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Patent Searching and Data


Matches 251 - 300 out of 5,121

Document Document Title
WO/2013/164571A3
A method for warming up a vacuum pump arrangement having a booster pump and a backing pump downstream of the booster pump for evacuating a process chamber includes setting the booster pump at a first speed higher than an idle speed of th...  
WO/2013/180538A1
Disclosed is a turbo compression system comprising: a first impeller which has a first intake port and a first discharge port, and which compresses a fluid flowing into the first intake port by using a rotational motion such that the flu...  
WO/2013/179749A1
[Abstract] To provide an IPM motor for a vacuum pump which is suitable as the motor for a small vacuum pump. [Problem] An IPM motor for a vacuum pump includes a rotor core into which a rotor shaft for a vacuum pump is pressed and a magne...  
WO/2013/032923A3
An axial fan assembly includes a hub (12,14), a plurality of connection structures (40), and a plurality of isolated members (48). The hub (12,14) is rotatable about an axis of rotation (18) and includes a radially extending face (24) an...  
WO/2013/171454A1
A method for adjusting operating parameters of a vacuum pump arrangement includes determining characteristics of a gas flowing through the vacuum pump arrangement; and setting operating parameters of the vacuum pump arrangement based on ...  
WO/2013/164571A2
A method for warming up a vacuum pump arrangement having a booster pump and a backing pump downstream of the booster pump for evacuating a process chamber includes setting the booster pump at a first speed higher than an idle speed of th...  
WO/2013/160432A1
A generator system that includes an engine and an alternator which is driven by the engine to generate electrical power. A radiator is connected to the engine and an axial fan directs air toward the radiator to cool the radiator. A plura...  
WO/2013/161399A1
Provided is a deposit detection device for an exhaust pump which can be implemented easily without generating burdens such as the installation of equipment for circulating a gas or the addition of or changing of a device operating mode. ...  
WO/2013/151015A1
A vibration suppression mechanism (50) is interposed between a ball bearing (8) and the support part (2a) of a base (2). The vibration suppression mechanism (50) is equipped with multiple stacked sliding members (51, 52) and an elastic b...  
WO/2013/110936A3
An improved vacuum pump mechanism (10) is described in which an intersecting solid or perforated element (14) is arranged to intersect a channel (12) member. Relative movement of the intersecting solid or perforated element and channel m...  
WO/2013/142121A1
A pump with magnetically-levitated rotor includes a position sensor having an eddy-current sensor coil that operates as a resonating element in a low frequency oscillator located within the pump housing. The oscillator is operably interc...  
WO/2013/131911A1
The present invention relates to a pumping unit (IP) comprising at least one first positive-displacement machine (10) and one second positive-displacement machine (20), as well as a control module (MC), in which unit a gas (G) is dischar...  
WO/2013/125080A1
In the variable stator blade drive device of the axial flow machine according to the present invention, a ring support mechanism (40), which supports a movable ring (31), is provided with: first rollers (41); first support sections (44),...  
WO/2013/107667A1
A turbomolecular pump has a rotor element (18) in a housing (16). The rotor element (18) is arranged on a rotor shaft (10). The rotor shaft (10) is supported by two bearing elements (12, 14) in the housing (16). The bearing element (12) ...  
WO/2013/103095A1
An electromagnet has a core with a pair of magnetic poles, a primary coil wound around the core, and a series circuit of a first auxiliary coil wound around the first magnetic pole of the core, a second auxiliary coil wound around the se...  
WO/2013/098178A1
The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrica...  
WO/2013/083000A1
Disclosed is a method of dynamic balance for a magnetic levitation molecular pump involving starting a force-unrestrained imbalance vibration control module after actuating the magnetic levitation molecular pump motor (8). If under the c...  
WO/2013/082998A1
A method for synchronously suppressing the subcritical vibration of a magnetic suspension molecular pump rotor. The amplitude, frequency and phase of rotor subcritical vibration is obtained by synchronously sampling a rotor subcritical v...  
WO/2013/082999A1
Disclosed is a method of dynamic balance for a magnetic levitation molecular pump involving starting a force controlled imbalance vibration control module after actuating a magnetic levitation molecular pump electric motor (8). If under ...  
WO/2013/081019A1
Provided is a vacuum pump that is capable of sufficiently reducing a gap between a fiber-reinforced plastic rotating cylinder and a fixed cylinder by reducing strain on the rotating cylinder as much as possible, thereby improving exhaust...  
WO/2013/073141A1
This axial blower (18) is equipped with a rotary shaft (9), a propeller fan (8), a squirrel cage rotor (3), and a stator. The propeller fan (8) is connected to at least one end of the rotary shaft (9). The squirrel cage rotor (3) is inte...  
WO/2013/065440A1
Provided is a stationary member which promotes thermal radiation from the surface and thermal conduction to adjacent members; also provided is a vacuum pump containing this stationary member. In order to increase the heat radiation of a ...  
WO/2013/057272A1
The invention relates to a gas pumping and treatment device comprising a stator (5) including a plurality of pumping stages (6, 7, 8, 9, 10) connected in series one after another between an intake (11) and a discharge (12) by inter-stage...  
WO/2013/020167A1
A blower includes a housing including an inlet and an outlet, a motor to drive a rotatable shaft, first and second impellers provided to the shaft, the first and second impellers each including a plurality of impeller blades, a first sta...  
WO/2013/008519A1
Provided is a thread groove vacuum pump with increased exhaust velocity such that exhaust performance can be improved. A casing (11) with an inlet port (12) and an exhaust port (13) houses: a rotor shaft (14) rotatably supported on an ax...  
WO/2013/001982A1
An objective of this invention is to provide a cylindrical body formed from FRP with improved corrosion resistance, and a vacuum pump enclosing the cylindrical body with an extended life span through quality improvement of an anti-corros...  
WO/2012/172851A1
[Problem] To provide: a vacuum pump capable of minimizing a gap provided between a rotating cylindrical member and a fixed member surrounding the outer periphery thereof, and favorably improving the pump performance through minimization ...  
WO/2012/172990A1
The purpose is to provide: a cylindrical body having a load change damping structure for damping the load change in a boundary section between a rotor and a cylindrical rotating part; and a vacuum pump having improved rotating performanc...  
WO/2012/172307A1
A method and apparatus for reducing undesirable noise generated by a vacuum pumping system is disclosed. The vacuum system operates to reduce the pressure in chamber to a first pressure value. The system then detects that the pressure at...  
WO/2012/165105A1
The purpose of the present invention is to provide a vacuum pump that can be assembled without the application of vacuum grease and that can achieve appropriate surface sealing. A tolerance and thermal deformation absorbing structure, in...  
WO/2012/166564A1
A supersonic compressor rotor. The supersonic compressor rotor includes a substantially cylindrical disk body (56) that includes an upstream surface (68), a downstream surface (70), and a radially outer surface (66) that extends generall...  
WO/2012/140406A1
To overcome the problem associated with liquid or solid process debris from a vacuum process system falling into, and contaminating or damaging, a vacuum pumping arrangement used to evacuate the system, the inlet of the vacuum pumping ar...  
WO/2012/119753A1
Conventional turbo compressors for internal combustion engines are driven by a mechanical connection. Compression of the intake air takes place downstream of the air filter. The solution according to the invention relates to an axial unt...  
WO/2012/121383A1
A power supply device for a vacuum pump, equipped with: cooling piping for circulating a cooling medium; a temperature sensor that detects the temperature of the cooling piping; a valve that adjusts the amount of cooling medium circulati...  
WO/2012/093777A3
The present invention pertains to a quick-release vacuum pump, which is designed to quickly release a vacuum and negative pressure formed by a device. The vacuum pump according to the present invention includes a release section and a fi...  
WO/2012/114862A1
The present invention is a bolt fastening structure for a turbomolecular pump, for which a first member is fastened in the axial direction with respect to a second member by means of multiple bolts arranged concentrically with respect to...  
WO/2012/110384A1
Bearing arrangement for rapidly rotating shafts of vacuum pumps, in particular turbomolecular pumps, having two bearing elements (12) which mount the shaft (10). At least one of the two bearing elements (12) has a bearing (16) having a b...  
WO/2012/110378A1
A stator element for a high-vacuum pump is arranged downstream of the last rotor element in the pumping direction (26). The stator element has a housing element (28), which is connected to a housing (12) of the high-vacuum pump. A plural...  
WO/2012/108087A1
The purpose of the present invention is to provide a vacuum pump in which a stator column is not required to be individually manufactured. A spacer provided with: a first temperature sensor head including a temperature sensor for tempera...  
WO/2012/105116A1
[Problem] To provide a rotating body of a vacuum pump suitable for obtaining highly reliable vacuum pump that attains improvement of discharge performance and improvement of the gas flow rate in which gas is capable of continuously disch...  
WO/2012/104387A1
A leakage search device has a backing pump connected to a test chamber (42) via a test gas line (48). Furthermore provided is a high-vacuum pump (10), at the inlet (36) of which a test gas detector (38) is arranged. The outlet (34) is co...  
WO/2012/093777A2
The present invention pertains to a quick-release vacuum pump, which is designed to quickly release a vacuum and negative pressure formed by a device. The vacuum pump according to the present invention includes a release section and a fi...  
WO/2012/091216A1
According to an embodiment of the present invention, a method for fluid stabilization control of an axial flow compressor comprises the steps of: a driving step for driving an axial flow impeller; and a stall control step for suppressing...  
WO/2012/081726A1
A vacuum pump is provided with a rotor which rotates to perform evacuation, a pump disassembly detection circuit which detects a disassembly state in which the vacuum pump is disassembled, and a pump operation prohibition circuit which p...  
WO/2012/081287A1
[Problem] The purpose is to provide a fixed blade assembly suitable for improving exhaust performance by reducing exhaust time, and an exhaust pump provided with the same. [Solution] Multiple fixed blades (14) each have inner and outer f...  
WO/2012/077411A1
The purpose of the present invention is to extend the period until accumulated products come into contact with a rotation part or a fixed part. In a rotary vane tubular part or fixed part in which a screw groove is formed, the projection...  
WO/2012/074099A1
[Problem] To provide an evacuation apparatus control method and an evacuation apparatus control apparatus capable of wide-range pressure control even when the flow rate of gas is changed in a wide range. [Solution] A method for controlli...  
WO/2012/070278A1
[Problem] Provided is a magnetic bearing control device which specifies the range of motion of an eddy current gap sensor constituting a magnetic bearing and the center thereof to enable a rotor shaft or another shaft to be controlled, w...  
WO/2012/070282A1
[Problem] A protective mesh is configured in such a manner that the protective mesh is reduced in cost by forming the protective mesh in a single piece having required strength, that the protective mesh can be attached to an affixation g...  
WO/2012/066715A1
Provided is a leak detector with strong detection sensitivity and usability which allows commencing a leak test rapidly after commencing evacuating the probe without impairing a function of also having a rapid speed of reaction with heli...  

Matches 251 - 300 out of 5,121