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JPH0772031A |
PURPOSE: To provide an ionization vacuum gage which makes it possible to measure vacuum at a high sensitivity without polluting the space of a high vacuum. CONSTITUTION: A UV lamp 21 is provided to emit ultraviolet rays and an electron r...
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JPH0718769B2 |
A cold cathode gauge including a glow lamp or the like disposed within the vacuum space of the gauge for initiating the gauge discharge, the lamp emitting UV or blue light directly at at least the cathode of the gauge where the energy of...
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JPH079383B2 |
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JPH0727648A |
PURPOSE: To improve S/N ratio and then the sensitivity in vacuum measurement by improving the conventional Raffti type vacuum meter. CONSTITUTION: In side a container-shaped body 1 with a magnet 6 at an outer periphery, a filament 2 for ...
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JPH0712668A |
PURPOSE: To measure a pressure of a wide range by providing independent diaphragm and fixed electrode having different measuring ranges in a vacuum gauge, and providing a controller for deciding whether value measured by any of the diaph...
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JPH075061A |
PURPOSE: To obtain a reliable and high-sensitivity vacuum meter by measuring the potential distribution in space, space charge and further rotary current when measuring vacuum with a high sensitivity using a space where electric field an...
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JPH076925A |
PURPOSE: To provide a magnetic structure for use in a vacuum gauge, wherein a magnetic field does not exist outside the gauge as much as possible. CONSTITUTION: A magnetic structure for use in a vacuum gauge, particularly a cold cathode ...
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JPH06347554A |
PURPOSE: To eliminate influence due to re-evaporation of an adhered substance and to measure molecular beam intensity accurately by providing a heating means at a part where heat from the filament of an ionization vacuum meter directly a...
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JPH0695106B2 |
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JPH06307964A |
PURPOSE: To predict an appropriate replacing time of ionization vacuum gauge by disposing a light emitting unit and a light receiving unit oppositely on the opposite sides of the tubular body of the ionization vacuum gauge and measuring ...
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JPH0684917B2 |
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JPH0678960B2 |
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JPH06260448A |
PURPOSE: To meet the requirements for etching performances such as etching work shape, selection ratio and etching rate of a specimen. CONSTITUTION: In order to etch a specimen 2 by leading a processing gas into a vacuum vessel 1 as a pr...
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JPH0672829B2 |
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JPH06213754A |
PURPOSE: To quantitatively measure the degree of vacuum of a sealed vessel by continuously increasing voltage until a new dielectric breakdown by voltage occurs according to a prescribed time after dielectric breakdown is extinguished, a...
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JPH0656347B2 |
A cold-cathode ionization or Penning vacuum meter with an ignition system to increase the meter's usefulness at very low pressures. The ignition system comprises an additional anode and at least one additional cathode mounted adjacent to...
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JPH0650273B2 |
A thermocouple pressure gauging system for measuring partial vacuum is provided which uses time multiplexing to alternately heat the thermocouple to constant temperature and then measure the EMF from thermocouple with heating current off...
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JPH0648225B2 |
A thermocouple pressure gauging system for measuring partial vacuum is provided which uses AC current to heat the thermocouple to constant temperature. A signal proportional to pressure is derived from the AC current needed to heat to co...
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JPH06150875A |
PURPOSE: To prevent failure of an electron bombardment circuit when degassing is carried out in a device having an ion source with an electron bombardment system degassing function. CONSTITUTION: An electric current loop 11 to flow a dis...
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JPH0640046B2 |
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JPH06137977A |
PURPOSE: To perform exact pressure measurement in response to a sort of gas by determining constants of a particular expression in regard to a difference between resonant impedance and inherent impedance of a quartz oscillator by means o...
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JPH06109575A |
PURPOSE: To measure pressure in a wide range without any affection of the kind of ambient atmosphere gases. CONSTITUTION: A pair of electrode films 2, 3 are formed on a glass board 1 and for instance, an iron porphyrin thin film 4 is sha...
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JPH0666661A |
PURPOSE: To fabricate a semiconductor device in which irregularities caused by wiring pattern can be flattened through a simple step. CONSTITUTION: In the fabrication of a semiconductor device, e.g. a large scale integrated circuit (LSI)...
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JPH0626966A |
PURPOSE: To provide a specified stable semiconductor thin film controlled in grain size of crystal grain by using a gas having a specified thermal conductivity as an atmospheric gas at crystallization, and conducting crystallization in t...
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JPH067467B2 |
The present invention comprises disposing an electrode group consisting of an anode and cathodes provided on both sides of the anode at a portion where the degree of vacuum in an electron microscope is to be measured closing in thermal e...
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JPH0617787A |
PURPOSE: To detect, in a simple way, that a pump reaches a pressure limit, by arranging, in a circuit used for running a motor driving a rotor, an electrically constituent element for detecting a current consumed by the drive motor. CONS...
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JPH05346364A |
PURPOSE:To make it possible to execute calibration on occasion and highly reliable measurement of vacuum even when an apparatus to which a vacuum gage is fitted is in operation. CONSTITUTION:On the opposite sides of a high-vacuum chamber...
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JPH0588773B2 |
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JPH05332870A |
PURPOSE:To obtain a testing method for judging heat insulating performance by measuring whether the degree of vacuum of the vacuum insulating layer of a metallic flat-bottom type vacuum thermally insulated container reaches the specified...
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JPH0585859B2 |
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JPH0585858B2 |
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JPH0543397Y2 |
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JPH05281073A |
PURPOSE:To provide a Pirani gauge in which the warmth of an outside wall is kept at fixed temperature to always keep an inside wall surrounding a filament at fixed temperature for excluding the influence of using environment, and its sta...
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JPH0540427Y2 |
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JPH05264389A |
PURPOSE: To obtain an improved inversion magnetron type cold cathode ionization vacuum gauge. CONSTITUTION: The ionization vacuum gauge having a vacuum gauge head comprises an outer cathode sleeve 1 having an inlet 2 communicating with t...
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JPH05264388A |
PURPOSE:To obtain a vacuum gauge for ultra-high vacuum which is constituted so that the gauge can only measure ions of gas molecules by eliminating the influences of resulted products of impacts from electrons other than the ions of gas ...
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JPH0535311Y2 |
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JPH05215633A |
PURPOSE:To automatically measure the vacuum pressure in a vacuum chamber and plot the relation between the time and vacuum pressure in a graph by periodically collecting the vacuum pressure data of a vacuum gauge by connecting a personal...
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JPH05189058A |
PURPOSE:To provide the measurement and storage device which accurately and easily measures and stores the vacuum degree characteristics of facilities adjusting the vacuum degree of the vacuum chamber by using an opening degree variation ...
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JPH0544619B2 |
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JPH0533734B2 |
For measurement of gas pressure a gas-friction vacuum meter is used in whose measuring head a rotating body is suspended in a magnetic field contact-free between electromagnetic drive coils. The rotating body is set in motion with the ai...
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JPH0515073Y2 |
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JPH0594792A |
PURPOSE: To measure the vacuum degree of an ion source highly sensitively and highly precisely without using an additional vacuum gauge by installing a microchannel plate in a part of an electrode against which ions strike, detecting and...
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JPH0524463B2 |
PURPOSE:To make it possible to easily detect the disconnection in an electric circuit, by connecting a detection condenser to the terminal of the electric circuit and detecting the presence of absence of disconnection on the detection si...
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JPH0579940A |
PURPOSE:To precisely measure the degree of vacuum of a vacuum packing body evacuation-sealed with a filler in a container made of a sheet having a gas barrier property. CONSTITUTION:A vacuum packing body 10 is inserted into a vacuum cham...
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JPH0523089U |
[Purpose] It is an object of the present invention to provide a vacuum measuring sphere in which an electrode is enclosed in a metal tube and is not easily damaged. [Constitution] The electrode is enclosed in the metal cylinder 2 via the...
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JPH0566169A |
PURPOSE:To enable stable operation of a vacuum gauge over a long period of time by mounting the vacuum gauge to the end portion of an L-shaped intervening member, and mounting the intervening member to piping in such a manner that the va...
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JPH0519936U |
[Purpose] Immediately detect a decrease in the vacuum pressure of the vacuum suction pad to prevent the sucked work from falling. [Constitution] A vacuum suction device 7 is provided on the main body 3 by a link mechanism 6 so as to be m...
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JPH0562569A |
PURPOSE: To make sensing free from influence of an eventual switching surge, etc., and at a low degree of vacuum by coupling a light emission part with a light reception part and a vacuum part of a vacuum switch apparatus through a photo...
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JPH0560642A |
PURPOSE:To obtain a measuring apparatus capable of measuring the degree of vacuum in an X-ray generating apparatus correctly by using an ionization vacuum gauge even when recoil electrons are generated in the X-ray generating apparatus. ...
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