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JP6462335B2 |
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JP6459503B2 |
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JP6459606B2 |
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JP6458386B2 |
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JP6455233B2 |
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JP3219604U |
To provide a vacuum energy-saving type large-capacity precision pressure regulating valve which precisely adjusts a vacuum pressure to save energy. The inside is composed of a main valve 20, an intermediate valve seat 30, and a pressure ...
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JP6449704B2 |
To provide a faucet device capable of suppressing intrusion of foreign matters into a faucet while securing necessary flow.A faucet device 50 includes a faucet member 7 extended from an upstream side with respect to a cylindrical straine...
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JP2018204847A |
To provide a refrigerator which can separately and accurately supply a refrigerant required for a plurality of evaporators even when the refrigerant amount is small, and which has an expansion valve that prevents increase in manufacturin...
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JP2018537633A |
The present invention provides a mechanical interlock manifold that controls the flow of a process medium between a fluid or gas system and, for example, a sensor, while at the same time calibrating a measuring instrument communicated wi...
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JP6435430B1 |
To prevent foreign matter from adhering and accumulating in or near a valve port. A flow control valve 10 is provided in a casing 11 in which an inflow port 12 and an outflow port 13 and a flow path 14 connecting them are formed, and a v...
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JP6431308B2 |
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JP6427254B1 |
To provide a space-saving gate valve provided with a link mechanism having less vibration at the time of opening and closing. A main body having an opening for opening and closing between an exhaust port of a chamber and a vacuum pump, a...
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JP6425442B2 |
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JP2018179067A |
To capture contamination while suppressing clogging of a filter for a long time.A lubricant inlet 250A of a back pressure control valve 250 is provided with a cylindrical portion 250B projecting from an end face of the lubricant inlet to...
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JP6422202B2 |
To improve a conventional valve, particularly a hydraulic controlled valve.A valve (1, 1a, 1b), particularly a hydraulic controlled valve includes a closing body (5) configured to seal a valve seat (9) within a valve body (7, 7a) that is...
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JP6421013B2 |
A throttle valve includes a throttle valve element (62); a support member (33) that supports the throttle valve element (62), the support member (33) including a valve element support portion (51), and a shaft portion that is connected t...
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JP6416506B2 |
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JP6412670B1 |
To provide a gate valve with a heater which can uniformly heat a gate valve and can easily replace a heater. A gate valve includes a valve body for opening and closing an opening of a vacuum chamber, a heater for uniformly transferring h...
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JP6412723B2 |
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JP6408233B2 |
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JP6405201B2 |
To provide an exhaust valve which can suppress an amount of contents accumulated in a gap.An exhaust valve 1 is fitted to a nozzle 3 of a tank 2 in which an inner peripheral surface 2c is subjected to surface treatment, and is configured...
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JP6405067B1 |
To provide a control method of a gate valve which is opened in a short time while suppressing vibration of a valve body. The present invention is a method for controlling a gate valve provided at an opening of a chamber, wherein a valve ...
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JP2018159467A |
To provide a seal component for a closure element or a valve seat of a vacuum valve to improve process reliability.A vacuum valve includes: a valve seat having a first seal surface; and a closure element having a second seal surface corr...
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JP6404191B2 |
In a throttle device, a guide section (18B) including a small-diameter hole (18b) which slidably guides a guide stem (20P3) of a needle member (20) is formed upstream side portion from a communicating hole (18c) in a guide tube (18).
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JP2018528359A |
The present invention relates to a square gate vacuum valve and a semiconductor manufacturing apparatus including the same. The square gate vacuum valve of the present invention includes a gate frame in which a first gate and a second ga...
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JP6397715B2 |
A switching valve (22) of a fluid pressure control device (100) includes a pilot chamber (22a) to which pilot pressure is leaded via the pilot valve (10), a spool (36) configured to move in a valve-opening direction in accordance with th...
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JP6392479B1 |
To control vibration within an allowable range by adjusting an operating speed of a vacuum valve. A vacuum valve drive control method includes a valve body that opens and closes an opening of a vacuum valve, an actuator that moves the va...
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JP3217802U |
To provide an electromagnetic water supply valve capable of enhancing the strength of a partition wall and improving the response speed. A valve body includes a water inlet 1 and a drain port 2 having a valve chamber 3 installed between ...
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JP6383313B2 |
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JP6380401B2 |
A first thermal shield constituted by a material with a thermal conductivity of 20 W/(m·K) or less and a second thermal shield constituted by a space are disposed between a passage and a laminated piezoelectric actuator. Preferably, a t...
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JP6379997B2 |
A fluid control valve device includes a seal part disposed to a valve part. The seal part is elastically deformable and contacts a valve seat when a fluid passage is closed to intercept fluid from passing through the fluid passage. The v...
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JP6383312B2 |
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JP6382556B2 |
A steam valve 10 of an embodiment includes: a valve element 32 of a steam control valve 30, the valve element 32 being provided to be movable in an up and down direction; a valve element 42 of a main stop valve 40, the valve element 42 b...
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JP6377251B2 |
A multi-vane throttling valve for a vacuum process chamber includes a reciprocal vane pivotally connected to and extending backwardly away from a back side of each of a plurality of rotatable vanes, and a stationary reciprocal vane angli...
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JP6377934B2 |
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JP2018128108A |
To provide an actuator fastening jig capable of fastening an actuator cap to an actuator base from the inside of the actuator cap, and dispensing with a tool fixation place or hole on the outside of the actuator, and a method for fasteni...
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JP6375185B2 |
A solenoid 100 includes a coil 11 configured to generate magnetic force when a current flows therethrough; a stator core 12 provided inside the coil 11, the stator core 12 being configured to be excited by the magnetic force of the coil ...
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JP6368897B2 |
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JP6368882B1 |
To suppress scattering of particles only by controlling a gate valve when opening a gate valve in a chamber in accordance with an outside air pressure. In a gate valve control method, in a gate valve that detects the torque of a motor th...
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JP2018520326A |
The vacuum chamber (100) for use in processes that require vacuum pressure has a compact design that minimizes the spacing required for valves in the direction of travel. The chamber valve gate (116) is movable between a first position w...
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JP2018115567A |
To provide an exhaust gas recirculation device capable of reliably preventing extraction of a sealing body while reliably blocking a first pore with the sealing body, the first pore communicating with a valve chamber.In a body 12 of an e...
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JP6358727B1 |
The sluice valve of the present invention includes a valve box having a hollow portion, a first opening and a second opening which are provided so as to face each other and serve as a flow path for communicating with the hollow portion, ...
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JP6357444B2 |
To acquire a valve capable of reducing a driving force for driving a valve member.A valve 19 is stored inside a closed space whose pressure is lower than the atmospheric pressure, and it includes: a valve member 50 capable of opening/clo...
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JP3217010U |
To provide a jig for valve inspection capable of improving work efficiency of valve inspection. A valve inspection jig 1 is an inspection jig of a valve 30 having a valve body, and includes a jig body 2 having a first end surface 4 and a...
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JP2018105374A |
To provide a vacuum valve that can reduce power consumption.A vacuum valve 1 comprises a valve plate, a motor 31 that drives the valve plate to open/close it and holds it at a desired opening, and a control unit 40 that acquires valve po...
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JP2018100708A |
To provide an air bypass valve which can easily discharge foreign matters in a pressure equilibrium chamber.A movable-side member 26 has a valve body 50. A spring 76 energizes the movable-side member 26 in a closing direction. An electro...
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JP2018100697A |
To provide a liquid control valve for actualizing smooth operation of a valve element by reliably discharging foreign matters entering into a flow path to the downstream side.A columnar valve element 14 is rotatably provided inside a bod...
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JP2018100698A |
To provide a liquid control valve for actualizing smooth operation of a valve element by reliably discharging foreign matters entering into a flow path to the downstream side.A columnar valve element 14 is rotatably provided inside a bod...
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JP6349146B2 |
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JP6346898B2 |
A vacuum valve having a valve rod (11) which has a longitudinal axis (20) and which carries at least one closing member (9, 10) for closing at least one valve orifice (2, 3) and which can be displaced by a longitudinal drive (18), in a l...
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