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WO/2002/095542 |
A reticle management system is disclosed including a sorter (101) coupled to one or more stockers (102) that allow a customized configuration of the overall reticle management system. The stockers may be bare reticle stockers, closed con...
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WO/2002/092480 |
The invention relates to devices for moving substrates (2), more particularly CDs and DVDs, wherein the transporting motions should be synchronized in a simple and reliable manner with those of the devices connected upstream or downstrea...
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WO/2002/093617 |
The invention concerns a device for automatically loading and unloading a feed to be treated in a heat treatment unit (1) such as a diffusion oven, comprising at least a cantilever (2) designed to receive the whole feed and to introduce ...
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WO/2002/090222 |
The invention relates to a device for gripping and holding an object (1) in a contactless manner from a direction (z) that is oriented at least partially towards the direction (z) of gravity (F), using a holding element (3), which is loc...
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WO/2002/089183 |
The invention relates to a holding device for wafers in a system for inspecting wafers. The holding device comprises two grippers (11, 12), which each enclose a partial section of the wafer periphery when the holding device (8) is closed...
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WO/2002/088007 |
The invention relates to a conveyor device which is used to transport workpieces, especially the workpieces of motor vehicle bodies (104), through a processing area (108) for surface treatment of said workpieces, comprising a conveyor (1...
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WO/2002/083372 |
A wafer carrying robot teaching method using a simple and cheap apparatus and capable of maintaining a clean state in the front end and energy saving in the teaching work. A positioning mark (3) is provided on a hand (2) of a wafer carry...
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WO/2002/082507 |
An object handling system and apparatus for moving objects through a pressure sensitive system. The present invention can operate in a chamber having a pressurized environment, without adversely influencing or causing pressure changes. T...
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WO/2002/081345 |
The invention concerns an installation for handling and positioning elements separating vertically arranged stacks of flat elements, comprising a bearing structure; at least an assembly horizontally sliding on a subassembly of the bearin...
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WO/2002/081391 |
A glass pane processing device (1), comprising a glass pane processing part (4) for processing a glass pane (2) having a coated upper surface (3) and a transfer means (6) for carrying the processed glass pane (2) into the glass pane proc...
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WO/2002/079059 |
Access to the interior of a substrate storage pod (22) in which substrates such as semiconductor wafers (74) are stored is gained using an access device (20) provided within a micro environment enclosure (26). The access device has a tel...
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WO/2002/074669 |
An air track including a first body with a plurality of outlets (308) and having a concave top (304) or a flat surface with a notch (504). The body includes an air filter (404) that runs along the length of the body. The filter dividing ...
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WO/2002/074668 |
A loading and unloading device (100) includes a spindle (104) that rotates a pallet (102) while an arm (110) is engaged with the spring (104) in the pallet (102) to open and close the spring or alternatively, the spring is adjacent an ai...
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WO/2002/072265 |
The present invention relates to a cap which can form an essentially leak-proof seal with an open-ended vessel capable of receiving and holding fluid specimens or other materials for analysis. To minimize potentially contaminating contac...
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WO/2002/069392 |
A lift type substrate treatment device having a function to transfer a substrate from one to the other side of a treatment line and capable of treating the substrate during transfer, and a substrate treatment system having the lift type ...
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WO/2002/067303 |
A coater/developer (50) for applying resist to a wafer (W) for developing thereon is connected inline with the body chamber (12) of an exposure device (10) by a transfer chamber (70) having a wafer transfer unit thereinside. The transfer...
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WO/2002/062680 |
A configurable storage system particularly suited for use with clean-environment conveyors is disclosed. The storage system includes modular conveyor track elements (310, 320, 330, 340) which may be provided parallel to and adjacent a ce...
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WO/2002/063659 |
The invention relates to a device for treating substrates, especially semiconductor wafers, comprising at least two separate treatment stations that are arranged diagonally. The device is further provided with at least one transport unit...
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WO/2002/060607 |
The invention relates to a bearing device (39,40), which is particularly suitable for use in purified atmospheres such as clean rooms or purified air regions in factories. In order to prevent the rub-off from the bearing device (39, 40) ...
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WO/2002/055940 |
An air feed system (1), comprising a filter (6) for removing dust in the air installed in an air feed pipe (4) for connecting an air feed part (2) to an object district (C) and a sterilizing part (10) having an electron beam irradiation ...
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WO/2002/056350 |
Apparatus and methods for a wafer handling system (10) that manipulates semiconductor wafers (20). The present invention includes an end effector (25) having a vacuum chuck (33), an internal vacuum plenum (84), and a plurality of flow di...
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WO/2002/053482 |
Objects, in particular vehicle bodies (4) are guided in a continuous or intermittent translation movement through a plurality of immersion devices with the help of a conveyer device (5). Two guides (40, 41, 42, 43) placed at a distance f...
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WO/2002/051695 |
The present invention relates to an automatic system for surface processing bodies of motor vehicles and the like, comprising a transfer track for transferring a shuttle assembly supporting a skid on which the vehicle body is arranged. T...
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WO/2002/052638 |
A pressure control method, comprising the steps of sharing a dry pump (DP1) between cassette chambers (CC1) and (CC2) and a transfer chamber (TC), stopping the exhaust gas in the transfer chamber (TC) during the transfer of a wafer (W), ...
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WO/2002/050876 |
A system and method for improved throughput of semiconductor wafer processing. In one aspect, a wafer carrier is provided having a flat zone capable of holding an additional lot of wafers for processing. In addition, a multiple fork wafe...
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WO/2002/049943 |
The invention relates to a facility for processing, especially painting, objects (4), more particularly vehicle bodies, comprising at least one bath (2, 3), a processing liquid, especially paint, being contained in said bath. The objects...
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WO/2002/049099 |
A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot comprises a fixed base, a first turnable arm...
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WO/2002/049096 |
A tilting fluid cutout device capable of eliminating treating fluid from a substrate (10) by the inclination of the substrate (10), comprising a fluid cutout promoting means (43) installed above one side of a fluid cutout device body (42...
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WO/2002/049200 |
The invention concerns a device for holding a wafer (2) an electronic component or the like. Said device constitutes a system for transporting without deformation a wafer of electronic components or the like. The device also enables said...
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WO/2002/049097 |
A wafer holder capable of confirming the holding and the presence or absence of a wafer with a single detection means, comprising a drive means (2) having a pressing element (8) movable forward and backward in longitudinal direction and ...
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WO/2002/047871 |
A method for accurately transferring a substrate by a robot arm in a vacuum, comprising the steps of detecting the extended amount of the robot arm for transferring the substrate (4) in the vacuum, and feeding back the extended amount to...
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WO/2002/046842 |
The present invention relates to a system (100) for the manufacture of semiconductor devices by lithography, and in particular to an assembly (206) of mask containers (200:C1-C4) for use in such a system. The system comprises: a pluralit...
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WO/2002/047139 |
A substrate processing method comprising steps for forming a copper film on a surface of a substrate. These steps includes the step of filling a first metal in the trenches so as to form a plated film of the first metal on an entire surf...
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WO/2002/045137 |
A wafer handling system (200) and a method of retrofitting the system to an existing wafer handling apparatus (100) are provided that make possible a method of handling wafers (35) by contacting only a narrow area (202) of not more than ...
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WO/2002/045154 |
A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), ...
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WO/2002/039499 |
A method of transferring a processed body and a processing system for processed body; the processing system, comprising a transferring mechanism teachable in a short time with small size and less installation area and having a positionin...
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WO/2002/036467 |
A transport switch for plate material conveyor lines, especially for flat glass, consists of a succession of short sections of a conveyor line (41 to 46). Said sections can be jointly moved vertically to the level of the discharge convey...
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WO/2002/035583 |
For bay type structures of semiconductor wafer transport systems an arrangement is provided with interbay rail tacks (10) and intrabay rail tracks (20) mounted on each other, and the vehicles (11) of the interbay system, and the carrier ...
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WO/2002/035604 |
A treated substrate (W) transfer system in a semiconductor treatment equipment (2), comprising guide rails (42) disposed in a common transfer area (6) for transferring the treated substrate (W) between a plurality of semiconductor treatm...
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WO/2002/027766 |
A vehicle for transporting semiconductor devices is provided, that allows to serve the loadports (2) of semiconductor processing tools (1) with device carriers (5) like a portal hoist (4) from the top. Thereby, the vehicle comprises an e...
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WO/2002/026396 |
The invention relates to a device for the surface treatment of workpieces (12) such as vehicle bodies. One such device comprises a plurality of successive treatment stations (1-9), a guiding system (16, 17) comprising a first guiding sec...
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WO/2002/022469 |
A wafer carrier adapted to hold a plurality of wafers and is positioned on an elevator plate in a load lock. The elevator plate is adapted to move between a first position with the carrier in a first chamber of the load lock and a second...
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WO/2002/018107 |
The present invention is an edge aligner (100) with buffering capabilities and a method for increasing the throughput of wafers through the device. According to one embodiment, the present invention has first and second buffer arms (106a...
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WO/2002/012076 |
The invention relates to a support device for transport and storage of fragile items such as glass, which support device is prepared for mounting on a standard pallet with an upper surface consisting of parallel load-bearing elements (2)...
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WO/2002/011858 |
A fluid meter particle isolating system (20) having a tortuous path (25) formed between a pair of walls (22, 28) with an inlet and an outlet. The inlet is open to a clean zone (14) while an outlet is open to a particle contaminated zone ...
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WO/2002/005313 |
An automated processing system (50) has an indexer bay (75) perpendicularly aligned with a process bay (95) within a clean air enclosure (54). An indexer (72) in the indexer bay (75) provides stocking or storage for work in progress wafe...
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WO/2002/004176 |
A substrate handling system comprises a robot (20) containing micro-environment (32) in communication with a plurality of processing stations (34). The robot (20) has a robot arm (30) comprising an end effector linkage (50) mounted to an...
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WO/2002/003433 |
A wheel (108) for a conveyor system for transporting semiconductor wafers includes a first section (108f) for supporting a semiconductor wafer at a first level and a second section (108g) for supporting the wafer at a second level, with ...
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WO/2002/002282 |
An apparatus (7) for holding and orienting a wafer (1) having an alignment feature (3), and including a movable robot arm (19); and an end effector (20) attached to an end of the robot arm, the end effector (20) including a gripping mech...
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WO/2002/003431 |
The invention relates generally to equipment for semiconductor wafer processing, for example, mechanisms and apparatus for handlig pods or containers for housing silicon wafers or substrates. The pod may be a front-opening unified pod or...
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