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JP6445292B2 |
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JP6441660B2 |
A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated w...
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JP6437785B2 |
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JP6427254B1 |
To provide a space-saving gate valve provided with a link mechanism having less vibration at the time of opening and closing. A main body having an opening for opening and closing between an exhaust port of a chamber and a vacuum pump, a...
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JP2018178846A |
To provide a vacuum pump which can reduce the size and the cost compared to a conventional one.A vacuum pump device 1 includes a main pump 10 and a booster pump 20. The pumps include intake ports 11a, 21a, and exhaust ports 11b, 21b. The...
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JP6418838B2 |
An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust ...
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JP6415230B2 |
A cryopump includes: a cryopump vessel that defines an inlet; a refrigerator including a first stage and a second stage housed in the cryopump vessel, the second stage being cooled to a lower temperature than that of the first stage; a f...
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JP6416898B2 |
Getter devices with improved sorption rate, based on powders of quaternary alloys particularly suitable for hydrogen and carbon monoxide sorption, are described. Quaternary alloys having a composition comprising zirconium, vanadium, tita...
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JP6410589B2 |
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JP6410590B2 |
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JP6410836B2 |
The present invention relates to a pumping method in a pumping system (SP, SPP) comprising: a primary lubricated rotary vane vacuum pump (3) with a gas inlet port (2) connected to a vacuum chamber (1) and a gas outlet port (4) leading in...
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JP2018162702A |
To provide a heat transition flow pump capable of generating and keeping larger temperature difference between a front part and a rear part of a porous body and with smaller energy.A heat transition flow pump comprises: a low temperature...
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JP6406236B2 |
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JP6403807B2 |
Components within a cryocooler are scaled and/or configured for operation at a CMG operating frequency (e.g., 100 Hz) rather than at 30 to 70 Hz, matching the exported disturbances of control moment gyroscopes on the same platform and re...
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JP6399859B2 |
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JP2018132024A |
To provide a controller which causes only small vibration, can achieve downsizing, and can efficiently remove heat of a control circuit incorporated into the controller at low costs, and to provide a vacuum pump device.A controller 12 in...
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JP6377248B2 |
The invention relates to a motor vehicle vacuum pump having a pump housing surface, on which a noise absorption cap is mounted, said cap defining a noise damping volume.
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JP2018127943A |
To reduce manufacturing costs of a cryopump.A low-temperature cryopanel part of a cryopump comprises two cryopanel members 62 arranged at both sides of a low-temperature cooling stage across a cryopump central axis. Each of the cryopanel...
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JP2018127929A |
To provide a simple technique for coping with vibration, for an inverter-driven compressor unit for a cryogenic refrigerator.The compressor unit comprises: a flow rate control valve for controlling a flow rate of bypass piping allowing t...
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JP6372841B1 |
To shorten a drying time, reduce a drying cost, reduce the size of an apparatus, reduce vibration noise during operation, and reduce an environmental load by making the moisture collected in a rotary cylinder apparatus oilless. To provid...
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JP2018122746A |
To provide a control device for a vehicle, which hinders a decrease in efficiency in supply of negative pressure to a brake booster from a negative-pressure pump.When the tube wall temperature Ta of a second introduction passage connecte...
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JP6368458B2 |
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JP2018520304A |
The present invention relates to a pump system including a vacuum pump (12) and a cooling element (18) connected to the vacuum pump (12). A cooling medium supply pipe (20) and a cooling medium discharge pipe (22) are connected to a cooli...
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JP6351693B2 |
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JP6351525B2 |
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JP6348094B2 |
The invention provides a cooling device, which is used to inhibit reduction of gas exhaust speed of space used for accommodating a cooling object. The cooling device is provided with a cooling part and a cooling body cooled by the coolin...
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JP6345790B2 |
Dryer that is provided with a pressure vessel (2) with a drying zone (3) and regeneration zone (5); whereby the regeneration zone (5) comprises a first subzone (6) and a second subzone (7); whereby the dryer further comprises a rotatable...
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JP6339017B2 |
A rare earth regenerator material particle and a regenerator material particle group having a high long-term reliability, and a superconducting magnet, an examination apparatus, a cryopump and the like using the same are provided. A rare...
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JP6338403B2 |
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JP6333908B2 |
The present invention relates to a vacuum evacuation apparatus which can be mounted in a posture that can freely be selected a vacuum evacuation apparatus for evacuating a container from an atmospheric pressure to a high vacuum or less i...
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JP2018066370A |
To provide a hermetic vacuum pump isolation (VPI) valve interposed between a vacuum pump and a vacuum chamber.During normal operation of a vacuum pump, a VPI valve 214 is open, allowing fluid communication between the vacuum pump and a v...
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JP2018066375A |
To provide a pump system which ensures high safety.A pump system enables a positive displacement vacuum pump module (211) to be replaced independently from a drive module (207) which has an electric drive motor (3) and a frequency conver...
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JP6314754B2 |
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JP6317471B2 |
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JP2018054496A |
To provide a vacuum-sealing package for making a sealed space vacuum, the package being smaller in size and having higher performances and increasing the reliability.The vacuum-sealing package includes: a first substrate 10 with a convex...
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JP6303386B2 |
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JP6289652B2 |
[Problem] A heat exchanger generally employs a method for supplying liquid having critical pressure or higher or high pressure in order to suppress boiling. However, gas obtained by a evaporator behind the heat exchanger has relatively l...
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JP2018503027A |
In the field of semiconductor manufacturing, there is a need to improve the efficiency of related pumping equipment, especially for the manufacture of silicon chips. At least the first and second vacuum pumps, the first vacuum pump inlet...
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JP2018013109A |
To ensure that the size and cost of a control device can be reduced in a device using a vacuum pump and a vacuum valve.A control device 4 controls a turbo molecular pump 2 and a vacuum valve 3 provided on the side of an inlet of the turb...
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JP6257574B2 |
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JP6253464B2 |
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JP6255196B2 |
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JP2017214936A |
To improve energy saving performance of a cryopump system.In a cryopump system 100, a cryopump 10 comprises: a refrigerator 12 that comprises a low-temperature cooling stage and a high-temperature cooling stage; a low-temperature cryopan...
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JP6240190B2 |
A compressor device that periodically supplies compressed working gas to a cooling device loses less gas by not using a rotary valve. The compressor device includes a compressor chamber, a working gas connection, a working liquid connect...
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JP6218892B2 |
An apparatus that is capable of propelling a gas includes a first layer and a second layer arranged in a stack, mechanism for heating and/or cooling the first layer and the second layer to form a hot layer and a cold layer, and a through...
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JP6218921B2 |
An apparatus and method for protecting a target pump interior, where a target pump (10) inlet is provided with an inlet manifold (20) and a target pump outlet with an exhaust manifold (30). The target pump interior is exposed to sequenti...
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JP6211816B2 |
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JP6208219B2 |
A method for warming up a vacuum pump arrangement having a booster pump and a backing pump downstream of the booster pump for evacuating a process chamber includes setting the booster pump at a first speed higher than an idle speed of th...
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JP6209160B2 |
A compressor device that periodically supplies compressed working gas to a cooling device loses less of the gas by not using rotary valves. The compressor device includes a compressor cylinder, a compensation container and a drive device...
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JP6203282B2 |
A brake system for a vehicle comprises a vacuum pump mounted to an engine, wherein the vacuum pump is selectively connected to be driven by the engine. A clutch is mounted within a housing for the vacuum pump. The clutch can be selective...
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