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Matches 251 - 300 out of 1,703

Document Document Title
JP2017072384A
[Subject] Heat stress from the outside which gets across to a sensor chip is further reduced rather than the conventional thing. [Means for Solution] Rather than a joined part with package 10 of support diaphragm 50, it is an inner circu...  
JP6111129B2  
JP2017508976A
A micro Pirani meter vacuum meter using a support element of low thermal conductivity is indicated. A heating element which operates so that a signal corresponding to pressure of gas may be generated while a micro Pirani meter or a vacuu...  
JP6069415B2  
JP2017015738A
[Subject] In operation on various pressure levels, a pressure measuring method which uses an ionization vacuum gauge which does not receive damage by sputtering, and such an ionization vacuum gauge, and various methods within a vacuous g...  
JP6058450B2  
JP6059257B2  
JP6055820B2  
JP2016218050A
[Subject] A Pirani gauge with structure which can control disconnection of a filament by vibration or a shock effectively is provided. [Means for Solution] Filament 6 provided in envelope 1, and the 1st terminal box 2 that carries out ai...  
JP2016200440A
[Subject] A pressure measurement system and a pressure measuring method which do not need to perform temperature compensating for canceling influence of ambient temperature are provided. [Means for Solution] A pressure measurement system...  
JP2016200441A
[Subject] A heat conduction type sensor with high flexibility of attachment is strongly provided against vibration and a shock. [Means for Solution] Pipe-like substrate 2 with which heat conduction type sensor 1 concerning the present in...  
JP6031502B2  
JP6019121B2  
JP2016180650A
[Subject] It enables it to proofread a plurality of candidates for proofreading in the same proofreading quality. [Means for Solution] Measurement output signal Sc acquired when fluid FL of standard pressure power Pr reproduced based on ...  
JP5997771B2  
JP2016170089A
[Subject] Pressure in a dome can be monitored without using special elements, such as a thermo couple, and improvement in the reliability of an encapsulated type MEMS device is aimed at. [Means for Solution] 1st MEMS element 100 that is ...  
JP2016161450A
[Subject] Cold cathode ionization gauge IG with which a measuring object thing is equipped and which detects pressure of the inside is constituted so that magneto unit 2 can be detached and attached to housing 1 by easy manual labor. [Me...  
JP2016156731A
[Subject] A manufacturing method of a diaphragm gage which suppresses that distortion arises between barrier membrane and a barrel, and a diaphragm gage is provided. [Means for Solution] It is formed from ceramics and barrel 11 with an o...  
JPWO2014057536A1
The present invention makes it a subject to provide the vacuum processing device with which measurement accuracy was provided with the small high pressure sensor and the pressure sensor simply [structure] and strongly. Pressure sensor 1 ...  
JP2016145378A
[Subject] A measuring device which can measure a dry state of a resin film with sufficient sensitivity correctly is provided. [Means for Solution] It is a gas determination device consisting of cylindrical member 10 of a rotation type he...  
JP2016133326A
To provide a vacuum degree estimation system of a double-tube structure, an internal combustion engine, and a vacuum degree estimation method of the double-tube structure which can easily determine a vacuum degree of a vacuum state in a ...  
JP2016118542A
[Subject] A sensor which enables operation continuing in extreme environment, for example, hot environments, high-pressure environment, and/or environment containing corrosive gas is provided. [Means for Solution] Thermal electron elemen...  
JP5940901B2  
JP2016513787A
An ionization vacuum measurement cell is the anode (3).ANegative pole (4)KIt contains in a measurement chamber (107). A measurement chamber (107) goes outside and is the negative pole (4).KIt is arranged in a housing (101) which has the ...  
JP5905137B2  
JP2016033509A
To provide a vacuum gauge capable of accurately diagnosing the contamination level of the vacuum gauge with a simple structure, and a contamination diagnosis method capable of accurately diagnosing the contamination level of the vacuum g...  
JP5874117B2  
JP2016504582A
An invention relates to a measurement cell configuration (100) containing a capacitive diaphragm pressure measurement cell (20) for measuring vacuum pressure using a diaphragm (2) as a pressure transducer, A measurement cell configuratio...  
JP2016011876A
To provide a sensor module capable of measuring gas pressure with a high degree of accuracy.A sensor module 10, which outputs a change in temperature of an electric resistor generated according to gas pressure as a change in a resistance...  
JP2016011875A
To improve accuracy in measuring gas pressure.A manufacturing method for a sensor module 10, which heats an electric resistor 20 exposed to gas and outputs a change in temperature of the electric resistor 20 generated according to gas pr...  
JP5827532B2  
JP5816116B2  
JP2015184058A
To provide a hot cathode ionization vacuum gauge having sensitivity stability equivalent to a triode-type hot cathode ionization vacuum gauge of a conventional example and allowing a measurement lower limit to be lowered than that of the...  
JP5798194B2  
JP2015179095A
To provide an apparatus and a method for measuring ambient gas pressure capable of easily determining cause of malfunction or failure.An apparatus for measuring ambient gas pressure includes in a gauge assembly: a vacuum gauge 165; a non...  
JP3199967U
[Subject] A pressure sensor does not break in response to influence of heat, and it is easy to read a measurement value, and provides a device for degree-of-vacuum measurement which can also secure the stability of jig installation. [Mea...  
JP5787316B2  
JP5783866B2  
JP5770828B2  
JP5764723B2  
JP5762749B2  
JP2015143692A
To provide a measurement instrument that extends an operating range with use of a sensor having a different operating range in view of the problem in which many different type of sensors have been used to measure various physical quantit...  
JP2015129684A
To provide a metal ceramic joint capable of suppressing occurrence of distortion in a joint material, a diaphragm vacuum gage, a joining method of metal to ceramic, and a manufacturing method of the diaphragm vacuum gage.The metal cerami...  
JP5745205B2  
JP5728728B2  
JP2015099068A
To provide a hermetic seal component which prevents the reduction of insulation due to remaining bubbles during heating of a glass member in conventional glass hermetic seal using a sealant which is inserted to a through hole of a holdin...  
JP2015062035A
To provide an ionization gauge which reduces stress of an electron source without suffering from damage from sputtering in operation at various pressure levels, a pressure measuring method using such an ionization gauge, and various meth...  
JPWO2013051198A1
隔膜型圧力計は、第1圧力範囲内の圧力を測 定できる第1センサと、前記第1圧力範囲よ りも高圧側に上限を有するとともに前記第1 圧力範囲との重複範囲を有する第2圧力...  
JPWO2013051198A
The 1st sensor by which the barrier membrane type pressure gauge can measure the pressure in the 1st pressure range, The 2nd sensor that can measure the pressure in the 2nd pressure range that has the duplication range of the 1st above-m...  
JP2015507203A
[Subject] When operating by high-pressure power, the ionization vacuum gauge which measures pressure is provided controlling the position of the sediment which arises in sputtering. [Means for Solution] Ionization vacuum gauge 100 is pro...  

Matches 251 - 300 out of 1,703