| Document |
Document Title |
|
JP2000223717 |
To provide a semiconductor sensor for reducing drift due to a temperature or the lapse of a time. This semiconductor sensor is provided with a supporting substrate 5 constituted of a pyrex joined to a substrate constituted of an n type s...
|
|
JP2000200533 |
To lower the loss of the energy flowing in a signal line by providing a gap and a control line connected to an electrode arranged with a space from each signal line, and arranging the control line and a control terminal with a more space...
|
|
JP2000195843 |
To provide a method and device for processing a plasma, that generates a uniform plasma. A specified gas is introduced into a vacuum vessel 1 from a gas supply device 2, vacuumized by a pump 3, and a high-frequency electric power of 100 ...
|
|
JP2000188049 |
To provide an inexpensive micro switch of high performance which can be produced in high volume. A micro machine switch comprises: a support member 7 which is disposed in the proximity of a gap on a signal line on a substrate 1 and has a...
|
|
JP2000186933 |
To prevent deterioration in performance due to leakage on the surface of a substrate. This surface micromachine has a substrate 1, a wiring 10 made of an n-layer or a p-layer formed by ion-implanting impurities to the substrate 1 and hav...
|
|
JP2000183290 |
To easily manufacturing a semiconductor high-frequency integrated circuit through the manufacturing process of conventional MMIC and eliminate the leakage of a signal flowing to a signal line.A semiconductor high-frequency integrated cir...
|
|
JP2000179531 |
To make a vacuum maintainable even on a small irregular surface, by providing a negative pressure chamber, elastic cylindrical seal material in an opening part peripheral edge of the negative pressure chamber, and an annular sheet-state ...
|
|
JP2000164105 |
To reduce electric power consumption, and to easily and reliably provide a latching structure by supporting both end parts of a buckling part by support parts, and holding a deformation state in either one position.A silicon movable part...
|
|
JP2000157751 |
To express motions close to the movement of an insect by providing at least two rotating bodies on both right and left sides of a device body, and at the same time, supporting leg sections at eccentric locations of respective rotating bo...
|
|
JP2000158365 |
To enable three dimensional parallel movement in a microminiature.This magnetic levitation type micro-hand is provided with magnetic actuators 1, 4, 7 consisting of a movable piece consisting of permanet magnets 3, 6, 9 arranged so as to...
|
|
JP2000153476 |
To correctly determine positional relation of legs and an obstacle to walking using a sight sensor installed on a base body.This movable robot 1 comprises a base body 2 and plural leg parts 3, and is provided with a sight sensor 7 instal...
|
|
JP2000149751 |
To suppress deterioration of a reflection characteristic at the ON time, and simultaneously to improve an isolation characteristic at the OFF time, by making a moving element have at least two projecting parts formed by notching the end ...
|
|
JP3070669 |
To provide a production method by which the adhesion of micro-bridge structure to a base after drying can be prevented and the micro-bridge structure adhered thereto can be recovered in the case where the surface of substrate made of sil...
|
|
JP2000142507 |
To travel a transportation vehicle without causing the breakage of a rope, uncontrolled running of the transportation vehicle, and derailment, when the transportation vehicle is traveled along an uneven roadway while being pulled by the ...
|
|
JP2000121535 |
To prevent an overshooting by moving a probe in the direction of Z axis being vertical to the sample surface and in the direction of X axis being in parallel with the sample surface and adding damping elements to the operation of a contr...
|
|
JP2000124469 |
To obtain a manufacturing method of a fine airtight container which can realize high vacuum degree.A polycrystalline silicon film 21 which becomes a sealing member is formed by using SiH4 gas. Since the gas is active, it reacts on H2O. A...
|
|
JP2000121966 |
To improve the productivity by easily forming a complicated shape with good reproducibility not through a complicated process by forming a 2nd structure on a 1st structure by pattern transfer.On a driving part 140 as the 1st structure wh...
|
|
JP2000113792 |
To provide a small micro relay having good high frequency characteristic by providing fixed electrodes on both sides of a signal line with equal distance and sharing it with a high frequency GND electrode.Fixed electrodes 12 and two sign...
|
|
JP2000109984 |
To provide a method and device for producing a micro structure having a high yield and a high image resolution in the laminating direction.While rotating a substrate holder 30 and a transfer table 40, the joining face of plural thin film...
|
|
JP2000100758 |
To enable control of an etching pattern having a point-symmetrical shape into an arbitrary shape.Drawing of a plurality of patterns having different radii is carried out with respect to a resist coated on a substrate S, while a substrate...
|
|
JP2000100797 |
To measure a finely processed pattern on real-time basis on the spot and to calculate a state that an element is finely processed from the measured value to aim to form a desired shape to be processed of the element.The initial processin...
|
|
JP2000096263 |
To reduce the laminating time without reducing the resolution in the laminating direction by forming plural thin films with different film thicknesses, peeling this plural thin films from a substrate, successively laminating them in acco...
|
|
JP2000088686 |
To provide a pedestal in which a groove part used to relax a stress can be formed easily. First, a silicon wafer 1 which is composed of a low-concentration layer 1a, a high-concentration layer 1b and a low-concentration layer 1c is prepa...
|
|
JP2000092806 |
To provide a linear muscle cylinder which utilizes the force generated from an electromagnet. An electromagnet C is put in a cylinder 6 made of a weak- magnetic material. Then both ends of the cylinder 6 are sealed with electromagnets A ...
|
|
JP2000090872 |
To provide a fine working device capable of stably forming a large area at a high speed. This device is constituted so as to work a surface to be worked S by bringing a tip of a needle into contact with the surface S to be worked or arra...
|
|
JP2000090801 |
To prevent loss of microwave from increasing and prevent manufacturing cost from rising, using a micro machine switch for switching the microwave. This circuit 1 is provided with a semiconductor substrate 2, a microwave transistor 3 prov...
|
|
JP2000087862 |
To reduce size and manufacturing cost of a micropump which has a diaphragm at least partially oscillated in thickwise direction by forming a wall tilting toward an outflow port on at least one portion composed with a pressure chamber of ...
|
|
JP3047227 |
To provide sanitary goods containing catechin extracted with pure water and more excellent in bactericidal and deodorizing effects compared with usual goods containing catechin. The cetechin-containing sanitary goods, sweat-removing shee...
|
|
JP2000080671 |
To provide a working vehicle for a slope face devised to be capable of carrying out work safely by preventing overturning by devising it to be capable of smoothly travelling on a slope and certainly fixing the working vehicle on a slope ...
|
|
JP2000081356 |
To provide a pressure converter having high degree of freedom in use in which assembling process is simplified, installation space is reduced and the size can be reduced easily. A housing 5a having at least two pressure introduction pass...
|
|
JP2000077681 |
To provide a manufacturing method of electronic components where variations in manufacturing an improved by increasing the etching machining accuracy of a thin pattern. In a manufacturing method, a mask for etching that consists of a plu...
|
|
JP2000073935 |
To provide a rotation torque generating means by light pressure useful for a micro machine, its generation method and control method based on action of light to generate light pressure. To an incidental end surface 10 of a fiber 1, in ad...
|
|
JP2000072059 |
To provide a mobile working vehicle which can reduce its weight as much as possible, and can be manufactured in an extremely inexpensive manner. In a mobile working vehicle K, a plurality of slidable vacuum suction cells 9 in which a suc...
|
|
JP2000072060 |
To provide a working vehicle suitable for traveling on an inclined ground in which the stable maintenance of the posture and the traveling are possible even on a steeply inclined ground with complicated unevenness and inclination combine...
|
|
JP2000061872 |
To reset an attitude from an abnormal attitude condition including a falling-down condition to a normal attitude condition by itself. What the attitude condition of a device mainbody is transited to an abnormal attitude condition differe...
|
|
JP2000062659 |
To easily pull a vehicle over to the direction crossing the traveling direction, or horizontally move the vehicle by providing a driven traveling means such as driven wheel capable of optionally protruding and recessing in the direction ...
|
|
JP2000052702 |
To a wheel driving mechanism in a compact manner in the internal space of a wheel itself by fixing a wheel drive mechanism such as a motor, a reducer, a brake and a power transmission gear for driving a wheel to an axle suspending a magn...
|
|
JP2000052701 |
To provide a wheel having strong attractivity to a magnetic substance and traveling on the magnetic surface eliminating dust, and a magnetic surface traveling truck. A pair of magnetic poles provided on the center of a contact surface of...
|
|
JP3035051 |
PURPOSE: To recover the positional stabilization of a robot so quickly by installing a detecting means, detecting any external force acting on the robot, and also a compensating means for compensating a control value to drive its articul...
|
|
JP3035074 |
PURPOSE: To obtain a new compound, excellent in antiviral activity, especially antiinfluenzal activity and useful as a low toxic antiviral agent. CONSTITUTION: The objective compound of formula I (R1 to R3 are H, alkyl, alkoxy, alkenyl, ...
|
|
JP2000043766 |
To realize work having no uneven processing, and improve work efficiency. A device movable along a surface is provided with at least two moving units 2AA and 2BB connected to each other by an extended/ contracted connecting means. Each m...
|
|
JP2000039372 |
To provide a semiconductor pressure sensor whose accuracy is good in a wide temperature range and to provide its manufacturing method. In a semiconductor pressure sensor, a part 1b which corresponds to a pedestal is formed on one main su...
|
|
JP2000033585 |
To provide a leg type traveling robot preventing shortage of electric power supplied from a fuel cell when load of a drive system increases abruptly without installing a large reserve tank. A leg type traveling robot 1 which acts in acco...
|
|
JP2000030595 |
To lessen a size of a filter structure required for a multi-system mobile communication means, by forcing at least either one of a first or second conductors to transmit a control voltage into contact with a piezo-electric layer, and by ...
|
|
JP3026276 |
PURPOSE: To avoid interference of a robot with man and object in an emergency by constituting a control means so that it judges whether it is in a stable posture or not when an emergency stop signal is recognized and also it walks after ...
|
|
JP2000030594 |
To lessen a size of a filter structure required for a multi-system mobile communication means, by integrating a resonator element and a switch element on the same base and in the same process. A bulk acoustic wave(BAW) resonator having a...
|
|
JP2000024964 |
To provide a manufacturing method of a semiconductor material integrated micro-actuator as well as to provide electrostatic force having sufficient rigidity in the vertical direction to a disk and having sufficient acceleration to a head...
|
|
JP2000025663 |
To simplify a mechanism comparing with a traditional device and improve right and left bending movement function of a device. At least two moving units 2A, 2B are provided which are interconnected through an expandible and shrinkable con...
|
|
JP2000024965 |
To reduce the dispersion of the characteristic data relative to the process error by properly setting the specified geometrical design parameter. In the manufacturing of the micromechanic component element having the electrical or mechan...
|
|
JP3024027 |
PURPOSE: To improve drift correction accuracy of a tilt sensor by obtaining an interference angle obtained by assuming no action by compliance, and obtaining estimated floor reaction force from the interference angle so as to correct a s...
|
