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WO/2019/002489A1 |
The invention relates to a vacuum valve with a sensor arrangement having at least one inertial sensor (11a, 11b, 11c, 11d, 11e), wherein the sensor arrangement is designed in such a way it detects a measuring signal with respect to an ac...
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WO/2019/002490A1 |
The invention relates to a vacuum valve (1), comprising a valve closure (4) and a preferably pneumatic or electropneumatic drive unit (7, 7') having a pressure medium, said drive unit being coupled to the valve closure (4). The vacuum va...
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WO/2018/235482A1 |
This control valve used for a variable capacity compressor suppresses the infiltration of foreign substances into a slidable support part which slidably supports a valve unit including a valve part for opening/closing a valve hole. A val...
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WO/2018/224150A1 |
A closing device (100, 200), particularly for closing an opening of a vacuum chamber, is provided. The closing device includes: a flange (110) to be provided at a vacuum chamber and comprising an opening (112); a blocking device (120, 22...
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WO/2018/216534A1 |
In the present invention, a second filter housing hole 53 in which a second filter member 62 of a SS/V IN 41 is housed has a region 69 where a gap with respect to the outer peripheral surface of the second filter member 62 is narrow and ...
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WO/2018/196382A1 |
Disclosed are a rapidly assembled and disassembled aerator and a faucet. The aerator comprises: a fixing module, comprising a fixing shell (2) and a first sleeve piece (5) which are arranged together; and a disassembling module, comprisi...
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WO/2018/193014A1 |
The invention relates to a vacuum valve comprising a sensor assembly with at least one force sensor (11a, 11b, 11c, 11d, 11e, 11f) which has a deformation-sensitive element. The sensor assembly is designed such that a measurement signal ...
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WO/2018/175523A1 |
Low-flow fluid delivery system. The system includes a pump assembly comprising a pump mechanism having an inlet side and an outlet side, wherein the inlet side is configured to fluidly couple to a fluid supply. The system further include...
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WO/2018/166620A1 |
The present disclosure provides an apparatus (100) for vacuum processing of a substrate (10). The apparatus (100) includes a first vacuum region (110), a second vacuum region (120), an opening (130) between the first vacuum region (100) ...
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WO/2018/167964A1 |
Provided are: a shut-off valve control device which is capable of reducing the difference between a set opening amount and the actual opening amount, when executing a partial valve stroke test; a shut-off valve control system; a method f...
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WO/2018/167994A1 |
Provided are: a valve control device which is capable of reducing the difference between a set opening amount and the actual opening amount, when executing a partial valve stroke test; a valve control system; a method for calculating a v...
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WO/2018/168878A1 |
The present invention reduces dust generated in a gate valve device, and ensures closability of an opening of a vacuum container. This gate valve device (100) is provided with: a valve body (2) which opens and closes an opening (11H) of ...
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WO/2018/166618A1 |
The present disclosure provides an apparatus (100) for vacuum processing of a substrate. The apparatus (100) includes a processing vacuum chamber (110), a maintenance vacuum chamber (120), an opening (130) for transferring at least a por...
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WO/2018/083176A1 |
The invention relates to a valve system consisting of a vacuum valve and a regulating unit. The vacuum valve has a valve seat which has a valve opening and a first seal surface which runs around the valve opening, and the vacuum valve ha...
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WO/2018/077553A1 |
The invention relates to a closure device (1) for an opening (2) in a chamber wall (3), wherein the closure device (1) has at least one closure element (4) and at least one closure element carrier body (5) and at least one yoke (6), and ...
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WO/2018/066554A1 |
This gate valve has: a valve casing with a hollow section, and a first opening and a second opening that are provided so as to face each other with the hollow section therebetween to form a continuous flow channel; a neutral valve elemen...
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WO/2018/056132A1 |
This filter unit (F1) comprises a filter check valve (FC) provided in a flow path and permitting only the flow of fluid from one side of the flow path towards the other side; and a fluid filter FF provided further on the other side of th...
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WO/2018/045963A1 |
An anti-siphon water intake valve (100), comprising a water intake body assembly (1), an anti-siphon stopper (20) movably matching the water intake body assembly (1) in a longitudinal direction and capable of opening and closing an air i...
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WO/2018/038729A1 |
Examples of a two-piece guide bushing apparatus are provided. A specific example comprises a guide bushing base comprising flanges which extend into the interior of the guide bushing base, and a guide bushing center comprising a spring c...
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WO/2018/036106A1 |
A throttling apparatus and an air conditioner applying the throttling apparatus, comprising: the throttling apparatus (10), comprising a cooling valve core (1) and a heating valve core (2). The cooling valve core is provided with a cavit...
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WO/2018/008894A1 |
Disclosed is a vacuum-sealed container wherein a large negative pressure is applied inside the container compared with a conventional one without using a pump such that a high degree of vacuum can be maintained, making it possible to sto...
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WO/2017/217123A1 |
A flow rate adjustment valve 10 is provided with: a casing 10 having formed therein an inlet opening 12, an outlet opening 13, and a flow path 14 for connecting the inlet opening 12 and the outlet opening 13; a valve opening 26 provided ...
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WO/2017/196702A1 |
Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance c...
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WO/2017/186757A1 |
Vacuum valve (10) for the essentially gas-tight closing of an opening (11), having a valve wall (12) surrounding the opening with a valve seat and a closure arrangement (17) with a closure element (14) having a closure side (15). The val...
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WO/2017/186470A1 |
The invention relates to a valve (1), in particular a vacuum valve, comprising at least one valve rod (2), at least one closing element (3) fastened to the valve rod (2) for closing at least one valve opening (4), and at least one valve ...
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WO/2017/178794A1 |
A protection valve (20) isolates gas flow between an upstream vacuum chamber (14) and a downstream vacuum pump (16). The protection valve comprises a valve seat (24); a valve member (22) which in a first valve condition seals against the...
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WO/2017/174448A1 |
The invention relates to a closure device (1) comprising a closure element (2) for closing an opening (5, 6) of the closure device (1) that is surrounded by a valve seat (3, 4) of the closure device (1), wherein the closure device (1) ha...
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WO/2017/145353A1 |
The drive mechanism (3) of a valve system (1) has: a piston (32) for dividing the cylinder chamber (311) of a cylinder case (31) into a first chamber (311a) and a second chamber (311b); a bypass passage (37) for providing communication b...
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WO/2017/144574A1 |
The invention relates to a vacuum valve for the substantially gas-tight interruption of a flow path, comprising a valve housing (1) with a first opening (3) having an opening axis (4) and a valve seat (5) surrounding the first opening (3...
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WO/2017/141777A1 |
A cryopump 10 is provided with a cryopump flange 14 attached to a gate valve flange 104, and an annular baffle 16 that extends from the cryopump flange 14 in the axial direction toward a gate valve 102 so as to form an annular orifice 18...
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WO/2017/127365A1 |
Disinfection cap (3000) includes housing (3002) comprising closed top (3022), essentially cylindrical sidewall (3004), and open bottom (3024) formed by the sidewall with opening (3026) to inner cavity (3028) within the housing for receiv...
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WO/2017/099106A1 |
[Problem] To provide a joint member designed to trap waste such as dust and dirt contained in a fluid before the fluid arrives at a filter member, so as to reduce the amount of dust, etc. reaching the filtering element of the filter memb...
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WO/2017/097672A1 |
The invention relates to a closure device or lock device for a vacuum chamber (12), comprising: a counter plate (16), which can be arranged on a vacuum chamber (12) and which surrounds an opening (14) of the vacuum chamber (12); a frame ...
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WO/2017/085163A1 |
A valve (10) for shutting off a flow path in substantially gas-tight fashion, having a valve housing (11) which has a first port (12) in the direction of a first axis, a second port in the direction of a second axis, and a valve seat whi...
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WO/2017/077975A1 |
[Problem] To provide a temperature control device in which it is possible to suppress a size increase and suppress increased complexity of the device overall, as well as promptly control the temperature of a region in which the temperatu...
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WO/2017/051704A1 |
An orifice type drain discharge mechanism 10 comprises: a casing 11 that forms a drain inlet 12, a drain outlet 13, and a channel 14 connecting the inlet 12 and the outlet 13; an orifice 26 that is provided in the channel 14; and a rod-s...
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WO/2017/053682A1 |
An apparatus (10) for vacuumizing and sealing a package (322) includes a plurality of platens (12) and vacuum chambers (14), each chamber (14) adapted to mate with a dedicated one of the platens (12); a conveying system (16) for conveyin...
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WO/2017/043269A1 |
Provided are an electromagnetic valve, the axial length of which can be suppressed from being increased, a hydraulic control device, and a brake device. In the present invention, a first filter member, through which a fluid is filtered, ...
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WO/2017/036672A1 |
The vacuum valve comprises a valve housing (1) with an interior (2), first and second valve openings (3, 4), and a closure unit (10) that is arranged in the interior (2) of the valve housing (1) and has a first plate (11), a second plate...
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WO/2017/039113A1 |
Disclosed are a valve capable of preventing a vortex and a core used therefor. The plastic valve comprises: a body made of plastic; a core formed inside the body; and an opening/closing portion. A fluid transfer hole is formed in the inn...
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WO/2017/033745A1 |
In the present invention, passage members 3, 4, and 9 have the necessary width, height, and length, and in the center part of the width fluid passages 13, 14, 17, and 18 are provided. Two bolts 15 and 16 are used as fastening means. One ...
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WO/2017/025329A1 |
Valve (1), in particular a vacuum valve, with at least one closure member (2) which has a wedge-shaped closure region (3), and with at least one valve seat (5) which surrounds a valve opening (4) of the valve (1), wherein, in a closed po...
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WO/2017/022968A1 |
The present invention is characterized by being comprised of: a blade (200) installed inside a valve housing (100) in the front surface and rear surface of which a first and second moving hole (110, 120) are formed, respectively, the bla...
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WO/2017/019476A1 |
A modular hopper tee including a modified tee box, a tee box liner, a readily detachable inflow adapter for coupling a first pipe to the tee box and a readily detachable outflow adapter for coupling a second pipe to the tee box, the line...
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WO/2016/206966A1 |
The invention relates to a control device for a pneumatic piston-cylinder unit (7, 7'), which piston-cylinder unit has a closing cylinder chamber (18) and an opening cylinder chamber (17) for moving a closing element (5, 6) of a vacuum v...
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WO/2016/204203A1 |
Provided is a gate valve that enables a substrate to be suitably removed from a valve body when opening the gate valve.　The gate valve (30A) is a valve that is provided on the entrance and exit openings for a flexible belt-like substra...
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WO/2016/202782A1 |
Vacuum valve unit (10) for gas-tight closing of a movement path by means of a linear movement, comprising a valve housing (11) with a passage opening (13) for the movement path, and comprising a valve seat surface surrounding the passage...
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WO/2016/199541A1 |
Provided is an oil pressure control valve capable of achieving a rotation prevention function for a filter without sacrificing the ease with which the filter can be assembled with respect to a valve body. This oil pressure control valve ...
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WO/2016/199184A1 |
A compound electromagnetic valve (2) has multiple electromagnetic valves (24a and 24b), and an output port (22). The output port (22) supplies air to an air supply destination only when all of the multiple electromagnetic valves (24a and...
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WO/2016/172429A1 |
A chamber valve (100) for use in processes requiring vacuum pressures has a compact design which minimizes the space needed for the valve in the travel direction. The chamber valve gate (116) is moveable between a first position in which...
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