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JP2009263066 |
To suppress a consumption amount of air and to stably convey a glass substrate in a substrate inspection device.The substrate inspection device 1 for inspecting the glass substrate 10 includes a conveying passage 2; a conveying member 3 ...
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JP2009256001 |
To provide the hose adaptor of a part feeder used in putting together feeding passages in a single feeding passage, in which rod members with a head such as screw are fed by air through the feeding passages from a plurality of parts feed...
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JP2009253135 |
To support a plate material flat by generating pressing force balanced with the levitation force.A gas pressure support mechanism 20 for a plate material includes an object pad 22, its body 26 of a housing, and a housing section 21 havin...
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JP2009242103 |
To provide a switching device capable of improving durability in the device, while reducing a leakage quantity of air in an air transport passage by biting-in of a powder and grain material.This transport switching device 1 of the powder...
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JP2009227528 |
To provide a method for transporting reclaimed ashes where, when the reclaimed ground of incineration ashes is excavated, and the reclaimed ashes to be recycled are pneumatically transported, the sticking, clogging or the like of the rec...
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JP2009208964 |
To provide a substrate carrying device and a substrate carrying method efficiently carrying and inspecting substrates in a shorter time, and reducing installation space for the substrate carrying device.The device is provided with a flot...
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JP2009208909 |
To reduce the size of a device by reducing the number of components and to convey a conveying object in a noncontact state.This noncontact conveying device is provided with a static pressure table for making afloat a conveying object S u...
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JP2009179423 |
To detect an interval between a movable body and a guiding support and surely maintaining the interval by surely controlling a floating structure and the movable body with it from contacting the guiding support.This stage device 100 comp...
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JP2009166941 |
To smoothly and stably conveying a substrate while preventing damage of the substrate.A plurality of floating units 25 for floating up the substrate W are provided on a support frame along a conveying direction, and a group 31G of refere...
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JP2009161283 |
To provide a levitating unit and a device capable of levitating and conveying a workpiece such as a glass substrate while suppressing any warp generated in the workpiece.The levitating unit has a chamber 36. A vent hole communicated with...
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JP2009164381 |
To provide a bulk feeder capable of easily removing a component jam if the component jam is caused during movement of an electronic component in a linear passage.The bulk feeder has a constriction portion NP which has a cross section sha...
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JP2009149442 |
To avoid an adverse effect on operation of a production machine due to a conveyance force.A conveyance system comprises the production machine for manufacturing web of packaging cushions, a duct downstream from the production machine, a ...
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JP2009149389 |
To provide a floating unit and a device having the same capable of floating and conveying a workpiece such as a glass substrate without warping it.The floating unit has a chamber 36. A vent hole communicating with airtight space of the c...
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JP2009147240 |
To provide a substrate processing apparatus capable of performing positioning by moving a substrate to an arbitrary position in a state where the substrate is supported by air float devices, and to provide a substrate supporting apparatu...
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JP2009132541 |
To provide a pneumatic conveying element capable of carrying articles with a predetermined speed held without vibrating in a pipe line, and without generating the breakage of the articles, the pneumatic conveying element, a pipe and the ...
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JP2009135307 |
To provide a support for a workpiece that is conveyed without causing any breakage and any crack by making it afloating with gas.A sealing space 15 is formed at a lower surface side of an air permeability porosity sheet 14 by supporting ...
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JP2009126588 |
To prevent cup-shaped containers 17 from being damaged during conveyance or from being adhered with stains without requiring counting of conveyed containers 17 in a discharge part 32 on a goal point side, in a conveying device for convey...
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JP2009120402 |
To provide a sterile transfer device for fluids such as liquids or gases.A disposable device for the sterile transfer of fluids such as liquids or gases includes a body, a bore formed through at least a portion of the interior of the bod...
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JP2009117571 |
To stably float and convey a rectangular substrate to be processed on a flotation stage while holding the substrate in a fixed posture suitable for processing with simple constitution.First and second holding portions 106L and 106R of fi...
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JP2009107838 |
To correct a recessed part formed at a synthetic resin bottle during conveying the synthetic resin bottle.The synthetic resin bottle conveying device (10) is provided with a cylindrical casing (11) having a slit (15) formed along a longi...
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JP2009105377 |
To avoid interference between one end of a substrate W and a float unit 37, or the like, when carrying the substrate W that is enlarged, by fully keeping the levelness of the substrate W, while ensuring full floating performance of a flo...
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JP2009098052 |
To provide a substrate gripping mechanism for stably transferring without vertical fluctuation in a defect inspecting device of a substrate used for a flat panel display and the like.A substrate transferring device includes: a substrate ...
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JP2009083954 |
To provide a vacuum transportation system having very small air resistance to allow movement with higher speed and capable of transporting cargoes, passengers or the like at high speed.This vacuum transportation system includes a transpo...
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JP2009073660 |
To provide air blowout structure for an air floating conveyor apparatus which can be easily maintained.The air blowout structure for the air floating conveyor apparatus conveys a glass substrate 4 as a thin plate by floating it pneumatic...
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JP2009073622 |
To enable an article to be automatically set to a pneumatic element for dispatching and receiving without applying a load to the article, in a pneumatic dispatch device for dispatching the pneumatic element between stations by a pneumati...
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JP2009073637 |
To provide a workpiece transporting device and a workpiece transporting method capable of transporting fine workpieces in vacuum without using a conventional pick-and-place type transportation.A workpiece transporting device and a workpi...
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JP2009073646 |
To provide a floating method and a floating unit for floating a workpiece without generating a warp in the workpiece.This floating unit comprises a chamber 36. A ceiling wall of the chamber 36 is formed with ventilation holes communicate...
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JP2009067600 |
To provide a conveyance device capable of successfully conveying paper sheets.Sensors 100 for detecting passing of paper sheets are provided in the vicinity of connecting parts of respective air delivery tubes 22 and common tube paths 82...
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JP2009071323 |
To convey a glass substrate at high speed without damaging the substrate by conveying it in a noncontact state and reducing the transfer time of the substrate.The device conveys the substrate manufactured in a flat panel display producti...
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JP2009067591 |
To provide a transporting pipe for separating liquid as a liquid separator capable of reducing an installation area by reconsidering a structure of a conventional liquid separator, and an air transporting system equipped with the transpo...
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JP2009062146 |
To provide a coating apparatus capable of improving work efficiency and attaining space saving of a working space, and a method for cleaning the coating apparatus.The coating apparatus comprises a substrate conveying part for conveying a...
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JP2009064900 |
To reduce an installation cost as the entire plant and to sufficiently reduce the running cost of a clean carrying system.In the clean carrying system, a support frame 27 is provided inside a sealed housing 3, the support frame 27 is pro...
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JP2009051654 |
To inspect a substrate while carrying, without falling wide of the depth of field, by easily, inexpensively and stably carrying the substrate without vertical vibration, without constructing complicated mechanism and system, in an inspec...
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JP2009051672 |
To convey a glass substrate at a high speed without damaging, by conveying the glass substrate in a non-contact state.This substrate conveying device is provided for conveying the substrate manufactured by a flat panel display manufactur...
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JP2009046272 |
To prevent the occurrence of poor quality due to fluttering of a film-shaped article and the like by performing carrying in a stable state, especially carrying in a stable state at a left end surface portion and a right end surface porti...
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JP2009046308 |
To provide a transporting device capable of transporting articles to be transported between a plurality of transportation means while supporting the articles under a non-contact condition by the transportation means adjacent to a downstr...
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JP2009040598 |
To provide an air floatation transportation device increasing a floating amount of an object to be transferred near a downstream end in a carrying direction of the air floatation unit and reducing air consumption of a whole device, and t...
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JP2009035356 |
To provide a bottle conveying apparatus and a bottle conveying method capable of mitigating reduction of the bottle conveying speed when a plurality of bottles B are brought close to each other and conveyed, and allowing the bottles to b...
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JP2009029579 |
To improve the conveyance efficiency of a flotation conveyor while sufficiently suppressing the flexure of a thin sheet when the thin sheet is pulled out of a carrying-out part of a treatment device.On the front end side and the rear end...
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JP2009032984 |
To provide a floating conveying unit capable of floating and conveying a work such as a glass substrate without generating warpage.The floating conveying unit includes a chamber 36. On the ceiling wall of the chamber 36, a vent hole comm...
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JP2009029591 |
To provide a thin plate-like material carrying device for preventing the tip of a thin plate-like material from colliding with the other air table due to descending, even if an air supply capacity of a partial air table is reduced, when ...
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JP2009032979 |
To simplify the configuration of a levitation conveyance system 1, while reducing its manufacturing cost.A plurality of levitation units 41, making a thin plate W levitate are provided to the unit body 29 of a changeover apparatus so as ...
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JP2009033214 |
To convey a glass substrate at a high speed in a non-contact state without scratching it.The substrate conveying device for conveying a rectangular glass substrate manufactured in a flat panel display manufacturing process includes a sub...
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JP2009026782 |
To reduce the production cost, while making the X-axial installation space of a sheet transfer device small.A pair of transfer arms 35 are installed on a device body movable in X-axial direction at Y-axial intervals; each arm 35 has a fi...
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JP2009026783 |
To simplify the constitution of a sheet transfer device 7, and to reduce its production cost.This device includes its body, disposed at a transfer station between first and second treatment stations, a floating unit disposed on the devic...
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JP2009023836 |
To convey a glass with a lid containing liquid without any leakage of the liquid so that any liquid leaks even in an arbitrary posture of the glass with the lid containing liquid.For example, the width of a groove 6 in the vertical direc...
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JP2009023797 |
To provide a levitation conveying system for improving efficiency of a conveying work of a thin sheet with the levitation conveying system by sufficiently suppressing a part of the thin sheet from being interfered with an edge part of th...
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JP2009023789 |
To enable adjustment of a clearance and a change in height of guide bars guiding a body section of a bottle conveyed by an air carrying conveyor, and to allow the adjustment by a small number of driving means.In this air carrying conveyo...
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JP2009023778 |
To provide a work transporting system easy to handle in work handling operation without damaging work.The work transporting system is equipped with pipes 2a and 2b to admit a cap 1 to flow through, a work supplying part 4 which has an in...
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JP2009023776 |
To provide a transport object levitation device and a stage device using it, capable of achieving a high holding stiffness while it assures easiness to conduct processing.The transport object levitation device (200, 200a, 200b) includes ...
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