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JP2004354043 |
To provide a heat treatment method for a substrate and a heat treatment furnace capable of early solving the temperature distribution within the substrate when carrying the substrate containing a film forming material between adjacent he...
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JP3624658 |
To correctly evaluate the stability by directly measuring the differential pressure between the in-furnace pressure at the position at the prescribed distance below the surface of the reference charged stuff and the in-furnace pressure i...
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JP2004347208 |
To provide an electric furnace for ceramic art capable of performing an optimum drying in a short time without leading to a failure by insufficient drying in a drying process, and significantly reducing the time to baking by enabling the...
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JP2004340524 |
To provide a control method for a rotary kiln, its device, and its program capable of reducing dispersion of temperature of burned ore ejected from a rotary kiln for maintaining stable operation of the rotary kiln carrying out burning an...
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JP2004319953 |
To provide an inspection device for detecting a degree of degradation of a heater heating a furnace and to provide a semiconductor manufacturing device loading the device.The device is provided with a current detection means 21A detectin...
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JP2004304104 |
To provide a heat treatment device which can improve the accuracy of development processing of a pattern formed on a substrate to be processed by executing the temperature control in the heat treatment device and which can execute the st...
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JP2004293899 |
To provide a fluidized bed type heat treatment furnace capable of suppressing flowing-out of a powder and granular material forming a fluidized bed, stabilizing temperature in the furnace, and performing safe and high quality heat treatm...
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JP2004292880 |
To make evaluative of the intensity of unsteady state in a reaction vessel.In an evaluating method for evaluating the state in the reaction vessel based on temperature data measured with a thermocouple disposed in the inner part of wall ...
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JP2004288510 |
To provide a temperature raising/lowering unit capable of speedily raising/lowering a temperature in a temperature raising/lowering chamber, capable of controlling the temperature with high precision, and capable of uniforming the temper...
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JP2004278970 |
To detect temperature of molten slag accurately and in real time for strictly controlling temperature of molten slag in an electric resistance type ash melting furnace.Temperature of molten slag 9 flowing out from a cinder notch 8 of the...
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JP2004264063 |
To visually specify the instance at which a sample of a complicated shape changes into a spherical shape by acquiring the contrast of the sample even if the sample glows at high temperatures and outputting position information required f...
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JP2004257679 |
To provide a device and a method for collecting dust of an arc furnace capable of effectively changing pressure fluctuation caused by change of exhaust gas generation stemming from change of operational conditions in the arc furnace for ...
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JP2004257703 |
To provide an electric melting furnace controller capable of providing stable operation not affected by experience of an operator with respect to an electric melting furnace having a main electrode, a furnace bottom electrode, and a star...
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JP2004257607 |
To provide a combustion control method for a reactor using a hot air combustion technology capable of reducing a temperature difference in the reactor without developing the cracking and caulking of reaction tubes.A second burner 8 is di...
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JP2004237211 |
To provide a device and a method for controlling a warmup of a drying oven that can exactly raise a temperature in the drying oven to the desired temperature by the desired starting time of operation by controlling a heating/temperature ...
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JP2004232890 |
To provide an economical drying apparatus with low electric energy consumption and high working throughput.The drying apparatus 10 is provided with a drying furnace 16, an air supply fan 74 supplying the drying furnace 16 with heated air...
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JP2004225960 |
To securely judge replacement of heat insulation materials in a continuous burning furnace and securely judge replacement timing of the heat insulation materials in the continuous burning furnace.In the burning furnace 1 for burning a su...
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JP2004225083 |
To provide a power output method of an induction heating type alloying furnace which can alleviate the total capacity of the induction heating type alloying furnace while satisfying the power output characteristic requirement for the ind...
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JP2004218956 |
To provide a method of heat-treating a substrate and a heat treatment furnace capable of uniformly heat treating the entire part of the substrate by suppressing the occurrence of temperature distribution in the substrate by thermal effec...
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JP3580768 |
To cool appropriately the furnace wall in the part lower than the vicinity of the level of a melt in a melting-furnace main body, and prevent a partial overcooling or insufficient cooling of the wall. A furnace wall 2 above the vicinity ...
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JP2004212005 |
To provide a heat amount monitoring device for continuously and accurately measuring and monitoring heat output amount taken away by exhaust gas discharged from a furnace body, in an arc melting facility.In the heat amount monitoring dev...
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JP2004211167 |
To provide a heat-treatment apparatus used in a magnetic field which yields a high-quality semiconductor element and can be downsized.The heat-treatment apparatus used in a magnetic field has a tubular heat-treatment furnace (3) which is...
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JP2004205188 |
To provide a waste treatment method and its device, effectively reducing the charged amount of solid fuel such as coke, coal, wood coal or carbide.The waste treatment device 1 comprises a measuring hopper 2 for measuring the charged amou...
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JP2004205066 |
To provide a heat treating apparatus having high heat treating efficiency by uniformizing temperature distribution in a fluidized bed furnace.Temperature measuring instruments 11-1 and 11-2 are installed at a furnace center part and near...
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JP2004205180 |
To provide a cyclone incinerating/melting system and an incinerating/melting furnace to be used for the same, applicable as a medium/small scale combustion system and as a melting furnace for completely controlling dioxine with a heat so...
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JP2004191047 |
To provide a combustion control system and a combustion control method for a furnace capable of keeping high combustion efficiency in accordance with a combustion state in the melting furnace.This combustion control system in the furnace...
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JP2004193219 |
To provide a heat treatment apparatus which can easily set and change control parameters and a temperature control method therefor.The PID control unit 21 comprises a master controller 216 for outputting a manipulation amount Mv by condu...
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JP2004183013 |
To provide an economical heat treatment method of high production efficiency and heat efficiency by solving problems with in-furnace rail type and hearth-roller type batch furnaces.A heat treatment furnace has a pre-heating chamber 3, a ...
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JP2004183026 |
To provide a continuous heat treatment furnace which can heat-treat products containing Cr and Si in a carbon furnace, can employ carbon dioxide, sulfur hexafluoride and a fluorine compound as a sealing gas, prevents the inflow of air co...
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JP2004174388 |
To provide a method and equipment for flue gas treatment of electric furnace, wherein concentration of DXN (dioxins) in flue gas treatment of an electric furnace is controlled so as to reach at most a target value on the discharge side o...
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JP2004179461 |
To provide a temperature setting substrate, a temperature setting device, and a temperature setting system capable of controlling the temperature of an object while saving labor, and to provide a reflow furnace in which the temperature i...
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JP2004162974 |
To provide a batch furnace for examining the continuous burning capable of controlling the heating and the atmosphere approximating the continuous burning furnace in the batch furnace for burning electronic components.This batch furnace ...
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JP3560190 |
To improve production efficiency by detecting temperatures of a plurality of heating bodies to control the temperatures of residual heating bodies so that the temperatures of the residual heating bodies converge onto the temperatures of ...
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JP2004156807 |
To make appropriately controllable furnace condition.This smelting furnace 1 has a jacket 3 for cooling a region in contact with molten metal M or a refractory in contact with the molten metal M in a furnace body 2; a refrigerant feeder ...
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JP3558800 |
To provide a control method of pressures within a furnace with very limited changes in the pressure within the furnace by quickly controlling the changes in the pressure within the furnace. In this control method, an internal pressure is...
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JP2004144421 |
To provide a direct fire gas burner furnace capable of maintaining a furnace interior at a set temperature while reducing exhaust heat loss, saving energy, and reducing a CO2 exhaust amount.In the direct fire gas burner furnace, an objec...
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JP2004144443 |
To provide an operation controller and its method for a DC electric type melting furnace capable of suitably operating the melting furnace by completely detecting a stray current generated in the DC electric type melting furnace.In the o...
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JP2004141944 |
To provide an atmosphere furnace which can preheat a workpiece to be brazed at a high speed, can prevent deterioration of a flux and can suppress growth of an oxidized film even if the atmosphere of a preheating chamber is not an oxygen-...
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JP2004138369 |
To provide a PDP substrate drying device and method capable of improving the quality of a PDP substrate by controlling the concentration of a solvent in a drying part most suitably to a constant rate drying period, a lapse rate first dry...
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JP2004125318 |
To suppress a structural flaw or combustion anomaly caused by gas irrespective of the amount of ceramic formed bodies to be baked.The ceramic formed body 16 of laminating a ceramic sheet and an internal electrode is housed in setter 15 f...
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JP2004123524 |
To insure that the organic components volatilized from ceramic shaped articles in a heat treatment process can be surely detected and that the exact heat treatment can be applied to the ceramic shaped articles and the rate of nondefectiv...
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JP3543949 |
To enable stable control, without the need for atmospheric air introduction and inert gas introduction, simplify the structure of an exhaust system and reduce cost. An apparatus, where a treatment object matter (w) is contained in the in...
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JP3543963 |
To improve maintenance operability by simplifying the piping of an exhaustion system. The heat-treating equipment is provided with a main valve 18, a 1st auxiliary valve 30, and a 2nd auxiliary valve 31 for a pipe 13 of the exhaustion sy...
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JP3542074 |
To automatically perform horizontal and vertical movement of electrodes and discharge of molten slag according to the temperature and level of the molten slag, save electric power consumption and prevent breakage of a transformer, a furn...
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JP2004101008 |
To provide a microwave radiation continuous baking furnace capable of stably baking an object to be baked by microwaves irrespective of material and shape of the object to be baked, reducing the number of defective products having crack,...
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JP2004093113 |
To provide a large quantity fuel combustion furnace and a system capable of economical and effective combustion of large quantity fuel.An improved large quantity fuel combustion system includes designs comprising independent gas feeds, i...
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JP2004093050 |
To provide a new technology in which freedom of control of the revolution number of a motor is high under a purpose for avoiding adoption of the motor having a large capacity.The heat treatment furnace 1 in which the inside of the furnac...
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JP2004077055 |
To carry out a temperature setting for more accurately controlling the temperature of a furnace chamber without disturbing the temperature of the furnace chamber by disturbance or the like without carrying out the input of a complex para...
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JP2004077007 |
To provide a continuous heating furnace and its operation method causing no increase in equipment cost and operation cost, causing no deterioration in the yield and quality of slab, capable of easily changing heating temperature even whe...
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JP2004077005 |
To provide a continuous nonoxidation furnace and its control method high in energy efficiency, and capable of stably performing an incomplete combustion of fuel in a furnace body.This furnace continuously processes an object to be heated...
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