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Matches 551 - 600 out of 2,208

Document Document Title
JP5084216B2
Overcoating layer organic compositions comprising (i) a resin component that comprises one or more terpolymers, tetrapolymers or pentapolymers and/or (ii) one or more acid generator compounds, that are applied above a photoresist composi...  
JP5074529B2  
JP5070109B2  
JP5055176B2  
JP2012203406A
To provide a radiation-sensitive resin composition for liquid immersion exposure which is capable of providing a resist coating film that exhibits excellent drainability on the surface by having a high dynamic contact angle during the ex...  
JP2012201794A
To provide a highly gas-permeable cycloolefin addition polymer which has high productivity and excellent gas permeability, thermal stability and solubility, and is further excellent in mechanical strength, particularly, flexibility; and ...  
JP5040005B2
There are provided a novel norbornene derivative which is a material for a chemically amplifying type photoresist for F2 laser, possesses excellent transparency and improved dry etching resistivity and has a fluorine-containing ketone un...  
JP5034242B2  
JP2012181427A
To provide a reliable optical waveguide with high transmission efficiency and high optical coupling efficiency relative to light-emitting/receiving elements, and an electronic apparatus having such an optical waveguide.An optical wavegui...  
JP2012177834A
To provide a negative resist composition for improving line edge roughness (LER), allowing formation of a resist profile with little undercut degree specific to a negative resist composition, and giving high resolution.A chemically ampli...  
JP2012177836A
To provide a negative resist composition for forming a resist film, in which fine distribution and diffusion of a compound having an ability of generating an acid in the resist film can be further homogenized, effective sensitivity can b...  
JP5017222B2  
JP5015608B2  
JP5013444B2  
JP5015036B2  
JP5013402B2  
JP4999499B2  
JP4998724B2  
JP2012149233A
To solve the following problem of copolymers in the related art that can be used as a surface modifier for dispersing inorganic particles in a cyclic olefin polymer: those copolymers require the use of an expensive catalyst such as a pal...  
JP4979155B2  
JP4975505B2  
JP2012121956A
To provide an addition-type norbornene-based resin excellent in adhesion to an inorganic base material, dielectric characteristics, heat resistance and moldability, a molding containing the resin, a composite member having the molding, e...  
JP2010519594A5  
JP4957230B2  
JP4955732B2  
JP2012111872A
To provide a formed article which may be formed into a thick plate having excellent heat resistance and dielectric properties, and is reduced in warp of a circuit board during processing of the board, and to provide a method for producin...  
JP2012106486A
To provide a laminate separating a support from an object while firmly adhering and supporting the object and a method of separating the same.The laminates has the light-transmissive support, a supported substrate, an adhesion layer, and...  
JP4925759B2  
JP2012077284A
To provide a high-active catalyst system that efficiently produces a high molecular weight addition (co)polymer of a norbornene-based monomer excellent in transparency, heat resistance, low water absorbability, and electrical insulation ...  
JP2012077296A
To provide a method for efficiently producing a norbornene-based copolymer excellent in transparency, heat resistance, low water absorbability, and electrical insulation characteristics.The method for producing a norbornene-based copolym...  
JP4907977B2  
JP4907994B2  
JP2012063653A
To provide a resist underlayer film of a multilayer resist film used in lithography, in particular, the resist underlayer film of a multilayer resist film having three layers, or the resist underlayer film used for directly forming a sil...  
JP2012046735A
To provide a catalyst composition for efficiently obtaining a high-molecular weight addition copolymer of a norbornene compound having a polar group, to provide a method for producing a high-mulecular weight addition copolymer of the nor...  
JP4887753B2  
JP4888655B2  
JP4882232B2  
JP2012031305A
To provide a superior manufacturing method of obtaining a cyclic olefin addition polymer of high gas permeability easy in industrial production, having superior gas permeability, high in thermal stability and a mechanical strength, and s...  
JP4877443B2  
JP2012027438A
To provide a pattern forming method excellent in sensitivity, limit resolution, roughness properties, exposure latitude (EL), post exposure bake (PEB) temperature dependency and depth of focus (DOF), and a resist composition.A pattern fo...  
JP4872735B2  
JP4870072B2  
JP4872183B2  
JP2012022338A
To provide a resist composition with which fine patterns can be formed without swelling with good practical sensitivity by development using a basic aqueous solution.A negative type resist composition includes an alkali-soluble resin wit...  
JP4859264B2  
JP4843838B2  
JP4841541B2  
JP4831307B2  
JP4831274B2  
JP4824849B2  

Matches 551 - 600 out of 2,208