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Matches 1 - 50 out of 5,166

Document Document Title
WO/2019/121558A1
The invention relates to a method for the diagnosis of a vacuum suction system (1) having a receiver device (2) for material to be transported, an acoustic sensor (7), which is positioned on the receiver device (2) and an acoustic signal...  
WO/2019/120800A1
The present relates to a Metal hydride compressor control method for generating a variable output pressure P_desired_outPut, comprising a first step of inflowing gaseous hydrogen into a metal hydride compartment at a constant temperature...  
WO/2019/114923A1
A piston type pump, comprising: a pump housing having at least one pump inlet and one pump outlet and a piston arrangement connected to a driving shaft which, when driven, sets the piston arrangement into movement, wherein the piston arr...  
WO/2019/116197A1
An apparatus (1300) includes a first pump module (1304), a second pump module (1302) and a sealing disc (1310). The first pump module (1304) includes a first flange having a first opening, a second flange (1322) having a second opening a...  
WO/2019/112232A1
Disclosed is a vacuum pump. A vacuum pump according to the present invention is characterized by comprising: a pump main body in which a vacuum space portion and an exhaust space portion are provided; a plurality of vacuum modules which ...  
WO/2019/107299A1
A vacuum generation device according to one aspect of the present invention is provided with a case, a vacuum pump, and a storage battery. The housing has: a top surface section having a handle part and a pipping terminal connectable to ...  
WO/2019/099862A1
In a cryopump, a primary cryopumping array having adsorbent and cooled by a second refrigerator stage extends along radiation shield sides. That array is shielded by a condensing cryopumping array that extends along the primary cryopumpi...  
WO/2019/099728A1
A cryopump has a cryogenic refrigerator with a cold stage and a colder stage that cool a radiation shield (20) having sides, a closed end and a frontal opening (204). A primary cryopumping array (130) is thermally coupled to the colder s...  
WO/2019/092429A1
A module for a vacuum pumping and/or abatement system. The module comprises a frame defining a space, a plurality of facilities inputs configured to receive facilities from a facilities supply, a plurality of facilities outputs configure...  
WO/2019/094520A1
A reciprocating pump includes a frame for a power end, a skid support structure integrally formed at a base of the power end frame to provide proper support and rigidity for the pump power end, where the integral skid support structure h...  
WO/2019/092427A1
A vacuum pumping or abatement system comprising: a first apparatus (32) and a second apparatus (31), each of the first and second apparatuses (32, 31) being either a vacuum pumping apparatus or an abatement apparatus, the first apparatus...  
WO/2019/092430A1
The one or more connection points are located at the top side. The module has a maximum size in a first system dimension that is equal to a first integer multiple of a fixed system value, the first system dimension being a dimension betw...  
WO/2019/092394A1
An anti-vibration arrangement for a condensate pump comprising a housing having a first opening; a pump motor contained within the housing having a pump motor inlet in fluid communication with a pump motor outlet; and a resiliently defor...  
WO/2019/075804A1
A handheld vacuum comprises: a handle portion, wherein the handle portion comprises a housing (1), an air extraction pump (2) fixed inside the housing (1), and a control portion, and wherein the housing (1) is provided with an air inlet ...  
WO/2019/062160A1
An efficient evacuation apparatus, comprising a sealed can (1), a first piston (2), telescopic rods (3), a vacuum pump (4), a driving device, one-way valves (21), a pressure sensor, and an electric control device (8). An air pipe (5) is ...  
WO/2019/062037A1
Disclosed is a cryopump with a high occlusion limit mounted in a vacuum chamber. The cryopump comprises a housing (2), a low-temperature cold source, a radiation cooling shield (3) located in the housing (2) and a low-temperature plate a...  
WO/2019/052131A1
A low-carbon oil-free vacuum air pump unit with a high pumping speed comprises multiple vertical composite runoff molecular pumps, a cryogenic water vapor pump (19), and a chemisorption pump unit (14). A pumping speed comparable to that ...  
WO/2019/037894A1
The invention relates to a method for operating a compressor (100), wherein an ionic liquid (a) is used as an operating liquid, and wherein two different materials (c, d) of the compressor (100) are brought in contact with the ionic liqu...  
WO/2019/013405A1
A vacuum-sealed case according to an embodiment of the present invention comprises: a container body, the upper surface of which is open, and which has a containing space formed therein; an upper cover installed on the upper surface of t...  
WO/2019/014330A1
The disclosure includes an outer electrode and an inner electrode. The outer electrode defines an inner volume and is configured to receive injected electrons through at least one aperture. The inner electrode positioned in the inner vol...  
WO/2019/007768A1
The invention relates to pressure transfer device, system comprising the pressure transfer device, a fleet comprising the system and use of a pressure transfer device for pumping fluid at pressures above 500 bars, the pressure transfer d...  
WO/2019/007093A1
Provided is a low-temperature pump, comprising: a pump housing, the pump housing comprising a suction port; a cold head, the cold head being located in the pump housing; a shielding member, the shielding member being located in the pump ...  
WO/2018/235661A1
This cryogenic pump 10 is provided with: a first-stage cryopanel 18; a second-stage cryopanel 19; a freezing machine 16 which is thermally coupled to the first-stage cryopanel 18 and the second-stage cryopanel 19 so as to cool the first-...  
WO/2018/188828A1
A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate, comprising at least one housing comprising at least one internal wall, at least one optical component arranged within at least one chamber ...  
WO/2018/181975A1
In this reciprocating booster compressor, the interior of a crank case, which accommodates a crank mechanism, is divided by a dividing wall into a first space and a second space. At least one of the first space and the second space is pr...  
WO/2018/162358A1
Systems and methods are provided for evacuating a chamber (101). The evacuation system comprises a cooler (320) coupled with the chamber and a controller (350). The controller is configured to determine whether a property of the cooler o...  
WO/2018/164011A1
The cryopump 10 is provided with: a freezer 16 comprising a room-temperature part, a first cooling stage, and a second cooling stage; and a cryopump housing 70 comprising a radiation shield thermally coupled to the first cooling stage an...  
WO/2018/150911A1
[Problem] To provide a controller and a vacuum pump device, which have less vibration, are compact and of low cost, and are configured to enable the heat of a control circuit contained in the controller to be efficiently removed. [Soluti...  
WO/2018/147180A1
A cryopump (10) is equipped with: a refrigerator (16) that is equipped with a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield (30) that is thermally coupled to the high-temperature cooling stage and...  
WO/2018/147179A1
Provided is a compressor unit comprising: a flow control valve for controlling the flow rate of a bypass piping in accordance with a valve command signal; a compressor inverter (170); and a compressor controller (168). The range of value...  
WO/2018/147181A1
A cryopump (10) is equipped with: a refrigerator (16) that is equipped with a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield (30) that is thermally coupled to the high-temperature cooling stage and...  
WO/2018/147187A1
A low-temperature cryopanel part of this cryopump is provided with two cryopanel members (62) disposed on both sides of a low-temperature cooling stage with a cryopump center axis therebetween. Each of the cryopanel members (62) is provi...  
WO/2018/135412A1
[Problem] The present invention addresses the problem of providing a vacuum pump device, whereby the thickness, weight, and size of a vacuum pump control device can be reduced, and cost can be reduced. [Solution] A vacuum pump device (10...  
WO/2018/127293A1
Herein an electro hydro dynamic (EHD) apparatus (2) is disclosed. The EHD apparatus comprises a first electrode (4) and a second electrode (6). The second electrode (6) is arranged above the first electrode (4) at a predetermined distanc...  
WO/2018/104719A1
An improved cooling arrangement for a vacuum pump motor and control is provided; wherein both the motor and control are provided with cooling mechanisms and housed in respective housings connected by at least one opening. The cooling mec...  
WO/2018/100342A1
A vacuum pumping arrangement (10), for use in a semiconductor fabrication assembly, comprises a first pump (12) which has a first inlet (14) and a first outlet (16). The first inlet (14) is fluidly connected to a first common pumping lin...  
WO/2018/099710A1
A processing chamber (10) is connected to a lock chamber (12). A vacuum pump system is provided for evacuating the lock chamber (12) and/or the processing chamber (10). Said system comprises a vacuum pump device (18) comprising at least ...  
WO/2018/100440A1
Vacuum insulated glasses with activationless getters on the basis of Ba, Ca, Li, Mg, Na and Sr alloys, taken in ratios, where each component of the getter alloy reacts with active gases continuously and to the end are provided. The gette...  
WO/2018/097325A1
Provided are a component and a container, which are coated with a non-evaporative getter, the component and the container being characterized by including: a non-evaporative getter material layer containing a total of 20 mole% or less of...  
WO/2018/090048A1
A trap system adapted to trap polyimide or other vapors exiting from a process chamber. The vapors are routed from the process chamber through a heated exit line at low pressure and then cooled, resulting in condensation at a selected lo...  
WO/2018/074191A1
[Problem] To provide a vacuum pump for which on-site maintenance work is improved, and the infiltration of water into a connector connecting part can be prevented when a cover is removed during circuit disassembly or the like, and also t...  
WO/2018/055277A1
The invention relates to a hydrogen compressor (10) with metal hydride comprising: a pressure chamber (20), comprising an inner space, defined by a first inner surface (21); a shell (70) with a thickness E, the shell (70) comprising a fi...  
WO/2018/055780A1
[Problem] To provide a fluid-drawing unit, etc., for drawing in and discharging a byproduct powder generated inside a vacuum pump, etc. [Solution] A fluid-drawing unit 1 is provided with a cylindrical body 10 that is open at both ends an...  
WO/2018/020731A1
In this vacuum pump (motor with crank mechanism), a rotor and a crank part are assembled so that the rotor is set in an initial position when a moving member has moved to a prescribed position in the crankcase due to stoppage of rotation...  
WO/2018/010767A1
An evacuation system for evacuating a chamber comprises a pump arrangement including a main pump (1 ) of a first evacuation capacity and a backing pump (2) of a second evacuation capacity connected to the main pump by a pump connecting l...  
WO/2018/007302A1
The invention relates to a method for controlling a vacuum pump in the vacuum supply of a motor vehicle with an oil supply for lubrication by a drive motor, wherein the vacuum pump is operated electrically and is connected to a controlle...  
WO/2017/217667A1
Disclosed is an embedded packaging device embedded and installed in an installation target and packaging by sucking through a vacuum hole in a zipper bag having a zipper and the vacuum hole. Such an embedded vacuum packaging device compr...  
WO/2017/207706A1
The invention relates to a vacuum device, in particular a vacuum pump, sensor, measuring device, or valve, comprising at least one component having a portion which, during operation of the vacuum device, is in contact with a vacuum and w...  
WO/2017/203416A1
High pressure injection apparatus 2 for addition of a liquid formulation into a polymer melt stream at position 4 comprises pump assembly 6 upstream of an injector assembly 8. Pump assembly 6 is arranged to increase the pressure of the l...  
WO/2017/165338A1
An apparatus for consuming gases includes an electrochemical cell comprising a cathode, an anode, and an electrolyte. The cell is operable to produce an electrochemical reaction that forms on the cathode a reactive material comprising at...  

Matches 1 - 50 out of 5,166