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JP2011241955 |
To provide a roll bearing method capable of exhibiting excellent characteristics of a rolling bearing and a static pressure bearing, namely, capable of exhibiting excellent characteristics of the rolling bearing in a load and rigidity, a...
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JP2011231760 |
To provide a magnetic levitation vacuum pump prevented from being reversely rotated during the start of rotation of a rotor without comprising a rotor rotating position detection function such as a Hall sensor.In this magnetic levitation...
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JP2011220919 |
To provide a vertical type balance measuring device that, even if a rotation axis of a thrust air bearing is vertically moved from the balance position thereof due to the influence by disturbance, allows the rotation axis to return to th...
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JP2011220291 |
To provide a method of effectively suppressing a dynamic thrust load that acts on a main shaft in a low flow region including the neighborhood of a cut-off point in a horizontal double suction pump configured to support a radial load by ...
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JP2011214605 |
To prevent water from entering a spindle assembly mounted on various equipment.The spindle assembly is configured so that spindle housing 21 is disposed with water/air separator 25 between air supply port 230 and air bearing communicatio...
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JP2011208724 |
To provide a static pressre journal bearing spindle having high rotating accuracy preventing transmission of the heat generated in a motor or the like to a rotating table on a side opposite to the motor through a spindle, preventing ther...
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JP2011202555 |
To provide a vacuum pump preventing the unstable generation of a high-level signal and a low-level signal during operation of the pump.This vacuum pump includes: a sensor target provided integrally with a rotor; an inductance type rotary...
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JP2011190837 |
To provide a vibration damping control mechanism capable of reducing or suppressing the swing or vibration of a superconducting magnetic bearing and magnetic levitation device by actively controlling the swing or the vibration.This vibra...
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JP2011185368 |
To provide a magnetic bearing device which maintains desired magnetic bearing characteristics even if weight of a floating body to be supported is changed, in a structure provided with an electromagnet and a permanent magnet for sandwich...
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JP2011185284 |
To reduce the running cost and energy consumption of a shape detecting device 1 having an air bearing structure 15.A plurality of jet holes 25 located in a load acting region FA includes a plurality of first inclined jet holes 25A inclin...
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JP2011185437 |
To provide a parallel slider device by pneumatic linear guides, eliminating deterioration of reproducibility of parallelism due to mutual influence of mechanical rigidity of a connecting part of the slider and air bearing rigidity of an ...
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JP2011179568 |
To provide a roll device whose cost can be lowered and which can reduce air consumption volume.The roll device 1 includes: a hollow roll body 2; a shaft body 4 inserted into the hollow of the roll body 2 with a gap 3 interposed therebetw...
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JP2011179577 |
To provide a cam follower which can reduce rotational friction, improve rotational speed, be used over a long period of time, and reduce running cost.The cam follower 1 includes: a hollow rolling element 2; a shaft body 4, which is inser...
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JP2011174496 |
To reduce access of heat from a heating value variation unit to a place where it is desired that thermal change is reduced.On the basis of a difference between temperatures of a second fluid measured by a first thermometer 16 and by a se...
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JP2011169424 |
To provide a pad type thrust bearing including a lift pump for reducing a starting torque while having a structure capable of easily preventing leakage of lubricating liquid, and a submerged motor and a vertical submerged motor pump usin...
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JP2011158021 |
To provide a magnetic levitation device in which a length of an air gap between a magnet unit and a levitating body is set large, and which reduces power consumption and prevents a position of the levitating body to disturbance in variou...
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JP2011158018 |
To provide a hydrostatic guide device which realizes the improvement of smooth movement with high precision.The device contains a bed 11 equipped with linearly extending guide rails 12a, 12b and a column bed 13 movable along the guide ra...
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JP2011149556 |
To provide a hydrostatic gas bearing having a high damping characteristic.A gas bearing section includes: a first bearing part formed between a thrust plane and a radial plane between a fixed bearing cylinder and a floating bush by passi...
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JP2011149500 |
To provide a high-precision hydrostatic bearing device, capable of preventing vibration by constituting an orifice, a ventilation groove or the like so that a laminar flow state can be maintained in the overall area of a ventilation pass...
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JP2011144712 |
To provide a turbo-molecular pump preventing electrical run-out while suppressing cost increase.The turbo-molecular pump includes a rotor 30 formed with multistage rotary blades 32, multistage stator blades 22 arranged alternately with t...
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JP2011144895 |
To provide an actuator hardly transmitting microvibration to an object mounted on a main bearing even when the main bearing is moved at high speed and suddenly accelerated or decelerated.The actuator includes: a driving pulley 1; a drive...
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JP2011140983 |
To provide a fluid bearing device for a rotary apparatus endurable against high rotation with a simple structure.This fluid bearing device includes a shaft hole member 1 having a bearing surface 1a of a predetermined width in the axial d...
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JP2011141022 |
To provide a scanner motor, capable of ensuring a long service life and safety performance even with ultra-high speed rotation.The scanner motor includes an axially supporting rotary shaft 140 which is rotatable, and a hollow cylindrical...
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JP2011133724 |
To easily remove dust on a surface plate by a simple structure in which, when a foreign substance is present on a counter face, the foreign substance is guided by a guide unit together with fluid ejected from a bearing face in a directio...
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JP2011131289 |
To provide a plane lapping/polishing machine in which fluid such as lubricating oil is ensured to flow to the bottom of a fluid bearing pan of a fluid bearing and also in the inner and outer circumferential direction, thereby preventing ...
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JP2011134946 |
To provide a stage apparatus which prevents a gap from being generated between a supporting means that supports the rear surface of a holding means for holding a substrate, and the rear surface, when adjusting the flatness of the substra...
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JP2011127699 |
To provide an air bearing enabling easy machining of a bearing body even when the bearing body is upsized or bearing bodies with various shapes other than a rectangular plate-like shape are used.The air bearing 2 includes the bearing bod...
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JP2011112068 |
To suppress the generation of vibrations at high speed rotation and maintain a stable state not only at rotation of a high speed rotor but also at a standstill.A rotor is formed by fixing a flywheel on a rotary main shaft to be mounted i...
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JP2011112144 |
To provide an air spindle having an improved thrust load capacity while holding desired accuracy.In the air spindle 1, a stator 3 as a thrust-direction air jetting means and a radial-direction air jetting means is fixed to a housing 2. T...
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JP2011106530 |
To provide a hydraulic feeding device of a high-precision processing machine which can pressure-feed a pressurized oil which is fed to a hydrostatic bearing or the like for performing high-accuracy machining without generating pulsation ...
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JP2011106502 |
To provide a static pressure gas bearing spindle capable of effectively reducing heat generation or heat transmission.The static pressure gas bearing spindle A includes: a static pressure gas bearing 3 rotatably supporting a main shaft 1...
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JP2011108983 |
To suppress reduction in productivity and adverse influences on exposure processing, and the like.An articulated arm device has a joint JT12, to which a pair of connection members AM11 and AM12 are rotatably connected on a prescribed axi...
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JP2011102642 |
To provide a bearing usable at high rotation speed and having a long life, the bearing being used in a vacuum environment not permissive of oil content.The rolling bearing 1 includes an inner ring 2, an outer ring 3, a plurality of rolli...
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JP2011099523 |
To provide a rotary encoder control type air spindle which does not generate a hunting phenomenon when a rotary motor stops.As pads 18, 19 contact a disk 13 fixed to a rotary shaft 3, vibration in the rotational direction of the rotary s...
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JP2011099463 |
To provide a static pressure fluid bearing device capable of improving machining accuracy by appropriately controlling the fluctuation of a thickness (an interval between two members) of a fluid flow-out layer to be generated when increa...
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JP2011099459 |
To increase the load capacity of a fluid bearing, and to reduce a flow rate of fluid required to operate the bearing.This fluid bearing device includes: a bearing hole 7, into which a shaft 50 is to be inserted; fluid flow-in holes 9 and...
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JP2011097802 |
To provide a flywheel storage device capable of improving electromagnetic characteristic and performing cold storage for a long period of time.The flywheel storage device with a superconductive magnetic bearing is equipped with a flywhee...
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JP2011085253 |
To provide a bearing device and the like bearing a main shaft with high static rigidity, suppressing the displacement of the main shaft in the radial direction and the like, thereby enabling highly precise assembling.Radial hydrostatic g...
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JP2011085223 |
To provide a triaxial active control type magnetic bearing device having good assembling property for allowing the insertion of a rotor into a stator after load connection or balance adjustment while suppressing the axial length of the r...
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JP2011085155 |
To provide a gas bearing having a simple structure and high damping property.A projecting face 6 is formed on a movable part 1 to which a bearing pad 2 is attached, and the projecting face 6 is opposed to a fixed part 4 via a minute gap ...
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JP2011080475 |
To provide a pump which can operate a delicate behavior fluid such as a blood and is efficient at liquid pressure and is efficient on power.The blood pump has a pump housing 110 for defining a pump chamber 112 having an inlet port 114 an...
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JP2011075018 |
To provide a magnetic bearing control device and method capable of stabilizing both of forward spinning components and backward spinning components, and capable of increasing attenuation in a plurality of frequency bands.The magnetic bea...
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JP2011075084 |
To improve use efficiency of a working fluid in a fluid bearing.The fluid bearing includes a pumping section 340 for supplying gas to a space 301 between a first member and a second member moving along the surface of the first member; an...
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JP2011073118 |
To provide a fluid holding device (a static pressure bearing and a static pressure guide) capable of restraining accuracy reduction in a moving body by a disturbance load of varying at a high speed.This fluid holding device includes disp...
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JP2011073072 |
To provide a fluid holding device (a static pressure bearing and a static pressure guide) capable of restraining accuracy reduction in a moving body by a disturbance load varying at a high speed.This fluid holding device includes displac...
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JP2011075072 |
To provide a fluid holding device (hydrostatic bearings and a hydrostatic guide) suppressing accuracy deterioration of a mobile body due to a disturbance load fluctuating at high speed.The fluid holding device includes displacement senso...
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JP2011069698 |
To provide a rotating power transmitting device having an excellent work efficiency and measuring belt tension more accurately, the rotating power transmitting device transmitting the rotating power to a spindle via a belt supported by a...
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JP2011062753 |
To provide a damage prevention function against collision in a machine tool for machining a workpiece by relatively moving a spindle device and the workpiece.A bearing 4 for carrying a spindle 2 is held by an outer ring case 5. The outer...
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JP2011066136 |
To provide a fail-safe mechanism having two stages of fail-safe operations in such a way that the inertial travel of a table in the case of the stop of a control means is checked by a spring reaction and that a hydrostatic bearing is gro...
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JP2011047512 |
To provide a static pressure gas bearing which comprises assembly parts and has a self-aligning function.The static pressure gas bearing 1 is composed of an inner cylindrical case 2 which is oppositely arranged to the outer circumference...
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