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JP61035324 |
PURPOSE: To minimize the tensile force or compressive force onto a resonator which is generated by a temp. change by cutting a Z plate at the angle rotating 30W60° the plate around the X-axis as the axis f rotation. CONSTITUTION: The li...
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JP61030735 |
PURPOSE: To attain miniaturization and to enhance the strength against impact, by cutting a bending mode AlPO4 vibrator at an angle rotating a Z-plate by 30W60° around an X-axis being a rotary axis. CONSTITUTION: Both end parts 3 of an ...
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JP61030736 |
PURPOSE: To attain miniaturization and to increase the strength against impact, by cutting a bending mode quartz vibrator at an angle for rotating a Z-plate by 20W70° around an X-axis being a rotary axis. CONSTITUTION: Both end parts 3 ...
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JP61014533 |
PURPOSE: To enable to measure a degree of vacuum correctly by making a jet of vapor by raising the temperature of mercury or oil with the normal temperature and low vapor pressure and discharging gas from the high vacuum side to the low ...
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JP60259924 |
PURPOSE: To enable a vacuum value measurement in an ion source without a vacuum meter for exclusive use, by installing an electric current shock type ion source repeller or detecting a current value of an electric current flowing in a co...
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JP60243936 |
PURPOSE: To enable the pressure of sealed gas to be measured easily and with high accuracy, by cold lighting a fluorescent lamp with a stabilizer constituted by a resonant stabilizer having a secondary no-load voltage waveform in which r...
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JP60227143 |
PURPOSE: To eliminate malfunction and to improve reliability by providing an elastic wave counter and discriminating unit between an amplifier and display unit and by discriminating the elastic wave due to mechanical switching of a vacuu...
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JP60225039 |
PURPOSE: To make it possible to detect the vacuum degree of a vacuum valve during the supply of a current, by using a coaxial cable as the output wire connected to a discharge detector and coaxially providing a conductor connecting an ea...
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JP60198432 |
PURPOSE: To obtain the device that generates drawing data which allows proximity effect corrections at a high speed by correcting the size of a drawing pattern according to an exposure level. CONSTITUTION: A bit pattern memory 4 is contr...
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JP60177235 |
PURPOSE: To calibrate the vacuum gauge accurately in an extremely high vacuum state by providing a shield plate for prevention against discharge to a vacuum gauge fitting part, and providing an orifice which has small conductance between...
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JP60168033 |
PURPOSE: To simplify the structure of the titled element to enable the drastic decrease of the weight by composing a member for supporting current introducing terminal and a vacuum measuring port of ferromagnetic materials to form a magn...
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JP60127472 |
PURPOSE: To make it possible to easily detect the disconnection in an electric circuit, by connecting a detection condenser to the terminal of the electric circuit and detecting the presence of absence of disconnection on the detection s...
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JP60098327 |
PURPOSE: To quicken response speed and to measure precisely a vacuum degree by detecting an acoustic impedance of a gas seen from a mechanical vibration part varying with the vacuum degree. CONSTITUTION: AC signal generated from an oscil...
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JP60093935 |
PURPOSE: To make it possible to measure a vacuum degree accurately by attaching a hot-cathode ionization vacuum gage to a standed cylindrical tube and preventing heat generation of the cylindrical pipe during the measurement of a vacuum ...
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JP60063854 |
PURPOSE: To enable the pressure of the gas charged in a fluorescent lamp to be easily measured without breaking the lamp by comparing a tube voltage waveform obtained when the lamp is ignited with the relationship between the pressure of...
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JP60057231 |
PURPOSE: To make a title pressure gauge small-sized, and to expand a pressure range in a friction type measurement by using a piezoelectric vibrator for executing a bend vibration of a piezoelectric substance. CONSTITUTION: A piezoelectr...
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JP60003533 |
PURPOSE: To miniaturize the titled element so that the element can be enclosed directly even into a small objective space and to detect the deterioration of a vacuum degree in said space by forming said element from an insulator board, a...
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JP59230245 |
PURPOSE: To enable determination of a partial pressure of below 10-11Torr to be performed by placing a modulation electrode between an analyzing part and an electron-impact-type ion source, installing hot cathodes along the outer circumf...
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JP59228141 |
PURPOSE: To make linearity excellent to the range of very low pressure and to improve excessively large pressure characteristics and temperature characteristics, by providing a strain yielding part between a peripheral thick fixed part a...
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JP59221634 |
PURPOSE: To measure a relatively small degree of vacuum easily by detecting a current supplied to a turbo molecule pump. CONSTITUTION: The turbo molecule pump 1 varies in rotating speed up to about 10-2 torr inlet pressure. The current s...
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JP59206733 |
PURPOSE: To monitor the degree of vacuum visually even if a vacuum apparatus is connected to high potential by forming a fluorescent material layer to be acted by an electric field increasing in accordance with the rise of the degree of ...
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JP59196436 |
PURPOSE: To make it possible to monitor the degree of vacuum at a low cost, by emitting light from the outside of a vacuum shielding device, and detecting the reflected light from the surface of a gas absorbing material. CONSTITUTION: A ...
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JP59187236 |
PURPOSE: To generate an alarm by a buzzer and to acutomatically open a switch apparatus when vacuum deterioration is generated, by attaching a vacuum sensor to a vacuum switch tube while always monitoring the vacuum degree of the vacuum ...
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JP59170761 |
PURPOSE: To obtain a vacuum gauge which senses gaseous molecules flying from a specific direction b laminating plural truncated conical umbrellia-form bodies on the gaseous molecule flow intake side of the vacuum gauge. CONSTITUTION: Plu...
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JP59166832 |
PURPOSE: To measure a pressure value in an optional place in a vacuum system by displaying a pressure value obtained by multiplying a coefficient to a pressure value shown by a signal obtained from a pressure measuring, sensor attached t...
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JP59141028 |
PURPOSE: To detect pressure change with good accuracy by preventing the excessive increase of the internal stress of a piezoelectric element, by providing a minute gap which disappears when force reaching a definite value or more is appl...
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JP59141027 |
PURPOSE: To attain to enhance measuring capacity by reducing a measuring error, by calculating pressure from the radio of the charging time of the ion current due to an integrator and the discharge time of the integrated amount due to el...
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JP59141026 |
PURPOSE: To attain to enhance the measuring accuracy of a vacuum degree, by applying constant high frequency voltage to one of piezoelectric elements fixed to an elastomer held in a freely vibratory state while detecting excited vibratio...
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JP59138933 |
PURPOSE: To prevent a cathode protecting function from malfunctioning by setting the lower estimated pressure measurement range for an automatic range vacuum gauge previously and limiting the lowest pressure measurement range when necess...
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JP59091330 |
PURPOSE: To prevent the effect of disturbance and to measure vacuum degree accurately, by providing a tubular electrode for preventing fluctuation in potential, which has the potential that is insulated from a potential of a part attache...
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JP59073748 |
PURPOSE: To obtain a vacuum meter capable of being used in an ultra-high vacuum apparatus to be cooled to a liquid helium temp. or an ultra-high vacuum apparatus made of an aluminum alloy, by utilizing ultraviolet rays as the ionization ...
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JP59058751 |
PURPOSE: To enable a true ionic current caused due to pressure to be read by constituting an extractor-type ionization vacuum gage by installing an ion-collecting electrode below an ion-drawing hole and inserting an ionic-current control...
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JP59054935 |
PURPOSE: To automate measurement and recording, by driving a rotary mechanism by motors, by measuring the height of mercury by a vertical moving mechanism wherein an optical sensor is used, and controlling them by a microcomputer. CONSTI...
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JP58202863 |
PURPOSE: To find the thermal conductivity of gas by a method wherein the temperature of a container is controlled to be kept at a specified level with a temperature measuring resistor therein, a current flows therethrough to shift the te...
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JP58169044 |
PURPOSE: To indicate atmospheric pressure in inverse proportion when a Pirani gauging resistance etc. is abnormal, by a method wherein a bridge circuit comprising a Pirani gauging resistance is combined with an offset amplifier and a fee...
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JP58139042 |
PURPOSE: To measure an extra-high vacuum, by a method wherein a vacuum receptacle housing a voltage applying electrode for measuring a discharge current is located in a magnetic field of a magnetic field generator, an alternating excitat...
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JP58139041 |
PURPOSE: To detect the degree of vacuum at the inside of a receptacle to be detected, by installing a vacuum receptacle so that it is connected to gas in the receptacle to be detected and a means for producing a gas molecule in the vacuu...
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JP58129338 |
PURPOSE: To perform a checking of the degree of vacuum without the need for a discharge electrode and an alternate power souce for a high voltage, by a method wherein deterioration in the degree of vacuum is detected by receiving an elec...
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JP58113830 |
PURPOSE: To simultaneously find a digital pressure display and a display indicating a pressure trend, by a method wherein a data on a trend of a pressure is found from a pressure value indicated by a vacuum gauge, and the data is display...
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JP58106431 |
PURPOSE: To shorten inspection time and to realize labor-saving inspection by providing an electrode for inspection to a case body which contains a vacuum breaker and deciding on whether its degree of vacuum is normal or not, and thus el...
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JP58090139 |
PURPOSE: To readily detect a poor vacuum simply by performing an opening and closing operation of a vacuum opening and closing device, by a method wherein a poor vacuum, produced due to a vacuum leak from a vacuum valve, is detected by g...
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JP58087439 |
PURPOSE: To measure the degree of vacuum in a cathode-ray tube, by a method wherein an emission flows between a cathode of an electron gun of a cathode- ray tube and an arbitrary electrode, and ion produced as a result of said flow is ga...
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JP58048829 |
PURPOSE: To previously prevent a vacuum apparatus from accidents with a simple configuration by incorporating a radiometer into the inside of the vacuum case of the vacuum apparatus and supervising the degree of vacuum by the rotation of...
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JP58022934 |
PURPOSE: To start discharge by a simple mechanism, by giving necessary mechanical impacts in the face of the outside wall of a vacuum gauge. CONSTITUTION: In the face of a part of the outside wall of a vacuum gauge 1, a plunger consistin...
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JP58021534 |
PURPOSE: To reliably generate discharge without the particular increase in a pulse output voltage of a discharge power source, by a method wherein a discharge trigger electrode is situated in a hollow part of an anode, and a potential, b...
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JP58021533 |
PURPOSE: To reduce an output power of a pulse discharge control power source, by a method wherein a discharge control electrode, extending into a part of a hollow part of an anode, is located so that it is insulated from a cathode, and t...
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JP57206843 |
PURPOSE: To enable a highly accurate detection of vacuum at low cost in a small size by arranging a Pockel's element which is made up of a crystal with a Z cut so as to transmit polarized light in the direction of Z ar a point where an e...
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JP57200830 |
PURPOSE: To measure the vacuum degree in a high vacuum region highly accurately by providing the constitution wherein only a discharge current component is extracted from the current value detected in a high voltage current. CONSTITUTION...
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JP57199929 |
PURPOSE: To make the measurement of the degree of vacuum more accurate and to make the detection of gaseous pressure near a target possible by providing magnetic poles near the opening of a conduit communicating with a vacuum gage in suc...
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JP57163836 |
PURPOSE: To accurately measure the working pressure of an apparatus which requires a wide pressure range by automatically correcting the zero point of a low-vacuum measurement system when a high-vacuum measurement system measures a degre...
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