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Patent Searching and Data


Matches 551 - 600 out of 1,544

Document Document Title
JP2000269187A
To realize a method for accurately monitoring the treatment of substrate to be treated in a vacuum treatment chamber, using a gas in plasma state, utilizing a Pirani gage of fast response and a method for manufacturing a semiconductor de...  
JP2000249617A
To provide a fast-response Pirani gauge which is easily manufactured and has satisfactory durability in filaments and few individual differences. Filaments 8 to be provided inside the envelope of a Pirani gauge is constituted of three fi...  
JP3086230B2  
JP2000241289A
To provide a helium leak tester which can perform test in a short time even when the member of a specimen itself discharges a gas significantly. A specimen W composed of a resin part Wa and a non-resin part Wb and previously encapsulatin...  
JP2000241281A
To enhance accuracy of pressure measurement by setting power supply to a grid constantly within a specified range during measurement. A tubular coil-like grid 54 is secured to the end wall 53 of an insulator in a container 51 communicati...  
JP2000243325A
To develop an inspection process using an easier method without inspecting an image forming device by actually displaying an image. In an image forming device having an electron source having plural electron emitting elements 13 on a bas...  
JP3069975B2  
JP3069544B2  
JP2000509151A  
JP3088792B2
PURPOSE: To obtain a sensor device to be arranged at high density. CONSTITUTION: A sensor element 1 or a sensor element group is formed of a cathode layer 12 and a cathode end connected therewith, and an anode layer 14 opposing thereto. ...  
JP3086011B2
PURPOSE: To enable a true pressure to be measured and obtain an ionization vacuum meter which is also suited for measurement of pressure at an extremely high vacuum region. CONSTITUTION: A title item is provided with an electron source 1...  
JP2000133640A
To monitor accurately the real pressure in a plasma etching chamber by a method wherein a plasma having plasma molecules is fed in the chamber and the luminous intensity of one kind of the plasma molecule of the fed plasma is measured to...  
JP2000131164A
To avoid forming bubbles in a sealed liq. chamber to improve the vacuum resistance in a wide temp. range by keeping the pressure in the liq. chamber to be always higher than measured pressure likewise for the pressure in a reference pres...  
JP3057360B2
To perform not only a continuous vacuum inspection but also a total inspection of products by applying a high voltage into a sealed and evacuated non-conductive vessel from the outside to cause a plasma state within the vessel, and detec...  
JP2000097910A
To realize a method for calibrating a mass spectrometer without specially introducing a calibration gas by obtaining a calibration coefficient for the mass spectrometer from the ratio between the pressure value measured by a total pressu...  
JP3025971B2  
JP2000081359A
To maintain accurate measurement without recalibrating a measurement system during use by using the ratio of an initial intensity value where light intensity is measured to light intensity value during use at the initial stage of the ins...  
JP3045559B2
PURPOSE: To provide a Pirani gauge in which the heat loss of a filament resulting from end loss radiated outside the gauge through a terminal is reduced, and the influence of room temperature or the temperature change of a sensor body is...  
JP3045571B2
PURPOSE: To achieve measurement with a photo detector without any influence of a product due to an electron impact by placing an electron-rejection electrode and an ion-rejection electrode so that the photo detector does not cover a fila...  
JP2000039375A
To obtain an ion source which prevents a gas from being adsorbed to an electron collector during the operation of the ion source and which is not influenced by electron simulated desorption(ESD). In an ion source, an airtight vacuum cham...  
JP2000028465A
To provide a crystal vacuum gauge which is capable of stable and accurate measurement without being affected by the instability of the potential of a vacuum chamber, an object of measurement, and in which a crystal oscillator can be repl...  
JP2999227B2  
JPH11326103A
To permit the measurement with a satisfactory S/N ratio of the degree of even ultra-high vacuum, by compressing a gas in a container and dividing the measured value of the degree of vacuum of the compressed gas by the compression ratio. ...  
JPH11326100A
To provide a manometer fitting device capable of replacing a manometer without breaking vacuum at the time of replacement. A housing 11 fitted to a piping 6 connected to a tank is provided with a diaphragm 12 sealing a coolant 7 on the t...  
JPH11510644A  
JPH11183296A
To judge the operation of a hot-cathode ionization vacuum gage by using a gage head itself by composing the ionization vacuum gage of a means which compares a change-rate value with an atmospheric-pressure judgment value and a means whic...  
JPH11142258A
To eliminate the operation for inserting a temperature sensor by indirectly measuring the temperature of a cooled body and to stably and automatically measure the temperature of the cooled body. This instrument is equipped with a cooling...  
JP2595111Y2  
JP2885233B2  
JPH11101704A
To provide a vacuum pressure measuring method and device for accurately and simply measuring vacuum pressure at a reduced pressure part. Water in a container 3 being connected to a reduced pressure part 1 where pressure should be measure...  
JPH11101703A
To provide the pressure-measuring device of a vacuum device that accurately measures pressure in the vacuum device with a high response property, and at the same time freely sets a pressure-measuring range in a vacuum region. When pressu...  
JP2873934B2  
JP2864291B2  
JP11051797A
To obtain a heat-loss pressure gage which enhances the accuracy of the measurement of a pressure in a range from a low pressure up to a high pressure. A Pirani gage is provided with a small-diameter-wire detecting element 12, a small-dia...  
JP11044601A
To obtain a pressure sensor capable of measuring a pressure area of a wide range even in a small-sized sensor and accurately measure the pressure area of a wide range by using the pressure sensor. A pressure sensor 10 comprises a substra...  
JPH1110232A
To quickly and precisely inspect an external size shape even in the case of any external size by arranging proximately cylindrical work external size automatic straightening device and cylindrical work external size inspecting device sid...  
JPH10332504A
To obtain a pressure sensor strong against overload by keeping a constant interval between a vibratory structure and a board during vibration. The interval between a vibratory structure 12 and a board 20 is kept constant during vibration...  
JP2839243B1  
JP2839244B1  
JP2863652B2
PURPOSE: To enable an ultra-high vacuum region which is equal to or less than 10-10 Pa to be measured accurately by measuring only gas molecule ions by virtually eliminating an influence of electron excitation isolated ion, light, and so...  
JPH10293077A
To provide a measuring instrument in which a pressure in a wide range from normal pressure up to 10-2 Pa can be measured by one pressure gage. A very small vibrator 1 which is manufactured by a silicon process is vibrated near a resonanc...  
JP2816423B2  
JPH10281911A
To provide a wide band ionization gauge capable of measurement in an ultrahigh vacuum area. In an ultrahigh vacuum area, desorption ion is removed from the ion generated within an ion generating part 10 by an energy filter part 20 to mak...  
JPH10510921A  
JP2839244B2
To obtain a heat-loss pressure gage which enhances the accuracy of the measurement of a pressure in a range from a low pressure up to a high pressure. A Pirani gage is provided with a small-diameter-wire detecting element 12, a small-dia...  
JP2839243B2
To enhance precision and stability by using a multiple ion collector in a small-sized ionization vacuum gauge. An electronic source is disposed outside an anode volume of a releasing anode 14, and a plurality of ion collector electrodes ...  
JPH10267780A
To carry out high-accuracy vacuum measurements by miniaturizing a vacuum measuring device. In a vacuum measuring element 10, a cold cathode 20 serving as the radiation source of electrons that ionize atoms of residual gas and a collector...  
JP2807059B2  
JPH10239199A
To accurately measure the degree of vacuum without withdrawing outside a lead wire and the like, by calculating the degree of vacuum by a calculation means that is buried into a measurement object and generating a vibration corresponding...  
JP2790351B2  

Matches 551 - 600 out of 1,544