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Matches 551 - 600 out of 1,585

Document Document Title
JP3239817B2
To provide a vacuum pressure measuring method and device for accurately and simply measuring vacuum pressure at a reduced pressure part. Water in a container 3 being connected to a reduced pressure part 1 where pressure should be measure...  
JP2001517784A  
JP2001517313A  
JP2001255225A
To provide a static capacitance type vacuum sensor efficiently correcting a measurement error by thermal expansion and highly reliably measuring the pressure in the static capacitance type vacuum sensor possible of measuring a wide press...  
JP2001256910A
To provide a vacuum display device for an electron microscope sample cell capable of more accurately displaying the degree of vacuum in the sample cell than before without giving poor effect on the control of a primary electron beam or a...  
JP2001221701A
To calculate pressure within an accelerating tube on the basis of the indicated pressure of an ion pump or the like and to indicate it.This device for indicating the vacuum pressure of an electron microscope accelerating tube computes an...  
JP2001215161A
To measure pressures of a wide range in comparison with the prior art without greatly changing a structure of the conventional capacitive type vacuum sensor, in a capacitive type vacuum sensor having inside a pair of a diaphragm electrod...  
JP3218746B2
PURPOSE: To obtain a method (device) which can discriminate the reliability level of the measured results of the gas ratio of a cathode ray tube by a gas ratio measuring method (measuring instrument). CONSTITUTION: The gas ratio of a cat...  
JP2001215163A
To stably measure both a pressure from a middle level vacuum region to a high level vacuum region by an ionization type first measuring element and a pressure of a measurement region proper to a second measuring element.This ionization g...  
JP2001201417A
To provide a small-sized vacuum pressure sensor, which can measure a pressure range of 0.01 to 133 Pa with high sensitivity by improving the linearity of the relation between pressure and electrostatic capacity. The size and thickness of...  
JP3213125B2
PURPOSE: To perform approximate conversion of measurement signal by, when a measurement signal is approximate converted into a related value with a specific equation, using the relation among a collector current, base and emitter voltage...  
JP2001165907A
To provide a gas analyzer capable of measuring the total pressure of gases of a vacuum atmosphere along with the partial pressure ratio thereof and accurately measuring the total pressure of the gases.The gas analyzer consists of an ion ...  
JP2001153747A
To provide a simple exchange type vacuum sensor which has no need of replacing the entire vacuum sensor with a new vacuum sensor even when a pressure detecting element easy to be damaged by the measuring environment is broken in the vacu...  
JP2001133346A
To realize a cold-cathode discharge vacuum gauge hardly having a sudden change point of current in the pressure-discharge current characteristic and having a discharge current substantially proportional to pressure by setting the aspect ...  
JP2001133344A
To precisely measure the sealed gas pressure of a gas-sealed apparatus having a dispersion of electrode interval or a gas-sealed apparatus having a fluctuating electrode interval. This measuring method of gas pressure comprises applying ...  
JP3188752B2
PURPOSE: To allow highly accurate measurement even of low pressure by fixing a temperature sensor, to be connected with a temperature compensation circuit, directly to an inner cylinder thereby allowing effective temperature compensation...  
JP2001124651A
To provide a pressure measuring circuit capable of detecting the disconnection of a filament 25. This pressure measuring circuit 1 comprises a first amplifier 31 connected to a resistance bridge circuit 5 having the filament 25 of a Pira...  
JP3183122B2
To accurately monitor the degree of vacuum in a vacuum airtight container. An ionizing electron emitting part 112 constituted of an field emission array is formed on a cathode base plate 101, an anode electrode 106, an electron accelerat...  
JP2001116645A
To provide a resistance variable type degree of vacuum measuring device functioning even in high vacuum. This resistance variable type degree of vacuum measuring device 10 measures the degree of vacuum by arranging a sensing resistance R...  
JP2001108555A
To provide a vacuum checking meter capable of accurately measuring the degree of vacuum in a pipe lining during resin impregnation and a method for impregnating a hardenable resin into the pipe lining whereby the hardenable resin can be ...  
JP3177292B2
PURPOSE: To obtain an improved hot cathode ionization pressure gauge. CONSTITUTION: The hot cathode ionization pressure gauge comprises a hot cathode filament 10, a diaphragm-like control electrode 12, an acceleration electrode 14 and an...  
JP3171410B2
PURPOSE: To measure absolute pressure within a wide range of gas with only a device and achieve miniaturization in simple structure in regard to a vacuum sensor for detecting an absolute pressure value from the change of an electrostatic...  
JP2001066209A
To guarantee a measurement of an absolute pressure value by providing a vacuum chamber, a vacuum gage and a vacuum pump, and selectively switching and connecting the gage to the chamber or the pump. A vacuum gage 6a is mounted at a port ...  
JP3170136B2
PURPOSE: To make it possible to ensure a prescribed detection reference position at all times without depending on the thickness and the size of a vacuum pack type heat insulating material, by providing an opening part in a setting stage...  
JP2001050845A
To obtain a power supply for an ionization in which the capacity, heat generation and size are reduced by realizing output characteristics corresponding to the voltage-current characteristics of an ionization load where the load current ...  
JP2001029772A
To correct amt. of deviation of zero point to appropriately control pressure in a vacuum chamber and to prevent defect of treatment of a base caused by change in pressure from being generated by a method wherein a low pressure condition ...  
JP2001015062A
To provide a control power source for a quadrupole electrode capable of operating a quadrupole mass spectrometer even in a region having a small mass number to be analyzed without using a diode vacuum tube.In this power source, a high fr...  
JP2001015060A
To prevent a filament from being discontinued by not carrying an excess inrush current when inputting a power source.When a switch 12 is turned on, a variable current source 10 raises a filament current in accordance with the potential r...  
JP2000348581A
To eliminate dispersion in detection characteristics and enhance the detecting accuracy by providing a means for adjusting the initial position of a plunger actuating a vacuum switching mechanism for detecting negative pressure of fluid....  
JP2000329634A
To measure a pressure of a wide range from an atmospheric pressure to a low pressure region by a single measurement sphere and improve a durability and a reliability, by constituting a grid to operate as a filament of a Pirani gage. A gr...  
JP3131689B2
To monitor accurately the real pressure in a plasma etching chamber by a method wherein a plasma having plasma molecules is fed in the chamber and the luminous intensity of one kind of the plasma molecule of the fed plasma is measured to...  
JP2000321161A
To suppress a measurement error caused by temperature change and to improve the measurement accuracy of a sensor by fixing a diaphragm electrode to a substrate so that it opposes a fixed electrode and controlling the surrounding of the d...  
JP2000315474A
To monitor the vacuum degree of the ion source of a mass spectrometer without mounting an ionization vacuum gage. In an ion source wherein a box electrode 12 for introducing a sample is disposed, the sample is ionized by introducing a he...  
JP3125002B2
PURPOSE: To provide a vacuum gauge capable of utilizing an ultra-high vacuum or extreme-high vacuum and having simple structure. CONSTITUTION: A needlelike cathode 3 having a tip curvature radius of 1μm or less and an anode 2 opposite t...  
JP2000306473A
To provide a vacuum insulated breaker device having high safety and a vacuum pressure monitoring and measuring function with enhanced reliability. A vacuum pressure measuring terminal 30 is installed on the side of a metal container 2 in...  
JP3124859B2
PURPOSE: To provide a vacuum leakage detecting sensor which has a small size and a wide application vacuum degree range and in which probe gas except helium gas can be used. CONSTITUTION: This vacuum leakage detecting sensor 1 comprises ...  
JP3124857B2
PURPOSE: To provide a sensor for measuring vacuum degree that allows significant miniaturization. CONSTITUTION: A vacuum degree measuring sensor 1 is provided with a substrate 2 that contains a hallow part 3, and a thermal insulation fil...  
JP2000292297A
To measure an igniter while protecting and controlling by preventing the igniter from operating under high pressure using an auxiliary pressure sensor. The pressure gauge comprises a gauge head 2 communicating with vacuum to be measured ...  
JP2000292296A
To provide an inexpensive and practical diaphragm vacuum gauge in which the measuring range of the degree of vacuum is widened and the work for measuring the degree of vacuum can be enhanced. The diaphragm vacuum gauge comprises a first ...  
JP2000269187A
To realize a method for accurately monitoring the treatment of substrate to be treated in a vacuum treatment chamber, using a gas in plasma state, utilizing a Pirani gage of fast response and a method for manufacturing a semiconductor de...  
JP2000249617A
To provide a fast-response Pirani gauge which is easily manufactured and has satisfactory durability in filaments and few individual differences. Filaments 8 to be provided inside the envelope of a Pirani gauge is constituted of three fi...  
JP3086230B2  
JP2000241289A
To provide a helium leak tester which can perform test in a short time even when the member of a specimen itself discharges a gas significantly. A specimen W composed of a resin part Wa and a non-resin part Wb and previously encapsulatin...  
JP2000241281A
To enhance accuracy of pressure measurement by setting power supply to a grid constantly within a specified range during measurement. A tubular coil-like grid 54 is secured to the end wall 53 of an insulator in a container 51 communicati...  
JP2000243325A
To develop an inspection process using an easier method without inspecting an image forming device by actually displaying an image. In an image forming device having an electron source having plural electron emitting elements 13 on a bas...  
JP3069975B2  
JP3069544B2  
JP2000509151A  
JP3088792B2
PURPOSE: To obtain a sensor device to be arranged at high density. CONSTITUTION: A sensor element 1 or a sensor element group is formed of a cathode layer 12 and a cathode end connected therewith, and an anode layer 14 opposing thereto. ...  
JP3086011B2
PURPOSE: To enable a true pressure to be measured and obtain an ionization vacuum meter which is also suited for measurement of pressure at an extremely high vacuum region. CONSTITUTION: A title item is provided with an electron source 1...  

Matches 551 - 600 out of 1,585