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JP3297755 |
PURPOSE: To obtain a microscopic rotating mechanism of a structure, wherein a rotator does never make a frictional contact with a rotating shaft not only in the axial direction but also in the radial direction at the time of stable rotat...
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JP2002081401 |
To reduce valve opening pressure on the high pressure side against the low pressure side of a shuttle valve assembly in a fluid pressure device.In this fluid pressure device, a shuttle bore 35 is formed in a housing having high pressure ...
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JP2002039439 |
To provide a connecting structure capable of being easily and surely demounted.A ring or a joint 3 having the toroidal shape or the other shape, and an end of a tube 1 integrated with an external flange 2 are included in a recessed part ...
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JP3273109 |
PURPOSE: To provide a method for carrying out feed back control so as not to cause control error by change in temperature when lifting and lowering control of reaping pretreating apparatus in a general purpose combine is carried out by p...
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JP2002022045 |
To provide a compact valve device capable of relieving the mechanical stress.At least one oscillation control rocker member 12 acting for controlling at least one fluid duct openings 25a and 25b, and movable between two terminal position...
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JP3247132 |
PURPOSE: To provide a fluid element with a simple structure having a high responsiveness for changing over a flow path. CONSTITUTION: At least a pair of fluid discharging means 12, 13 disposed opposedly to each other and coaxially with t...
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JP2001271946 |
To provide a fluid control valve operated by a low-energy signal and effectively operating in a wide range of pressure and flow conditions, especially to provide a flow control valve suitably used for make-up fluid feed system for a batt...
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JP2001269602 |
To provide a quick disconnect spray nozzle assembly having a nozzle body connectable to a liquid supply source and a removable and replaceable spray nozzle chip. The spray nozzle chip 12 supports a tubular sealing/bias member 14 attached...
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JP3196086 |
PURPOSE: To give a proportional action characteristic to a vortex element and enlarge the applied range of the vortex element by providing in a vortex chamber means to weaken the strength of a turning current in the case of the vortex el...
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JP3198049 |
To stably discharge a fluid in the straightened form along a circumferential surface in a fluid straightener by mounting a straightener type constant flow water saving valve device to a fluid discharging terminal end. After a spherical v...
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JP2001138298 |
To provide a MEMS thermal actuator. On a microelectronic board 14 a synthetic beam 12 in the form of cantilever is provided extending along the surface of the board, and the base end of the synthetic beam 12 is attached to the board 14 t...
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JP2001124014 |
To provide micromachining sensor module mounting structure capable of further miniaturize a micromachining sensor module and its manufacturing method. In this micromachining sensor module mounting structure comprising a microvalve 1 to c...
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JP2001116159 |
To provide a small micro-electromechanical valve having a good efficiency of operating energy. A pair of supports 22 are arranged with a gap therebetween on a substrate 50. A single-crystal arched beam 24 is extended between the supports...
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JP2001059602 |
To control instability of combustion positively under a simple and functionally little precondition by employing a fluidic method for modulating fuel supply. A premixing burner 17 in a combustion system 10 is constituted as a double cone...
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JP2001050214 |
To provide a fluid switching element utilizing fluid switching effect called Coanda effect. This fluid switching element 10 is provided with an inlet 11 for fluid, two outlets 13, 14 regulated by a passage branch part 12 for branching fl...
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JP3160091 |
PURPOSE: To prevent perpetual deformation and disfunction of a bending element of a piezo valve that can be cause by a long period voltage application. CONSTITUTION: For a piezo valve 1 the sealable surface of the seat 13 of the controll...
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JP3147938 |
PURPOSE: To provide a liquid outflow control valve of low price and small power consumption by fixing both ends of a beam opening/closing a through hole by curving according to change of temperature on a base plate formed with the throug...
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JP3144698 |
PURPOSE: To provide a pump device using a micro-production technology and having excellent responsiveness and an accurate fluid supply characteristic by periodically deflecting a diaphragm by a heating means for periodically opening/clos...
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JP2000259257 |
To solve operational instability such as the fluctuation, vibration and noise of secondary side pressure by providing a flame-shaped part having an opposite surface to a valve seat surface provided in an orifice, projectingly outward per...
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JP2000249112 |
To form an etching thin plate layer and facilitate an integral assembling of a module having fluid-element, electrical, and mechanical components by executing a material removal treatment to each thin plate member and mutually attaching ...
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JP2000114547 |
To provide a molten wafer micro machining process.A micro machining of micro electric/machine structure requires at least one heavily doped silicon layer. A complex-patterned structure is made in a surface layer which is heavily doped on...
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JP3048860 |
PURPOSE: To prevent an alumina substrate from cracking due to shrinkage at the time of curing of an insulating resin in a high-tension variable resistor. CONSTITUTION: An alumina substrate 5, to which a connection terminal 8 forming a de...
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JP3039583 |
PURPOSE: To provide a gas valve for a semiconductor manufacturing device which is suitable for forming a semiconductor thin film precisely at a high speed. CONSTITUTION: A metallic film 1 having one or more movable inflectional surfaces ...
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JP11344147 |
To improve responsiveness to a feedback signal. An electropeneumatic proportional pressure difference control valve is operated for making the pressure difference between two signal pressure ports A and B approach a target value. In such...
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JP11223538 |
To provide a mass flow controller flow rate detecting system in which the flow rate measuring efficiency of the mass flow controller can be improved. This mass flow controller flow rate testing system is provided with a plurality of proc...
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JP11159650 |
To provide a regulating valve of fluid whereby adjustment of a large flow amount, high speed, and high accuracy can be performed in good repeatability. This regulating valve is provided with a nozzle plate 12 having 36 pieces/square inch...
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JP11153606 |
To provide the buret chip for liquid titration which is hardly mechanically damaged, simple, and economically manufactured. The buret chip 1 for measuring a titrant consists essentially of a film 2 and a buret main body 10 having a seat ...
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JP11047641 |
To provide a nozzle assembly for generating a fine spray of droplets suitable, for example, for giving medication by inhalation and a method of manufacturing such nozzle assembly with a filter. The method of manufacturing plural nozzle a...
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JP11022853 |
To increase the speed of switching action in a fluid operated valve switching method in which fluid passages are switched from one to another by use of a fluid operated valve such as a pneumatic valve. In a fluid operated valve switching...
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JP10301633 |
To provide a piping simple flow rate adjustment mechanism which attaches a plate body that forms a restriction to a piping path. A front side tube part 4 which is interfitted inside a piping element 3 and a back side tube part 5 inside w...
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JP10231814 |
To control flow and speed of fluid by changing volumetric magnetic susceptibility of the fluid in magnetic field inclination. A non-magnetic cylindrical body 2 is placed in air, and a magnetic field magnetic field strength of which decre...
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JP10196611 |
To directionally control (namely, switching control) an input flow three-dimensionally. In a multi-directional fluid switching element, a similar inner shell part 21b is arranged inside a pyramid-shaped outer shell part 21a, and a fluid ...
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JP10197067 |
To improve the responsiveness in controlling the flow rate by making a control so that the regulation of the passing degree of opening by a regulating means and the operation by an operating means. A control circuit is provided with a st...
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JP10184616 |
To continuously control the throughput of a fluid. A fluid control device is provided with a base 11 formed locally thin and provided with a diaphragm 11e, an opposed member 12 opposed to the base 11 so as to form passage space 17 for a ...
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JP10169826 |
To prevent any mistaken carriage of the object such as paper, and to improve the carrying accuracy by providing at least one laminate consisting of the dielectric base material impregnated in the resin, and providing a plurality of eleme...
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JP10169827 |
To facilitate the manufacture by forming first and second laminate layers of the dielectric base material impregnated in the resin, and arranging a second opening to be partially overlapped with a first opening in forming each opening to...
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JP10149220 |
To provide a pressure regulating device simple in structure, hardly clausing failure and capable of executing secure degassing and charging operation and easily varying governing pressure without the need for calibration by governing and...
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JP10141315 |
To provide an acceleration sensitive type servo valve capable of obtaining valve opening purely mechanically corresponding to the size of the acceleration acting upon a valve body. This valve 100 is provided in the interior of a valve bo...
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JP10116123 |
To provide the row and column bistable array which is controlled with reliable passive matrix addresses. The array includes cantilever bistable valves 10, which each have an opening 29 determined and have electrically conductive switchin...
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JP10095553 |
To provide a fluid carrying device and its method to move a flexible object without needing any physical contact. A valve housing 12 has an opening plate 18 for deciding an opening 16 and a plate 20 opposite thereto which is separately a...
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JP10091247 |
To set return pressure as high as possible in a range wherein a flow quantity is large and further to hold a pressure difference between a supply and a return part small, and then to minimize the noise generation of a pressure control va...
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JP10074728 |
To make it possible to realize a deep etching of 300μm or deeper in an Si single crystal substrate with good reproducibility and moreover, at a high yield by an anisotropic etching and to make it possible to contrive the enhancement of ...
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JP10038110 |
To minimize power consumption in the state of low flow/high sypplying pressure. The microminiature valve 10 has an actuator member 22 including a central main body 13 suspended over foot parts 26 and 27 which have a first and a second ma...
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JP10011147 |
To obtain the breaking and opening unit which is reduced in dead volume and also reduced in volume and weight by slanting a surface, where a valve actuator on the front end side of a valve main body is fitted, forward. Of the top surface...
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JP09273508 |
To provide a configuration necessary for a fluid speed increase tube for increasing current speed of the whole fluid by branching the current of the fluid into two and allowing one of the currents to flow in vortex and allowing the other...
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JP2708395 |
To allow easy manufacture and improve reliability by using a plurality of semiconductor substrates in construction, heating or cooling a material as a heating means for a second semiconductor substrate to control the deflection of a flex...
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JP2702648 |
PURPOSE: To reduce erosion of a control valve by providing a vortex valve which has a vortex chamber in the flow duct and providing another duct, which is extended up to the junction part of the flow duct, above the vortex valve. CONSTIT...
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JP09209911 |
To achieve compactness, and facilitate various actions including constant position holding by providing a pressure space in a movable body main body to contain pressure fluid, and controlling opening/closing of a jet port of this pressur...
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JP09209913 |
To achieve compactness and high output power by composing a heating control means to control a heating means in such a way that action of supplying liquid phase fluid to a movable body main body, and action of changing the fluid into a v...
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JP09196015 |
To provide a device and a method for generating a periodical impulse change in a flow of fluid without using a control valve or the like. In the fluid technology, there are many cases, which require a flow of the pulsating fluid to be co...
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