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JP02266242 |
PURPOSE: To provide an inexpensive tuning fork quartz pressure gauge which is constructed in a solid structure, can limit the influence of interference, and can measure pressure with high accuracy by providing a mounting and supporting s...
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JP02266243 |
PURPOSE: To enable a pressure gauge to measure the pressure of a gas without relying much upon the type of the gas by measuring signals from a heat conductivity gauge and a gas abrasion gauge and processing the measured results as a comm...
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JP02228535 |
PURPOSE: To perform the substantial compensation depending upon the temperature of a resonance frequency by combining with the output signal of a measured crystal and the output signal of a reference crystal. CONSTITUTION: Since the pres...
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JP02158029 |
PURPOSE: To detect a reduction in degree of vacuum of a vacuum interrupter in a position separated from the vacuum interrupter by leading a discharge light generated at the time of reducing the degree of vacuum of the vacuum interrupter ...
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JP02158028 |
PURPOSE: To detect a reduction in degree of vacuum certainly with no attenuation in an optical fiber by detecting a light by a discharge caused on either of the fixed side or the movable side in the leaf initial time of the reduction in ...
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JP02103843 |
PURPOSE: To enable constant measurement of a vacuum degree curve by providing a contactor wherein a brush and a contact contact with each other, which makes a vacuum element and a vacuum gauge conductive when the rotary part is retating,...
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JP02010165 |
PURPOSE: To prevent the occurrence of a conversion error of a current-voltage converting circuit and to permit it to be used in full dynamic range by providing a guard element connected with the transistors of a PNP and NPN in parallel a...
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JP01301993 |
PURPOSE: To carry out vacuum measurement with molecular density at a high level by installing a filament and an ion collector inside the spatial portion in a circumferential groove provided on the rotary cylinder side of a screw pump. CO...
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JP01277698 |
PURPOSE: To make a working mode in an optional state selectable by making a second mounting part of a second vacuum pump free of attachment or detachment to or from a first mounting part of a first vacuum pump. CONSTITUTION: A mounting h...
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JP63264833 |
PURPOSE: To prevent the erroneous detection by receiving the signal wave-form caused by the electric discharge occurring in the fixed region and obtained by an antenna as one wave-form and counting the number of them to judge the defecti...
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JP63176694 |
PURPOSE: To eliminate the necessity for providing a vacuum gage, by obtaining a degree of vacuum in a turbo molecular pump from a phase difference between a current and voltage in an induction motor, which drives a rotor, to be displayed...
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JP63016538 |
PURPOSE: To make the degree of vacuum in and around a sample part or the like inside a scope measurable without deteriorating the capacity of the electron microscope, by setting up the specified electrode group in a vacuum measuring spot...
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JP62299735 |
PURPOSE: To obtain a small-sized, stable sensor by forming a heat radiation layer on the 1st optical waveguide formed on a substrate and a heat insulation layer on the 2nd optical waveguide, and supplying light beams which have a specifi...
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JP62287126 |
PURPOSE: To obtain a power source of simple constitution for a grid which is small in power consumption by adding a switch to the charging circuit of a triple voltage rectifying circuit and enabling the triple voltage rectifying circuit ...
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JP62218834 |
PURPOSE: To measure pressure consistently from atmospheric pressure to superhigh vacuum area with a small single type apparatus, by carrying a mechanical vibrator type manometer and an ionization type manometer on a single flange while a...
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JP62211534 |
PURPOSE: To improve the reliability and to realize sufficiently practical use in terms of economy by providing a gas concentration switch with plural operation set values which differ stepwise and monitoring the operation time between re...
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JP62185139 |
PURPOSE: To enable the monitoring of vacuum free from effecting influence on shut down performance by the start of discharge within a discharge tube, by connecting a discharge tube which starts a discharge at a higher vacuum than that wi...
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JP62182636 |
PURPOSE: To extremely reduce a measuring error due to the change in the temp. of a diaphragm type vacuum gauge, by covering a gauge frame body with a shield frame body through a vacuum space. CONSTITUTION: A gauge frame body 1 is covered...
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JP62145138 |
PURPOSE: To measure the pressure from an atm. pressure region up to a high vacuum region with one kind of vacuum gage by making use of the moisture monitoring effect that the pulverized particle film of metallic titanium on a crystal res...
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JP62144037 |
PURPOSE: To achieve a higher impact resistance, by providing a protective circuit adapted to protect a vibrating circuit from abnormally high voltage and large current by discharging between a vibrating electrode and the vibrating circui...
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JP62137533 |
PURPOSE: To enable the measurement of vacuum pressure of 102W1-5Torr, by providing a driving means of a vibration body and a means of detecting the position thereof on a vibration plate of tuning fork type vibrator comprising a parallel ...
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JP62049232 |
PURPOSE: To enable the measurement of vacuum of a vacuum working chamber even during the bleeding of a gas from an ion collector, by arranging an introduction bar connected to a current introducing section outside the vacuum at both ends...
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JP62043530 |
PURPOSE: To positively detect the lowering of a vacuum degree and to enable the detection at a point in time while the vacuum degree is still high, by detecting discharge light at the time of discharge in a first vacuum gap with the ligh...
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JP62024122 |
PURPOSE: To enable accurate pressure measurement, by surrounding a gauge bowl with a conducting screen of the earth potential to eliminate mutual interfer ence with other devices during the use of an ion gauge bulb. CONSTITUTION: A filam...
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JP62019729 |
PURPOSE: To measure the gaseous pressure in a device without contacting by measuring the emission intensity of the specific chemical species in plasma. CONSTITUTION: The device is constituted of an interference filter 5 which allows the ...
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JP61296231 |
PURPOSE: To enable accurate and efficient inspection, by applying the output of a high frequency generator to an article to be inspected and judging the degree of discharge generated at the time of the application of said output on the b...
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JP61278732 |
PURPOSE: To make operability and responsibility satisfactory by employing an optical fiber as vibrating members, leading the rays of light in the interior of the optical fiber, emitting it out of the other end and detecting optically the...
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JP61277030 |
PURPOSE: To make it possible to perform the calibration and capacity measurement of a vacuum gauge in a pressure region lower than 10-4Torr with good accuracy, by correlating the hydrogen transmissivity of a nickel membrane with the temp...
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JP61272624 |
PURPOSE: To improve operability, responsibility and further, measuring accuracy of the titled gage by oscillating a diaphragm forcedly and detecting the amplitude optically and detecting a vacuum degree. CONSTITUTION: The periodical elec...
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JP61265544 |
PURPOSE: To obtain a vacuum gauge constituted so that a negative ion is formed by adhering an electron having extremely small kinetic energy to a gas molecule and collected by an ion collector to be measured, by mounting a negative ion f...
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JP61240135 |
PURPOSE: To enable the measurement of a vacuum degree from a low vacuum region to a medium vacuum region, by providing a vacuum sensor wherein a heat generating resistor element and a temp. measuring resistor element are formed on a memb...
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JP61231423 |
PURPOSE: To measure atmosphere pressure over a wide range with good accuracy, by providing a means for exciting a plate shaped vibrator and a means for detecting displacement due to the vibration of an exciting body. CONSTITUTION: A tors...
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JP61230038 |
PURPOSE: To detect the pressure of a gas at high accuracy irrespective of the type of the gas by disposing an exothermic body and a heat receiving body with the specific position relationship so as to face each other and calculating pres...
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JP61226628 |
PURPOSE: To facilitate electric discharge even at an area with low pressure by providing a filament to the inside of a vacuum gage and making a thermion and gas generating from the filament a trigger of the electric discharge. CONSTITUTI...
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JP61215930 |
PURPOSE: To make small the equivalent serial resistance, to make high the sensitivity, to make wide the vacuum degree measuring scope, to make small- sized and to make light by sticking the piezoelectric plate further to the piezoelectri...
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JP61215929 |
PURPOSE: To obtain the vibrator for a vacuum sensor which is small in equivalent serial resistance, small-sized, strong in the impact and excellent in the reliability by arranging the exciting electrode with a different polarity at both ...
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JP61215932 |
PURPOSE: To make small the equivalent serial resistance, to make high the sensitivity, to make wide a vacuum degree measuring scope, to make small-sized and to make light by arranging the exciting electrode at both edge parts and the cen...
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JP61215933 |
PURPOSE: To obtain a vibrator which makes wide the vacuum degree measuring scope, is small-sized, strong in the impact and excellent in the reliability by making the width of the central part of the vibrator arm smaller than the width of...
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JP61215931 |
PURPOSE: To obtain a vibrator for the vacuum sensor which is small-sized and excellent in the reliability by making the width near the tuning fork base wider than the arm width of the tuning fork tip part, and arranging the exciting elec...
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JP61145429 |
PURPOSE: To obtain a measuring element normally operated under the ferromagnetic field of a nuclear fusion reactor, receiving the reduced effect of a secondary electron and capable of measuring the rapid change in gas pressure, by arrang...
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JP61130840 |
PURPOSE: To achieve a high measuring accuracy, by a method wherein a fitting metal for connecting a filament is supported at one end thereof so as to be movable with respect to an insulator and a thermal stress is absorbed by the fitting...
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JP61130485 |
PURPOSE: To make possible the control of a remaining gas in the stage of film formation regardless of the condition in a vacuum chamber by coupling an analysis chamber having a high vacuum evacuation system via a pressure conversion orif...
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JP61128139 |
PURPOSE: To calculate the real total pressure value of gas to be measured, by correcting a total pressure measured value by calculating not only the concn. of each componential gas from the ion current value of the gas to be measured cal...
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JP61107126 |
PURPOSE: To accurately calculate the vacuum degree of a vacuum pack type heat insulating material, by mounting a displacement sensor for detecting the deformation of the outer packing material of the heat insulating material in the vicin...
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JP61073047 |
PURPOSE: To obtain a small-sized vacuum sensor which is tolerant to a shock and has superior reliability by using a crystal resonator by selecting the cutting angle of the resonator which provides minimum force sensitivity regardless of ...
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JP61073044 |
PURPOSE: To obtain a vacuum sensor having a small size, strength to impact and excellent reliability by using a lithium niobate which is produced by selecting the cutting angle of the resonator to provided min. power sensitivity regardle...
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JP61073045 |
PURPOSE: To obtain a vacuum sensor having a small size, strength to impact and excellent reliability by using a lithium tantalate resonator which is produce by selecting the cutting angle of the resonator to provide min. power sensitivit...
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JP61073046 |
PURPOSE: To obtain a small-sized vacuum sensor which is tolerant to a shock and has superior reliability by using a crystal resonator by selecting the cutting angle of the resonator which provides minimum force sensitivity regardless of ...
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JP61057827 |
PURPOSE: To obtain a lithium niobate resonator having excellent reliability by cutting the Z plate of said resonator at the angle rotating 75W105° around the X-axis as the axis of rotation. CONSTITUTION: The flexuous mode lithium niobat...
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JP61035325 |
PURPOSE: To measure pressure without correcting the direction and intensity of a magnetic field by using a spherical electrode structure and gathering ions to a collector without reference to whether a magnetic field is present or not an...
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