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WO/2022/204560A1 |
An interferometer and an imager may include a tunable light source, a beam splitter, a digital imager, and a processor system. The tunable light source may be configured to emit a beam. The beam splitter may be configured to direct the b...
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WO/2022/200210A1 |
A measuring device (10) for interferometrically measuring a form of a surface (12) of an inspection object (14) in relation to a reference form (41) comprises: - a diffractive optical element (30) for producing an inspection wave (32) fr...
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WO/2022/200209A1 |
The invention relates to a measurement device (10) for interferometric measurement of a shape of a surface (12) of a test subject (14) in relation to a reference shape, comprising a diffractive optical element (30) for generating a test ...
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WO/2022/197418A1 |
An interferometric overlay tool may include an interferometer and a controller. The interferometer may include one or more beam splitters to split illumination including one or more wavelengths into a probe beam along a probe path and a ...
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WO/2022/196050A1 |
The digital projector according to an embodiment includes: a light source for irradiating a workpiece with light; a low-magnification camera mechanism for imaging a projected image of the workpiece produced by being irradiated by the lig...
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WO/2022/191201A1 |
A physical quantity measurement device (1) comprises: a first light source (11) configured such that a first light (L1) can be emitted; a second light source (12) configured such that a second light (L2) can be emitted; an optical sensor...
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WO/2022/192247A1 |
A gas leak detector includes a solar detector and a signal filter. The solar detector generates an electrical response by interfering a light signal with a solar signal and detecting a resultant interference signal. The signal filter is ...
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WO/2022/191921A1 |
In some variations, an interferometric frequency-reference apparatus comprises: an atom source configured to supply neutral atoms to be ionized; an ionizer configured to excite the neutral atoms to form ionized atoms; an ion collimator c...
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WO/2022/189665A1 |
The invention relates to a device for converting a photonic signal to be analysed, the device having two output branches (45, 50), an input for receiving a photonic signal to be analysed and for conveying a portion of the photonic signal...
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WO/2022/189660A1 |
The invention relates to a device for converting a photonic signal to be analysed, the device having two output branches (45, 50), an input for receiving a photonic signal to be analysed and conveying a portion of the photonic signal to ...
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WO/2022/188637A1 |
An imaging method for a direct electron detection camera. The method comprises: acquiring an original image of a frozen sample photographed by a direct electron detection camera (101); classifying clusters in the original image to obtain...
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WO/2022/185753A1 |
Provided is a high-speed, high-precision measuring device. A measuring device 100 measures a distance to a target object, and is provided with: a light source 110 for projecting light; a mirror 129; a beam splitter 121 for splitting the ...
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WO/2022/179776A1 |
The invention relates to a method and a device (10) for finding an optimized set of parameters for a measurement using a measurement device (12). For this purpose, in particular n*m measurements are carried out and assessed, preferably a...
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WO/2022/182319A1 |
This invention relates to the ability to measure the rolling angle of a reflective surface placed at a certain distance.
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WO/2022/175471A1 |
A method of creating a local oscillator light beam LO for a phase- resolved spectroscopy measurement comprises the steps of providing a first measuring light beam (1) and a second measuring light beam (2) being aligned to each other, cre...
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WO/2022/173240A2 |
An optical measurement apparatus, according to one aspect of the present invention, comprises: a universal metasurface on which light is incident; a polarizations sensor which measures the polarization state of light passing through the ...
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WO/2022/169442A1 |
A system includes a first interferometer to measure the shape of a first side of a semiconductor wafer, a pallet to hold the semiconductor wafer and expose the first side of the semiconductor wafer to the first interferometer, and three ...
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WO/2022/165582A1 |
In a general aspect, a device is disclosed for providing a reference frequency of light. The device includes a housing having a first opening and a second opening. A first optical window covers the first opening and is coupled to the hou...
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WO/2022/170256A1 |
Aspects of the disclosure relate to systems, methods, and algorithms to perform wavenumber linearization and dispersion correction in optical systems without the need for hardware modifications, empirical adjustments, precise mirror alig...
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WO/2022/170102A1 |
A high effective refractive index structure may include one or more high effective refractive index materials disposed on a substrate. The high effective refractive index structure configured to respond to a light received at the high ef...
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WO/2022/170160A1 |
A metrology frame configured to receive and secure a workpiece in preparation for an interferometric determination of a spatial profile of the workpiece with the use of one or more retroreflectors removably cooperated with the frame in k...
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WO/2022/162224A1 |
An OCT system is constructed on a micro optical bench or semiconductor optical bench. The present OCT system may use free space optics and avoid the use of fiber optics.
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WO/2022/165526A1 |
Methods, systems, and devices for generating resolution-enhanced space-domain image of a target sample based on optical coherent tomography (OCT) imaging technologies are disclosed. In an aspect, a system includes a processing platform c...
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WO/2022/162893A1 |
This machine tool comprises: a machining device provided with a main shaft to and from which a tool is attachable and detachable; and a measuring device capable of measuring the shape of an object by irradiating the object with first lig...
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WO/2022/152479A1 |
The invention provides an interferometer system comprising: - a light source configured to emit a first light beam and a second light beam; - an optics system configured to allow the first light beam to travel along a measurement path in...
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WO/2022/138716A1 |
Provided is an optical measurement system that can suppress noise and achieve higher-accuracy measurement. This optical measurement system includes a light source, an image sensor, and an optical system including a beam splitter that spl...
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WO/2022/140215A1 |
A photomask-inspection system includes a vacuum chamber and a stage, disposed in the vacuum chamber, to support a photomask and to translate the photomask horizontally and vertically. The system also includes an EUV objective, disposed i...
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WO/2022/137560A1 |
Provided is an optical measurement system that is capable of suppressing noise and achieving more accurate measurement. This optical measurement system comprises a light source, an image sensor, and an optical system comprising a beam sp...
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WO/2022/135852A1 |
An interferometer head is disclosed. A first portion of an input radiation beam is incident on a first partially-reflective surface and reflected from a first reference surface towards a first output terminal. A second portion of the inp...
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WO/2022/133433A1 |
This disclosure generally relates to an optical coherence tomography (OCT) system. This disclosure particularly relates to an OCT system with a multi-pass dispersion compensation cell incorporated into its reference arm. This disclosure ...
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WO/2022/128966A1 |
Optical diffraction tomography microscope (2) comprising an illumination system (4) configured for transmitting a sample beam through a sample observation zone, a detection system (8) comprising at least one image sensor (54), and a wave...
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WO/2022/131612A1 |
The present invention has the following configuration. The present invention comprises: a laser optical frequency comb generation device for generating a comb-shaped multi-wavelength laser optical frequency comb having the same spacing; ...
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WO/2022/126198A1 |
The present invention relates to a method of reducing phase-error signal degradation in a characteristic spectrum produced by a Fourier Transform interferometer, comprising the steps of: (1) Receiving, upon the detector array, a light be...
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WO/2022/124373A1 |
A high-order harmonic observation device comprising: an output unit for outputting a first pulse light having a prescribed wavelength and a prescribed pulse width; an optical delay circuit to which the first pulse light is input, and whi...
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WO/2022/123705A1 |
Disclosed is an optical sensor in which components are integrated on a substrate. The optical sensor integrates, on one substrate, a low coherence light source such as a laser or SLD configured parallel to a substrate surface and a mirro...
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WO/2022/117207A1 |
The invention relates to a method for monitoring a process for machining a workpiece (W, W', W"), in particular laser welding, by means of a high-energy machining beam (50; 250), the method comprising the steps of: defining a machining f...
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WO/2022/111940A1 |
A method for calibrating spot positions on a mirror of an interferometer system including at least two pairs of interferometers to provide redundant measurement of rotational position of an object about a rotation axis, wherein the metho...
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WO/2022/112882A1 |
A system for providing accurate lateral mapping of images acquired via a scanning mechanism has a modulator synced to the imaging engine clock to generate image markers. The markers are then used to remove distortions and generate spatia...
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WO/2022/111928A1 |
The invention provides a positioning system to determine an absolute position of a moveable target relative to a reference, comprising an interferometer system with a first light source to emit light at a fixed frequency and a second lig...
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WO/2022/107128A1 |
An optical fiber for use in distributed vibration sensing has perturbations along its length. The perturbations may be applied externally to a mode field diameter of the optical fiber. Alternatively, the perturbations may be applied thro...
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WO/2022/106694A1 |
Presented is an interferometer (10) for the extensive measurement of a surface (108) or optical thickness of an optically smooth test object (122), the interferometer (10) being configured to simultaneously illuminate the optically smoot...
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WO/2022/103586A1 |
Disclosed herein is an endpoint detection having an optical bundle configured to emit light through a ceiling of a processing chamber. The optical bundle has a plurality of fibers configured to transmit the light from a light source towa...
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WO/2022/101643A1 |
An apparatus for optical coherence tomography, OCT, scanning is described. The apparatus provides a first signal, a reference signal, a photonics integrated circuit (11), and a means for analysing an interference signal. The photonics in...
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WO/2022/099200A1 |
An optical sensor readout Interrogates an optical sensor and includes: a microcavity sensor that receives an optical frequency comb, produces a post-sensor optical frequency comb from the optical frequency comb based on a physical pertur...
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WO/2022/096575A1 |
A photonic integrated circuit for use in hyperspectral spectroscopy. The photonic integrated circuit comprising: a multi-spectral laser source, configured to produce a multi-spectral optical signal; a modulator, the modulator configured ...
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WO/2022/094695A1 |
A method and a system for imaging a transient event, the method comprising passively recording spatiotemporal projections of the transient event in an angular range from -45° to +45°; and processing the recorded spatiotemporal projecti...
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WO/2022/091474A1 |
An optical coherence tomography (OCT) system for profilometry measurements of a specimen with a lateral resolution across the profilometry measurements is provided. The OCT system includes a line-field generator, an interferometer, and a...
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WO/2022/091508A1 |
The present invention provides a three-dimensional measurement device capable of measurement accuracy enhancement, and the like. This three-dimensional measurement device 1 comprises an interference optical system 3 for dividing incident...
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WO/2022/084150A1 |
The invention relates to an apparatus (1) for determining a distance, comprising an optical resonator (2), which has a plurality of resonant frequencies (3), and at least one radiation source (4), the spectrum of which comprises at least...
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WO/2022/079325A1 |
The present invention relates to a polarization-sensitive optical coherence tomography, also known as PS-OCT, measurement system capable of taking measurements with a miniaturized measuring unit, operating in a robust manner with respect...
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