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Matches 501 - 550 out of 1,582

Document Document Title
JP3462238B2
PURPOSE: To provide a sensitivity correction method of a gyro capable of correcting sensitivity change accompanying a change with the passage of time of the gyro as it is mounted on a moving body and securing precision necessary for navi...  
JP3452913B2
To provide a vacuum gage using a Peltier element. The vacuum gage using a Peltier element for measuring the pressure in a vacuum tank comprises a signal generator 1 for generating a current flowing in the Peltier element, a current meter...  
JP3421951B2  
JP3434813B2
To accurately measure vacuum pressure. A vacuum gauge comprises an electron supply source 16, an open anode 18 for forming an anode space, an ion collector electrode 20 for collecting ions formed by a collision of electrons with gas mole...  
JP2003149069A
To provide a vacuum switch which can be operated when a prescribed degree of vacuum is reached and to provide a vacuum evacuation device using the vacuum switch as well as to provide an ion-type vacuum gage.A switching element 18 which i...  
JP2003083831A
To detect a leakage current flowing into a live part interphase caused by deterioration of an insulating material, in a vacuum circuit breaker having a three-phase integrally molded insulating frame.A conductor 8 is disposed on a live pa...  
JP2003065877A
To provide an ultrahigh vacuum gage capable of adjusting and measuring offset derived from a gage head and the whole measuring system, and an ultrahigh vacuum measuring method using the gage.In this ultrahigh vacuum gage, a condition whe...  
JP2003065875A
To provide an ultrahigh vacuum measuring method capable of removing the influence by electrons and the influence by ions.This method is constituted as follows: a vacuum gage for ionizing gas molecules by electron impact at an ion source ...  
JP3403845B2
PURPOSE: To provide a method and a vacuum gauge for ultra-high vacuum which can accurately measure ultra-high vacuum not more than about 10-11Pa by removing an ESD(electronically stimulated desorbed) ions. CONSTITUTION: In an ultra-high ...  
JP2003050176A
To accurately measure vacuum pressure. A vacuum gauge comprises an electron supply source 16, an open anode 18 for forming an anode space, an ion collector electrode 20 for collecting ions formed by a collision of electrons with gas mole...  
JP3400885B2
PURPOSE: To provide a flange mount-type hot cathode ionization vacuum gauge of long life which can measure stably even under a high pressure or even when performing degassing frequently and can be made compact. CONSTITUTION: The gauge ha...  
JP3396726B2
To enhance measuring sensitivity and accuracy in a BA-type ionization vacuum gauge. In the BA-type ionization vacuum gauge 10, an ion collector electrode 16 in an open grid 12 is formed into a loop shape, and the loop surface thereof is ...  
JP2003042884A
To provide a vacuum measuring apparatus capable of substantially shortening aging time. The vacuum measuring apparatus is provided with both a vacuum gauge connected to a vacuum processing chamber and a controller connected to the vacuum...  
JP2003021567A
To provide a micro high-vacuum pressure sensor, which is housed inside a low-pressure microchip enclosure and which can be manufactured by a well-known microchip manufacturing technique.The micro pressure sensor uses an electric field ge...  
JP2003021566A
To provide a silicon-diaphragm type vacuum pressure sensor device, by which a pressure region up to 13.3 kPa from 0.01 Pa can be measured continuously.The diaphragm-type vacuum pressure sensor device is provided with a first silicon-diap...  
JP3385624B2
PURPOSE: To precisely guide a moving body through a passage by displaying an actual image in addition to map information. CONSTITUTION: When there is some input from an input device 6, images from an image pickup device 5 are stored on a...  
JP3385392B2
PURPOSE: To provide a vacuum sensor which is simple in structure, small-sized, and besides can measure wide range of vacuum pressure with by itself by counterposing plural sets of diaphragm electrodes and conductive film electrodes with ...  
JP2003004572A
To accurately and easily assemble a quadrupole section of a partial pressure vacuum gauge using a jig.The partial pressure vacuum gauge with a quadrupole section employs an assembling jig and an assembling method by which electrode rods ...  
JP2003004571A
To protect a crystal gauge of a combination gauge from heat radiated from an ion gauge.In the combination gauge in which the crystal gauge is arranged near the ion gauge having a thermal filament, the crystal gauge is surrounded by a pie...  
JP3359941B2  
JP2002340720A
To provide a vacuum gage pressure corrector which is usable together with an existing ionization vacuum gage controller to have a pressure correcting function.The vacuum gage pressure corrector is connected to a vacuum gage having a self...  
JP2002340719A
To provide a vacuum gage using a Peltier element.The vacuum gage using a Peltier element for measuring the pressure in a vacuum tank comprises a signal generator 1 for generating a current flowing in the Peltier element, a current meter ...  
JP2002318166A
To provide an electrostatic capacity type vacuum sensor allowing the change of a measuring pressure region without changing the thickness of an elastic structure part of a diaphragm electrode and allowing the measuring pressure region of...  
JP3336384B2  
JP3358394B2
PURPOSE: To resume the leak test effectively by lowering the background level at a mass spectrometric section quickly even when a large quantity of He is mixed into an oil in an oil-sealed rotary vacuum pump due to gross leak. CONSTITUTI...  
JP2002267560A
To provide a manufacturing method capable of manufacturing high- reliability pressure sensor by establishing a patterning technology capable of forming a conductive substrate of a pressure sensor and a corrosion resisting metal thin film...  
JP2002528777A  
JP2002528983A  
JP2002528775A  
JP2002528776A  
JP2002520613A  
JP3323004B2
PURPOSE: To provide a small and highly sensitive pressure sensor excellent in environment resistance. CONSTITUTION: A pressure sensor 20 is arranged so as to face an opening 14 communicated with a space 12 being a measuring object, and t...  
JP3280981B2  
JP2002122498A
To provide a simple method for measuring gas pressure and a low-cost device for the method applicable to a pressure reduced atmosphere and having excellent measuring accuracy and responsiveness.This method and device for measuring the pr...  
JP3300775B2
PURPOSE: To provide a field emission type vacuum gauge which has an extremely simple structure and small size and can accurately measure a pressure in an ultra-high vacuum region or lower than the region. CONSTITUTION: A constant-current...  
JP2002508836A  
JP2002071500A
To provide a method and an apparatus using a crystal oscillator which can always measure pressure accurately without replacement and cleaning of the crystal oscillator.In the method and the apparatus measuring gas pressure based on the d...  
JP2002506974A  
JP2002039902A
To enhance measuring sensitivity and accuracy in a BA-type ionization vacuum gauge.In the BA-type ionization vacuum gauge 10, an ion collector electrode 16 in an open grid 12 is formed into a loop shape, and the loop surface thereof is a...  
JP2002025398A
To provide a pressure measurement device which is free from vacuum leakage due to erosion as in use for a ground electrode.By putting a metal block 32 between an insulating part 31 such as ceramics and a ground electrode 33 absorbing dif...  
JP3260721B2
To provide an inexpensive and practical diaphragm vacuum gauge in which the measuring range of the degree of vacuum is widened and the work for measuring the degree of vacuum can be enhanced. The diaphragm vacuum gauge comprises a first ...  
JP2001343302A
To provide a heat loss measuring instrument that measures gas pressure under a certain environment and has an accurate pressure measuring range with one measuring instrument from a low pressure to a high pressure.This heat loss pressure ...  
JP2001525060A  
JP2001330543A
To solve problems so far experienced in measuring the concentration of a mixed gas, for example, that the mixture ratio (concentration) can not be accurately measured when the pressure of the mixed gas is different from the atmospheric p...  
JP2001324403A
To provide a vacuum measurement device having small size and small individual difference in characteristics and capable of stable mass production.In a vacuum measurement device for measuring the pressure of gas by heating a filament touc...  
JP2001324398A
To provide a capacitance type vacuum sensor having resistance against reactive gas, high quality, and excellent mass productivity.The problems are solved by this corrosion resistant vacuum sensor equipped with a corrosion resistant diaph...  
JP2001305292A
To prevent the reduction in breakdown voltage by magnetic field in a high-voltage apparatus such as electron gun to be set in a magnetic field. In this high-voltage apparatus, a negative potential part 1 and a positive potential part 2 a...  
JP3239817B2
To provide a vacuum pressure measuring method and device for accurately and simply measuring vacuum pressure at a reduced pressure part. Water in a container 3 being connected to a reduced pressure part 1 where pressure should be measure...  
JP2001517784A  
JP2001517313A  

Matches 501 - 550 out of 1,582