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Matches 601 - 650 out of 2,217

Document Document Title
JP4859264B2  
JP4843838B2  
JP4841541B2  
JP4831307B2  
JP4831274B2  
JP4824849B2  
JP4821943B2  
JP2011237691A
To provide a radiation-sensitive resin composition for liquid immersion exposure, a cured pattern forming method and a cured pattern which are suitably used in a liquid immersion exposure process for exposing a resist film via a liquid f...  
JP2011225632A
To provide a norbornene based copolymer with a high molecular weight being excellent in transparency, heat-resistance, low absorptivity and an electric insulation property.The manufacturing method for the specific norbornene based copoly...  
JP4799322B2  
JP4790081B2  
JP4782910B2  
JP2011178052A
To provide a photo-curable transfer sheet to be used for producing an intermediate stamper in a nanoimprint process method, which is improved in releasability from a mold of a fine concavo-convex pattern and releasability from a photo-cu...  
JP4769410B2  
JP4766359B2  
JP2011170316A
To provide a photoresist composition increasing a dissolution contrast in organic solvent development, and a pattern forming method for forming a hole pattern by positive-negative reversal using a mask wherein a grid pattern is arranged ...  
JP2011164584A
To provide a negative resist composition which ensures small line edge roughness, high sensitivity, high throughput and small substrate dependence of a pattern, and to provide a patterning process using the negative resist composition.Th...  
JP4752211B2  
JP4745298B2  
JPWO2009128513A1
【課題】半導体基板加工時に有効なリソグラ フィー用レジスト下層膜形成組成物並びに該 レジスト下層膜形成組成物を用いたレジスト パターン形成法、及び半導体装置の製造...  
JP4737451B2  
JP4731067B2  
JP4722828B2  
JP2011132415A
To provide a polymerizable composition which has an extremely low dielectric dissipation factor in a high frequency region and is useful for production of a laminate excellent in wiring embedding property and heat resistance; a crosslink...  
JP2011122146A
To provide an olefin polymerization catalyst having high polymerization activity and high copolymerizability for an olefin to produce a polymer with a high molecular weight, and a method for polymerizing the olefin using the olefin polym...  
JP4708023B2  
JP2011111573A
To further improve the thermal imprinting property of an amorphous cyclic olefin polymer while maintaining properties such as transparency, heat resistance and mechanical properties of the amorphous cyclic olefin polymer.The resin compos...  
JP4696681B2  
JP4696682B2  
JP4694153B2  
JP2011105791A
To provide a photosensitive resin composition simultaneously having developability, low loss and heat resistance; to provide a photosensitive resin composition for forming optical wave guide paths; to provide a film for forming optical w...  
JP2011107170A
To provide a resin composition that is used for forming films having a thickness of 30 μm or more, where such films are highly transparent, have a low permittivity (permittivity lower than or equal to that of a thermal silicon oxide fil...  
JP4687197B2  
JP2011514406A
A monomer which the present invention 水添 dicyclopentadiene which occupies many of C5 fractions of naphtha cracking, and can be manufactured easily and economically, Or after carrying out the chemical bond of the three molecules of cy...  
JP2011090328A
To provide an optical waveguide of which the heat resistance is excellent and the water absorption property is low, and of which the cost of materials is reduced, and to provide an optical waveguide structure.The optical waveguide struct...  
JP4674089B2  
JP4667555B2  
JP2011070209A
To provide a novel radiation sensitive resin composition having high transparency to radiation, excellent basic physical properties for a resist pattern such as in sensitivity, resolution, and pattern shapes, without causing development ...  
JP4665043B2  
JP4666177B2  
JP2011063629A
To provide a cyclic olefin-based resin suitable for manufacturing a film provided with high heat-resistance and tensile characteristic, and a film using the cyclic olefin-based resin.In the cyclic olefin-based resin, a glass transition p...  
JP2011063809A
To provide a method for producing a homopolymer or a copolymer having high impact strength and high-temperature resistance.A catalyst system and a method for the bulk addition polymerization of polycyclic olefins, such as norbornene, met...  
JP4663075B2  
JP2011057945A
To provide a transparent thermoplastic resin excellent in low hygroscopicity and heat resistance and useful as an optical material.The alicyclic hydrocarbon copolymer includes structures represented by general formula (1) and general for...  
JP2011060275A
To calculate an intrinsic birefringence index of a polymer with high accuracy.This intrinsic birefringence index calculation method is a method for calculating the birefringence index of a polymer in an information processor, and include...  
JP4654739B2  
JP2011052154A
To provide a polymer composition excellent in light resistance and transparency, and capable of giving a molded article that is controlled from deterioration of optical characteristics when violet laser light is used as light source, and...  
JP4645858B2  
JP4645849B2  
JP4645787B2  

Matches 601 - 650 out of 2,217