Login| Sign Up| Help| Contact|

Patent Searching and Data


Matches 251 - 300 out of 1,581

Document Document Title
JP2013040913A
To provide a method for calibrating a measurement error caused by change of situation of a sensor, particularly a method for easy calibration of a cold-cathode type ionization vacuum gauge at a production field.When displays of a measuri...  
JP5151934B2  
JP5151935B2  
JP5148104B2  
JP5143736B2  
JP5139679B2  
JP5127042B2  
JP5124283B2  
JP2013011556A
To provide a diaphragm barometer in which, in order to fundamentally solve a problem of temporal change of a standard atmospheric pressure including vacuum of a standard pressure chamber in the diaphragm barometer, the standard atmospher...  
JP5108852B2  
JP5088814B2  
JP5080283B2  
JP5076235B2  
JP2012216325A
To provide a tank type vacuum breaker capable of detecting deterioration of a degree of vacuum even under an operational condition, and detecting deterioration of the degree of vacuum and outputting alarms in realtime.In a tank type vacu...  
JP2012198187A
To accurately measure a pressure value in a vacuum environment without disturbing the environment.A micro pressure sensor is composed of a heat conduction type pressure sensor part 2 arranged on a necessary position in a vacuum device an...  
JP5049780B2  
JP5038361B2  
JP2012181067A
To inhibit film formation inside of a vacuum gauge.A vacuum gauge system comprises: a cold cathode ionization gauge 1 which is attached to a vacuum processing device via a valve 2 and measures pressure inside of the vacuum processing dev...  
JP5027882B2  
JP5000386B2  
JP5002861B2  
JP4994058B2  
JP4995617B2  
JP4981720B2  
JP4976411B2  
JP4975959B2  
JP4970751B2  
JP4962908B2  
JP2012112981A
To provide an apparatus and method for measuring an ambient gas pressure capable of easily determining the cause of malfunction or failure.An apparatus for measuring an ambient gas pressure includes in a gauge assembly: a vacuum gauge 16...  
JP3175319U  
JP4926233B2  
JP2012078184A
To provide a pressure measuring device and a pressure measuring method that enable more reliable measurement.A pressure measuring device comprises: a first detection part 4 that has a first resistance element 13 and that outputs an elect...  
JP4905704B2  
JP4903029B2  
JP2012037295A
To provide an ionization vacuum gauge for further reducing gas discharge amounts due to electron stimulated desorption (ESD).The ionization vacuum gauge includes: an axial ion collector 1; a coil-shaped grid 2 installed in the periphery ...  
JP4878289B2  
JP2012026995A
To provide an inexpensive transducer type vacuum gauge capable of performing accurate pressure measurement in accordance with gas (component) in a measuring object by a single body and suited to a device required for accurate pressure me...  
JP2012503199A  
JP4868438B2  
JP4860972B2  
JP4845169B2  
JP2011257377A
To provide a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation.A cold cathode ionization vacuum gauge according to the present invention includes an anode 2, a cathode 1...  
JP4836306B2  
JP4829285B2  
JP2011242172A
To provide an oxygen detecting gauge that can cause oxygen to be practically quickly desorbed when a large quantity of oxygen is adsorbed in a filament surface.An oxygen detecting gauge M1 that is fitted to a vacuum vessel W and detects ...  
JP2011242335A
To provide a vacuum gauge capable of measuring pressure in a wide range without making measurement discontinuous with the single vacuum gauge.A vacuum gauge comprises: vibrators; vibrating electrodes for driving the vibrators using an el...  
JP4809837B2  
JP4810422B2  
JP2011196831A
To provide a vacuum gauge measuring wider range of gas pressure with sufficient accuracy than a conventional vacuum gauge.The vacuum gauge has: a vibrating body 4; an excitation electrode 5 which faces the vibrating body 4 and drives the...  
JP2011191284A
To provide a vacuum gauge capable of measuring two systems at low cost and at high accuracy.A cold cathode type ionization vacuum gauge, which shares a power source, a central processing element, and an accessary circuit therefor, is inc...  

Matches 251 - 300 out of 1,581