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WO/2007/123032 |
A vertical substrate conveyance device and film deposition equipment in which a film can be deposited on any surface regardless of the conveyance posture of a substrate, and a substrate can be conveyed while being supported without inter...
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WO/2007/119613 |
A conveyance apparatus capable of conveying a body while reliably holding it, and a conveyance method. The conveyance apparatus for conveying an object (W) while holding it has a conveyance body (30). The conveyance body (30) has holding...
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WO/2007/119530 |
Provided is a tray stack transfer apparatus which can easily and surely hold stacked trays by a simple constitution and has a high versatility. The tray stack transfer apparatus is provided with a pressing body (16), which abuts to and p...
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WO/2007/117545 |
The present invention relates to a substrate cassette support bar in a substrate cassette for housing a plurality of horizontally oriented substrates in multiple levels in the vertical direction, the substrate bar being arranged so as to...
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WO/2007/117094 |
A package handler is disclosed, by which productivity and work efficiency can be enhanced in a manner of automatically performing a work of unloading a cut package from a cutting jig (5) and a work of loading a new uncut package on the c...
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WO/2007/117545 |
The present invention relates to a substrate cassette support bar in a substrate cassette for housing a plurality of horizontally oriented substrates in multiple levels in the vertical direction, the substrate bar being arranged so as to...
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WO/2007/117546 |
The present invention relates to a substrate cassette (12) that houses a plurality of horizontally oriented substrates (14) in multiple levels in the vertical direction and in which support bars (20) are arranged that support the substra...
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WO/2007/117546 |
The present invention relates to a substrate cassette (12) that houses a plurality of horizontally oriented substrates (14) in multiple levels in the vertical direction and in which support bars (20) are arranged that support the substra...
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WO/2007/116080 |
A thin-glass gripper is described for holding and turning a flat workpiece (1), comprising a plurality of gripper arms (2a-h) having at least one suction lifter (3a-n) arranged in each case on them, wherein the gripper arms (2a-h) can be...
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WO/2007/116419 |
Method for loading flat items into multilevel containers (21), characterized in that it comprises the following operating steps: - collecting a matrix of flat items in a collecting device (1); moving said matrix from the collecting devic...
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WO/2007/114293 |
Provided is a wafer storing cabinet, which has high transfer efficiency and storage efficiency, is not affected by dusts nor a gas generated from wafers being stored. A method for controlling such storage is also provided. In a storing c...
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WO/2007/112258 |
A pallet load transport system includes a shuttle car that is supported by and moves along a track between a pick-up location to a deposit location. A control system monitors and controls all operation of the shuttle car, ensuring proper...
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WO/2007/108192 |
There is provided an electrostatic attraction apparatus and an attracting/releasing method capable of reliably attracting and quickly releasing a glass substrate. An attraction force for attracting a glass substrate is obtained according...
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WO/2007/105310 |
A transfer robot (A) comprises a hand (13) holding works (W), parts (12) on which the works (W) are placed, and a moving means (14) reciprocatingly moving the hand (13).
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WO/2007/099976 |
Provided is a substrate treating device capable of improving a tact time of a substrate treatment process. A polishing device as the substrate treating device includes a plurality of polishing units (3a, 3b) for polishing a semiconductor...
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WO/2007/091503 |
A robot device having an arm section and a control device. The arm section is constructed at least from a first arm and a second arm. The first arm has a work holding section for holding a workpiece and reciprocates. The second arm is co...
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WO/2007/088614 |
A device that floats by gas flow and a nozzle plate that is used for the device. The device can sufficiently floats a plate-like object in a stabilized attitude by gas flow with low pressure or with a small volume. The device that floats...
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WO/2007/088936 |
Provided are a gas flow transportation device that sufficiently floats a plate-like object by a low-pressure gas flow or a small amount of gas flow and stabilizes the posture of the object, and nozzle plate that is used for the gas flow ...
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WO/2007/080986 |
Provided is a substrate transfer robot, in which a contact type vacuum seal portion is cooled so that a vacuum seal may not exceed a heat resisting temperature thereby to prevent a drawback that the atmosphere leaks into a transfer chamb...
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WO/2007/080779 |
[PROBLEMS] An object having a temperature adjusted to an appropriate level is reliably conveyed with the temperature maintained. [MEANS FOR SOLVING PROBLEMS] An object conveyance apparatus having a slider arm (143) for conveying a wafer ...
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WO/2007/077765 |
Provided is a stage apparatus wherein a step is not generated between the upper end of a lift pin and placing plane of a stage in a status where a substrate to be processed is placed on the placing plane. A plasma processing apparatus wh...
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WO/2007/074855 |
Attention is paid on a micro energy loss which has not been considered in a conventional non-contact delivery device so as to effectively utilize energy of a fluid to realize improvement of energy efficiency and energy saving. The non-co...
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WO/2007/074854 |
Attention is paid on a micro energy loss which has not been considered in a conventional non-contact delivery device so as to effectively utilize energy of a fluid to realize improvement of energy efficiency and energy saving. The non-co...
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WO/2007/074798 |
A substrate conveyance method capable of continuously conveying substrates to a substrate processing device, the method being capable of processing the substrates while conveying them to a processing unit fixed to the substrate processin...
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WO/2007/072817 |
A substrate conveying method and a substrate conveying apparatus that arte used to convey a substrate such as a wafer, reticle, etc., and an exposure apparatus used for lithography of a semiconductor integrated circuit etc. and heating t...
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WO/2007/071424 |
A device (1) for interconnection to a surface is disclosed comprising a base (2) having a lower surface from which a plurality of suction cups (11) are protruding, each of the suction cups comprising a cap (12) from which at least one bl...
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WO/2007/071424 |
A device (1) for interconnection to a surface is disclosed comprising a base (2) having a lower surface from which a plurality of suction cups (11) are protruding, each of the suction cups comprising a cap (12) from which at least one bl...
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WO/2007/070511 |
A process and system for continuous flow-through dip-coating of a workpiece (8) requires the introduction of the workpiece in a porous coating basket (7) at a first side (15) of a coating chamber (5) and the removal of the coated workpie...
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WO/2007/068977 |
A stain inhibitor, which acts to neutralise alkali leached to the surface of a sheet of glass in the presence of water is disclosed. The stain inhibitor comprises a buffered, non-acidic compound, with a pKa value of between 6.0 and 10. P...
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WO/2007/067395 |
Apparatus (10) for cleaning and drying a semiconductor wafer container (12) includes a load with a fixture that received a dirty container and delivers it to a deck assembly. A carrier (200) receives the container for further handling. A...
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WO/2007/063817 |
A treatment bath section (10) of an electrolytic plating apparatus (1) is provided with a hollow rotating shaft (23) horizontally arranged on the upper side of a plurality of treatment baths (42-47). The hollow rotating shaft (23) is con...
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WO/2007/061257 |
Embodiment of the invention relates to an apparatus for automated fabrication of lens and provided with a mold arranging part for transporting a mold in which a lens is formed in a lens former and arranging and fixing the transported mol...
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WO/2007/059043 |
A signature transport device (10) includes a first conveyor_(l 1) moving a first signature (74) and a second signature (72) in a first direction. A signature lifting device (20) removes the first signature (74) from the first conveyor (1...
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WO/2007/052028 |
A stain inhibitor, which acts to neutralise the alkali leached to the surface of a sheet of glass in the presence of water, is disclosed. The stain inhibitor comprises a compound that reacts with the water to produce an acid. The acid ac...
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WO/2007/048751 |
The invention substantially relates to a device for feeling a nacelle with nuclear fuel pellets comprising a filling spout (2), which defines a pellet flow path (4), is provided with a top end (8) for receiving the pellets and a lower en...
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WO/2007/045951 |
There is provided a conveying method for attracting and conveying separators (2) for a fuel cell, from a stack of the separators, one at a time. According to the conveying method, when a separator (2A) arranged at the top of the separato...
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WO/2007/045951 |
There is provided a conveying method for attracting and conveying separators (2) for a fuel cell, from a stack of the separators, one at a time. According to the conveying method, when a separator (2A) arranged at the top of the separato...
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WO/2007/037005 |
A work receiving device that stably floats work by air. In the work receiving device, lifting and lowering operation by a lifting means causes an air jetting means to enter a receiving cassette and work to be unloaded to the outside from...
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WO/2007/032057 |
Any deterioration of the hydrogen termination on wafer surface, for example, during transit (20), is suppressed by retaining a wafer in an inert gas atmosphere containing hydrogen gas.
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WO/2007/032530 |
A carrying device capable of carrying an article to be carried to a correct position while preventing the article from being contaminated by dust. The carrying device comprises first and second parallelogram linkages (13, 14). The second...
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WO/2007/029401 |
A work loading/unloading system has a conveyance device for supporting rectangular plate-like work from its lower surface side, in a substantially horizontal position, and conveying the work in a substantially horizontal direction; place...
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WO/2007/016689 |
A method and apparatus for cleaning, drying, coating, baking etching and deposition of surfaces on glass substrate as it transitions thru and between small gaps between hydro-static porous media bearings. Due to the non-contact nature of...
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WO/2007/010725 |
A method for teaching the wafer position precisely and automatically without causing interference even when the frontage of processing equipment is narrow, and an external teaching tool therefor. In the method for teaching a wafer positi...
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WO/2007/007642 |
Provided is a substrate transfer apparatus having excellent workability which can transfer a substrate without taking around a vacuum pump and a power supply code of the vacuum pump while transferring the substrate. The substrate transfe...
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WO/2007/004551 |
Provided are a container transporting apparatus and a container transporting system which can suitably transport containers corresponding to a process speed, arrangement configuration and the like of a processing apparatus. The container...
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WO/2007/000914 |
A processing system (100) comprises a conveyance chamber (150), a plurality of chambers (140, 160) connected with the conveyance chamber, conveying equipment (180) arranged in the conveyance chamber, and a section (200) for controlling t...
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WO/2006/137370 |
A transfer robot is composed of two concentrically arranged driving sources; a driving arm protruding from a side plane of each driving source; two driven arms arranged at the other end of the driving arm; and a hand arranged at a leadin...
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WO/2006/137407 |
A substrate receiving device (1) for receiving substrates (W) as workpieces. The substrate receiving device (1) has a first substrate cassette (10) for receiving substrates (W) from above in the order of loading, an unloading conveyor (3...
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WO/2006/136187 |
The invention relates to a device for the successive coating of a number of substrates, comprising at least one transfer chamber and two coating chambers, the transfer chamber on the one hand and the coating chamber on the other hand bei...
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WO/2006/137476 |
A technique capable of eliminating positional displacement without employing a conveyance robot. Objects (31-33) to be conveyed that are placed on a placement table (55) are rotated, and after an error angle (&agr ) is set to zero, a tem...
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