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JP6201729B2 |
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JP6195638B2 |
To provide a vacuum pump flexibly usable with a simple method.The vacuum pump has a housing (12) connected to an element having at least one groove-shaped recess, and/or having at least one groove-shaped recess (14, 14'). In order to con...
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JP6188850B2 |
To provide a method capable of prolonging a service life of an abradable seal in a vacuum pump, and detecting abrasion of the seal in the vacuum pump early.A vacuum pump 101 has at least one pump stage, a motor and a motor control part. ...
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JP2017145726A |
To provide a dry vacuum pump device, a control method for the same and a control program capable of minimizing fluctuation in inner pressure of an exhaust object chamber due to instantaneous power failure.A dry vacuum pump device compris...
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JP6185967B2 |
A vacuum pump, in particular turbo-molecular pump or pre-vacuum pump for a turbo-molecular pump, such as a scroll, Schraubenvakuum-, diaphragm, rotary vane, reciprocating or Wo Lzkolbenpumpe comprises at least a pumping mechanism for pum...
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JP6185751B2 |
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JP6174054B2 |
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JP6170396B2 |
The present invention realizes a simple method for preventing a pressure in a crank chamber from excessively increasing without leading to an increase in a weight and an escalation of cost and causing damage of a structure forming a pres...
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JP6166102B2 |
A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating...
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JP6166774B2 |
Disclosed is a vacuum apparatus that is not complicated in construction, does not require two receptacle bodies, and is improved in vacuum efficiency. The vacuum apparatus includes a cylinder member provided with a guide shaft disposed i...
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JP6166970B2 |
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JP6150716B2 |
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JP6149827B2 |
The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamber 40 that enables a workpiece to be soldered in...
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JP6148743B2 |
To easily assemble a vacuum pump.A vacuum pump has a housing 10, at least one function unit disposed in the housing 10, and at least one opposite unit 14 disposed outside of the housing 10. The opposite unit is electrically and/or inform...
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JP6145443B2 |
Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieve...
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JP2017101571A |
To provide a non-evaporation-type getter pump that can further efficiently increase exhaust velocity.A non-evaporation-type getter pump 1 includes: a heater; and a non-evaporation-type getter material 3 arranged radially about the heater...
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JP6138144B2 |
A device evacuates a chamber and purifies the gas extracted from said chamber of any foreign substances. The device comprises a dry-condensing vacuum pump having an input connected to the chamber to be evacuated and is suitable for maint...
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JP6139876B2 |
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JP2017089462A |
To provide a determination system of a vacuum pump capable of determining abnormality occurring in a vacuum pump in advance, and a vacuum pump including the determination system.A vacuum pump (dry pump) including a determination system a...
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JP2017089512A |
To provide an evacuation device capable of reducing cost while assuring productivity.An evacuation device 10 in accordance with one preferred embodiment of this invention comprises a main pump 20, a check valve device 30, a first auxilia...
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JP6133919B2 |
To separate, in particular, vibration between a vacuum pump and a receiver, and also electrically separate vibration and obtain vacuum air-tightness connection by a simple and inexpensive method.In a vacuum pump damper for vacuum air-tig...
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JP6133821B2 |
A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle s...
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JP6124776B2 |
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JP6124626B2 |
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JP6121549B2 |
A getter pump is described. The getter pump has a casing, whose shape is a solid of revolution with a revolution axis, and a plurality of getter cartridges mounted within the getter pump casing, each cartridge having a linear central sup...
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JP6120915B2 |
To provide an improved vacuum system capable of accomplishing a pressure in a region of an ultra high vacuum (UHV), in particular, a pressure lower than 10hPa within a receiver for a long period of time.This invention relates to a vacuum...
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JP6120469B1 |
[Subject] Provide a fluid induction unit etc. which attract and discharge a suboutput powder object generated in insides, such as a vacuum pump. [Means for Solution] Barrel 10 in which, as for fluid induction unit 1, both ends attached a...
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JP6116843B2 |
A vacuum pump may comprise a grating, and a sublimation element. The grating may have a grating opening and a grating interior that may be bounded by at least one grating surface. The sublimation element may be located within the grating...
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JP3209622U |
[Subject] Cylinder exhaust air structure of an air compressor where the amount of compressed air per unit time which goes into an air storage chamber of a cylinder increases is provided. [Means for Solution] It is the cylinder exhaust ai...
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JP3209651U |
[Subject] Cylinder exhaust air structure of an air compressor where the amount of compressed air per unit time which goes into an air storage chamber of a cylinder increases is provided. [Means for Solution] It is the cylinder exhaust ai...
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JP6095586B2 |
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JP6089727B2 |
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JP6090243B2 |
A handy pump has a head and a body. A display window is disposed on an outer circumference of the head to surround the head. A light-guide plate is disposed to guide light from a light source to the display window. The light source is co...
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JP6090242B2 |
A handy pump has a head and a body. A display window is disposed on an outer circumference of the head to surround the head. A light-guide plate is disposed to guide light from a light source to the display window. The light source is co...
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JP6084119B2 |
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JP6078748B2 |
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JP6078749B2 |
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JP6078750B2 |
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JP2017031892A |
To improve productivity while reducing maintenance costs.A vacuum evacuation device 1 of an embodiment includes a multistage volume transfer type main pump 10, an auxiliary pump device 20, a ballast gas introduction line 30, and a check ...
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JP6076843B2 |
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JPWO2014132758A1 |
Achieve a longer life of the Orbitron pump. In an Orbitron pump in which the anode (1), cathode (2) and electron emitting filament (3) are located inside the pump chamber (4), there should be a non-evaporative getter material on the surf...
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JP6074139B2 |
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JP6057782B2 |
A cryopump includes: a cryopanel assembly including a plurality of cryopanels each having an adsorption area on both surfaces thereof; a radiation shield forming a gas receiving space that surrounds the cryopanel assembly; and a radiatio...
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JP2017002898A |
To complete a vacuum device and a remote diagnosis method in which diagnosis data required for remote diagnosis can be provided completely by a simple method as much as possible without any distortion and this must be possible to be atta...
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JP2016540645A |
A vacuum system 300 for a press system 200 is provided. The press system includes a die assembly 310, a feed assembly 320, and a transport assembly 340. The vacuum system includes an airflow generator 201 and a duct assembly 202. The duc...
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JP6053588B2 |
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JP6053552B2 |
A cryopump for evacuating a vacuum chamber is provided with a radiation shield provided with a shield opening end surrounding a shield opening for receiving a gas and a lid member having a connection opening narrower than a shield openin...
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JP6053934B2 |
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JP6053551B2 |
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JP2016211441A |
To provide a power consumption control device for controlling power consumption of a vacuum pump that controls power consumption of a vacuum pump and can reduce installation cost and maintenance cost.A power consumption control device 1 ...
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