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JPS627823B2 |
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JPS627828B2 |
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JPS627827B2 |
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JPS6238248A |
PURPOSE: To simplify establishment and to facilitate monitoring from the outside, by constituting a local clean room by mounting a floor panel to the surface of an existing floor in a freely detachable manner and integrally bonding a pne...
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JPS627824B2 |
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JPS627826B2 |
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JPS627113Y2 |
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JPS627110Y2 |
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JPS61201411U |
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JPS6143538Y2 |
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JPS61276644A |
(57) [Abstract] Since this gazette is application data in front of an electronic application, the data of an abstract is not recorded.
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JPS6156020B2 |
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JPS6155422B2 |
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JPS6152700B2 |
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JPS6138661Y2 |
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JPS61249545A |
(57) [Abstract] Since this gazette is application data in front of an electronic application, the data of an abstract is not recorded.
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JPS61173659U |
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JPS6147677B2 |
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JPS6144537B2 |
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JPS61155033U |
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JPS61150993U |
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JPS61148253U |
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JPS61202026A |
PURPOSE: To reduce the load of a filter to extend the service life of the titled clean room by vertically providing an inside space partitioning member defining a high cleaning degree zone and an outside space partitioning member definin...
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JPS61200857A |
PURPOSE: To enhance the purification of contaminated gas still more, by forming a filter form ceramic having small pores and embedding a heating wire therein. CONSTITUTION: A ceramic filter 2 is provided to the inlet 11 of a clean box 1 ...
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JPS61144195U |
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JPS61129014U |
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JPS61118564U |
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JPS61117828U |
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JPS61161147A |
PURPOSE: To evacuate the air in the vicinity of a harmful vapor generating region by regulating the velocity of the first air current flowing from the upper part of the specified region in the vicinity of one harmful gas generating regio...
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JPS61108710U |
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JPS61141877A |
PURPOSE: To facilitate the opening and closing operation of the inner door of a testing chamber, and to prevent the opening of the chamber by mistake, by placing an air-tight testing chamber and an air-tight gas-substitujtion chamber sid...
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JPS6198533U |
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JPS6198532U |
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JPS6126478B2 |
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JPS6119795Y2 |
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JPS6191332U |
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JPS6116879Y2 |
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JPS6116878Y2 |
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JPS6176234U |
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JPS6167839U |
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JPS6165184U |
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JPS6114918B2 |
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JPS6136229U |
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JPS6135671U |
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JPS6126877U |
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JPS6125418U |
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JPS6118441U |
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JPS613360Y2 |
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JPS6110446U |
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JPS619410U |
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