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WO/2013/069057 |
With the present invention, an object is imaged at a first direction and a first angle of elevation, resulting in a first x-ray image being acquired, and the object is imaged at a second direction and a second angle of elevation, resulti...
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WO/2013/069636 |
In a scanning electron microscope (SEM), a pyramid pattern formed on a sample is scanned from four directions and SEM images are obtained, then the landing angles of the electron beams are calculated from the SEM images and averaged to d...
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WO/2013/067590 |
A process for vibration analysis, including the steps of: receiving synchronized motion measurements of particle motion in two or three orthogonal dimensions over a selected period of time at a plurality of different measurement location...
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WO/2013/065475 |
The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy...
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WO/2013/065143 |
In order to eliminate cumulative errors in an imaging range generated on the basis of the movement resolution of a moving stage, and improve the positional accuracy of defect detection in liquid crystal array inspections, this liquid cry...
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WO/2013/065142 |
In order to reduce the false detection of detector pixel coordinates when detector pixel coordinates corresponding to pixels are detected from detector pixel coordinates obtained from a scanned image, in a liquid crystal array inspection...
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WO/2013/059720 |
An apparatus for measuring an enclosed space. The apparatus is comprised of a support pole; a fixture engaged with the support pole; a driving device engaged with the fixture to rotate the fixture around the support pole and translate th...
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WO/2013/057115 |
The invention relates to a system for controlling the quality of an object leaving a production facility. According to the invention, the system comprises: a chamber including an inlet port through which the object to be inspected is ins...
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WO/2013/051456 |
The objective of the invention is to provide a measuring method that can determine pattern contours and dimensions with high precision even if an object to be measured shrinks due to electron beam radiations. In order to achieve this obj...
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WO/2013/052283 |
One embodiment relates to a method of classifying a defect on a substrate surface. The method includes scanning a primary electron beam over a target region of the substrate surface causing secondary electrons to be emitted therefrom, wh...
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WO/2013/047047 |
The present invention is a cross-sectional shape estimating method for samples being inspected and has a fitting step (s102) for fitting a plurality of shape models (200) to cross-sectional shape data (100) for a sample being inspected (...
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WO/2013/035364 |
An objective of the present invention is, while reducing calculation time required for OPC model calibration, to increase precision. A pattern measurement device comprises: a storage unit which stores mask edge data of a semiconductor ci...
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WO/2013/027453 |
In the present invention, at the time of measuring, using a CD-SEM, a length of a resist that shrinks when irradiated with an electron beam, in order to highly accurately estimate a shape and dimensions of the resist before shrink, a shr...
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WO/2013/028237 |
Method for imaging of a hydraulic fracture generated by fluid injection. Microseismic data of the hydraulic fracture treatment is collected and analyzed for the location and magnitude of microseismic events. The seismic energy or moment ...
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WO/2013/027644 |
This charged particle beam device is characterized by controlling a deflector in a manner so as to correct the amount of scanning deflection of a charged particle beam between: a first detection condition for detecting a secondary charge...
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WO/2013/024827 |
The present invention has: a char feeding hopper body (53a) for feeding separated char (55) toward a coal gasifier (14); a char communicating tube (111) provided in the vertical axis direction so as to be communicated with a floor part o...
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WO/2013/015204 |
In the cases of automatically measuring the lengths of FEM wafers, not only the sizes of subjects the lengths of which are to be measured are often varied from those obtained when the subjects are registered, but also the patterns of the...
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WO/2013/015040 |
In order to provide a charged particle beam apparatus and measuring method that enable the dimensions of a pattern bottom to be measured at high accuracy even with a high-aspect ratio structure, the present invention provides a method fo...
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WO/2013/005134 |
Methods and systems may image an object of interest using one or more probes. More specifically, such exemplary methods and systems may deliver electromagnetic energy (e.g., microwave energy) using a transmitting antenna to the object wh...
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WO/2013/001247 |
The invention relates to a method for identifying a material, which comprises the following steps: measuring (200) a spectrum of electromagnetic radiation transmitted through the material to be identified; determining (202, 204) at least...
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WO/2012/159870 |
The measurement accuracy during the determination of a thickness (d) of rolling stock (4), in particular a rolling strip or a metal plate, is improved by remotely measuring a base measurement value (G) for the thickness (d) by means of a...
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WO/2012/157160 |
In the cases of selecting areas to be analyzed on the basis of inspection data, highly significant defects have not been selected to be analyzed. Furthermore, there has been the problem of affecting defects depending on the shapes and si...
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WO/2012/152738 |
The invention relates to a method for determining dimensions of one or more workpieces by means of image processing algorithms. In order to make it possible to determine dimensions extremely accurately, images taken from a section throug...
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WO/2012/153462 |
The present invention is a method for determining the film thickness of an SOI layer in an SOI wafer having at least an insulation layer and an SOI layer consisting of silicon single crystals formed on the insulation layer, the method fo...
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WO/2012/147132 |
An irregular shape detecting apparatus for detecting irregular shapes on a plane comprises: a plurality of pairs of transmission/reception antennas that are so set up as to emit electromagnetic waves in directions in which the directiona...
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WO/2012/136114 |
A thickness and convexity detection device for a plate strip comprises a C-shaped frame (9), two radiating sources (3,4) which are arranged in the upper arm of the C-shaped frame (9) and distributed at intervals in the width direction of...
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WO/2012/130398 |
The invention relates to a method for measuring at least one physical property of a rod-shaped item (11-11") of the tobacco processing industry conveyed at least in some sections in a conveying line (10) in a longitudinal-axis direction ...
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WO/2012/125476 |
Apparatuses, methods, software, and systems for analyzing homogeneous samples containing signal-emitting entities, such as, but not limited to, radioisotopes, are disclosed. The apparatuses mainly involve sample-container apparatuses tha...
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WO/2012/116429 |
Various system and methods for estimating the position of one or more radiation blocking objects on a surface are disclosed. A plurality of radiation sources and radiation sensors are positioned about the surface. A plurality of sectors ...
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WO/2012/117997 |
The purpose of the present invention is to provide an image processing device for forming a pattern resembling an actual image on the basis of design data or a simulation image. To achieve this purpose, image processing device is propose...
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WO/2012/114411 |
The purpose of the present invention is to provide a pattern dimensions measurement method that accurately measures the amount of shrinkage for a pattern to be shrunk and the original dimensions prior to shrinking, and to provide a charg...
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WO/2012/108278 |
An X-ray inspection device is provided with an X-ray irradiation unit (10) for irradiating an object (1) with X rays from a plurality of directions and capturing a plurality of X-ray transmission images having a disparity therebetween, a...
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WO/2012/104921 |
This width-direction end position measuring device is a width-direction end position measuring device for measuring the position of a width-direction end of a band-shaped member that passes through an enclosed space surrounded by a plura...
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WO/2012/098605 |
Provided is a high-speed circuit pattern inspection scheme requiring a short inspection preparation time and capable of defect assessment by detecting an image of only one die, and also provided is a device therefor. With reference to de...
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WO/2012/090465 |
Provided is a reference member which has, on the same plane, a cross-section of a multilayered film comprising alternately superposed different materials, a plurality of first mark patterns which have been disposed parallel to the multil...
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WO/2012/085500 |
An excavator (10) has a quick coupler (24) coupled to the distal end (22) of its excavator arm (12). The quick coupler (24) can be operated from the cab (14) of the excavator (10), and is connected to a warning control system (48) or an ...
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WO/2012/085401 |
The present invention relates to a device (100) for measuring a degree of misalignment of objects that are contained in a diaphragm (2) and aligned mainly in a predetermined direction or in a predetermined plane, the measuring device (10...
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WO/2012/085500 |
An excavator (10) has a quick coupler (24) coupled to the distal end (22) of its excavator arm (12). The quick coupler (24) can be operated from the cab (14) of the excavator (10), and is connected to a warning control system (48) or an ...
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WO/2012/081428 |
This electron scanning microscope comprises an electron source (102),electron optical systems (109, 110, 111) for exposing a sample (113) to primary electron beams (138), an electron detector (127) for detecting signal electrons (139) em...
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WO/2012/068831 |
A method for on-line measuring non-chromic coating thickness on steel strip surface includes the following steps: selecting two water soluble compounds which contain element P, Ca, Ti, Ba or Sr and which are not reactive with the non-chr...
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WO/2012/062343 |
The invention relates to a measuring device and to a method for measuring and/or detecting layer thicknesses and/or defects in one or more layers of a wafer stack at a multiplicity of measurement points distributed on the wafer stack, an...
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WO/2012/057198 |
The purpose of the present invention is to provide a computer program and an image processing apparatus that detects a defect such as a scum at high speed and with high precision. In order to achieve the purpose, the present invention pr...
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WO/2012/056638 |
In the case of measuring a pattern having a large process fluctuation, correct measurement has not been performed when noises, such as a pattern that is not a subject to be measured, and dirt, are present at the periphery of the pattern ...
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WO/2012/053650 |
A model based measurement method is capable of estimating a cross-sectional shape by matching various pre-created cross-sectional shapes with a library of SEM signal waveforms. The present invention provides a function for determining wh...
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WO/2012/039480 |
Provided is a method for inspecting a honeycomb structure, which is provided with: a step of obtaining a computed tomography image of a first cross-section, which is at a distance (Z1) from one end surface (112d) of a honeycomb structure...
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WO/2012/027914 |
A negative-pressure wound treating system based on wound exudate management includes a liquid collecting bottle (5) for collecting wound exudate; a negative-pressure wound treating appliance (8) comprising a negative-pressure source (6) ...
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WO/2012/029844 |
An objective of the present invention is to provide an image processing device and computer program that accurately identify correspondence points either between layout data and contour lines or between contour lines, when carrying out m...
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WO/2012/026321 |
Provided is a pipe thickness measurement device (10) provided with: a luminance profile acquisition unit which acquires the luminance profile in a direction crossing a pipe to be measured of a radiographic image of the pipe; an outer dia...
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WO/2012/014356 |
Beforehand, the device characteristic parameters of each critical dimension SEM are measured, the cross-sectional shapes of an object to undergo dimension measurements are estimated by a model-based library (MBL) matching system, dimensi...
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WO/2012/014363 |
The present invention relates to a device (303) for setting image acquisition conditions for charged particle beam devices or the like. An image integration unit (402) forms a plurality of images with a number of different integrations (...
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