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WO/2005/090788A1 |
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a...
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WO/2005/078281A1 |
A vacuum device used in the field of semiconductor production and capable suppressing power consumption. The vacuum device comprises vacuum containers (10), (11), (12), (13), (14), and (15) having gas inlets and gas outlets, vacuum pumps...
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WO/2005/075826A1 |
The invention relates to a cryogenic vacuum pump for producing a high vacuum, especially in a vacuum chamber (72), said pump comprising at least one cooling stage (14) that can be cooled, during a normal operation of the pump (10), to a ...
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WO/2005/075827A1 |
The present invention provides a pumping system (60) comprising: a pumping mechanism (64); a motor (51) for driving the pumping mechanism; a drive control (50) for controlling the motor; and means (52) for monitoring at least one state w...
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WO/2005/068968A1 |
A pump for a gas sampling or analyzing system includes a pump body having walls impervious to the gas and an electrical coil within body. The pump is coupled in series with a gas sensor and a gas volume containing the gas to be sampled o...
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WO/2005/066493A1 |
Disclosed herein is a vacuum ejector device, connected to a suction pad, thus sucking and conveying the article. The device includes a valve unit (10), an ejector unit (30), and a plate-shaped cover. The valve unit includes a body having...
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WO/2005/052374A1 |
A vacuum pump is provided comprising a pumping mechanism, a drive shaft for driving the pumping mechanism and a gear box connected to the drive shaft for rotating the drive shaft. Pressure control means are provided to define a path to a...
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WO/2005/052369A1 |
A method for regenerating water which comprises heating the ice formed on the portion in a vessel having an extremely low temperature refrigerator installed therein which portion is cooled by said extremely low temperature refrigerator t...
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WO/2005/050017A1 |
A cryopump in which the volume of gas absorbed is increased without increasing the size of the cryopump by providing tubular panels (41, 42) having a surface parallel with the inflow direction of gas at the gas inflow section through whi...
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WO/2005/050018A1 |
A cryopump (20) used in a process chamber (10) allowing a process gas to flow therein, comprising a 1st stage panel, a heat shield plate (24), and a 2nd stage panel (28). A cutout for enabling the inflow of gas molecules into the pump an...
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WO/2005/031169A1 |
A vacuum pump has, in fluid communication with a location intermediate an inlet thereof for receiving fluid and an outlet thereof for exhausting pumped fluid, a sensor for receiving at least part of the fluid received by the pump and for...
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WO/2005/019744A1 |
A vacuum device comprises several cryopumps (10), connected to one or several vacuum chambers. The cryopumps (10) are connected to a compressor device (16), by means of medium supply lines (12) and medium return lines (14). An adjuster d...
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WO/2005/019745A1 |
The invention relates to a vacuum device comprising several cryopumps (10), in particular several cryopumps connected in parallel. In addition, the device is equipped with at least one compressor unit (16), which is connected to the cryo...
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WO/2005/005833A2 |
An electronic controller is integral with a cryopump and provides an offline solution for purging a cryopump and an exhaust line during unsafe conditions. The electronic controller is responsible for controlling the opening and closing o...
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WO/2005/005832A1 |
The invention relates to a cryopump comprising a pumping chamber that is provided with a gas inlet port and a pumping area which is located in the pumping chamber and is chilled by means of a source of cold. The design of the pumping are...
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WO/2004/097220A1 |
The invention relates to a piston vacuum pump, comprising a cylinder (14) and a piston (12) which forms a compression chamber (28) together with the cylinder (14). The piston (12) reciprocates in the cylinder (14) with a compression stro...
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WO/2004/092585A1 |
The vacuum chamber comprises a vacuum space (11) with a passage (14) at which a vacuum pump (15) is directly placed. The vacuum space (11) contains heat radiators (16). In order to prevent heat radiation from penetrating inside the vacuu...
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WO/2004/090332A1 |
A method of starting a dry vacuum pump including an upstream pump 1 having an inlet side 11A in fluid communication with a vacuum chamber 3, and a downstream pump 2 having an inlet side 12A connected to an outlet side 11B of said upstrea...
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WO/2004/086610A2 |
A dry pump (10) has adjacent its inlet (12) and between the inlet and pump foreline (14) an apparatus for abating the back flow of organic molecules originating from a lubricant used to lubricate a drive mechanism of the pump. In one emb...
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WO/2004/081381A1 |
A vacuum pump having a high corrosion resistance is disclosed. A member constituting the vacuum pump is composed of aluminum or an aluminum alloy, and the surface of the member is subjected to a plasma oxidation treatment such as an oxid...
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WO/2004/079192A1 |
A vacuum device has a vacuum container with a gas inlet and a gas outlet, and a vacuum pump with plural stages of mechanically structured vacuum pumps for reducing the pressure inside the vacuum container and maintaining the pressure-red...
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WO/2004/073825A2 |
This invention relates to a method for reducing the partial pressure of undesired gases in a small vacuum vessel. The method comprises using a getter pump with a sufficient sorption capacity to eliminate the need for a bakeout step.
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WO/2004/065788A1 |
A number of micromachined devices including a micromachined pump for on-chip vacuum is provided. For example, a single-chip micromachined implementation of a Knudsen pump having one or more stages and which uses the principle of thermal ...
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WO/2004/065290A2 |
An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A...
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WO/2004/018947A1 |
An inverter (22) is provided between a power source (20) and a suction/discharge valve driving motor (14) that controls cycle time of suction and discharge of a refrigerator unit (10). An output frequency of the inverter (22) is controll...
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WO/2004/013493A2 |
A process, apparatus, and kit for horizontally assembling a cryogenic pump with an apparatus generally including a workstand, a plurality of support stands longitudinally spaced apart from the workstand and a roller transport structure. ...
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WO/2004/011701A1 |
An integrated phase separator for use in an ultra high vacuum system, for example, a molecular beam epitaxy system, is described. The vacuum chamber has a cryogenic panel disposed therein. The cryogenic panel includes a cryogenic shroud ...
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WO/2003/106844A1 |
The present invention relates to a ultrahigh vacuum pump and a hydraulic method for compressing gas into water in three dimensions. Said pump includes a conduit, a hydraulic valve assembly, an oil supplying&sol discharge port, a piston w...
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WO/2003/101576A1 |
The invention relates to a cold trap comprising a hollow body (3) with an inlet valve (2) and an outlet valve (6). The aforementioned hollow body (3) houses a cold core (11) which is associated with a plate (13) with low thermal inertia ...
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WO/2003/098045A1 |
The invention relates to a method for producing a vacuum by using a vacuum pump. The invention also relates to a vacuum pump that, in particular, is suited for implementing the aforementioned method. The inventive vacuum pump has a multi...
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WO2003078838B1 |
A vacuum pump control device capable of suppressing a power consumption by a vacuum pump by varying the speed of the vacuum pump according to the operating conditions of a vacuum device, wherein a condition set part (4) sets a relation b...
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WO/2003/089791A1 |
The invention relates to a vacuum pump (10) comprising a pump unit (14) and an operator unit (12), which is connected to the pump unit (14) to control the same and is located at a distance from said pump unit (14). The pump unit (14) and...
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WO/2003/057340A1 |
The pulse tubes (165, 175) and regenerators (160, 170) contained within a cryopump housing (210) are arranged in a way that facilitates the fabrication and installation of the cryopanels (265). The pulse tubes and regenerators are locate...
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WO/2003/048577A1 |
A double action pump (10) having a cylinder (26), a housing (28), a piston (20) for reciprocating motion within the cylinder (26), a piston rod (30) extending externally of the pump (10), a drive assembly (14) for the piston (20), and a ...
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WO/2003/040568A1 |
The invention concerns a vacuum pump (10) comprising a control device (20) for processing operational data and operational instructions, as well as a touch screen (40) for displaying operational data capable of being invoked from the con...
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WO2002024983A9 |
An integrated phase separator for use in an ultra high vacuum system, for example, a molecular beam epitaxy system, is described. The vacuum chamber has a cryogenic panel disposed therein. The cryogenic panel includes a cryogenic shroud ...
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WO/2003/016719A1 |
A vacuum pump capable of pumping solid, liquid and gas, or any combination thereof, including a drive (40) and a manually disengageable pumping system connected thereto. The pumping system is composed of a two- or three-chambered caniste...
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WO/2002/099280A1 |
The invention relates to a multi-stage piston-type vacuum pump (1) comprising an inlet (71), an outlet (70), at least one pair of pistons (2, 3), and several compression stages, which are assigned to the faces of the pistons and each hav...
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WO/2002/088546A1 |
An obstetrical vacuum extractor (20) and coupled hand-held pump arrangement wherein the pump subassembly (22) includes a diaphragm (94) deflectable to draw a vacuum through an inlet valve (102) to draw a vacuum within the extractor cup (...
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WO/2002/081915A1 |
The invention relates to a method and device for generation of a vacuum in a body, using a piston which may be displaced in the body. The piston may thus be withdrawn from a starting position, in which said piston lies on an end wall of ...
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WO/2002/053957A1 |
A leak control valve preventing the damage of the vacuum pump and/or the neighboring instruments even in the case of fluid leak at the vessel. The side wall of the valve poppet closes the channel to the outlet through restoring forces of...
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WO/2002/035100A1 |
The invention relates to a mechanical kinetic vacuum pump comprising a rotor made of an alloy. The aim of the invention is to increase the resistance thereof to heat and creep. The rotor material is a light metal alloy produced from a po...
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WO/2002/033332A1 |
An energy exchanger (2) is connected to an earth energy exchanger (18) via a flow line (10) and a return flow line (14). The flow line (10) and the return flow line (14) are both provided with a regulatable stop valve (12,16). At least o...
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WO/2002/027058A1 |
A method for reducing the loss of particles form the surface of porous getter bodies, consisting in producing on this surface a thin layer (20) of a metal or metal alloy with a deposition technique selected among evaporation, deposition ...
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WO/2002/012725A2 |
A pump has a pump assembly for pumping fluid. The pump assembly includes a fluid pressure changing mechanism in fluid communication with a valve plate which is in fluid communication with a port plate. A pair of flappers are interposed b...
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WO/2002/002943A1 |
A flywheel energy storage system (200), includes two pumps (218, 224) arranged in parallel for simultaneously drawing-off and absorbing substantially all of the gases that evolve from a flywheel assembly during high speed operation. A wa...
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WO/2001/096744A1 |
The invention concerns a vacuum generating device wherein the vacuum pump body (1) comprises cavities forming regulating chambers (12), closed at their ends by closure means such as sealing plugs (26, 27), and run through by an exchange ...
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WO/2001/087463A1 |
The invention relates to a compressor unit comprising a compressor element (2), the outlet conduit (3) of which connects to an adsorption dryer (6) with a vessel (8) and a rotor (7) mounted therein. On each of the extremities of the vess...
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WO/2001/083990A1 |
The invention relates to a multistage device (1) for delivering moist gases. Said device comprises several delivery pumps (2, 3) each of which having a displacer that oscillates inside a delivery space, and being connected in series via ...
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WO/2001/079694A1 |
An electro-desorption compression system (10, 100, 200, 300, 400, 500, 600) comprises an enclosure (30) which includes a sorbent positioned between first and second spaced-apart conductors (14, 14', 16, 16'), a sorbate capable of forming...
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