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JP63059350 |
PURPOSE: To uniformly coat the surface of a powder with a reaction product, by arranging a body, which is a lid body having the max. diameter part larger than the inner diameter of the opening of a reaction gas supply pipe and has a wt. ...
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JP63054934 |
PURPOSE: To make the generation of plasma in the inside of a nozzle efficient by providing a construction or the like for microwave between a waveguide and the nozzle and also joining the waveguide and the nozzle and making the inside of...
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JP63051939 |
PURPOSE: To markedly promote the synthetic speed of a reaction product, by a method wherein a plurality of laser beams having the same wavelength guided into a hermetically closed space from the outside are applied to a plurality of raw ...
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JP63051942 |
PURPOSE: To enhance the denseness of a film while increasing a film forming speed, by exciting the raw material gas supplied into a reduced pressure casing by arc discharge and subsequently activating the same by laser beam to perform ga...
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JP63051940 |
PURPOSE: To promote reaction by enhancing the activity in a reaction region, by generating photochemical gaseous phase precipitation reaction by irradiating the raw material gases introduced into a hermetically closed container with a pl...
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JP63051941 |
PURPOSE: To make reaction efficient by drastically enhancing the activation of raw material gases, by activating and reacting the raw material gases by irradiating the raw material gases supplied into a reduced pressure casing with a plu...
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JP63050478 |
PURPOSE: To form a uniform thin film at a low cost and a high rate by converting a gaseous mixture prepd. by properly diluting a gas contg. a film forming component with a rare gas into plasma by glow discharge under a pressure close to ...
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JP63050305 |
PURPOSE: To produce high-purity uniform ultrafine-particle powder in a short time with a small number of stages by directly hydrolyzing and spraying a metal alkoxide under high temp. and high-pressure conditions. CONSTITUTION: A soln. of...
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JP63045107 |
PURPOSE: To carry out low-temperature distillation for the production of high- purity liquefied nitrous oxide with an inexpensive small-sized apparatus and to reduce the consumption of cold heat source, by recovering plasma-excited nitro...
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JP63036833 |
PURPOSE: To transmit a plasma gas as an ultrasonic beam of homogeneous distributing state by providing a contracting-enlarging nozzle in a flow passage of a reaction device and arranging an electron gun in the downstream side of the cont...
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JP63036832 |
PURPOSE: To improve the utilizing efficiency of raw material and to increase the yield of the product by providing a contracting-enlarging nozzle in a flow passage of a reaction device and arranging a heater consisting of a metallic wire...
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JP63031536 |
PURPOSE: To prepare fine particles having a uniform particle size at a good recovery rate by providing opposed electrodes for generating low temp. plasma and a blow-off port of raw material gas in a vacuum container and mounting a mechan...
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JP63028883 |
PURPOSE: To prevent the plasma damage and to efficiently carry out uniform plasma treatment by pulling out the plasma in the form of a sheet, and positioning a substrate close to and in parallel with the plasma. CONSTITUTION: A plasma pr...
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JP63023734 |
PURPOSE: To prepare fine particles and also prevent fine particles from adhering to the inner wall of an inner tube by supplying reactive gas with high pressure into an outer tube and reactive gas with less high pressure into an inner tu...
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JP63017209 |
PURPOSE: To enable the continuous operation of the titled production process over a long period and to obtain a uniform and high-purity amorphous fine powder in high yield, by moving a cylindrical insert unit from one end to the other en...
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JP63016041 |
PURPOSE: To obtain an ultrafine/fine powder of a metal or ceramics having a good powder characteristic, by forcibly mixing gas containing an easily evaporative metal compound with reactive gas reacting with said gas at the beginning of a...
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JP63004842 |
PURPOSE: To stabilize the vaporization and supply of a solid raw material and high-frequency plasma by monitoring the luminance of the raw material element, etc., through a spectral analysis means, and performing a specified control on t...
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JP63001445 |
PURPOSE: To impart uniform heat history to all of gases and hyperfine particles, by constituting an hyperfine particle preparing apparatus by providing a reaction pipe for allowing raw gases to flow and a means irradiating the interior o...
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JP63001440 |
PURPOSE: To prevent foreign matter from adhering to the back surface of a wafer by preventing the adhesion of oxide flakes, by applying a polysilicon membrane to the surface contacted with the wafer of a wafer mount stand, a wafer push-u...
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JP62283805 |
PURPOSE: To produce the title extremely fine powder of AlN by using a gaseous mixture of N2 and NH3 or the gaseous mixture further added with an inert gas as the ambient atmosphere when metallic Al is melted in the frame of arc or a plas...
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JP62282636 |
PURPOSE: To produce the title high-purity ultra-fine powder with high productivity by allowing a base gas consisting of ≥50vol% diatomic molecule or polyatomic molecule to react with the gas of a metal or a metal halide while stably ge...
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JP62250945 |
PURPOSE: To efficiently form fine particles having a new functional characteristic, by constituting a gaseous phase apparatus by arranging a plurality of treatment chambers along the flow passage of the downstream side of a nozzle ejecti...
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JP62247836 |
PURPOSE: To transfer a gas at an accurately controlled supersonic speed by providing a nozzle at the tip of an induction pipe for supplying a plasma forming gas, and furnishing an exciting means for exciting the gas in the induction pipe...
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JP62247520 |
PURPOSE: To obtain a steep hetero junction interface and to prevent contamination due to a residual impurity and so on by a method wherein a plurality of treating chambers are demarcated in a treating container in such a way that raw gas...
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JP62227442 |
PURPOSE: To eliminate the adhesion of impurities to a microwave introducing window, by arranging a magnetic field generating means which applies a magnetic field to a plasma forming chamber in the axial direction thereof and first and se...
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JP62213841 |
PURPOSE: To enhance the reactivity and heat efficiency of a reactive substance, by supplying a first reactive substance in the arc plasma flame generated in a torch while supplying a second reactive substance in the space provided to the...
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JP62168542 |
PURPOSE: To easily form an ultrafine particulate compound, by a method wherein produced ultrafine particles of a stock material are moved to a plasma treatment area along with inert gas and subsequently reacted with reactive gas for form...
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JP62132540 |
PURPOSE: To synthesize a polycrystal on many sheets by setting one or more of intermediate substrates which have a rectangular cross section and deposits the compd. thereon, in parallel to each other between two facing sheets, thereby im...
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JP62119107 |
PURPOSE: To purity high-purity metallic Si in excellent yield at low cost by utilizing a plasma arc discharge phenomenon and allowing a gaseous mixture of SiCl4 and H2 to react chemically to obtain liquid metallic Si and gaseous HCl. CON...
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JP62113714 |
PURPOSE: To produce fine powder of SiO2 having a definite particle diameter and specific surface area, at a low temperature, by irradiating a gaseous mixture of a silane gas and ozone with ultraviolet radiation. CONSTITUTION: A silane ga...
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JP62105920 |
PURPOSE: To efficiently produce fine powder of high-purity MgO having a fine and uniform particle diameter, by separately jetting Mg vapor and an inert gas into a reaction chamber, mixing both and bringing the mixed gas into contact with...
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JP62099468 |
PURPOSE: To synthesize a ferromagnetic material contg. Fe8N excellent in the magnetic characteristics in high selectivity and high growth velocity by impressing electromagnetic wave energy in the decompression for two gaseous molecules c...
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JP62057642 |
PURPOSE: To obtain pulverous particles which are uniform and are high in purity by evaporating and suspending metallic particles by an arc and carrier gas in a reactive element atmosphere to form a pulverous granular metallic compd., the...
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JP62023983 |
PURPOSE: To obtain a small-sized device capable of treating many substrates simultaneously by specifying the structure and function of the holding mechanisms of the substrates in the titled device which is provided with the holding mecha...
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JP62003001 |
PURPOSE: To prevent moisture condensation at all parts of a device and to obtain high-purity steam, by heating oxygen to produce a reaction gas by a heating means, jetting the gas into a furnace and burning hydrogen in the furnace packed...
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JP61276976 |
PURPOSE: To obtain a high quality thin film contg. silicon, almost free from defects and undergoing no damage by plasma by thermally decomposing a gaseous mixture of species in an intermediate state such as SiF2 with decomposed species o...
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JP61243176 |
PURPOSE: To increase the durability of a reactor and to carry out stable CVD for a long period by previously sticking inorg. powder to the inside of the reactor. CONSTITUTION: A gaseous mixture of silicon tetrachloride with propane and h...
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JP61242631 |
PURPOSE: To produce the ultrafine particles of a compd. free from a by-product by feeding forcedly gas to the reaction region of both the gas and vapor, increasing the reaction efficiency of both and evaporating a material in the inside ...
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JP61227901 |
PURPOSE: To obtain a reforming furnace as a simple apparatus by reforming raw material gas by heat exchanging the raw material gas flowing through a reaction vessel with combustion gas flowing through a space between the reaction vessel ...
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JP61221310 |
PURPOSE: To produce pulverous powder of a metal or alloy which has the narrow range of a grain size distribution and is stable in grain shape by dispersing uniformly an inert gas or reducing gas fed into the melt of the metal or alloy in...
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JP61195976 |
PURPOSE: To increase the accumulation yield of a produced compd. in case of accumulating the produced compd. on a substrate having a rectangular cross- section in the inside of a reaction tube by providing a slanted substrate in the diag...
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JP61167441 |
PURPOSE: To continue a vapor-phase synthesis reaction for a long time by providing a heater for keeping the temp. of the region close to the raw gas supply nozzle of a reaction tube at the crystallization temp., and providing a substrate...
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JP61161138 |
PURPOSE: To enhance the reaction yield by introducing reaction material into the tail-flaming part of plasma generated by the 1st stage plasma gun due to high frequency and then by introducing said material into the central part of plasm...
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JP61158956 |
PURPOSE: To obtain methanesulfonyl chloride useful as a raw material for various industrial drugs, etc., inexpensively and easily in high yield while suppressing side effects, by irradiating a mixed gas of methane, a surfurous acid gas, ...
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JP61141789 |
PURPOSE: To automatically control a flow rate of gas in each reaction tube to be constantly equal, by detecting a flow rate in a certain reaction tube of a multi-tube converter as pressure difference across a throttling means and allowin...
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JP61141927 |
PURPOSE: To miniaturize an alcohol reforming device, by respectively arranging supply and discharge manifolds so as to cover tube plates and attaching the circumference of the peripheral edge part of at least one of the tube plates to a ...
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JP61136922 |
PURPOSE: To obtain the titled fine bismuth oxide particles which are almost spherical by heating Bi in the lower chamber of a hermetic vessel, mixing air into the Bi vapor which is introduced into the upper chamber, and cooling the forme...
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JP61122106 |
PURPOSE: To narrow the width of the particle size distribution of a metal oxide, and to reduce the average particle diameter thereof, by oxidizing metal vapor in a turbulent and diffused flame. CONSTITUTION: Metal vapor and an oxygen-con...
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JP61046238 |
PURPOSE: To obtain the titled high-purity fine particles having uniform particle diameter without classifying the particles by supplying ≥2 kinds of substances in a gaseous state separately into a chamber under vacuum, and allowing the...
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JP61011140 |
PURPOSE: To obtain the titled extremely fine particle of a high-purity ceramic by melting and vaporizing a metallic material consisting of a high-purity bulk material with a high-temp. plasma flame which is generated with a gas, etc. con...
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