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WO/2017/063467A1 |
A method for observing settlement and convergence of a tunnel, which relates to the field of methods for observing settlement and convergence of tunnels. The method for observing settlement and convergence of a tunnel comprises: 1) selec...
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WO/2017/051579A1 |
Provided is a technique for performing a film thickness inspection on a film including an active material formed on a current collector in a non-contact manner during a process of manufacturing a lithium-ion battery. This film thickness ...
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WO/2017/051621A1 |
The purpose of the present invention is to provide a charged particle beam device capable of predicting the three-dimensional structure of a sample, without affecting the charge of the sample. The present invention provides a charged par...
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WO/2017/043198A1 |
An optical film which comprises a layer of a cured product of a curable composition, and wherein the curable composition contains a light emitting material having a molar extinction coefficient of 10,000 (L/mol·cm) or more at the wavele...
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WO/2017/043942A1 |
The present invention relates to a method for analyzing a three-dimensional specimen, the method comprising: a component measurement step for measuring components constituting a three-dimensional specimen by identifying an energy spectru...
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WO/2017/035663A1 |
A system and method are provided for mapping spatial and temporal measurements of motion constrained objects in a scene, e.g., vehicles. The method comprises determining a location parameter, and/or other interesting properties, for each...
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WO/2017/024765A1 |
A display apparatus (10), a display system and a resolution adjustment method. The display apparatus (10) comprises a display screen (11), and also comprises: a distance sensor (12) and an adjustment unit (13), wherein the distance senso...
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WO/2017/022004A1 |
The purpose of the present invention is to provide a method and device for measuring pattern height, with which it is possible for the height of a pattern included in a specific layer of a multilayered structure to be rapidly and accurat...
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WO/2017/022818A1 |
An antenna and a reflection plate are coupled with a coupling member with both being rotated in the same direction by a waveguide rotation means, and the reflection surface of the reflection plate is tilted to the antenna side or the sid...
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WO2017010617A1 |
The present invention relates to a detection method for detecting a change in an underground environment. The detection method of the present invention comprises the steps of: repeatedly sensing an alternating current signal, propagated ...
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WO/2016/198690A1 |
The present invention relates to a millimeter or terahertz wave sensor for providing inline inspection, preferably including but not limited to continuous monitoring of objects, for example thin sheet dielectric material.
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WO/2016/187623A1 |
Disclosed is a method and an apparatus for x-ray techniques using structured x-ray illumination for examining material properties of an object. In particular, an object with one or more regions of interest (ROIs) having a particular shap...
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WO/2016/185012A1 |
The invention relates to a method for characterizing the microstructure of a strip or sheet (8) of metal. The object of providing an improved method for characterizing the microstructure of a strip or sheet of metal is achieved by a meth...
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WO/2016/167166A1 |
A charged particle device is configured to be provided with: a charged-particle source; a blanking electrode unit (10) for blanking a charged particle beam emitted from the charged-particle source; a deflection electrode unit (11) for de...
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WO/2016/158576A1 |
The through-silicon via (TSV) forming production system according to the present invention includes: X-ray inspection devices (10, 11, 12) that acquire images showing the shape of a through-silicon via (70) formed in a silicon substrate ...
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WO/2016/132452A1 |
A terahertz wave measurement device (100) is provided with an irradiation means (110) for irradiating terahertz waves (THz) onto an object of measurement (10), a detection means (130, 151) for generating a first detection signal by detec...
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WO/2016/121265A1 |
The purpose of the present invention is to provide a method for observing a sample using a charged particle microscope such that a combined image can be generated from a plurality of images detected by a plurality of detectors while the ...
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WO/2016/121073A1 |
The purpose of the present invention is to provide a pattern matching device and computer program that carry out highly accurate positioning even if edge positions and numbers change. The present invention proposes a computer program and...
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WO/2016/117103A1 |
The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a rec...
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WO/2016/117104A1 |
The purpose of the present invention is to provide a pattern measurement apparatus that appropriately assesses patterns formed by patterning methods for forming patterns that do not exist on photomasks. In order to achieve this purpose, ...
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WO/2016/098350A1 |
Provided are a remote ice-thickness measurement method, a remote ice-strength measurement method, a remote measurement method, a remote ice-thickness measurement device, a remote ice-strength measurement device, and a remote measurement ...
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WO/2016/096442A1 |
The invention relates to a method and apparatus for determining a size information of food ingredients. The method comprises a step of applying (110) to the food ingredients an electrical field having a given radio frequency, the electri...
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WO/2016/098795A1 |
In this method, in order to detect internal defects with high accuracy and without causing the overlapping of adjacent TSV transmission images when inspecting, using an X-ray transmission image, internal defects in a TSV formed in a semi...
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WO/2016/092641A1 |
The objective of the present invention is to provide a height measurement device capable of highly accurate measurement in the depth direction of a structure on a sample. To achieve this objective, proposed are a charged particle beam de...
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WO/2016/093555A1 |
An X-ray apparatus includes a collimator comprising a lamp and configured to adjusting an irradiation region of X-rays radiated from an X-ray source; an image acquirer configured to acquire an object image by imaging an object while the ...
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WO/2016/092553A1 |
System and method for stabilizing physical object in upright position using vacuum for exposure of full or at least maximum of its faces, 2D photographing and 360° interactive view of the object with single session of photographing. The...
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WO/2016/081277A1 |
A sensing system provides real time information as to the location of a stand in a tubular string at a predetermined elevation such as where the rams are located. This allows a determination of whether the upsets are aligned with the ram...
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WO/2016/058095A1 |
The method of inspecting a degraded area of a metal structure covered by a composite repair generally comprises operating a Compton scattering inspection device onto the degraded area, including emitting a beam of radiation particles dir...
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WO/2016/053677A1 |
An apparatus and method of measuring an object (having at least two edges) projects a plurality of x-ray images of the object. At least two of the plurality of x-ray images are projected from different directions relative to the object. ...
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WO/2016/045235A1 |
A mark belt real-time depth-measuring device based on a radar detection technology comprises a pipeline (3), a mark belt (2) laid above the pipeline (3), and a radar detecting instrument (1). A thin layer of aluminum foil is packaged in ...
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WO/2016/043471A1 |
Disclosed are a microscope measuring device and method using X-ray holography for a large-area sample. The disclosed invention comprises the steps of: acquiring a holographic diffraction image for acquiring an autocorrelation signal of a...
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WO/2016/039041A1 |
To address the problem in which when measuring the overlay of patterns formed on upper and lower layers of a semiconductor pattern by comparing a reference image and measurement image obtained through imaging by an SEM, the contrast of t...
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WO/2016/019444A1 |
A system and method are described for controlling and monitoring access to restricted areas, such as mass transportation means (underground trains, trains, airports, ships and the like), commercial buildings, schools, factories, data cen...
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WO/2016/016957A1 |
The purpose of the present invention is to provide: a pattern height measurement device capable of high-precision measurement of the dimensions of a fine pattern, in the height direction; and a charged particle beam device. In order to...
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WO/2015/191415A9 |
Disclosed is an improved device and method to evaluate the status of a material by scanning an area that overlaps a region of the material under evaluation. The device and method are operative to identify a leakage of a first material in...
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WO/2016/016967A1 |
The primary purpose of this invention is to provide a method whereby the thickness of slag can be measured with a high degree of precision without depending on the operator. This invention uses a microwave distance meter that uses an ant...
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WO/2016/012799A1 |
An apparatus (2) for determining thickness of refractory material (4) lining a metal vessel (6) is disclosed. The apparatus comprises a radiation source (16) for emitting radiation through a metal wall of the vessel and into the refracto...
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WO/2016/003291A1 |
A system and method that permits measuring properties and thickness of a dielectric layer, particularly a dielectric layer close to a pipeline wall, and more particularly fluids flowing inside a pipe is provided. The present invention at...
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WO/2016/002341A1 |
The purpose of the present invention is to provide a pattern measurement method and pattern measurement device for achieving highly accurate measurement in the depth direction of a pattern. The present invention is a pattern measurement ...
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WO/2015/198926A1 |
The purpose of the present invention is to provide a pattern measurement condition setting device which appropriately sets a measurement condition for finding out an appropriate exposure condition. To achieve the purpose, proposed is a p...
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WO/2015/200112A1 |
Methods and systems for feed- forward of multi-layer and multi-process information using XPS and XRF technologies are disclosed. In an example, a method of thin film characterization includes measuring first XPS and XRF intensity signals...
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WO/2015/190435A1 |
In order to provide technology in an endoscope system to make it possible to find the insertion length of an endoscope device by means of a simple configuration, there is provided an endoscope system that acquires images of the inside of...
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WO/2015/188125A1 |
A test method to assess in vitro or in vivo the bioactivity of a material such as dental or medical biomaterial. The method includes forming an assembly (10) having at least one first material (20) and at least one second material (30), ...
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WO/2015/182224A1 |
In semiconductor-device production-process management using a CD-SEM, when a measurement position has been at the bottom of a hole pattern or groove pattern, the signal level from the bottom of the pattern has been relatively diminished ...
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WO/2015/164417A1 |
Systems and approaches for silicon germanium thickness and composition determination using combined XPS and XRF technologies are described. In an example, a method for characterizing a silicon germanium film includes generating an X-ray ...
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WO/2015/163307A1 |
In order to measure the shift in alignment between an upper layer pattern and a lower layer pattern with high accuracy by scanning with an electron beam, an electron beam is scanned over an area that includes first and second patterns on...
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WO/2015/159705A1 |
Provided is a charged particle beam device capable of identifying the position of an initial core at a high accuracy even in a fine line and space pattern formed using SADP multiple times. The charged particle beam device has: a detector...
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WO/2015/152483A1 |
The present invention relates to a graphene analysis method and, more particularly, to a technique regarding a method for accurately measuring and determining, on the basis of the number of layers, the thickness of graphene having an ult...
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WO/2015/133005A1 |
A detection wave from a transmitting/receiving means is guided to the interior of a shaft furnace via an antenna and a reflecting plate, and when a reflected wave from the surface of a charging material is reflected by the reflecting pla...
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WO/2015/125504A1 |
In order to provide a pattern-measuring device and a computer program that quantitatively evaluate the effects brought about by the presence of pattern deformations in a circuit, this invention proposes a pattern-measuring device that me...
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