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WO/2014/144162A1 |
Embodiments of substrate handling systems capable of heating and/or cooling batches of substrates being transferred into and out of various substrate processing chambers are provided. Methods of substrate handling are also provided, as a...
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WO/2014/134641A1 |
In a device for removing planar objects (2), such as glass panes, from a frame (1) on which the objects (2) are stacked in abutment, wherein spacers (3) are arranged between objects (2), and wherein holding devices (5) are arranged on a ...
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WO/2014/133307A1 |
The present invention relates to a gantry apparatus for vacuum window manufacturing equipment, the gantry apparatus, which transports one more sheets of vacuum window plate glass to a pallet, comprising: first, second and third tables ar...
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WO/2014/132339A1 |
Purpose: To prevent a substrate from colliding with a transfer apparatus or the like by preventing an leading end of the substrate from warping. Solution: This transfer apparatus that transfers a subject in the first direction by floatin...
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WO/2014/133304A1 |
The present invention relates to a pallet on which sheets of plate glass are seated so that one or more sheets of vacuum window plate glass can be transported, the pallet comprising: a frame having at least one glass support on the upper...
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WO/2014/130353A1 |
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro p...
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WO/2014/129567A1 |
Provided are a non-contact support device and a non-contact support method whereby the flying height of an object to be supported can be controlled with greater precision. This non-contact support method supports an object to be supporte...
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WO/2014/125686A1 |
The present invention addresses the problem of further stabilizing the floating status of an object to be transported when passing over a gap between transport faces of two transport rails that are adjacent with a space therebetween in t...
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WO/2014/119458A1 |
Provided is a sheet material handling method that enables safe, quick, reliable, and efficient operation for transporting or loading sheet material subject to the influence of external force, such as thin plates of glass or glass sheets,...
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WO/2014/117192A1 |
When handling panel-shaped objects, such as glass panes, a gripping device (4) is used in order to remove said objects from stacks (1, 2), in which the objects are inclined towards the vertical, or to position said objects onto stacks (1...
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WO/2014/113828A1 |
A device, which is designed as a compartmented trolley or compartmented rack and which has compartments for accommodating sheet-type objects (glass panes), comprises a base rack (2), on which a plurality of frames (4) projecting upward a...
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WO/2014/115472A1 |
The purpose of this invention is to allow a transferring device (2), that unloads articles (22) to an unloading location by way of a lifting platform (16) provided in an overhead traveling vehicle (2), to detect, when alignment has faile...
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WO/2014/112542A1 |
Provided is a thin glass elongated body in which breakage of the thin glass can be prevented during roll-to-roll treatment or processing. This thin glass elongated body is provided with: a main body part comprising elongated thin glass; ...
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WO/2014/109196A1 |
Provided is a probe apparatus that is capable of suppressing generation of a transfer error or the like by suction-holding a semiconductor wafer even in the cases where the semiconductor wafer has been warped. A probe apparatus (100) is ...
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WO/2014/107351A1 |
A mechanism for handling substrates such as semiconductor wafers is disclosed. The mechanism supports the substrate in a tilted orientation to ensure that undesirable contact between a bowed substrate and the mechanism does not occur. Th...
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WO/2014/106360A1 |
A guide device (1) for conveying hard workpieces comprises a buffer belt (11) used for bearing the hard workpieces, a guide wheel (12) used for driving the buffer belt (11) to move, and a drive device used for controlling the rotation of...
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WO/2014/102887A1 |
The present invention addresses the problem of providing a sealing structure for a rotating section, the structure using a magnetic fluid seal. With the sealing structure, stable sealing performance is obtained even if a deformation such...
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WO/2014/094325A1 |
Disclosed is a carrying apparatus for a liquid crystal television, comprising a base (1), with a plurality of movable wheels (2) arranged below the base; and two supporting frames (10) arranged on the base (1). A supporting seat (3) is a...
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WO/2014/092204A1 |
Provided is a conveyance system that correctly adjusts the position of a conveyed substrate, prevents damage resulting from the heat of another apparatus in a conveyance base, prevents insufficient electrical power to another apparatus i...
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WO/2014/093241A1 |
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a micro pick up array mount includes a pivot platform to allow a micro pick up array to automatically align with a carrier subs...
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WO/2014/087879A1 |
[Problem] To provide a transportation robot having a simple structure and occupying a small surface area during operation. [Solution] This transportation robot is provided with: a support member fixed to, e.g., a side wall or the like of...
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WO/2014/086064A1 |
Disclosed is conveying equipment, comprising a drive device (20) and guide wheels (30), wherein the guide wheels (30) are located at two sides of the drive device (20), and vacuum cleaning devices (50, 51) are provided on the guide wheel...
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WO/2014/086399A1 |
A plant (1) for the anodic oxidation of aluminum profiles (10) which comprises first overhead transport means (11) of said aluminum profiles hanging on said first overhead transport means (11) along an advance direction and at least one ...
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WO/2014/085479A1 |
Embodiments include multi-arm robots for substrate transport systems that include a boom, first and second forearms rotationally coupled to the boom, the second forearm being shorter than the first forearm, a first wrist member rotationa...
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WO/2014/085163A1 |
Embodiments disclose a vibration-controlled robot apparatus. The apparatus includes a robot having an end effector operable to transport a substrate, a sensor coupled to the robot, the sensor operable to sense vibration as the robot tran...
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WO/2014/079106A1 |
Disclosed are a transporting device and a dustproof cover. The transporting device includes a transporting carriage (20) and the dustproof cover (10) covering thereon to form a dustproof space. The dustproof cover (10) includes an air-di...
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WO/2014/079098A1 |
Disclosed are a panel unwrapping method and unwrapping apparatus. The method comprises: step 1: providing a panel unwrapping apparatus, the panel unwrapping apparatus comprising an extraction device (22) and a conveyance device (24), whe...
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WO/2014/079077A1 |
A transport apparatus and a transport method for a glass substrate. The transport apparatus comprises a transport channel, a correction mechanism and a pressure reducing mechanism. The transport channel is used for loading and transporti...
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WO/2014/077379A1 |
Provided is a substrate processing device capable of improving throughput without increasing the operation speed of a drive device. Vacuum processing chambers (12A, 12C) which house a wafer (W) for plasma processing of the wafer are resp...
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WO/2014/075278A1 |
Disclosed are a device and a method for correcting the position of a glass substrate, for correcting the position of a glass substrate (11) in a transmission. The device comprises a roller group (19), at least two guide shafts (14), at l...
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WO/2014/075729A1 |
A method for extracting a shielding element from a processing chamber of a substrate processing system or inserting the shielding element into the processing chamber is provided. The substrate processing system includes the processing ch...
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WO/2014/074400A2 |
Methods of processing a glass ribbon are provided. The method comprises the step of traversing the glass ribbon through a travel path at a predetermined velocity and severing the glass ribbon to create an upstream web and a downstream we...
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WO/2014/067060A1 |
A correction system of an automatic transporting apparatus, comprising the automatic transporting apparatus (10), an emitter module (12) arranged on the automatic transporting apparatus (10) and for use in generating a light, a receiver ...
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WO/2014/067178A1 |
Disclosed are a transmission system for conveying flat plates, a mechanical apparatus and a conveyance method therefor. The mechanical apparatus comprises a mechanical arm (10), and the mechanical arm (10) comprises at least one first va...
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WO/2014/067179A1 |
A transfer apparatus and a transfer method used for a glass substrate. The transfer apparatus comprises a transfer channel (10) and a correction mechanism (20). The transfer channel (10) is used for loading and transfer. The correction m...
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WO/2014/069291A1 |
Provided is a position detecting device that is capable of precisely detecting the coordinates of the center of a disc-shaped substrate from image data captured by one camera, calculating the amount of positional misalignment of the disc...
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WO/2014/069029A1 |
In the present invention, a communication device is provided with a LAN communication unit, at least one IO port freely connectable to a manufacturing device, and a controller. The IO port is configured so as to exchange with the manufac...
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WO/2014/067159A1 |
Disclosed is a roller for carrying a glass substrate, comprising: a rotation shaft (1) and multiple rollers fastened on the rotation shaft (1), two adjacent rollers being separated at a spacing. At least one of the multiple rollers compr...
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WO/2014/064033A1 |
The present invention relates to a handling device for handling, in particular for transporting and for transferring, flat articles, in particular glass panes, having a base frame, having a vertical positioning unit which is arranged on ...
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WO/2014/063669A2 |
Disclosed are a method and an apparatus for quickly transferring plates, in particular glass plates, of different sizes, thicknesses and quality levels so as to place the plates one behind another on different stacking frames, said metho...
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WO/2014/061801A1 |
Provided is a thin glass elongated body capable of preventing breakage of thin glass during working or treatment by a roll-to-roll process. This thin glass longitudinal body comprises: a main body comprising long thin glass; and handling...
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WO/2014/061800A1 |
Provided is a thin glass elongated body capable of preventing breakage of thin glass during working or treatment by a roll-to-roll process. This thin glass elongated body comprises: a main body comprising long thin glass; and handling se...
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WO/2014/059725A1 |
Disclosed is a substrate conveying system. The substrate conveying system comprises a plurality of roller assemblies (11) and a controller (12). The roller assemblies (11) are used for conveying glass substrates (10) in a flowing manner....
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WO/2014/056469A1 |
A method and device for conveying large-area panels, particularly panes of glass, of extreme size over 40 metres long and over 6 metres wide, wherein the panel can be held from the bath side or the air side, said method comprising the fo...
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WO/2014/057736A1 |
A glass plate conveyance device is configured in such a manner that a glass plate is conveyed by the rotation of conveyance rollers, on the outer peripheries of which elastic members coming into contact with the glass plate are arranged,...
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WO/2014/056470A1 |
The invention relates to a method and device for turning large-area panels, in particular glass panels, in extreme oversize of the order of magnitude of more than 40 metres in length and over 6 metres in width, wherein pick-up from the b...
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WO/2014/054590A1 |
The present invention pertains to a roller conveyor for transporting a plate body (30) with rollers (54), said roller conveyor comprising: a plurality of rollers (54) disposed along the transport path of the plate body (30); a plastic be...
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WO/2014/047960A1 |
A clean room (10) for use in storing glass substrates. The clean room comprises a ventilation outlet (102), a first fan filter unit (200), and a second fan filter unit (300). The ventilation outlet (102) is arranged at the bottom part of...
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WO/2014/043907A1 |
A bearing apparatus (100) and a storage device (4) for a glass substrate cassette (200). The bearing apparatus (100) comprises a bearing element (1) for bearing the glass substrate cassette (200) and a buffering positioning element (2) t...
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WO/2014/040224A1 |
A method for plating connector frames (105) is provided. The method comprises the step of placing the frames in a vibrating bowl (200)to enable the bowl's vibrations load the frames in a predefined orientation onto the vibrating bowl's c...
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