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Patent Searching and Data


Matches 501 - 550 out of 1,192

Document Document Title
JP2001196322A
To provide an auxiliary heating plate which is capable of lessening a temperature difference between the peripheral part and center of a semiconductor wafer so as to uniformly heat the semiconductor wafer, holding it in a light irradiati...  
JP2001192274A
To provide a setter for bebindering/sintering, which can be manufactured without using any mold, so that gas generation in a sintering stage of the manufacturing process of the setter is suppressed to a possible minimum and the change of...  
JP2001168178A
To provide a substrate holding structure capable of reducing deformation of a substrate, especially a large-sized substrate.A method and an apparatus are provided for holding the substrate having a holding frame 54 capable of minimizing ...  
JP3176366B2  
JP3175251B2
PURPOSE: To equally heat workpiece, even if they are placed at any place on trays, in the title furnace in which a number of the workpiece are placed on the trays provided in multistage form and are heated. CONSTITUTION: For trays 7 prov...  
JP2001151524A
To provide a glass substrate supporting mechanism for a firing furnace which is capable of uniformly firing glass substrates.The glass substrate supporting mechanism 6 for the firing furnace which is kept at a specified temperature, cont...  
JP2001123218A
To provide a jig for heat treatment, by which the deformation can be reduced by uniformly cooling an annular member. The annular member 12 is fitted into the inside of a restricting ring 40 and also, supported from the lower side by the ...  
JP2001082880A
To minimize heat dissipation loss at the terminal part of a tube by a method wherein a driving plate is attached to a graphite pipe indirectly while a flexible atmosphere seal assembly, a heating chamber and a heating body are provided o...  
JP3136747B2
PURPOSE: To improve a mechanical strength, facilitate manufacturing and reduce cost of a transporting roll set in a furnace in which a heated item is supported and transported within an industrial furnace such as a continuous vacuum furn...  
JP3133324B2  
JP3130009B2
To provide a single-wafer heat-treating device, with a simple structure, which can improve in-plane uniformity of the temperature of an object to be treated without making the structure complicated or increasing the cost. In a single waf...  
JP2000355751A
To inexpensively and securely prevent the sticking of webs after sintering by thermally spraying alumina on a substrate such as a carbon sheet and a stainless sheet to form an alumina film of a specified thickness, interposing and lamina...  
JP3116437B2
PURPOSE: To prevent the breakage of grids and legs when the grids are expanded thermally by a method wherein the legs of at least three corners among four corners of the grids are supported through spherical bodies capable of being rolle...  
JP2000340501A
To surely control the temperature of a substrate by adjusting the parameters of a heat-treatment gas, that is supplied to the substrate in accordance with a prescribed heat treatment period for adjusting the temperature of the substrate ...  
JP3086677B2  
JP2000510434A
(-- 57) summary -- it being the method of creating the ceramic products which have a thickness of at least about 2.5 cm, and, : containing the following (a) * (d) -- (a) silicate material, a metal oxide, and a nitride --Choose a ceramic ...  
JP2000213869A
To provide a continuous melting furnace that has a rapid refining speed and a high refining effect. In a melting furnace, a raw material is melted by an upper burner 25 and the melted object of the raw material is superheated by a lower ...  
JP2000509102A
(57) Summary book invention indicates the method of putting the object of a hard metal or a cermet on a graphite tray, and sintering it. Other heat-resistant oxides of YO containing ZrO not more than 20wt%, or the amount of considerable ...  
JP2000161865A
To prevent a heat insulation member and a heating structure from being corroded and deteriorated in a ceramic furnace.The present furnace is adapted such that a high heat conductive ceramic molded structure is disposed between a space 5 ...  
JP2000154973A
To provide a shelf plate for burning integrated with a post that can further suppress the misalignment between a shelf plate body and a post body.While, at a specific position at the inner-circumference side of an upper surface 50 of a s...  
JP2000150281A
To provide a method for burning a ferrite core mold without deformations and color change, without requiring selection steps. This method includes the steps of obtaining a ferrite core molding 10 of a flattened cylinder shape, having a f...  
JP2000146455A
To suppress fusion welding between ceramics and a support member by burning the ceramics in a burning furnace while the ceramics are placed on the support member made of a heat-resistant alloy. A number of tiles 12 being piled up in a st...  
JP2000124211A
To provide a single-wafer heat-treating device, with a simple structure, which can improve in-plane uniformity of the temperature of an object to be treated without making the structure complicated or increasing the cost.In a single wafe...  
JP3030240B2
To provide a device for holding a billet while maintaining the conditions required for the billet. This holding device is for induction heating of the billet of an alloy having thixotropic property and for holding and transferring this b...  
JP2000052461A
To provide a kiln tool excellent in processability, which has good processability and processing precision, and has high durability in high temperature/strong oxidizing and corrosive environment. A kiln tool excellent in processability i...  
JP2999001B2
PURPOSE: To improve a graphite tubular furnace for atomic absorption spectroscopy with a specimen support. CONSTITUTION: The graphite tubular furnace 1 comprises zones 2, 3, 4, 5, 6, 5', 4', 3', 2' arranged almost at the center of the fu...  
JP2000012447A
To provide a rapid and uniform heat treatment apparatus and its method for treating by heat the whole substrate without causing electrostatic breakdown. A plurality of minute protecting pins 93 are provided on the upper face of a heat-tr...  
JP2000009390A
To prevent positional shift of a material to be treated when it is subjected to forced gas cooling after heating while being mounted on a tray by providing a retaining member for preventing or correcting positional shift of the material ...  
JP2984985B2
To obtain a diffusion tube supporting heat insulating material, improved in the workability of the same upon removing the same from a diffusion furnace as well as in the yield of semi-conductor products and not generating dust from the s...  
JP2985331B2  
JPH11314908A
To provide a graphitization furnace capable of efficiently executing continuous production of graphite by suppressing the generation of a bridge or removing the generated bridge. This graphitization furnace continuously produces the grap...  
JPH11293330A
To provide a lance sealing device in a vacuum degassing equipment, in which the wear of a gland packing is prevented and the sealability is improved and the manufacture and the fitting of the lance and a guide rail therefor can be simpli...  
JP2967589B2  
JP2964299B2
PURPOSE: To exactly take out a heated work by reducing an installation area by a vertical furnace and efficiently heating a work while rotating a gear plate which places the work. CONSTITUTION: A work placing rotor 9 having a plurality o...  
JP2951479B2  
JP2599145Y2  
JPH11199922A
To provide a bright annealing furnace in which atmospheric gas surely penetrates into the inner surface of a material and decarburization can effectively be prevented and also, the uniform quality product can be obtd., by forming the sui...  
JP2923804B2  
JP2596221Y2  
JP2877681B2  
JP11060332A
To provide a jig for firing without causing reation with a material to be fired such as a deflective yoke and without causing a dimensional change in the material to be fired. The jig used for firing a ferrite member such as a defective ...  
JPH113868A
To prevent variations in the temperature of wafer side of a lamp anneal device during the process of annealing. The measured temperature of a wafer 16 at the time of annealing is monitored. The electrical power of a lamp heater 14 for he...  
JPH10339581A
To enable a heat treatment to be carried out at a higher temperature than that attained where eutectic mixture material is formed between heat treated material and a floor material by a method wherein a contacting position between a bott...  
JPH10311686A
To provide a shelf assembling structure for a furnace in which damages to a column due to cracks are not caused easily, and a beam can be attached and detached easily, and which can correspond to various sized and sectional beams and all...  
JPH10303113A
To provide a heat-treating device which can effectively prevent the positional deviation of a substrate, when the substrate is elevated and lowered while the substrate is supported by supporting pins. A heat-treating device is provided w...  
JPH10192304A
To provide a fired matter supporting body which enables the simple and rapid adjustment of supplying pins with high exactness. This fired matter supporting body for dental technical working has one sheet of supporting plate 10 which has ...  
JPH10182243A
To provide a method for producing a ceramic long sized body having an improved shape accuracy by reducing variation in the accuracy of shape and suppressing deformation of the ceramic long sized body in a firing process. This ceramic lon...  
JP2770439B2  
JPH10168505A
To provide a low density molybdenum sintered compact capable of inexpensively forming a low density and high strength product with a high purity, its production, and a product using the sintered compact. The low density molybdenum sinter...  
JPH10168555A
To obtain parts and a jig stably usable for a gas carburizing furnace in an environment is which thermal impact is severe for a long time by subjecting parts and a jig made of metals to calorizing treatment and forming an Al cementation ...  

Matches 501 - 550 out of 1,192