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JPH0584692A |
PURPOSE: To realize miniaturization of an industrial robot for performing work in a vacuum chamber and further to prevent a motor from its burning or the like when a pressure difference is decreased by holding the pressure difference bet...
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JPH0525398U |
[Purpose] Provided is a structure that facilitates replacement of the panel provided on the can body of the glove box. [Constitution] An opening 2a is provided on one side surface of the can body 1a, and a panel 4a having at least a glov...
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JPH0524294U |
[Purpose] It enables the application of an airtight seal with low pressure resistance used under normal pressure, and prevents contamination in the vacuum chamber when the internal pressure of the industrial robot is abnormal. [Constitut...
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JPH0510640Y2 |
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JPH0519997U |
[Purpose] Provided is a glove box exhaust pre-filter casing in which the exhaust pre-filter can be replaced safely and easily without impairing the performance of the glove box exhaust equipment. [Constitution] A glove box in which an in...
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JPH0560299A |
PURPOSE: To provide a valve repairing device for low temperature tank capable of safely repairing a valve with liquid still stored in the tank. CONSTITUTION: A working space forming cabin 2 mounted so as to be attachable and removable to...
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JPH051918B2 |
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JPH051439B2 |
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JPH04365582A |
PURPOSE: To reduce the size of an industrial robot which is suitable for a small seal, such as an airtight seal used under an atmospheric pressure, having lower pressure resistance and effects work in a vacuum chamber by controlling a pr...
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JPH04335199A |
PURPOSE: To assemble desired work components through an operation from outside of a vessel by utilizing a through hole in a vessel wall. CONSTITUTION: The title device consists of a drive part A provided outside of a through hole, a conn...
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JPH04290454A |
PURPOSE: To enable reduction of the number of opening and closing times of an isolation valve by providing two robot symmetrical fingers at both ends of robot arms of transfer robots. CONSTITUTION: Two robot symmetrical fingers 5b, 5c an...
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JPH04283083A |
PURPOSE: To provide a conveying robot which reduces an arm operation range and reduces the size of a work conveyance passage and a vacuum processing device incorporating the conveying robot. CONSTITUTION: A process chamber 11 is communic...
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JPH0498595U |
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JPH04217484A |
PURPOSE: To abolish a drive unit of a grasping device, which is a cause of pollution of a clean room. CONSTITUTION: A tool 1, which grasps and moves a board-like article 15, has movable and stationary grippers 12, 12' and 14, 14'. The mo...
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JPH0473482U |
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JPH04146097A |
PURPOSE: To make the performance of an operation possible through remote control by providing a manipulator having an operating process function in an inner casing, and a remote control means for controlling the manipulator at a remote p...
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JPH0428512B2 |
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JPH0427455B2 |
A robot traveling duct for clean room in which a vertical laminar flow of air is produced from a ceiling filter toward a floor thereof, and in which the robot traveling duct is arranged within the clean room and below the ceiling filter ...
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JPH0419519Y2 |
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JPH0419520Y2 |
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JPH0451390U |
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JPH0465853A |
PURPOSE: To perform three-axis operation without generating dust, by a method wherein a carriage cart is levitated by attractive force between magnetic substance and an air side electromagnet, the electromagnet is moved by a moving means...
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JPH044239Y2 |
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JPH0365236B2 |
A spray paint system (10) including a paint booth (12) and paint robot apparatus (16) movable within the paint booth (12) and movably supported outside the paint booth is disclosed. The side walls (26) of the paint booth (12) have elonga...
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JPH03184796A |
PURPOSE: To facilitate vacuum maintenance in a simple structure even at the time of setting up plural chambers as well as to promote the secureness of operation by installing a conveying mechanism, simply reciprocating between a sample m...
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JPH03150443A |
PURPOSE: To perform preprocessing such as the removal of a principal component and the condensation of a component to be analyzed in safety by providing at least three pipes as piping which has specific valves and discharge piping substi...
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JPH0324568Y2 |
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JPH0389949A |
PURPOSE: To maintain clean environment by providing a circulation pump for force-feeding gaseous nitrogen in a hermetic box into a nitrogen tank to an exhaust pipe and providing a regulator for supplying gaseous nitrogen to a feed pipe s...
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JPH0327350B2 |
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JPH0317600U |
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JPH0310480B2 |
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JPH0310367B2 |
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JPH038918B2 |
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JPH038919B2 |
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JPH037838A |
PURPOSE: To obtain a manufacturing system applicable to various manufacturing processes easily by constructing a standardized isolation chamber of an active assembling isolation chamber, a double sluice gate isolation chamber for separat...
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JPH0248771Y2 |
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JPH0249876B2 |
Remote manipulating assembly of the type comprising a movable platform carrying a telescopic supporting or carrying assembly at the end of which a remote manipulation arm can be displaced within an enclosure, wherein the platform is loca...
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JPH0249703B2 |
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JPH02265655A |
PURPOSE: To prevent the infiltration of outdoor air by extending one end of a discharge tube into an insulator, sealing the other end thereof tightly by a door and extending an exhaust pipe into the discharge pipe near the door. CONSTITU...
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JPH02238276A |
PURPOSE: To simplify a configuration of a device and simplify a maintenance of the device by a method wherein a mechanism for separating a cooling mechanism from a specimen during rotation of the specimen is provided. CONSTITUTION: A spe...
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JPH02110495U |
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JPH02502758A |
(57) [Abstract] Since this gazette is application data in front of an electronic application, the data of an abstract is not recorded.
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JPH02502526A |
An object transport apparatus (10) is provided for the purpose of transporting an object (19), usually a semiconductor wafer, to various points within a planar circular zone (Z). The transport apparatus (10) includes a motive power subas...
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JPH02203299A |
PURPOSE: To shorten the cooling time for a treating object by passing air from the outside of an inside vessel and a cooling gas in the inside vessel as well to cool the treating object and further, cooling the high-temp. gas emitted fro...
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JPH02187022A |
PURPOSE: To speed up signal processing by performing a heat treatment stepise from a temperature where diffusion of tungsten formed on an electrode is started to a temperature where a WSi2 silicide layer is transformed and formed to a si...
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JPH02154198A |
PURPOSE: To maintain the airtight performance of a gasket stably for a long period by forming projecting streak parts whose cross section is trapezoid outside at least either of the mutually opposite upper and lower parts of a rubber gas...
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JPH02130500A |
PURPOSE: To absorb force from the outside such as earthquake and improve earthquake-proof safety by providing a plurality of wire ropes between a body fixed floor and a body bottom portion to set slidable support legs between said body f...
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JPH02106282A |
PURPOSE: To prevent pollution inside a clean room and get rid of the turbulent flow of air in the clean room by providing a dust collecting duct having a number of holes on the sliding portion inside a robot and sucking air into the robo...
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JPH0259292A |
PURPOSE: To surely hold an article with simple operation by moving vertically a placing base by placing an article and holding the article with the horizontal movement of a holding body, in an article fall preventing device of the case o...
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JPH0252299A |
PURPOSE: To obtain high rigidity by arranging equipments which need to be operated in the globe box concentrically and providing globes fitted to a window material only at places necessary for the handling of the equipments to be operate...
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