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JP2006084190 |
To solve the problem that the conventional case used to have a difficulty in specification of a vacuum gauge of malfuction from among a lot of vacuum gauges when they are set on a plurality of places on a vacuum system.The vacuum gauge m...
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JP2006078190 |
To determine the reason for the malfunction at a low cost and with a simple structure, in a system adopted with an insulating structure is whether a degradation in vacuum of the vacuum chamber or the abnormality of the system of the ther...
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JP2006047288 |
To provide a vacuum gauge with improved sensitivity, especially for an ionization vacuum gauge restricted in a saddle of electrostatic field.This vacuum gauge includes a negative electrode unit, a positive electrode ring, a shield electr...
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JP2005331362 |
To realize a vacuum gage robust against disturbance and capable of detecting precisely a degree of vacuum.A vibration body 1, a beam 2 and a housing 3 cut out of one sheet are fixed onto a base panel 6 via a spacer 5. The vibration body ...
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JP3739141 |
To enlarge the lower limit of extremely high vacuum measuring range by providing a charged particle shielding electrode in a space communicating between a vacuum gauge container and a vacuum chamber to be measured thereby blocking intrus...
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JP3734913 |
To provide a technique capable of surely preventing filament disconnection. When pressure is to be found on the basis of the magnitude of an ionic current I, by collecting ion formed by gas molecule ionization with a collector C after im...
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JP3721238 |
To judge the existence of a vacuum leak by a method wherein sound waves are impinged from one face of a sheetlike vacuum packaged product, the intensity of the sound waves which are transmitted up to a face on the opposite side is measur...
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JP2005172611 |
To provide a charged particle beam apparatus and a pressure measuring method for the charged particle beam apparatus, capable of measuring a vacuum pressure value around its charged particle gun.Values R1-R8 corresponding to conductances...
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JP2005140780 |
To provide a pressure sensor with its outside dimensions very limited.This pressure sensor is a micro electromechanical vibration device and comprises a silicon substrate 15 with a single-layer or multi-layer vibration assembly 121 forme...
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JP3681962 |
To provide a pressure measurement device which is free from vacuum leakage due to erosion as in use for a ground electrode. By putting a metal block 32 between an insulating part 31 such as ceramics and a ground electrode 33 absorbing di...
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JP2005127733 |
To provide a measuring apparatus including a crystal oscillator capable of preventing electrode parts of the crystal oscillator from corroding, keeping natural resonance impedance stable and constant, and improving accuracy in measuring ...
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JP2005114525 |
To provide an internal pressure measuring apparatus suited for measuring the internal pressure of a compact food container, in which food items and drink are filled and sealed, by restraining the dispersion of the pressure of air by the ...
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JP2005114574 |
To compensate for the fluctuations caused by a cable length change, even when a measuring cable for connecting a gauge head to a measuring part is changed into a cable having a different cable length, and to thereby measure pressure with...
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JP3664002 |
To precisely measure the sealed gas pressure of a gas-sealed apparatus having a dispersion of electrode interval or a gas-sealed apparatus having a fluctuating electrode interval. This measuring method of gas pressure comprises applying ...
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JP2005090991 |
To provide a quartz friction vacuum gauge which improves corrosion resistivity by preventing corrosion of electrode part of a quartz vibrator, prevents aging variation of temperature dependence concerning the intrinsic resonance impedanc...
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JP2005062167 |
To provide a miniaturized vacuum gauge that has high sensitivity and does not disturb the measurement of pressure greatly.An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a container 10 more con...
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JP2005062176 |
To provide a miniaturized vacuum gauge that has high sensitivity and does not give any disturbance for affecting the measurement of pressure.An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a co...
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JP2005043052 |
To provide a foreign matter detecting method capable of stably detecting floating foreign matter in a treatment chamber by suppressing the deposition of a film caused by plasma treatment and the cloudiness of a measuring window due to et...
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JP2004349102 |
To provide a quadrupole type mass spectrometer carrying out measuring of pressure.A pressure detecting part 40 for a pressure measuring device is installed inside a container 11 in which a quadrupole 23 is installed and the quadrupole 23...
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JP2004311592 |
To obtain a substrate cleaning device for making a film thickness after cleaning a substrate uniform in the plane when the thickness of laminated films cannot be made uniform because reaction of a gas for forming films on the substrate i...
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JP2004309605 |
To make correctable a white defect, a black defect or a glass projection defect of a Levenson mask with one kind of gas.By using diacetone acrylamide, a light-shielding film 17 to correct a white defect can be formed both on a glass subs...
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JP2004264075 |
To provide a means for confirming easily and simply a vacuum condition in a clean box.This vacuum gage has as elements a communication space for communicating a vacuum space inside the clean box with a space of atmospheric pressure, a di...
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JP2004257784 |
To provide a unit for accurately and easily measuring a degree of vacuum in the tip of an injection gun.The degree-of-vacuum measuring unit comprises: a connecting port 13a airtightly connected to the injection gun 21; closed piping 11 f...
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JP2004239770 |
To provide attaching structure for a cold cathode ionization vacuum gage capable of measuring the vacuum in a vacuum vessel under a high-vacuum condition upon restoration of a service power interruption, and capable of replacing the cold...
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JP3585969 |
PURPOSE: To accurately measure continuously a measuring area wider than the measuring area of each sensor element, by combining a plurality of pressure sensors. CONSTITUTION: A Pirani sensor 1 is used in combination with a cold cathode e...
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JP3580967 |
To enhance the pressure meausing accuracy of a hot-cathode magnetron-type vacuum gage, to reduce photoelectron current, and to reduce a current generated at a time when gas molecules stucked to the inner wall of an anode are driven out b...
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JP2004163136 |
To provide a pressure corrector for a vacuum gage equipped with a correcting function for clearing a pressure value of the effect not only of charged particles flowing into a gage head of the vacuum gage but also of a noise current flowi...
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JP2004144507 |
To provide a vacuum gauge which enables grasp of accurate vacuum achievement, and sufficient control of the degree of vacuum, even if rough handling is performed in work, when an air conditioning machine is installed.The inside of a cyli...
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JP2004132698 |
To provide a differential pressure/absolute pressure converter for accurately and rapidly performing load lock control.In the converter 10 and its conversion method, where an absolute pressure sensor for detecting an absolute pressure in...
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JP3490982 |
To provide a vacuum gage pressure corrector which is usable together with an existing ionization vacuum gage controller to have a pressure correcting function. The vacuum gage pressure corrector is connected to a vacuum gage having a sel...
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JP2003315296 |
To provide a detection device with a high sensitivity capable of detecting, with a high sensitivity, a detection object smaller in size than a detection object which a conventional art has targeted.The detection device is provided with a...
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JP2003303777 |
To provide a plasma deposition apparatus which enables accurate end-point detection for cleaning without accompanying the emission of light, and to provide a cleaning method.The plasma deposition apparatus 1 is provided with a first vacu...
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JP2003279433 |
To suppress increase of a device scale and a processing scale in a measuring system of the degree of vacuum, and to measure the degree of vacuum accurately, easily and quickly in a wide range from the low degree of vacuum (atmospheric pr...
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JP2003240740 |
To provide a means for judging the degree of vacuum in element units and to provide an electron device having the means, in the electron device that is sealed in a pressure-reduced atmosphere in element units.The electron device is provi...
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JP3462238 |
PURPOSE: To provide a sensitivity correction method of a gyro capable of correcting sensitivity change accompanying a change with the passage of time of the gyro as it is mounted on a moving body and securing precision necessary for navi...
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JP3452913 |
To provide a vacuum gage using a Peltier element. The vacuum gage using a Peltier element for measuring the pressure in a vacuum tank comprises a signal generator 1 for generating a current flowing in the Peltier element, a current meter...
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JP3434813 |
To accurately measure vacuum pressure. A vacuum gauge comprises an electron supply source 16, an open anode 18 for forming an anode space, an ion collector electrode 20 for collecting ions formed by a collision of electrons with gas mole...
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JP2003149069 |
To provide a vacuum switch which can be operated when a prescribed degree of vacuum is reached and to provide a vacuum evacuation device using the vacuum switch as well as to provide an ion-type vacuum gage.A switching element 18 which i...
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JP2003083831 |
To detect a leakage current flowing into a live part interphase caused by deterioration of an insulating material, in a vacuum circuit breaker having a three-phase integrally molded insulating frame.A conductor 8 is disposed on a live pa...
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JP2003065877 |
To provide an ultrahigh vacuum gage capable of adjusting and measuring offset derived from a gage head and the whole measuring system, and an ultrahigh vacuum measuring method using the gage.In this ultrahigh vacuum gage, a condition whe...
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JP2003065875 |
To provide an ultrahigh vacuum measuring method capable of removing the influence by electrons and the influence by ions.This method is constituted as follows: a vacuum gage for ionizing gas molecules by electron impact at an ion source ...
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JP3403845 |
PURPOSE: To provide a method and a vacuum gauge for ultra-high vacuum which can accurately measure ultra-high vacuum not more than about 10-11Pa by removing an ESD(electronically stimulated desorbed) ions. CONSTITUTION: In an ultra-high ...
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JP2003050176 |
To accurately measure vacuum pressure. A vacuum gauge comprises an electron supply source 16, an open anode 18 for forming an anode space, an ion collector electrode 20 for collecting ions formed by a collision of electrons with gas mole...
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JP3400885 |
PURPOSE: To provide a flange mount-type hot cathode ionization vacuum gauge of long life which can measure stably even under a high pressure or even when performing degassing frequently and can be made compact. CONSTITUTION: The gauge ha...
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JP3396726 |
To enhance measuring sensitivity and accuracy in a BA-type ionization vacuum gauge. In the BA-type ionization vacuum gauge 10, an ion collector electrode 16 in an open grid 12 is formed into a loop shape, and the loop surface thereof is ...
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JP2003042884 |
To provide a vacuum measuring apparatus capable of substantially shortening aging time. The vacuum measuring apparatus is provided with both a vacuum gauge connected to a vacuum processing chamber and a controller connected to the vacuum...
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JP2003021567 |
To provide a micro high-vacuum pressure sensor, which is housed inside a low-pressure microchip enclosure and which can be manufactured by a well-known microchip manufacturing technique.The micro pressure sensor uses an electric field ge...
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JP2003021566 |
To provide a silicon-diaphragm type vacuum pressure sensor device, by which a pressure region up to 13.3 kPa from 0.01 Pa can be measured continuously.The diaphragm-type vacuum pressure sensor device is provided with a first silicon-diap...
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JP3385624 |
PURPOSE: To precisely guide a moving body through a passage by displaying an actual image in addition to map information. CONSTITUTION: When there is some input from an input device 6, images from an image pickup device 5 are stored on a...
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JP3385392 |
PURPOSE: To provide a vacuum sensor which is simple in structure, small-sized, and besides can measure wide range of vacuum pressure with by itself by counterposing plural sets of diaphragm electrodes and conductive film electrodes with ...
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