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Matches 501 - 550 out of 688

Document Document Title
JP06026966
PURPOSE: To provide a specified stable semiconductor thin film controlled in grain size of crystal grain by using a gas having a specified thermal conductivity as an atmospheric gas at crystallization, and conducting crystallization in t...  
JP06026967
PURPOSE: To induce a discharge in a short time. CONSTITUTION: The vacuum gage using an inverted magnetron comprises a glow lamp 36' for inducing a discharge in a vacuum space 15 in a cathode 12. The lamp 36' is constituted so that ultrav...  
JP06018348
PURPOSE: To reduce gas generation rate out of a meter itself and power consumption and improve the soft X-ray limit. CONSTITUTION: Semisphere concave part 11 is provided in the center of a disk shape flange 10 and gold is plated on the s...  
JP05306962
PURPOSE: To ensure reproducibility and stability of sensitivity by fixing the path of an electron directed from a cathode toward an electron collecting means. CONSTITUTION: A tubular object is provided with an external electrode 12 and a...  
JP05288628
PURPOSE: To obtain an improved hot cathode ionization pressure gauge. CONSTITUTION: The hot cathode ionization pressure gauge comprises a hot cathode filament 10, a diaphragm-like control electrode 12, an acceleration electrode 14 and an...  
JP05264389
PURPOSE: To obtain an improved inversion magnetron type cold cathode ionization vacuum gauge. CONSTITUTION: The ionization vacuum gauge having a vacuum gauge head comprises an outer cathode sleeve 1 having an inlet 2 communicating with t...  
JP05203524
PURPOSE: To enhance the measuring accuracy of a vacuum meter, to keep sensitivity in repeated measurement and to reproduce sensitivity between a plurality of vacuum meters by selecting meter sensitivity fluctuating by the condition of th...  
JP05094792
PURPOSE: To measure the vacuum degree of an ion source highly sensitively and highly precisely without using an additional vacuum gauge by installing a microchannel plate in a part of an electrode against which ions strike, detecting and...  
JP05062569
PURPOSE: To make sensing free from influence of an eventual switching surge, etc., and at a low degree of vacuum by coupling a light emission part with a light reception part and a vacuum part of a vacuum switch apparatus through a photo...  
JP05021037
PURPOSE: To provide a vacuum gauge capable of utilizing an ultra-high vacuum or extreme-high vacuum and having simple structure. CONSTITUTION: A needlelike cathode 3 having a tip curvature radius of 1μm or less and an anode 2 opposite t...  
JP05001964
PURPOSE: To provide a vacuum leak testing device-capable of performing a leak test automatically and efficiently in a short time. CONSTITUTION: The degrees of vacuum are measured by multiple vacuum gauges 7 fitted to a vacuum tank 1 and ...  
JP04278430
PURPOSE: To provide a vacuum gauge having two integrated circuits connected in a half bridge circuit for indicating the pressure reduction of gas due to a change in the thermal conductivity of gas. CONSTITUTION: One of two integrated cir...  
JP04196038
PURPOSE: To prevent system-down when a welding process by attaching a cover having a sealing mechanism to a vacuum gage sensor connecting part upon measurement of the degree of vacuum in an electron gun. CONSTITUTION: Although the degree...  
JP04160357
PURPOSE: To calibrate a quadruplex electrode mass analyser using gas of known concn. by setting an analyzing chamber and a piping system to the background of an ultrahigh vacuum region. CONSTITUTION: At first, an analyzing chamber 2 and ...  
JP04132131
PURPOSE: To predict the life expectancy of a vacuum bulb which is in the state of being mounted on a vacuum circuit breaker, by controlling to a specific range the rising time constant of the pulse electric current of a large electric cu...  
JP04087231
PURPOSE: To easily and precisely detect vacuum deterioration by measuring an electromotive force generated by a difference in oxygen partial pressure between both sensitive surfaces of an oxygen sensor by a measuring instrument to detect...  
JP03280615
PURPOSE: To generate a large pulse current whose width is variable by generat ing sequentially a pulse from plural pulse generating circuits each filter element consists of coils and capacitors. CONSTITUTION: The generator is provided wi...  
JP03238334
PURPOSE: To fix the pressure of a gas by bringing a microbridge construction having a resistor sensor film in proximity to a heater film supported by a board and operated electrically into contact with a fuel gas to be detected, and meas...  
JP03223418
PURPOSE: To exactly measure the vacuum degree in a furnace body without errors by selecting plural vacuum gage sensors mounted to the furnace body by the operation of a changeover valve and communicating these sensors with the inside of ...  
JP03215727
PURPOSE: To make reliable usage possible even where the distance between a measurement place and a monitoring place is relatively long by constituting a measurement value detector as a transmitter. CONSTITUTION: A transmitter 1 of a meas...  
JP03195935
PURPOSE: To detect leakage from an object to be tested in a testing container by using a pump device incorporating a mass spectrometer, a primary vacuum pump, and a spiro-molecular pump and making the atoms of a rare gas to flow toward t...  
JP03068441
PURPOSE: To sufficiently degas by positively charging the metallic wall and bringing the electrons from the hot cathode of a vacuum gauge into collision with the inner wall of a metallic wall. CONSTITUTION: A heating electric power sourc...  
JP03042534
PURPOSE: To produce one or more output signal suitable for processing in a microprocessor by providing a comparator with a signal feedback loop having a digital/analog(DA) signal converter. CONSTITUTION: A heat flow 1 is added by an adde...  
JP03041297
PURPOSE: To improve maintainability in vacuum insulation piping for forming a insulation vacuum layer around an internal pipe for moving ultra low tempera ture fluid by means of an external pipe by providing a means to check the insulati...  
JP02307043
PURPOSE: To supply a gas component in a wide range of pressure without requiring a pressure lowering stage by leading a gas generated in a vacuum chamber to an optical excitation and analyzing part through a connection part. CONSTITUTION...  
JP02266242
PURPOSE: To provide an inexpensive tuning fork quartz pressure gauge which is constructed in a solid structure, can limit the influence of interference, and can measure pressure with high accuracy by providing a mounting and supporting s...  
JP02266243
PURPOSE: To enable a pressure gauge to measure the pressure of a gas without relying much upon the type of the gas by measuring signals from a heat conductivity gauge and a gas abrasion gauge and processing the measured results as a comm...  
JP02228535
PURPOSE: To perform the substantial compensation depending upon the temperature of a resonance frequency by combining with the output signal of a measured crystal and the output signal of a reference crystal. CONSTITUTION: Since the pres...  
JP02158029
PURPOSE: To detect a reduction in degree of vacuum of a vacuum interrupter in a position separated from the vacuum interrupter by leading a discharge light generated at the time of reducing the degree of vacuum of the vacuum interrupter ...  
JP02158028
PURPOSE: To detect a reduction in degree of vacuum certainly with no attenuation in an optical fiber by detecting a light by a discharge caused on either of the fixed side or the movable side in the leaf initial time of the reduction in ...  
JP02103843
PURPOSE: To enable constant measurement of a vacuum degree curve by providing a contactor wherein a brush and a contact contact with each other, which makes a vacuum element and a vacuum gauge conductive when the rotary part is retating,...  
JP02010165
PURPOSE: To prevent the occurrence of a conversion error of a current-voltage converting circuit and to permit it to be used in full dynamic range by providing a guard element connected with the transistors of a PNP and NPN in parallel a...  
JP01301993
PURPOSE: To carry out vacuum measurement with molecular density at a high level by installing a filament and an ion collector inside the spatial portion in a circumferential groove provided on the rotary cylinder side of a screw pump. CO...  
JP01277698
PURPOSE: To make a working mode in an optional state selectable by making a second mounting part of a second vacuum pump free of attachment or detachment to or from a first mounting part of a first vacuum pump. CONSTITUTION: A mounting h...  
JP63264833
PURPOSE: To prevent the erroneous detection by receiving the signal wave-form caused by the electric discharge occurring in the fixed region and obtained by an antenna as one wave-form and counting the number of them to judge the defecti...  
JP63176694
PURPOSE: To eliminate the necessity for providing a vacuum gage, by obtaining a degree of vacuum in a turbo molecular pump from a phase difference between a current and voltage in an induction motor, which drives a rotor, to be displayed...  
JP63016538
PURPOSE: To make the degree of vacuum in and around a sample part or the like inside a scope measurable without deteriorating the capacity of the electron microscope, by setting up the specified electrode group in a vacuum measuring spot...  
JP62299735
PURPOSE: To obtain a small-sized, stable sensor by forming a heat radiation layer on the 1st optical waveguide formed on a substrate and a heat insulation layer on the 2nd optical waveguide, and supplying light beams which have a specifi...  
JP62287126
PURPOSE: To obtain a power source of simple constitution for a grid which is small in power consumption by adding a switch to the charging circuit of a triple voltage rectifying circuit and enabling the triple voltage rectifying circuit ...  
JP62218834
PURPOSE: To measure pressure consistently from atmospheric pressure to superhigh vacuum area with a small single type apparatus, by carrying a mechanical vibrator type manometer and an ionization type manometer on a single flange while a...  
JP62211534
PURPOSE: To improve the reliability and to realize sufficiently practical use in terms of economy by providing a gas concentration switch with plural operation set values which differ stepwise and monitoring the operation time between re...  
JP62185139
PURPOSE: To enable the monitoring of vacuum free from effecting influence on shut down performance by the start of discharge within a discharge tube, by connecting a discharge tube which starts a discharge at a higher vacuum than that wi...  
JP62182636
PURPOSE: To extremely reduce a measuring error due to the change in the temp. of a diaphragm type vacuum gauge, by covering a gauge frame body with a shield frame body through a vacuum space. CONSTITUTION: A gauge frame body 1 is covered...  
JP62145138
PURPOSE: To measure the pressure from an atm. pressure region up to a high vacuum region with one kind of vacuum gage by making use of the moisture monitoring effect that the pulverized particle film of metallic titanium on a crystal res...  
JP62144037
PURPOSE: To achieve a higher impact resistance, by providing a protective circuit adapted to protect a vibrating circuit from abnormally high voltage and large current by discharging between a vibrating electrode and the vibrating circui...  
JP62137533
PURPOSE: To enable the measurement of vacuum pressure of 102W1-5Torr, by providing a driving means of a vibration body and a means of detecting the position thereof on a vibration plate of tuning fork type vibrator comprising a parallel ...  
JP62049232
PURPOSE: To enable the measurement of vacuum of a vacuum working chamber even during the bleeding of a gas from an ion collector, by arranging an introduction bar connected to a current introducing section outside the vacuum at both ends...  
JP62043530
PURPOSE: To positively detect the lowering of a vacuum degree and to enable the detection at a point in time while the vacuum degree is still high, by detecting discharge light at the time of discharge in a first vacuum gap with the ligh...  
JP62024122
PURPOSE: To enable accurate pressure measurement, by surrounding a gauge bowl with a conducting screen of the earth potential to eliminate mutual interfer ence with other devices during the use of an ion gauge bulb. CONSTITUTION: A filam...  
JP62019729
PURPOSE: To measure the gaseous pressure in a device without contacting by measuring the emission intensity of the specific chemical species in plasma. CONSTITUTION: The device is constituted of an interference filter 5 which allows the ...  

Matches 501 - 550 out of 688