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Patent Searching and Data


Matches 551 - 600 out of 1,569

Document Document Title
JP2001116645A
To provide a resistance variable type degree of vacuum measuring device functioning even in high vacuum. This resistance variable type degree of vacuum measuring device 10 measures the degree of vacuum by arranging a sensing resistance R...  
JP2001108555A
To provide a vacuum checking meter capable of accurately measuring the degree of vacuum in a pipe lining during resin impregnation and a method for impregnating a hardenable resin into the pipe lining whereby the hardenable resin can be ...  
JP3177292B2
PURPOSE: To obtain an improved hot cathode ionization pressure gauge. CONSTITUTION: The hot cathode ionization pressure gauge comprises a hot cathode filament 10, a diaphragm-like control electrode 12, an acceleration electrode 14 and an...  
JP3171410B2
PURPOSE: To measure absolute pressure within a wide range of gas with only a device and achieve miniaturization in simple structure in regard to a vacuum sensor for detecting an absolute pressure value from the change of an electrostatic...  
JP2001066209A
To guarantee a measurement of an absolute pressure value by providing a vacuum chamber, a vacuum gage and a vacuum pump, and selectively switching and connecting the gage to the chamber or the pump. A vacuum gage 6a is mounted at a port ...  
JP3170136B2
PURPOSE: To make it possible to ensure a prescribed detection reference position at all times without depending on the thickness and the size of a vacuum pack type heat insulating material, by providing an opening part in a setting stage...  
JP2001050845A
To obtain a power supply for an ionization in which the capacity, heat generation and size are reduced by realizing output characteristics corresponding to the voltage-current characteristics of an ionization load where the load current ...  
JP2001029772A
To correct amt. of deviation of zero point to appropriately control pressure in a vacuum chamber and to prevent defect of treatment of a base caused by change in pressure from being generated by a method wherein a low pressure condition ...  
JP2001015062A
To provide a control power source for a quadrupole electrode capable of operating a quadrupole mass spectrometer even in a region having a small mass number to be analyzed without using a diode vacuum tube.In this power source, a high fr...  
JP2001015060A
To prevent a filament from being discontinued by not carrying an excess inrush current when inputting a power source.When a switch 12 is turned on, a variable current source 10 raises a filament current in accordance with the potential r...  
JP2000348581A
To eliminate dispersion in detection characteristics and enhance the detecting accuracy by providing a means for adjusting the initial position of a plunger actuating a vacuum switching mechanism for detecting negative pressure of fluid....  
JP2000329634A
To measure a pressure of a wide range from an atmospheric pressure to a low pressure region by a single measurement sphere and improve a durability and a reliability, by constituting a grid to operate as a filament of a Pirani gage. A gr...  
JP3131689B2
To monitor accurately the real pressure in a plasma etching chamber by a method wherein a plasma having plasma molecules is fed in the chamber and the luminous intensity of one kind of the plasma molecule of the fed plasma is measured to...  
JP2000321161A
To suppress a measurement error caused by temperature change and to improve the measurement accuracy of a sensor by fixing a diaphragm electrode to a substrate so that it opposes a fixed electrode and controlling the surrounding of the d...  
JP2000315474A
To monitor the vacuum degree of the ion source of a mass spectrometer without mounting an ionization vacuum gage. In an ion source wherein a box electrode 12 for introducing a sample is disposed, the sample is ionized by introducing a he...  
JP3125002B2
PURPOSE: To provide a vacuum gauge capable of utilizing an ultra-high vacuum or extreme-high vacuum and having simple structure. CONSTITUTION: A needlelike cathode 3 having a tip curvature radius of 1μm or less and an anode 2 opposite t...  
JP2000306473A
To provide a vacuum insulated breaker device having high safety and a vacuum pressure monitoring and measuring function with enhanced reliability. A vacuum pressure measuring terminal 30 is installed on the side of a metal container 2 in...  
JP3124859B2
PURPOSE: To provide a vacuum leakage detecting sensor which has a small size and a wide application vacuum degree range and in which probe gas except helium gas can be used. CONSTITUTION: This vacuum leakage detecting sensor 1 comprises ...  
JP3124857B2
PURPOSE: To provide a sensor for measuring vacuum degree that allows significant miniaturization. CONSTITUTION: A vacuum degree measuring sensor 1 is provided with a substrate 2 that contains a hallow part 3, and a thermal insulation fil...  
JP2000292297A
To measure an igniter while protecting and controlling by preventing the igniter from operating under high pressure using an auxiliary pressure sensor. The pressure gauge comprises a gauge head 2 communicating with vacuum to be measured ...  
JP2000292296A
To provide an inexpensive and practical diaphragm vacuum gauge in which the measuring range of the degree of vacuum is widened and the work for measuring the degree of vacuum can be enhanced. The diaphragm vacuum gauge comprises a first ...  
JP2000269187A
To realize a method for accurately monitoring the treatment of substrate to be treated in a vacuum treatment chamber, using a gas in plasma state, utilizing a Pirani gage of fast response and a method for manufacturing a semiconductor de...  
JP2000249617A
To provide a fast-response Pirani gauge which is easily manufactured and has satisfactory durability in filaments and few individual differences. Filaments 8 to be provided inside the envelope of a Pirani gauge is constituted of three fi...  
JP3086230B2  
JP2000241289A
To provide a helium leak tester which can perform test in a short time even when the member of a specimen itself discharges a gas significantly. A specimen W composed of a resin part Wa and a non-resin part Wb and previously encapsulatin...  
JP2000241281A
To enhance accuracy of pressure measurement by setting power supply to a grid constantly within a specified range during measurement. A tubular coil-like grid 54 is secured to the end wall 53 of an insulator in a container 51 communicati...  
JP2000243325A
To develop an inspection process using an easier method without inspecting an image forming device by actually displaying an image. In an image forming device having an electron source having plural electron emitting elements 13 on a bas...  
JP3069975B2  
JP3069544B2  
JP2000509151A  
JP3088792B2
PURPOSE: To obtain a sensor device to be arranged at high density. CONSTITUTION: A sensor element 1 or a sensor element group is formed of a cathode layer 12 and a cathode end connected therewith, and an anode layer 14 opposing thereto. ...  
JP3086011B2
PURPOSE: To enable a true pressure to be measured and obtain an ionization vacuum meter which is also suited for measurement of pressure at an extremely high vacuum region. CONSTITUTION: A title item is provided with an electron source 1...  
JP2000133640A
To monitor accurately the real pressure in a plasma etching chamber by a method wherein a plasma having plasma molecules is fed in the chamber and the luminous intensity of one kind of the plasma molecule of the fed plasma is measured to...  
JP2000131164A
To avoid forming bubbles in a sealed liq. chamber to improve the vacuum resistance in a wide temp. range by keeping the pressure in the liq. chamber to be always higher than measured pressure likewise for the pressure in a reference pres...  
JP3057360B2
To perform not only a continuous vacuum inspection but also a total inspection of products by applying a high voltage into a sealed and evacuated non-conductive vessel from the outside to cause a plasma state within the vessel, and detec...  
JP2000097910A
To realize a method for calibrating a mass spectrometer without specially introducing a calibration gas by obtaining a calibration coefficient for the mass spectrometer from the ratio between the pressure value measured by a total pressu...  
JP3025971B2  
JP2000081359A
To maintain accurate measurement without recalibrating a measurement system during use by using the ratio of an initial intensity value where light intensity is measured to light intensity value during use at the initial stage of the ins...  
JP3045559B2
PURPOSE: To provide a Pirani gauge in which the heat loss of a filament resulting from end loss radiated outside the gauge through a terminal is reduced, and the influence of room temperature or the temperature change of a sensor body is...  
JP3045571B2
PURPOSE: To achieve measurement with a photo detector without any influence of a product due to an electron impact by placing an electron-rejection electrode and an ion-rejection electrode so that the photo detector does not cover a fila...  
JP2000039375A
To obtain an ion source which prevents a gas from being adsorbed to an electron collector during the operation of the ion source and which is not influenced by electron simulated desorption(ESD). In an ion source, an airtight vacuum cham...  
JP2000028465A
To provide a crystal vacuum gauge which is capable of stable and accurate measurement without being affected by the instability of the potential of a vacuum chamber, an object of measurement, and in which a crystal oscillator can be repl...  
JP2999227B2  
JPH11326103A
To permit the measurement with a satisfactory S/N ratio of the degree of even ultra-high vacuum, by compressing a gas in a container and dividing the measured value of the degree of vacuum of the compressed gas by the compression ratio. ...  
JPH11326100A
To provide a manometer fitting device capable of replacing a manometer without breaking vacuum at the time of replacement. A housing 11 fitted to a piping 6 connected to a tank is provided with a diaphragm 12 sealing a coolant 7 on the t...  
JPH11510644A  
JPH11183296A
To judge the operation of a hot-cathode ionization vacuum gage by using a gage head itself by composing the ionization vacuum gage of a means which compares a change-rate value with an atmospheric-pressure judgment value and a means whic...  
JPH11142258A
To eliminate the operation for inserting a temperature sensor by indirectly measuring the temperature of a cooled body and to stably and automatically measure the temperature of the cooled body. This instrument is equipped with a cooling...  
JP2595111Y2  
JP2885233B2  

Matches 551 - 600 out of 1,569