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JP2009250424 |
To provide a noncontact actuator capable of controlling the movement of a driven body with high accuracy regardless of a simple structure, and a control method thereof.A first noncontact linear actuator 10 which is provided to move a dri...
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JP2009243635 |
To provide a magnetic bearing device capable of carrying out favorable position control of a rotary shaft by preventing degradation of detection accuracy by a reluctance type displacement sensor.The magnetic bearing device is equipped wi...
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JP2009243729 |
To provide a small twin bulk head for rotating at high speed in a pulse tube refrigerator having a twin head mechanism having high temperature superconductive bulk bodies.A twin bulk head includes a cooling member 3 connected to a coolin...
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JP2009244124 |
To make a position sensor apparatus compact and improve the sensitivity of a position sensor in thrust directions.The position sensor apparatus is provided with stators and a rotor. The stators have four groups of teeth in each layered s...
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JP2009236178 |
To stop a travelling stage at a relatively high accuracy and to suppress fine vibration generated for the travelling stage and a fixed shaft body at a high accuracy.The travelling device is provided with: the fixed body extended in a dir...
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JP2009228842 |
To provide a repulsive magnetic bearing device capable of reliably exhibiting vibration damping effect by a ball balancer after passing through a dangerous speed.When restoring force F generated when a rotary body 30 rotates to an outer ...
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JP2009222069 |
To provide a magnetic bearing device for enabling the follow-up of the electromagnetic force of an electromagnet as part of a magnetic bearing to sharp axial load fluctuation.The magnetic bearing device uses rolling bearings 15, 16 and t...
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JP2009216200 |
To provide a static pressure gas bearing spindle having a differential exhaust sealing mechanism with enhanced sealing performance with suppressing increase in the device cost.The static pressure gas bearing spindle includes a rotary sha...
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JP2009216232 |
To provide a fluid bearing device having improved damping performance and controllability and being suitable for devices to be used in environment such as a clean room.The fluid bearing device includes a shaft 1, and a bearing 2 in no co...
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JP2009209958 |
To provide a magnetic bearing device capable of effectively damping vibration of a rotor when disturbance such as an earthquake is caused.A control means 20 is provided with a PID controller 22 for arithmetically operating an exciting cu...
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JP2009210033 |
To provide an air slider device capable of reducing the pressure loss of a pressurized air and suppressing the increase of the rate of flow and of a pressurized gas and its pressure.The air slider is furnished with a guide and has a stat...
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JP2009210295 |
To solve the problem wherein the controlling performance of a stage formed of thermal spray ceramic falls, since air leakage occurs due to pores or microcracks of a ceramic layer, and thus the stiffness of the stage cannot be ensured.A p...
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JP2009209962 |
To provide a fluid bearing capable of preventing stability from being decreased and unexpected behavior from occurring.The fluid bearing includes a first recess formed in a first surface of a first member, a second recess formed inside t...
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JP2009197942 |
To provide a gas bearing spindle capable of keeping rotation accuracy of a rotary shaft good.This gas bearing spindle comprises the rotary shaft 1, sleeves 3, 4, and a housing 2. The sleeve 3 is opposed to at least one part on a side of ...
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JP2009196029 |
To prevent deterioration of a cord and a tube connected to a spindle unit due to a high temperature of an ejected and already used air, in a spindle unit, with a rotary shaft supported by an air bearing.In a spindle unit 2, in which afte...
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JP2009197831 |
To provide a design method and a mechanism of a sphere levitation device for implementing a sphere levitation by an infinitesimal differential pressure and a minute flow rate compared with a conventional sphere levitation device.The desi...
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JP2009197943 |
To provide a gas bearing spindle which stably operates even if a rotating shaft rotates at high speed.The gas bearing spindle 1 is equipped with a rotating shaft 10 and a bearing sleeve 30. The bearing sleeve 30 is arranged in a manner o...
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JP2009192041 |
To provide a thrust force generation device which is easy to be assembled, and can reduce the number of components and shorten a length of a spindle, and provide an electromagnetic machine applying the thrust force generation device.A ra...
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JP2009194977 |
To provide a motor-integrated magnetic bearing device to suppress heat generation from a motor rotor and enhance the efficiency of a motor and to prevent burning of a coil when current is applied to a coil at an incorrect timing.Radial l...
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JP2009185926 |
To provide a static pressure gas bearing for a piston driving mechanism capable of precluding damage of a bearing sliding surface caused by impact in the radial direction.The piston driving mechanism 10 has a piston rod 12 and a housing ...
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JP2009180294 |
To reduce a cost in a dynamic pressure bearing motor and secure a dynamic pressure bearing section having highly accurately with stable strength without considering the bearing temperature when the motor is used.The dynamic pressure bear...
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JP2009174016 |
To provide a method capable of inexpensively producing a porous sintered compact for a lightweight air bearing, which uses aluminum powder having a density of about 1/3 that of copper or steel and a grain size of about 0.1 mm or alloy po...
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JP2009174646 |
To provide a magnetic bearing apparatus capable of realizing stable magnetic bearing control up to a high frequency area, by accurately detecting displacement of a rotating body up to the high frequency area.This magnetic bearing apparat...
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JP2009168072 |
To provide a bearing device, capable of reducing the number of components so as to lower the cost.The bearing device B is provided with an axial magnetic bearing 13 and a radial foil bearing 14, a rotary shaft S rotatably supported by th...
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JP2009150403 |
To provide a turbo vacuum pump improving exhaust performance by reducing a gap between a rotary blade and a stationary blade, accurately estimating temperature and thermal expansion quantity of a rotary shaft, and issuing warning or stop...
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JP2009144788 |
To provide a spindle assembly in which a spindle can rotate at high speed without increasing air supply volume.The spindle assembly includes a spindle housing with an air supply path, a spindle inserting hole formed in a center, and a pl...
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JP2009144922 |
To provide a thrust magnetic bearing adapted to thoroughly and singly receive axial force generated in an electric motor, and especially, preferably utilized for a spindle motor provided to a small disk drive device.This thrust magnetic ...
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JP2009133246 |
To reduce risk of interference of a piston and a cylinder.A high temperature-side cylinder 30H of a Sterling engine 100 comprises a sleeve 30HR and a cylinder block 30HB. A high temperature-side piston 20H reciprocates in the sleeve 30HR...
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JP2009133410 |
To provide a reciprocating device and its driving means capable of coping with this high speed reciprocating motion, a stably driving source and its control means, and a vibration damping means for restraining high speed violent vibratio...
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JP2009127518 |
To reduce the risk of contacting between a piston and a cylinder.In a side peripheral part 20S of the piston 20, a piston side clearance gradually changing part 20J is arranged in a range of a predetermined distance L3 toward a top surfa...
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JP2009127519 |
To reduce the risk of contacting between a piston and a cylinder.The piston 20 reciprocates in the cylinder 30. A gas bearing GB is formed between the piston 20 and the cylinder 30. The piston 20 has a diametrically contracting part 21 f...
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JP2009121337 |
To restrain durability deterioration of a piston and a cylinder by constraining foreign substances from entering a portion between the piston and the cylinder in a structure in which a gas bearing is interposed between the piston and the...
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JP2009118737 |
To dampen the resonance occurring in a rotating system.A method for damping the resonance of the rotating system is disclosed and includes the development of an expression representing vibration movement in the rotating system; the adopt...
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JP2009113156 |
To provide a static pressure gas bearing spindle capable of preventing permeation of working fluid into a seal gap.The static pressure gas bearing spindle includes a rotating shaft 1 in which a through-hole 28 is formed. The static press...
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JP2009108869 |
To provide a bearing unit that stably rotates a shaft.The bearing unit 8 has a shaft 5, a bearing housing 24, a sleeve 9, an attraction magnet 25, a thrust plate 10, a ring-like member 26, and a seal washer 12. The bearing unit is intern...
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JP2009108888 |
To provide a slide-type semi-levitation guiding device of which the space between a mobile member and a supporting member is left a predetermined clearance.A guide part 21 used for guiding the movable member 1 of the slide-type semi-levi...
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JP2009097613 |
To provide an air cylinder for supporting a piston by an air bearing for providing the strong aligning action while using high pressure air for operating the air cylinder.This air cylinder 12 has a cylinder body 31, the piston 32 sliding...
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JP2009097524 |
To provide a magnetic bearing unit capable of efficiently using a magnetic flux of permanent magnets.A shaft part and a receiving part have respectively a magnet assembly 20 including a plurality of permanent magnets 10 of holding mutual...
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JP2009097597 |
To provide a magnetic bearing device that dispenses with compensation for control of radial electromagnets and compensation for processing of control signals of the radial electromagnets even when the magnetic bearing device is used as a...
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JP2009092196 |
To provide a static pressure gas bearing in which bearing precision can be enhanced and a throttle opening can be prevented from being clogged.The static pressure gas bearing comprises a rotor 1, and bearing bodies 2, 3 having bearing su...
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JP2009092219 |
To provide an anticorrosive magnetic bearing and its assembling and manufacturing method.This armature 2 includes a stack 14 of mutually adjacently arranged insulating layer 8 and a coated plate 6, and the stack 14 has a first end and a ...
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JP2009092195 |
To provide a novel structure by which a static fluid bearing can easily manufactured and constituted with high precision.A bearing body 200 of the static pressure bearing comprises a first bearing member 210 integrally having a first rug...
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JP2009085386 |
To realize a slider capable of desirably adjusting distribution of the pressure on a fluid bearing surface and capable of restricting deformation thereof when rising to the surface.This slider, which moves by rising on a stage through a ...
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JP2009079708 |
To realize high rotational accuracy without fluctuation of a rotation axis of a coating roll, even when the coating roll is bent, or external force is applied on the coating roll from other than a gravity direction.A slide bearing 27 is ...
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JP2009079611 |
To provide a magnetic bearing device which can improve accuracy when used as a gyroscope, moreover support a rotary body stably.A plurality of axial displacement sensors 12 facing one side in the axial direction of a disc-like member 8 f...
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JP2009074688 |
To provide a magnetic bearing device capable of keeping predetermined rigidity when power of an electromagnet is on, of touching down to a bearing when the power is turned off, and small in leakage of magnetic flux in an eccentricity dir...
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JP2009068718 |
To provide a magnetic bearing device capable of preventing excessive amplitude of a rotor in changing feedback gain.A magnetic bearing type turbo molecular pump must experience a critical speed (rotation speed n2) from the rotor rotating...
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JP2009068544 |
To surely restrain the generation of an air hammer caused by the compressibility of air.A spindle 14 is rotatably supported to housings 12 and 13 via porous air bearings 26-29. The spindle 14 is connected to a motor rotary shaft 44 of an...
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JP2009068545 |
To surely restrain the generation of an air hammer caused by the compressibility of air.A spindle 14 is rotatably supported to a housing 12 via porous air bearings 26 and 28. The spindle 14 is connected to a motor rotary shaft 44 of an e...
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JP2009068541 |
To surely restrain the generation of an air hammer caused by the compressibility of air.A spindle 14 is rotatably supported to a housing 12 via porous air bearings 26 and 28. The spindle 14 is connected to a motor rotary shaft 44 of an e...
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