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Matches 251 - 300 out of 688

Document Document Title
JP2007147344A
To provide a thin film Pirani vacuum sensor having high sensitivity in a high band from a high vacuum pressure to a low vacuum pressure which is lower by almost one atmospheric pressure, and a vacuum measuring device.At least one heater ...  
JP3957371B
To provide a vacuum device by which the exhausting performance of the vacuum device can be kept in a good condition regardless of the temperature change of the sealing water to be supplied to a sealing water type vacuum pump. In a vacuum...  
JP2007113928A
To provide an ionization vacuum gauge that can make noise current which is generated extremely small, and easily and accurately measure all pressures in the region from an ultra-low vacuum to extremely-high vacuum.An electron gun section...  
JP2007093579A
To provide a pressure measurement device and its pressure measurement method related to a vacuum chamber, more specifically, one using ultrasonic waves, in the vacuum chamber pressure measurement system.The device comprises the vacuum ch...  
JP2007085953A
To provide a vibration sensor which is not limited to the usable range, with simplified wiring, capable of alleviating the effects of signal transmittance noise, capable of high-occuracy reliable measurement and of measuring the degree o...  
JP3931294B
To provide a detection device with a high sensitivity capable of detecting, with a high sensitivity, a detection object smaller in size than a detection object which a conventional art has targeted. The detection device is provided with ...  
JP2007051963A
To provide a thermal barometric pressure sensor which has barometric pressure sensing sensitivity, including barometric pressure of atmospheric pressure or higher and wide-range vacuum, ranging from low-vacuum region to high-vacuum regio...  
JP2007047910A
To provide a pressure/flow rate control system capable of easily controlling when a vacuum vessel is evacuated and a flow rate and gas pressure of the vacuum vessel is thereafter controlled at a certain level after charging gas into the ...  
JP2007047069A
To provide a physical quantity sensor that can seal a closed chamber for storing a detection section in a high vacuum state, can reduce size and costs, can improve the degree of freedom in a device, and has no restriction by the influenc...  
JP2007033422A
To provide a strong and low-cost ionization vacuum gauge using a cold cathode with little gas release.A hot cathode in a hot cathode ionization vacuum gauge (for example, a hot cathode B-A type ionization vacuum gauge) is replaced to the...  
JP2007024849A
To provide an ionization gauge that outgases a small amount of gas and has a robust cathode.A hot cathode in a hot cathode ionization gauge (for example: hot cathode B-A type ionization gauge) is replaced by a cold cathode by a carbon na...  
JP2007017263A
To provide a sensing element, a vacuum gauge and a vacuum tube which can catch heat diffused 3-dimensionally with a 3-dimensional temperature sensing part, catch the 3-dimensional isothermal contour with the temperature sensing part, to ...  
JP2006343305A
To enhance the degassing effect of an inner electrode of a measurement tube and that of a measurement-tube inner wall in a triode-type hot cathode ionization vacuum gauge.In this triode-type hot cathode ionization vacuum gauge, an ion co...  
JP2006343304A
To stabilize an apparatus in a B-A type hot cathode ionization vacuum gauge, and to release adsorption gas in a short time.In this B-A type hot cathode ionization vacuum gauge comprising a set of hot cathodes, a helical electrode 7 is pl...  
JP2006344738A
To provide a technique capable of easily detecting the abnormality of a measuring instrument fitted to a semiconductor production device.A Penning vacuum gage 1 fitted to a dry etching device or the like is composed of two dependent firs...  
JP2006329880A
To provide a pressure measuring device capable of measuring pressure in the pressure region from 100 Pa up to atmospheric pressure.The pressure measuring device is provided with a ballistic electron surface-emitting device (BSD) 1, an an...  
JP3886691B
To calculate pressure within an accelerating tube on the basis of the indicated pressure of an ion pump or the like and to indicate it. This device for indicating the vacuum pressure of an electron microscope accelerating tube computes a...  
JP2006300578A
To provide a capacitance type pressure sensor for absolute pressure measurement having higher accuracy or reliability, and an evaluation method for evaluating the degree of vacuum in a vacuum chamber thereof.In this capacitance type pres...  
JP3840872B
To provide a vacuum insulated breaker device having high safety and a vacuum pressure monitoring and measuring function with enhanced reliability. A vacuum pressure measuring terminal 30 is installed on the side of a metal container 2 in...  
JP2006201054A
To solve the problem that a magnetron vacuum gage needs a long time until discharge is performed again when discharge stops once, can not measure in a low vacuum region, has a risk breaking a positive electrode in measurement by constant...  
JP3833776B
To provide a wide band ionization gauge capable of measurement in an ultrahigh vacuum area. In an ultrahigh vacuum area, desorption ion is removed from the ion generated within an ion generating part 10 by an energy filter part 20 to mak...  
JP2006153782A
To prevent the flow of a gas to be measured from being directly in contact with a thin film and protect the thin film from contaminants or the like in the gas, in a gas sensing device which provides the thin film, which is formed thermal...  
JP2006153860A
To easily measure the degree of vacuum in a sealed vessel, for example to recognize that the inside of the sealed vessel is kept at a predetermined degree of vacuum, even when the inside of the sealed vessel is under rough vacuum of whic...  
JP2006153672A
To provide a measurement system for measurement of distribution of a physical amount such as air pressure or temperature in the space in particular in a vacuum chamber.The pressure and temperature distribution measurement system for meas...  
JP2006112812A
To provide a technology for measurement of a vacuum of a vacuum space of an enclosed vacuum structured body, using a very simple means without accompaniment of any destructive operation.The vacuum insulation panel 10 of the vacuum struct...  
JP2006084190A
To solve the problem that the conventional case used to have a difficulty in specification of a vacuum gauge of malfuction from among a lot of vacuum gauges when they are set on a plurality of places on a vacuum system.The vacuum gauge m...  
JP2006078190A
To determine the reason for the malfunction at a low cost and with a simple structure, in a system adopted with an insulating structure is whether a degradation in vacuum of the vacuum chamber or the abnormality of the system of the ther...  
JP2006047288A
To provide a vacuum gauge with improved sensitivity, especially for an ionization vacuum gauge restricted in a saddle of electrostatic field.This vacuum gauge includes a negative electrode unit, a positive electrode ring, a shield electr...  
JP2005331362A
To realize a vacuum gage robust against disturbance and capable of detecting precisely a degree of vacuum.A vibration body 1, a beam 2 and a housing 3 cut out of one sheet are fixed onto a base panel 6 via a spacer 5. The vibration body ...  
JP3739141B
To enlarge the lower limit of extremely high vacuum measuring range by providing a charged particle shielding electrode in a space communicating between a vacuum gauge container and a vacuum chamber to be measured thereby blocking intrus...  
JP3734913B
To provide a technique capable of surely preventing filament disconnection. When pressure is to be found on the basis of the magnitude of an ionic current I, by collecting ion formed by gas molecule ionization with a collector C after im...  
JP3721238B
To judge the existence of a vacuum leak by a method wherein sound waves are impinged from one face of a sheetlike vacuum packaged product, the intensity of the sound waves which are transmitted up to a face on the opposite side is measur...  
JP2005172611A
To provide a charged particle beam apparatus and a pressure measuring method for the charged particle beam apparatus, capable of measuring a vacuum pressure value around its charged particle gun.Values R1-R8 corresponding to conductances...  
JP2005140780A
To provide a pressure sensor with its outside dimensions very limited.This pressure sensor is a micro electromechanical vibration device and comprises a silicon substrate 15 with a single-layer or multi-layer vibration assembly 121 forme...  
JP3681962B
To provide a pressure measurement device which is free from vacuum leakage due to erosion as in use for a ground electrode. By putting a metal block 32 between an insulating part 31 such as ceramics and a ground electrode 33 absorbing di...  
JP2005127733A
To provide a measuring apparatus including a crystal oscillator capable of preventing electrode parts of the crystal oscillator from corroding, keeping natural resonance impedance stable and constant, and improving accuracy in measuring ...  
JP2005114525A
To provide an internal pressure measuring apparatus suited for measuring the internal pressure of a compact food container, in which food items and drink are filled and sealed, by restraining the dispersion of the pressure of air by the ...  
JP2005114574A
To compensate for the fluctuations caused by a cable length change, even when a measuring cable for connecting a gauge head to a measuring part is changed into a cable having a different cable length, and to thereby measure pressure with...  
JP3664002B
To precisely measure the sealed gas pressure of a gas-sealed apparatus having a dispersion of electrode interval or a gas-sealed apparatus having a fluctuating electrode interval. This measuring method of gas pressure comprises applying ...  
JP2005090991A
To provide a quartz friction vacuum gauge which improves corrosion resistivity by preventing corrosion of electrode part of a quartz vibrator, prevents aging variation of temperature dependence concerning the intrinsic resonance impedanc...  
JP2005062167A
To provide a miniaturized vacuum gauge that has high sensitivity and does not disturb the measurement of pressure greatly.An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a container 10 more con...  
JP2005062176A
To provide a miniaturized vacuum gauge that has high sensitivity and does not give any disturbance for affecting the measurement of pressure.An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a co...  
JP2005043052A
To provide a foreign matter detecting method capable of stably detecting floating foreign matter in a treatment chamber by suppressing the deposition of a film caused by plasma treatment and the cloudiness of a measuring window due to et...  
JP2004349102A
To provide a quadrupole type mass spectrometer carrying out measuring of pressure.A pressure detecting part 40 for a pressure measuring device is installed inside a container 11 in which a quadrupole 23 is installed and the quadrupole 23...  
JP2004311592A
To obtain a substrate cleaning device for making a film thickness after cleaning a substrate uniform in the plane when the thickness of laminated films cannot be made uniform because reaction of a gas for forming films on the substrate i...  
JP2004309605A
To make correctable a white defect, a black defect or a glass projection defect of a Levenson mask with one kind of gas.By using diacetone acrylamide, a light-shielding film 17 to correct a white defect can be formed both on a glass subs...  
JP2004264075A
To provide a means for confirming easily and simply a vacuum condition in a clean box.This vacuum gage has as elements a communication space for communicating a vacuum space inside the clean box with a space of atmospheric pressure, a di...  
JP2004257784A
To provide a unit for accurately and easily measuring a degree of vacuum in the tip of an injection gun.The degree-of-vacuum measuring unit comprises: a connecting port 13a airtightly connected to the injection gun 21; closed piping 11 f...  
JP2004239770A
To provide attaching structure for a cold cathode ionization vacuum gage capable of measuring the vacuum in a vacuum vessel under a high-vacuum condition upon restoration of a service power interruption, and capable of replacing the cold...  
JP3585969B
PURPOSE: To accurately measure continuously a measuring area wider than the measuring area of each sensor element, by combining a plurality of pressure sensors. CONSTITUTION: A Pirani sensor 1 is used in combination with a cold cathode e...  

Matches 251 - 300 out of 688