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Matches 351 - 400 out of 3,692

Document Document Title
JP5650360B1
圧力変化測定装置1に備わる演算処理部30 は、差圧計測用カンチレバー4の出力信号に 基づいて、キャビティ10の内部圧力と測定 対象圧力との差圧を求める差圧算出部と...  
JP2014534417A
改良された静電容量型圧力計は、(a)共通 電極を有するダイヤフラムと、(b)中心電 極およびリング電極を有する電極構造体と、 前記ダイヤフラムが前記電極構造体に対...  
JP2014228354A
To provide a pressure sensor module and a pressure sensor unit which are excellent in reliability.A pressure sensor module 10 for detecting pressure of a fluid is provided. The pressure sensor module 10 includes: a package 20 provided wi...  
JP5634026B2  
JP2014531034A
本発明は、機械的な大きさ又は動的な大きさ を測定し或いは検出することを意図する微小 機械構造に関し、変形可能な膜(20)と、 支持基板(10)とを含み、膜(20)...  
JP2014209131A
To provide a distance measuring instrument and a method for enabling continuous distance measurement, easy handling and various usages by conquering defects of a dielectric sensor.In the distance measuring instrument having a sensor and ...  
JP5619425B2  
JP5609305B2  
JP5603426B2  
JP2014173976A
To enable detection of a pressure fluctuation to be performed with sufficient accuracy, to enable a detectable lower limit frequency to be reduced, and to detect a pressure fluctuation of a low frequency band with high sensitivity.A pres...  
JP2014160084A
To provide a pressure sensor integrated with high density.A pressure sensor includes: a measurement element 3 that converts a variable number mechanically measured into an electric signal; and a signal converter 4 that further processes ...  
JP5548531B2  
JP5551690B2  
JP5547894B2  
JP2014115098A
To prevent peeling of a junction of a sensor chip.An O-ring 13-1 is interposed between an internal surface 12-1b of a sensor chamber 12a and one surface of a sensor chip 11 (an external surface of a pedestal 11-4), while being pressed an...  
JP2014109483A
To seal a pressure transmission medium in a short time without generating residual air bubbles.A fine gap 11-2d is formed that opens to part of a peripheral part 11-2a1 of a recess 11-2a of a stopper member 11-2 to be communicated with a...  
JP2014106184A
To prevent peeling of a junction of a sensor chip.A sensor base 13-1 is joined to one surface of a sensor chip 11, and a sensor base 13-2 is joined to the other surface. One end of a pressure guidance pipe 14-1 is inserted and fixed into...  
JP2014106182A
To completely prevent a joint part of a sensor chip from peeling and to achieve reduction in size by employing a simple structure.In a meter body 12, a communication path (pressure lead path) 12g which guides measurement pressure P1 to a...  
JP2014106097A
To accurately detect impulse line blockage of a pressure detector for measuring pressure of a fluid via an impulse line, in consideration of the change of a plant gain, in a facility which determines a control output in accordance with a...  
JP2014106183A
To completely prevent a joint part of a sensor chip from peeling and to make reinforcement effect securer.A space (recessed part 12e) on the back side of a pressure reception diaphragm 14a for P1-side protection and a sensor chamber 12a ...  
JP2014102129A
To secure expected pressure resistance by suppressing a chip from deforming on the whole when excessive pressure is applied after a diaphragm is landed and thereby reducing generated stress at a diaphragm edge.A reinforcing layer 11-6 is...  
JP2014102108A
To prevent the joint part of a sensor chip from being peeled.The upper surface of a sensor chip 1 (the upper surface of a stopper member 1-2) is joined to an inner wall surface 2-1a in a sensor chamber 2-1 through an adhesive layer 4-1, ...  
JP5501806B2  
JP2014095558A
To provide a connection component for interconnecting two members by bringing them close to each other with a simple configuration, and provide a differential pressure/pressure transmitter capable of being downsized by attaching a main b...  
JP2014089171A
To solve the problem that hydrogen having invaded into a pressure and differential pressure transmitter from outside or internally generated hydrogen and hydrocarbons turn into foams in a pressure guiding path to invite drifting of indic...  
JP2014081222A
To reduce the generation of stress due to the restraint of a diaphragm, and to ensure expected withstand pressure.An inner edge L1 of a peripheral edge portion 11-6c of a holding member (a first holding member) 11-6 joined to one surface...  
JP2014081283A
To miniaturize a pressure sensor device.A pressure sensor device comprises: a housing 26 including a first pressure introduction passage 29, a second pressure introduction passage 30, and a connector terminal 22; a first pressure detecti...  
JP5460732B2  
JP5460731B2  
JP5455533B2  
JP2014048292A
To provide a pressure sensor with a differential capacitive output.A MEMS pressure sensor device is provided that can provide both a linear output with regard to external pressure and a differential capacitance output so as to improve th...  
JP5439716B2  
JP5430700B2  
JP5424415B2  
JP2014032186A
To properly detect a reference pressure for controlling a room pressure.A fine differential pressure transmitter includes: a differential pressure detection part for detecting a difference between pressure used as a reference and pressur...  
JP5416967B2  
JP5409965B2  
JP2014016350A
To provide a method for correcting an offset for a pressure difference measured using a differential pressure sensor situated in an air duct.A method for canceling an offset 100 by an output signal 96 of a pressure sensor 88, 90, 94 incl...  
JP5403858B2  
JP2014006141A
To improve earthquake resistance of a pressure sensor device.In the pressure sensor device, a first mounting part is provided on a side wall surface on a long-side side of a housing so that the whole of a fixing hole of the first mountin...  
JP2014006135A
To improve connection strength of wire bonding.The pressure sensor device comprises: a housing which has a first pressure introduction passage, a second pressure introduction passage, and a connector part; a first pressure detection elem...  
JP2013257225A
To provide a pressure transmitter improved in hydrogen blocking effect and reduced in susceptibility to the influence of hydrogen permeation by appropriately designing the fixed structure of a diaphragm coated with a hydrogen blocking fi...  
JP5365456B2  
JP2013542429A  
JP2013234959A
To provide a pressure sensor capable of downsizing a frame while protecting gauge resistor formation surfaces.Two sensor chips (11, 12) respectively include diaphragms (23, 33) and gauge resistors (24, 34) formed on surfaces (20, 30) opp...  
JP5343837B2  
JP5343677B2  
JP5329757B2  
JP5330703B2  
JP5309277B2  

Matches 351 - 400 out of 3,692