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Matches 251 - 300 out of 1,648

Document Document Title
JP2015129684A
To provide a metal ceramic joint capable of suppressing occurrence of distortion in a joint material, a diaphragm vacuum gage, a joining method of metal to ceramic, and a manufacturing method of the diaphragm vacuum gage.The metal cerami...  
JP5745205B2  
JP5728728B2  
JP2015099068A
To provide a hermetic seal component which prevents the reduction of insulation due to remaining bubbles during heating of a glass member in conventional glass hermetic seal using a sealant which is inserted to a through hole of a holdin...  
JP2015062035A
To provide an ionization gauge which reduces stress of an electron source without suffering from damage from sputtering in operation at various pressure levels, a pressure measuring method using such an ionization gauge, and various meth...  
JPWO2013051198A1
隔膜型圧力計は、第1圧力範囲内の圧力を測 定できる第1センサと、前記第1圧力範囲よ りも高圧側に上限を有するとともに前記第1 圧力範囲との重複範囲を有する第2圧力...  
JPWO2013051198A
The 1st sensor by which the barrier membrane type pressure gauge can measure the pressure in the 1st pressure range, The 2nd sensor that can measure the pressure in the 2nd pressure range that has the duplication range of the 1st above-m...  
JP2015507203A
[Subject] When operating by high-pressure power, the ionization vacuum gauge which measures pressure is provided controlling the position of the sediment which arises in sputtering. [Means for Solution] Ionization vacuum gauge 100 is pro...  
JP5669411B2  
JP5660529B2  
JP2015001391A
To provide a cold-cathode ionization vacuum gauge and an inner wall protection member, capable of suppressing a size of a device from becoming large upon forming a predetermined discharge space and easily reducing looseness of a member f...  
JP2014534417A
A diaphragm in which an improved electric capacity type pressure gauge has the (a) common electrode, (b) While an electrode structure which has a center electrode and a ring electrode, and the diaphragm are restrained to the electrode st...  
JP5632644B2  
JP2014211356A
To provide a reverse magnetron type cold cathode ionization vacuum device capable of measuring at least a pressure of 10Pa or lower and in the 10Pa level.A reverse magnetron type cold cathode ionization vacuum device has: a vacuum vessel...  
JP2014196976A
To provide a metal ceramic joint body capable of suppressing occurrence of distortion in a joint matter, a diaphragm vacuum gage, a joint method of metal and ceramic, and a method of manufacturing the diaphragm vacuum gage.A diaphragm va...  
JP2014197037A
To provide a heat-conduction-type atmospheric pressure sensor having a simple structure and circuit configuration without need of using electrostatic attraction drive and resonance, serving as exciting means for vibrating a conventional ...  
JP2014525590A
An invention relates to an ionization vacuum measurement cell, and is an ionization vacuum measurement cell, a) A case (10) which has a measurement terminal area (8) about a vacuum which should be measured and which can be exhausted, b) ...  
JP5588243B2  
JP5579038B2  
JP2014520242A
This application is to solar radiation with the transparent airtight enclosure machine (10) which has the support structure (12) of a front plate (11) and its front plate (11) at least, The heat-absorptive means enclosed in the airtight ...  
JP5556363B2  
JP2014130016A
To provide a quart friction vacuum gauge with high sensitivity.The quart friction vacuum gauge is provided inside a gauge head container 7 which is communicated with a container 8 to be measured, and includes: a tuning fork crystal reson...  
JP2014126503A
To prevent liquid (water) from intruding from an introduction section and reduce the occurrence frequency of a failure such as zero-point shift at a low cost with a simple structure.A heater 80 for heating a baffle 70 is disposed. An ope...  
JP2014126502A
To reduce the generation of a trouble such as a zero-point shift and the like by preventing a liquid (water) from intruding from an introduction part at low cost with a simple structure.A plate surface is made to intersect at a right ang...  
JPWO2012111368A
The under-test fluid temperature to that measurement value and the heat conduction type sensor which can be amended so that there may be no influence of the kind of fluid (proofreading) are provided by measurement of the flow velocity, a...  
JP2014512528A
A gas pressure measurement cell device is provided with a heat conduction vacuum measurement cell (Pi) of a ピラニ type which has a measurement chamber case (3) which encloses a measurement chamber (2), and a measurement terminal area...  
JP5463361B2  
JP2014048264A
To provide a cold-cathode ionization gauge that prolongs lifetimes of a discharge induction member and an anode by suppressing sticking of a product material due to a discharge between the discharge induction member and a tip part of the...  
JP5387468B2  
JP5387467B2  
JP2013257174A
To provide a manufacturing method of a device, which allows a device part with a rectangular cross section formed on a substrate to have high-quality electrode films on all the surfaces including a first and a second principal surface, a...  
JP5375252B2
To provide a vacuum gauge that measures pressures of a gas in wide range with one vacuum gauge. Signals of frequencies corresponding to natural frequencies of vibrating bodies 24 and 28 that are output from initial vibration signal sourc...  
JP5371057B2
To provide an ionization vacuum gauge for further reducing gas discharge amounts due to electron stimulated desorption (ESD). The ionization vacuum gauge includes: an axial ion collector 1; a coil-shaped grid 2 installed in the periphery...  
JP5371931B2
There is disclosed an encoding device capable of appropriately adjusting the dynamic range of spectrum inserted according to the technique for replacing a spectrum of a certain band with a spectrum of another band. The device includes a ...  
JP5367925B1
A pressure sensor (400) has: a MEMS resonator (500); a sweep unit (401) that outputs an excitation signal to the MEMS resonator while sweeping frequencies of the excitation signal along a prescribed sweep direction across a prescribed fr...  
JP5353358B2
To provide a vacuum gage which enables measurement of gas pressure in a wider range by one vacuum gage. A signal outputted from a signal source 10 for driving is amplified or attenuated by a driving voltage adjusting circuit 11. Moreover...  
JP5349366B2
The present invention allows manufacturing of a capacitive diaphragm pressure gauge and a Pirani pressure gauge on a single silicon substrate, which makes it possible to reduce the manufacturing cost by the miniaturization of products an...  
JP2013217942A
To provide a vacuum gauge capable of measuring a wide range of gas pressure by a single vacuum gauge.A vacuum gauge includes; a vibrator which comprising a spindle, a beam, and a vibrator fixing part and can be made to measure different ...  
JP2013205011A
To provide a vacuum measuring device with less infiltration of moisture or steam of a molten metal, and with less failure of a vacuum gauge caused by the infiltration happening.A vacuum measuring device is constructed such that a branch ...  
JP5302346B2
A method for operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power leve...  
JP5284961B2  
JP5289321B2  
JP5252739B2  
JP5249112B2  
JP5248218B2  
JP2013527436A
A metal wire (13) to which this invention extends between two ends of a substrate (10), two support sticks (11, 12), and a support stick (11, 12), And it has an electric interengagement child (14, 15) provided in a support stick, and the...  
JP5219816B2  
JPWO2011099238A
According to a measuring object thing, a transducer type vacuum meter of a low running cost in which pressure measurement at two or more places is possible is provided, without spoiling a function to attain space-saving-izing, low electr...  
JP5196681B2  
JP2013072695A
To provide a hot cathode ionization vacuum gauge which has the sensitivity stability equal to that of a conventional triode-type hot cathode ionization vacuum gauge and whose measurement lower limit can be lowered than the conventional o...  

Matches 251 - 300 out of 1,648