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Matches 1 - 50 out of 5,779

Document Document Title
WO/2019/097842A1
Provided is a capacity control valve for a variable capacity compressor. The capacity control valve can prevent valve body malfunctions caused by minute foreign matter that is included in inwardly flowing refrigerant. A capacity control ...  
WO/2019/086245A1
The invention relates to a vacuum process system for the defined processing of an object, comprising an evacuable vacuum process volume (1), a vacuum valve (10), a peripheral unit (4, 21-25) designed for at least partly providing a defin...  
WO/2019/087879A1
Provided is a flow channel assembly having a functional component such as an orifice or a filter incorporated therein, such that a portion between the functional component and a flow channel component defining a flow channel is assuredly...  
WO/2019/074340A1
The present invention relates to a valve assembly wherein the same can be easily installed in an exhaust line of a vacuum chamber, a valve constituting a part of the exhaust line is moved horizontally such that process contaminants and b...  
WO/2019/068709A1
The invention relates to a CVD reactor having a gas-tight and evacuatable reactor housing (1) and an inner housing (2) arranged therein, which inner housing has means (3, 4) for the infeed of a process gas and means (5) for holding a sub...  
WO/2019/063073A1
A lock valve (100) for vacuum sealing is described. The lock valve (100) includes: a base structure (110) having a valve opening (111), a mechanism (120) for opening and closing the valve opening (111), and two or more connecting element...  
WO/2019/067885A1
The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma...  
WO/2019/039053A1
Provided is a control valve which is to be used in a variable displacement compressor, is capable of preventing foreign matter from accumulating in the gap between sliding surfaces which is formed between a main valve body and a guide ho...  
WO/2019/034401A1
In a seal arrangement for sealing first and second components (1, 2) of a vacuum device in relation to one another by means of an elastomeric sealing material (5), which is arranged on one of the two components (1, 2) and interacts with ...  
WO/2019/023086A1
A control assembly that is configured to operate large, heavy duty flow controls. The control assembly may include a main support and a thin plate disposed on the main support, the thin plate having four sides forming a mounting surface,...  
WO/2019/002487A1
The invention relates to a vacuum valve (1') for controlling a volume or mass flow and/or for gas-tight interrupting of a flow path, having a valve seat (3), which has a valve opening (2), which defines an opening axis (H), and a first s...  
WO/2019/002488A1
The invention relates to vacuum valve (1') having at least one acoustic sensor (10), the acoustic sensor (10) being designed such that information can be generated by the acoustic sensor (10) via a structure-borne sound wave, as a measur...  
WO/2019/002491A1
The invention relates to a vacuum valve (1) having a valve closure (4) and having a drive unit (7) which is coupled to the valve closure (4) and which has at least one adjustment element (5). The vacuum valve (1) furthermore has a positi...  
WO/2019/004651A1
According to the present invention, a main body housing is divided into two spaces provided with first and second pistons, respectively, wherein the first piston is provided, between driving parts, in an upper space inside the main body ...  
WO/2019/002489A1
The invention relates to a vacuum valve with a sensor arrangement having at least one inertial sensor (11a, 11b, 11c, 11d, 11e), wherein the sensor arrangement is designed in such a way it detects a measuring signal with respect to an ac...  
WO/2019/002490A1
The invention relates to a vacuum valve (1), comprising a valve closure (4) and a preferably pneumatic or electropneumatic drive unit (7, 7') having a pressure medium, said drive unit being coupled to the valve closure (4). The vacuum va...  
WO/2018/235482A1
This control valve used for a variable capacity compressor suppresses the infiltration of foreign substances into a slidable support part which slidably supports a valve unit including a valve part for opening/closing a valve hole. A val...  
WO/2018/224150A1
A closing device (100, 200), particularly for closing an opening of a vacuum chamber, is provided. The closing device includes: a flange (110) to be provided at a vacuum chamber and comprising an opening (112); a blocking device (120, 22...  
WO/2018/216534A1
In the present invention, a second filter housing hole 53 in which a second filter member 62 of a SS/V IN 41 is housed has a region 69 where a gap with respect to the outer peripheral surface of the second filter member 62 is narrow and ...  
WO/2018/196382A1
Disclosed are a rapidly assembled and disassembled aerator and a faucet. The aerator comprises: a fixing module, comprising a fixing shell (2) and a first sleeve piece (5) which are arranged together; and a disassembling module, comprisi...  
WO/2018/193014A1
The invention relates to a vacuum valve comprising a sensor assembly with at least one force sensor (11a, 11b, 11c, 11d, 11e, 11f) which has a deformation-sensitive element. The sensor assembly is designed such that a measurement signal ...  
WO/2018/177695A3
A valve (1), in particular a vacuum valve, comprising at least one closing member (2) for closing a valve opening (3) and at least one valve plunger (4), at least one first connecting section (5) being provided in or on the valve plunger...  
WO/2018/175523A1
Low-flow fluid delivery system. The system includes a pump assembly comprising a pump mechanism having an inlet side and an outlet side, wherein the inlet side is configured to fluidly couple to a fluid supply. The system further include...  
WO/2018/166620A1
The present disclosure provides an apparatus (100) for vacuum processing of a substrate (10). The apparatus (100) includes a first vacuum region (110), a second vacuum region (120), an opening (130) between the first vacuum region (100) ...  
WO/2018/167964A1
Provided are: a shut-off valve control device which is capable of reducing the difference between a set opening amount and the actual opening amount, when executing a partial valve stroke test; a shut-off valve control system; a method f...  
WO/2018/167994A1
Provided are: a valve control device which is capable of reducing the difference between a set opening amount and the actual opening amount, when executing a partial valve stroke test; a valve control system; a method for calculating a v...  
WO/2018/168878A1
The present invention reduces dust generated in a gate valve device, and ensures closability of an opening of a vacuum container. This gate valve device (100) is provided with: a valve body (2) which opens and closes an opening (11H) of ...  
WO/2018/166618A1
The present disclosure provides an apparatus (100) for vacuum processing of a substrate. The apparatus (100) includes a processing vacuum chamber (110), a maintenance vacuum chamber (120), an opening (130) for transferring at least a por...  
WO/2018/083176A1
The invention relates to a valve system consisting of a vacuum valve and a regulating unit. The vacuum valve has a valve seat which has a valve opening and a first seal surface which runs around the valve opening, and the vacuum valve ha...  
WO/2018/077553A1
The invention relates to a closure device (1) for an opening (2) in a chamber wall (3), wherein the closure device (1) has at least one closure element (4) and at least one closure element carrier body (5) and at least one yoke (6), and ...  
WO/2018/066554A1
This gate valve has: a valve casing with a hollow section, and a first opening and a second opening that are provided so as to face each other with the hollow section therebetween to form a continuous flow channel; a neutral valve elemen...  
WO/2018/056132A1
This filter unit (F1) comprises a filter check valve (FC) provided in a flow path and permitting only the flow of fluid from one side of the flow path towards the other side; and a fluid filter FF provided further on the other side of th...  
WO/2018/045963A1
An anti-siphon water intake valve (100), comprising a water intake body assembly (1), an anti-siphon stopper (20) movably matching the water intake body assembly (1) in a longitudinal direction and capable of opening and closing an air i...  
WO/2018/038729A1
Examples of a two-piece guide bushing apparatus are provided. A specific example comprises a guide bushing base comprising flanges which extend into the interior of the guide bushing base, and a guide bushing center comprising a spring c...  
WO/2018/036106A1
A throttling apparatus and an air conditioner applying the throttling apparatus, comprising: the throttling apparatus (10), comprising a cooling valve core (1) and a heating valve core (2). The cooling valve core is provided with a cavit...  
WO/2018/008894A1
Disclosed is a vacuum-sealed container wherein a large negative pressure is applied inside the container compared with a conventional one without using a pump such that a high degree of vacuum can be maintained, making it possible to sto...  
WO/2017/217123A1
A flow rate adjustment valve 10 is provided with: a casing 10 having formed therein an inlet opening 12, an outlet opening 13, and a flow path 14 for connecting the inlet opening 12 and the outlet opening 13; a valve opening 26 provided ...  
WO/2017/196702A1
Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance c...  
WO/2017/186757A1
Vacuum valve (10) for the essentially gas-tight closing of an opening (11), having a valve wall (12) surrounding the opening with a valve seat and a closure arrangement (17) with a closure element (14) having a closure side (15). The val...  
WO/2017/186470A1
The invention relates to a valve (1), in particular a vacuum valve, comprising at least one valve rod (2), at least one closing element (3) fastened to the valve rod (2) for closing at least one valve opening (4), and at least one valve ...  
WO/2017/178794A1
A protection valve (20) isolates gas flow between an upstream vacuum chamber (14) and a downstream vacuum pump (16). The protection valve comprises a valve seat (24); a valve member (22) which in a first valve condition seals against the...  
WO/2017/174448A1
The invention relates to a closure device (1) comprising a closure element (2) for closing an opening (5, 6) of the closure device (1) that is surrounded by a valve seat (3, 4) of the closure device (1), wherein the closure device (1) ha...  
WO/2017/160001A3
The present invention relates to a tumbler and, particularly, to a self-vacuuming tumbler which enables a user to store and carry food for a long period of time by putting the food into the tumbler and creating a vacuum in the tumbler by...  
WO/2017/145353A1
The drive mechanism (3) of a valve system (1) has: a piston (32) for dividing the cylinder chamber (311) of a cylinder case (31) into a first chamber (311a) and a second chamber (311b); a bypass passage (37) for providing communication b...  
WO/2017/144574A1
The invention relates to a vacuum valve for the substantially gas-tight interruption of a flow path, comprising a valve housing (1) with a first opening (3) having an opening axis (4) and a valve seat (5) surrounding the first opening (3...  
WO/2017/141777A1
A cryopump 10 is provided with a cryopump flange 14 attached to a gate valve flange 104, and an annular baffle 16 that extends from the cryopump flange 14 in the axial direction toward a gate valve 102 so as to form an annular orifice 18...  
WO/2017/127365A1
Disinfection cap (3000) includes housing (3002) comprising closed top (3022), essentially cylindrical sidewall (3004), and open bottom (3024) formed by the sidewall with opening (3026) to inner cavity (3028) within the housing for receiv...  
WO/2017/099106A1
[Problem] To provide a joint member designed to trap waste such as dust and dirt contained in a fluid before the fluid arrives at a filter member, so as to reduce the amount of dust, etc. reaching the filtering element of the filter memb...  
WO/2017/097672A1
The invention relates to a closure device or lock device for a vacuum chamber (12), comprising: a counter plate (16), which can be arranged on a vacuum chamber (12) and which surrounds an opening (14) of the vacuum chamber (12); a frame ...  
WO/2017/085163A1
A valve (10) for shutting off a flow path in substantially gas-tight fashion, having a valve housing (11) which has a first port (12) in the direction of a first axis, a second port in the direction of a second axis, and a valve seat whi...  

Matches 1 - 50 out of 5,779