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JP7336392B2 |
A vacuum pump and a stator column which relax a pressure difference generated in an exhaust path and can allow a purge gas to flow as uniformly as possible are provided.Partition walls from an outer peripheral surface of a stator column ...
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JP2023116394A |
To provide a vacuum pump facilitating positioning of a magnet even when a suction port is formed on a lateral face of a housing.In a vacuum pump 1, a housing part 2 has a suction port P11 formed on a lateral face portion 13. A magnetic b...
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JP2023116377A |
To generate data for predicting the possibility of failure of a vacuum pump.A failure prediction device 10 comprises a storage unit 101 and a control unit 102. The control unit 102 acquires, from a plurality of vacuum pumps 1, an abnorma...
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JP7327132B2 |
To provide a vacuum pump which is improved in the cooling efficiency of a bearing, and elongated in a lubrication life of the bearing.A bearing 50 is accommodated in an internal space 11 of a base 10, and a shaft 40 is rotatably supporte...
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JP7327183B2 |
To provide a turbo molecular pump that can reduce deposition of a product on rotor blades.The turbo molecular pump comprises: a pump rotor 2 in which a plurality of stages of rotor blades 20a-20d and a cylindrical rotor 21 are formed; a ...
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JP7327229B2 |
To provide a protection net which can prevent falling of objects and achieve vacuum performance.A protection net 5 is provided at a connection part between exhaust chambers of a mass spectroscope and a turbo molecular pump connected to t...
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JP2023111002A |
To restrain loss of a function of protecting a rotating body.A first composite bearing 10A and a second composite bearing 10B each comprise a magnetic bearing 20 rotatably supporting a rotating shaft 2 in a non-contact manner by a magnet...
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JP2023106779A |
To correct deviation of a gravity center position of a rotor from a rotation center.A vacuum pump 1 includes a housing 2 and a rotor 4. The rotor 4 is arranged on an inner peripheral side of the housing 2 and is rotary driven and has a f...
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JP7311556B2 |
To provide a rotor assembly for a vacuum pump capable of easily improving strength of the rotor assembly against disassembly.A rotor assembly for a vacuum pump comprises a rotor body 15. The rotor body rotates around a rotation axis 13 w...
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JP7308773B2 |
A rotating device and a vacuum pump are provided, having a structure in which a refrigerant or the like does not leak out to an inside and which can sufficiently cool a rotating body, obtain high reliability, and realize cost reduction. ...
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JP7306878B2 |
A main-body casing having an inlet port or an outlet port, a rotatable rotor shaft, and a rotor coupled to the rotor shaft are provided. A recess portion opened toward the inlet port is formed in the rotor and a fastening portion (a firs...
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JP7306845B2 |
The present disclosure provides a vacuum pump of which a thermal resistance between a heater and a water-cooling tube is high and which has a small number of components. The vacuum pump includes: a main body casing having an intake porti...
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JP7306846B2 |
To provide a stator that can ensure the degree of freedom of arrangement of two components arranged on both sides of the stator in the axial direction, and can locate these two components.An insulator 34 of a stator 9 includes a first co...
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JP7305646B2 |
A magnetic shield 2 for a vacuum pump 1, which encloses a portion of the pump such that external magnetic fields do not have an effect on the pump within the shield. There will be a longitudinally extending circumferential channel betwee...
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JP2023086079A |
To certainly execute automatic recognition of an accessory during the operation of a vacuum pump, even if different kinds of signals, especially analog signals or digital signals can be supplied to an interface of a vacuum pump.A vacuum ...
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JP7294119B2 |
To provide a vacuum pump capable of miniaturizing a regenerative brake resistor to reduce a power supply device in size.A vacuum pump includes a pump main body that has a rotor, a stator, a motor for driving the rotor, and a casing for a...
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JP2023084457A |
To provide a vacuum pump which is high in reflection accuracy of a gas molecule at each layer.A vacuum pump comprises a blade exhaust mechanism for exhausting gas by a fixed blade and a rotating blade 102, at least one of the rotating bl...
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JP7292881B2 |
To provide a vacuum pump capable of not only preventing damage to a rotating body thereof by preventing overheating of the rotating body, but also exhausting a large amount of gas continuously.In response to the rotation of a rotor shaft...
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JP2023083773A |
To provide a vacuum pump that makes temperature distribution in a circumferential direction of a stator uniform, which forms an exhaust part for evacuating a gas by cooperating with a rotor, and suppresses deposition of gas molecules in ...
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JP2023525086A |
An apparatus and method for monitoring deposits of reaction byproducts. A device (200) for monitoring deposits of reaction by-products in an exhaust passage (7) of a vacuum pump (1; 100), which is arranged upstream in the direction of ga...
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JP2023081875A |
To provide a vacuum pump having a high shaft supporting ability.An axial magnetic bearing 110 has a magnetic path separation structure. The axial magnetic bearing 110 has yokes 212A, 212B, coil parts 213A, 213B for generating magnetism i...
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JP2023081877A |
To provide a vacuum pump having a high shaft supporting ability.An axial magnetic bearing 110 has a magnetic path separation structure. A control device for controlling the axial magnetic bearing 110 includes a current storage part for s...
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JP2023081876A |
To provide a vacuum pump having a high shaft supporting ability.An axial magnetic bearing 110 has a magnetic path separation structure. The axial magnetic bearing 110 has yokes 212A, 212B, coil parts 213A, 213B for generating magnetism i...
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JP7289627B2 |
A vacuum pump that is small in height (length) is configured to bring a rotating body and a protective net as close to each other as possible by causing the rotating body to actively support the protective net. The vacuum pump is provide...
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JP2023079565A |
To prevent looseness of a bolt caused by heat stress occurring due to a difference of linear expansion coefficients of multiple components.In a vacuum pump 100 according to an embodiment of the invention, when a heated component (a faste...
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JP2023078905A |
To propose a vacuum pump capable of grasping noise resistance or the like of a master circuit and a slave circuit for controlling operation of each of sections contained in the vacuum pump, and a control device used in such the vacuum pu...
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JP7288436B2 |
The present invention provides bearing cage retainer for a rolling element rotor bearing in a vacuum pump. The bearing cage retainer being configured to have an operational arrangement in which, at the maximum longitudinal axial displace...
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JP2023075636A |
To provide a vacuum pump that is improved in rigidity and heat insulation effect of a heat insulation part to facilitate a user to manage temperature of internal components of a pump as intended, and to provide a heat insulation member u...
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JP7281964B2 |
To provide a vacuum pump which can properly determine a failure of the pump, and its rough operation method.This vacuum pump comprises a pump main body, a motor, a drive circuit, and a control part. The pump main body has a rotating shaf...
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JP7280911B2 |
To provide a method of manufacturing an electric motor or vacuum equipment comprising the electric motor, a turbo molecular pump in particular, so as to reduce vibration during operation of the electric motor or the vacuum equipment.A me...
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JP2023067727A |
To provide a vacuum pump that allows the optimum possible utilization of the performance thereof, while at the same time increasing the safety for personnel working in the area of the vacuum pump or for systems present in the area of the...
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JP7273751B2 |
To provide a braking method for a sensorless permanent magnet synchronous motor that can quickly stop after a motor or a pump is switched off.For braking in the case of an open control circuit, a permanent magnet synchronous motor is con...
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JP7273712B2 |
Infra-red sensors are often used in turbo molecular pumps to detect the temperature of the rotor or other mechanical parts and therefore indicate imminent, or potential, running failures. As deposits build up on either the infra-red sens...
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JP2023517050A |
A flanged vacuum pump, a vacuum system, and a method of attaching a vacuum pump to a vacuum chamber are disclosed. Vacuum pump (10) includes inlet flanges (12) and (42) for receiving a plurality of protruding securing elements (22) exten...
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JP7259675B2 |
To provide a magnetic levitation type vacuum pump that can be reduced in cost while restraining a decrease in bearing controllability.A bearing control unit 31 comprises a plurality of CPU cores (CPU 1 and CPU 2), and the CPU 1 and the C...
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JP2023055922A |
To provide a double-inversion type fan having a large air volume.A double-inversion type fan comprises: a first fan having a first impeller, a first motor part for rotating the first impeller around a center shaft, and a first case for s...
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JP2023050066A |
To provide a vacuum pump with improved back pressure characteristics during a large-flow-rate exhaust.A vacuum pump 1 comprises a housing 2, a rotor cylindrical part 23 and a stator cylindrical part 6. The housing 2 has a suction port 14...
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JP2023514643A |
A method of operating a vacuum system comprising at least a first vacuum pump and a second vacuum pump, wherein the first vacuum pump and the second vacuum pump are connected to a vacuum chamber to maintain a set pressure within the vacu...
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JP7252990B2 |
To easily and accurately affect an exhaust speed of a molecular vacuum pump at a specific position of a flow channel of the molecular vacuum pump.In a method for exerting influence on an exhaust speed of a molecular vacuum pump 250, 280,...
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JP2023513322A |
An axial vacuum pump for evacuating a chamber in a semiconductor manufacturing process includes a rotor having a plurality of rotor blades and a stator having a plurality of stator blades, the rotor blades and stator blades having curved...
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JP7247824B2 |
To provide an exhaust system which can prevent interference between a driving part of a vacuum valve and a vacuum pump and achieve a high flow rate while inhibiting increase in the size of the exhaust system.An exhaust system includes: a...
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JP7244328B2 |
The present invention provides a vacuum pump and a control apparatus of the vacuum pump which inexpensively realizes a structure that is less likely to be infiltrated by water droplets without using a sealing material and which is equipp...
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JP7244236B2 |
The present invention addresses the problem of stress concentration in a rotor core and/or the interior of an end ring. According to one embodiment, a rotor for an outer-rotor type motor comprises: a rotor core having a substantially cyl...
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JP7242321B2 |
Provided are a vacuum pump and a control device for a vacuum pump capable of accurately determining timing of rotor blade replacement by creating an index which allows a degree of fatigue of a rotor blade to be determined quantitatively ...
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JP7239510B2 |
To provide a vacuum pump configured to early detect imminent damage, ideally before the vacuum pump actually fails.The present invention relates to a vacuum pump, in particular a turbo molecular pump, comprising: at least one pumping sta...
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JP2023035884A |
To provide a magnetic bearing device which is capable of recovering from an abnormal state of oscillation etc., with high operation efficiency and safely in a levitation system using a magnetic bearing, reduces erroneous detection of abn...
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JP2023032614A |
To restrain a temperature rise of a rotor.A vacuum pump 1 comprises a stator 5, a rotor 4, and a base 3. The rotor 4 guides gas to be exhausted, to the outside of the vacuum pump 1 from an exhaust space S3 by being arranged on an inner p...
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JP2023509204A |
A vacuum pump, vacuum pump set and method for evacuating a semiconductor processing chamber are disclosed. A vacuum pump is attached to the semiconductor processing chamber and pumps the vacuum chamber to 1 mbar and 5X10-2Configured to v...
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JP2023509206A |
The vacuum pump (10) comprises a rotor (35) rotatably mounted within a stator having a plurality of angled blades arranged along a helical path from an inlet (26) to an outlet (28). (30) and the stator comprises a plurality of perforated...
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JP2023026633A |
To accurately estimate an accumulation state of deposit.A vacuum pump includes: a vacuum meter 110 for detecting gas pressure in a gas flow passage through which a gas taken from a suction port flows to an exhaust port 65; and an estimat...
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