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Matches 501 - 550 out of 1,568

Document Document Title
JP3385392B2
PURPOSE: To provide a vacuum sensor which is simple in structure, small-sized, and besides can measure wide range of vacuum pressure with by itself by counterposing plural sets of diaphragm electrodes and conductive film electrodes with ...  
JP2003004572A
To accurately and easily assemble a quadrupole section of a partial pressure vacuum gauge using a jig.The partial pressure vacuum gauge with a quadrupole section employs an assembling jig and an assembling method by which electrode rods ...  
JP2003004571A
To protect a crystal gauge of a combination gauge from heat radiated from an ion gauge.In the combination gauge in which the crystal gauge is arranged near the ion gauge having a thermal filament, the crystal gauge is surrounded by a pie...  
JP3359941B2  
JP2002340720A
To provide a vacuum gage pressure corrector which is usable together with an existing ionization vacuum gage controller to have a pressure correcting function.The vacuum gage pressure corrector is connected to a vacuum gage having a self...  
JP2002340719A
To provide a vacuum gage using a Peltier element.The vacuum gage using a Peltier element for measuring the pressure in a vacuum tank comprises a signal generator 1 for generating a current flowing in the Peltier element, a current meter ...  
JP2002318166A
To provide an electrostatic capacity type vacuum sensor allowing the change of a measuring pressure region without changing the thickness of an elastic structure part of a diaphragm electrode and allowing the measuring pressure region of...  
JP3336384B2  
JP3358394B2
PURPOSE: To resume the leak test effectively by lowering the background level at a mass spectrometric section quickly even when a large quantity of He is mixed into an oil in an oil-sealed rotary vacuum pump due to gross leak. CONSTITUTI...  
JP2002267560A
To provide a manufacturing method capable of manufacturing high- reliability pressure sensor by establishing a patterning technology capable of forming a conductive substrate of a pressure sensor and a corrosion resisting metal thin film...  
JP2002528777A  
JP2002528983A  
JP2002528775A  
JP2002528776A  
JP2002520613A  
JP3323004B2
PURPOSE: To provide a small and highly sensitive pressure sensor excellent in environment resistance. CONSTITUTION: A pressure sensor 20 is arranged so as to face an opening 14 communicated with a space 12 being a measuring object, and t...  
JP3280981B2  
JP2002122498A
To provide a simple method for measuring gas pressure and a low-cost device for the method applicable to a pressure reduced atmosphere and having excellent measuring accuracy and responsiveness.This method and device for measuring the pr...  
JP3300775B2
PURPOSE: To provide a field emission type vacuum gauge which has an extremely simple structure and small size and can accurately measure a pressure in an ultra-high vacuum region or lower than the region. CONSTITUTION: A constant-current...  
JP2002508836A  
JP2002071500A
To provide a method and an apparatus using a crystal oscillator which can always measure pressure accurately without replacement and cleaning of the crystal oscillator.In the method and the apparatus measuring gas pressure based on the d...  
JP2002506974A  
JP2002039902A
To enhance measuring sensitivity and accuracy in a BA-type ionization vacuum gauge.In the BA-type ionization vacuum gauge 10, an ion collector electrode 16 in an open grid 12 is formed into a loop shape, and the loop surface thereof is a...  
JP2002025398A
To provide a pressure measurement device which is free from vacuum leakage due to erosion as in use for a ground electrode.By putting a metal block 32 between an insulating part 31 such as ceramics and a ground electrode 33 absorbing dif...  
JP3260721B2
To provide an inexpensive and practical diaphragm vacuum gauge in which the measuring range of the degree of vacuum is widened and the work for measuring the degree of vacuum can be enhanced. The diaphragm vacuum gauge comprises a first ...  
JP2001343302A
To provide a heat loss measuring instrument that measures gas pressure under a certain environment and has an accurate pressure measuring range with one measuring instrument from a low pressure to a high pressure.This heat loss pressure ...  
JP2001525060A  
JP2001330543A
To solve problems so far experienced in measuring the concentration of a mixed gas, for example, that the mixture ratio (concentration) can not be accurately measured when the pressure of the mixed gas is different from the atmospheric p...  
JP2001324403A
To provide a vacuum measurement device having small size and small individual difference in characteristics and capable of stable mass production.In a vacuum measurement device for measuring the pressure of gas by heating a filament touc...  
JP2001324398A
To provide a capacitance type vacuum sensor having resistance against reactive gas, high quality, and excellent mass productivity.The problems are solved by this corrosion resistant vacuum sensor equipped with a corrosion resistant diaph...  
JP2001305292A
To prevent the reduction in breakdown voltage by magnetic field in a high-voltage apparatus such as electron gun to be set in a magnetic field. In this high-voltage apparatus, a negative potential part 1 and a positive potential part 2 a...  
JP3239817B2
To provide a vacuum pressure measuring method and device for accurately and simply measuring vacuum pressure at a reduced pressure part. Water in a container 3 being connected to a reduced pressure part 1 where pressure should be measure...  
JP2001517784A  
JP2001517313A  
JP2001255225A
To provide a static capacitance type vacuum sensor efficiently correcting a measurement error by thermal expansion and highly reliably measuring the pressure in the static capacitance type vacuum sensor possible of measuring a wide press...  
JP2001256910A
To provide a vacuum display device for an electron microscope sample cell capable of more accurately displaying the degree of vacuum in the sample cell than before without giving poor effect on the control of a primary electron beam or a...  
JP2001221701A
To calculate pressure within an accelerating tube on the basis of the indicated pressure of an ion pump or the like and to indicate it.This device for indicating the vacuum pressure of an electron microscope accelerating tube computes an...  
JP2001215161A
To measure pressures of a wide range in comparison with the prior art without greatly changing a structure of the conventional capacitive type vacuum sensor, in a capacitive type vacuum sensor having inside a pair of a diaphragm electrod...  
JP3218746B2
PURPOSE: To obtain a method (device) which can discriminate the reliability level of the measured results of the gas ratio of a cathode ray tube by a gas ratio measuring method (measuring instrument). CONSTITUTION: The gas ratio of a cat...  
JP2001215163A
To stably measure both a pressure from a middle level vacuum region to a high level vacuum region by an ionization type first measuring element and a pressure of a measurement region proper to a second measuring element.This ionization g...  
JP2001201417A
To provide a small-sized vacuum pressure sensor, which can measure a pressure range of 0.01 to 133 Pa with high sensitivity by improving the linearity of the relation between pressure and electrostatic capacity. The size and thickness of...  
JP3213125B2
PURPOSE: To perform approximate conversion of measurement signal by, when a measurement signal is approximate converted into a related value with a specific equation, using the relation among a collector current, base and emitter voltage...  
JP2001165907A
To provide a gas analyzer capable of measuring the total pressure of gases of a vacuum atmosphere along with the partial pressure ratio thereof and accurately measuring the total pressure of the gases.The gas analyzer consists of an ion ...  
JP2001153747A
To provide a simple exchange type vacuum sensor which has no need of replacing the entire vacuum sensor with a new vacuum sensor even when a pressure detecting element easy to be damaged by the measuring environment is broken in the vacu...  
JP2001133346A
To realize a cold-cathode discharge vacuum gauge hardly having a sudden change point of current in the pressure-discharge current characteristic and having a discharge current substantially proportional to pressure by setting the aspect ...  
JP2001133344A
To precisely measure the sealed gas pressure of a gas-sealed apparatus having a dispersion of electrode interval or a gas-sealed apparatus having a fluctuating electrode interval. This measuring method of gas pressure comprises applying ...  
JP3188752B2
PURPOSE: To allow highly accurate measurement even of low pressure by fixing a temperature sensor, to be connected with a temperature compensation circuit, directly to an inner cylinder thereby allowing effective temperature compensation...  
JP2001124651A
To provide a pressure measuring circuit capable of detecting the disconnection of a filament 25. This pressure measuring circuit 1 comprises a first amplifier 31 connected to a resistance bridge circuit 5 having the filament 25 of a Pira...  
JP3183122B2
To accurately monitor the degree of vacuum in a vacuum airtight container. An ionizing electron emitting part 112 constituted of an field emission array is formed on a cathode base plate 101, an anode electrode 106, an electron accelerat...  
JP2001116645A
To provide a resistance variable type degree of vacuum measuring device functioning even in high vacuum. This resistance variable type degree of vacuum measuring device 10 measures the degree of vacuum by arranging a sensing resistance R...  

Matches 501 - 550 out of 1,568