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Matches 451 - 500 out of 5,230

Document Document Title
WO/1998/005869A1
A vacuum pumping apparatus which can stably and surely store water in a water reservoir and is highly effective in saving of electric power. The vacuum pumping apparatus essentially comprises a Geissler tube (31) serving as a vacuum indi...  
WO/1997/049109A1
The invention discloses a pumping device by non-vaporisable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterised in that it comprises a thin layer of non-vaporisa...  
WO/1997/039242A1
A cryopump having a cryopump chamber (12) includes a purge gas valve (38) coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A ro...  
WO/1997/035652A1
A combination cryopump/getter pump (50) including a cryopump section (52) having a cryopump inlet (76), a getter pump section (54) having a getter pump inlet (86), and a mechanism (60) for coupling the cryopump section (52) and the gette...  
WO/1997/035111A1
A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator ...  
WO/1997/033671A1
A Group I gas cryopumping system includes a compressor throttle cycle refrigerator (10) using mixed refrigerants. Cold refrigerant flows through a cryopumping surface (44) located in a vacuum chamber, whereon vapor freezes. The refrigera...  
WO/1997/023730A1
A vacuum system (5) comprising a vacuum pump (10) and a vacuum indicator (15). The vacuum pump comprises a cylinder; a piston disposed in the cylinder (50); a piston rod (60) fixed at a first end to the piston and extending through an en...  
WO/1997/022839A1
The invention relates to a low-temperature refrigerator (1) for producing temperatures in a defined low-temperature range, with a cold head (3) which is fitted with a regenerator (7) and in which a thermodynamic circulation process (rege...  
WO/1997/017542A1
An apparatus for processing a substrate includes at least one closed chamber for containing the substrate in a controlled environment, and a non-evaporable gettering material in the chamber acting as an internal pump serving as the prima...  
WO/1996/039582A1
An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump occupies a space enclosed by a first surface...  
WO/1996/034669A1
A cryogenic trap (12) is shielded by a floating baffle array (30) which is insulated from ambient temperature. The cryogenic trap includes a baffle array (20) which is suspended by conductive braid (50) from split cylinders (24A, 24B). T...  
WO/1996/034199A1
There is presented a gas compressor including a housing (2) defining adjacent first and second chambers (4, 6) in axial alignment, a rod (8) extending through the first chamber and into the second chamber, a tubular projection (10) exten...  
WO1996017171A3  
WO/1996/022465A1
In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at...  
WO/1996/017171A2
A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter ...  
WO/1996/013620A1
A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ...  
WO/1995/011381A1
A process is disclosed for operating a cryopump (1) with coolable pump surfaces (5, 6, 8, 9) and a fore-pump (15). In order to reduce fore-vacuum or initial pressure generation costs and to eliminate the danger of oil contamination, cool...  
WO/1995/003186A1
Specifically configured gas compressors (2, 3) in a piping system will provide clean gas heating and recirculation that will quickly and efficiently heat a connected process chamber (1) or process piping section. Substantial heat is quic...  
WO/1994/028314A1
A pumping device is provided which is suitable for pumping mixtures of gases at cryogenic temperatures which is a combination of a cryogenic diffusion pump and a thermal gradient barrier diffusion pump. Specifically the pumping device co...  
WO/1994/027046A1
A vacuum pump contains a pumping unit (14) connected by a separable connection to a control and supply unit (10). The pumping unit (14) contains a non-volatile memory (20) which receives and retains data concerning the operation of the p...  
WO1994021312A3  
WO1994012285A3  
WO/1994/021312A2
A portable, battery-powered aspirator for use in emergency situations having an improved fluid container incorporating a recess for coiling an aspiration hose within the structural outline of the aspirator housing. A connection grommet i...  
WO/1994/019608A1
In a fast partial regeneration process, the second stage of a cryopump is heated as purge gas is applied to the cryopump. In a test loop, the purge gas is turned off and the roughing valve is opened. If the cryopump is judged to be suffi...  
WO/1994/012792A1
A process and device are disclosed for reducing the gap between a static part (2) and a movable part (1). A gas compatible with the working media of the installation is at first and temporarily introduced into the area of the gap, where ...  
WO/1994/012285A2
A device for comminuting a liquid, which comprises at least two electrohydrodynamic comminution means (24) arranged so that in use comminution of opposing polarity are formed which are substantially admixed after formation and a pump (22...  
WO/1994/010445A1
In order to reduce the overall size of serial pump arrangements, several block-disk-like building elements are used. These building elements are made of a non-metallic material and lie against each other with their control surfaces in a ...  
WO/1994/002958A1
An improved high-capacity getter pump, comprising a plurality of porous sintered piled-up annuli made from a non-evaporable getter material and having: (i) a first planar surface having a central hole; (ii) a second planar surface, havin...  
WO/1994/002957A1
An improved high-capacity getter pump, suitable for creating and maintaining the vacuum, comprising a plurality of porous sintered blades made from a non-evaporable getter material and having a first main surface; a second main surface, ...  
WO/1994/000212A1
A cryopump array (21) is described. Each vane (23) of the array (21) is coated with a 3-dimensional adsorbing structure made up of an adhesive (26) which is transparent to passage of gases to be pumped by adsorption and a plurality of pi...  
WO/1993/025815A1
In a cryopump (10) a frost concentrating device (26) is affixed to a condensing cryopanel (34) and provides surfaces (32) for condensing gases which are cryopumped through an opening (152) in the vacuum vessel. The surfaces (32) of the f...  
WO/1993/023133A1
A cold trap includes a set of baffles (20) cooled by the cold finger of a closed cycle refrigerator (24). The baffles (20) are vertically disposed in a vertical fluid conduit (12) with frustoconical and conical surfaces for directing liq...  
WO/1993/021441A1
A cryopump includes a sloped draining surface for receiving liquids released from cryopumping surfaces. The liquids are collected in an exhaust port and released outside the cryopump vacuum vessel. A pressure relief valve coupled to the ...  
WO/1993/017779A1
A process for purifying exhaust gases, especially from vacuum pyrolysis installations by means of the extraction of the exhaust gases and their combustion with a supply of air. Immediately after their formation, the exhaust gases are sub...  
WO/1993/015318A1
The invention relates to a cryopump with a substantially pot-shaped housing (2) with a radiation screen (4), also substantially pot-shaped, arranged in the housing, an inlet aperture (6), a cold head (3) extending into the housing and in...  
WO/1993/005859A1
A miniature cryosorption vaccum pump (7) capable of producing intermediate vacuums on the order of about 10-2 to 10-4 torr is provided which includes a closed cycle Stirling cycle refrigerator. The overall weight of the miniature cryosor...  
WO/1993/005294A1
The invention concerns a cryogenic pump (1) operated with a refrigeration unit (3), the pump having a housing (2), an inlet valve (33), heatable pump surfaces (11) and a rough-vacuum pump (45) connected to the interior chamber (9) of the...  
WO1992020918A3  
WO/1992/020918A2
A cryopump is capable of pumping a process chamber at a process pressure and differentially pumping a second chamber such as an RGA independently at a substantially lower pressure. A member extends through the cryopump housing into a low...  
WO/1992/016749A1
A reciprocating vacuum pump has a disc shaped piston (22, 122) h aving a peripheral elastomeric seal (52, 152) with oppositely directed, radially outwardly extending skirt portions (54, 56); the piston is driven axially by a rod (34, 134...  
WO/1992/015786A1
The invention concerns a device for supplying with inert gas a multi-stage dry-running vacuum pump (1) having devices for distributing the inert gas to the pump stages. In order to be able to monitor the flow of inert gas and/or to influ...  
WO/1992/014057A1
Condensation on a cryopump second stage refrigerator cylinder (32) is prevented by arranging a passageway (11) between a colder second stage cylinder shield (5) in thermal contact with the coldest section of the second stage (32) and a w...  
WO/1992/008894A1
The invention relates to a process for regenerating a cryopump (1) with an inlet valve (33), pumping surfaces (6, 8, 11) at a temperature during the operation of the pump which results in the condensation and/or adsorption of gases, said...  
WO/1991/008825A1
Device for continuously cleaning the exhaust gases of a vacuum installation by means of gas permeation diaphragms. The installation and operating costs are kept low for a good separation performance by forcing the flow of exhaust gas by ...  
WO/1991/005955A1
The invention relates to vacuum technology. An adsorption pump comprises, located in a casing (2), cells (4) with an adsorbent, a heater (15) of the cells (4), a cooler and an enclosed intermediate space (8) situated between the cooler a...  
WO/1991/005166A1
Vacuum pumping group comprising a secondary pumping subassembly (6) rotationally driven by an electric motor M2 and sucking from the housing to be vacuumed (1), and a primary pumping subassembly (2) rotationally driven by an electric mot...  
WO/1991/002160A1
A piston pump or compressor having a pump cylinder (2) and a cylinder head (7) with suction valve (8) and exhaust valve (10) is arranged and oriented in such a manner that the pump cylinder (2) has its cylinder 'head' (7) turned downward...  
WO/1990/012231A1
A self-cleaning pressure relief valve (60) has a spring-biased valve closure (68) with an annular contact edge (76) which makes contact with an o-ring (66) to seal the valve. The annular contact edge is slightly larger in radius than the...  
WO/1990/007061A1
Pumping system for obtaining high vacuum comprising a primary pump (4) and a secondary pump (1), associated in series whereby the secondary pump draws in gas from a chamber (3) and comprising means (7) for starting the secondary pump (1)...  
WO1990002878A3  

Matches 451 - 500 out of 5,230