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Matches 251 - 300 out of 1,567

Document Document Title
JP5049780B2  
JP5038361B2  
JP2012181067A
To inhibit film formation inside of a vacuum gauge.A vacuum gauge system comprises: a cold cathode ionization gauge 1 which is attached to a vacuum processing device via a valve 2 and measures pressure inside of the vacuum processing dev...  
JP5027882B2  
JP5000386B2  
JP5002861B2  
JP4994058B2  
JP4995617B2  
JP4981720B2  
JP4976411B2  
JP4975959B2  
JP4970751B2  
JP4962908B2  
JP2012112981A
To provide an apparatus and method for measuring an ambient gas pressure capable of easily determining the cause of malfunction or failure.An apparatus for measuring an ambient gas pressure includes in a gauge assembly: a vacuum gauge 16...  
JP3175319U  
JP4926233B2  
JP2012078184A
To provide a pressure measuring device and a pressure measuring method that enable more reliable measurement.A pressure measuring device comprises: a first detection part 4 that has a first resistance element 13 and that outputs an elect...  
JP4905704B2  
JP4903029B2  
JP2012037295A
To provide an ionization vacuum gauge for further reducing gas discharge amounts due to electron stimulated desorption (ESD).The ionization vacuum gauge includes: an axial ion collector 1; a coil-shaped grid 2 installed in the periphery ...  
JP4878289B2  
JP2012026995A
To provide an inexpensive transducer type vacuum gauge capable of performing accurate pressure measurement in accordance with gas (component) in a measuring object by a single body and suited to a device required for accurate pressure me...  
JP2012503199A  
JP4868438B2  
JP4860972B2  
JP4845169B2  
JP2011257377A
To provide a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation.A cold cathode ionization vacuum gauge according to the present invention includes an anode 2, a cathode 1...  
JP4836306B2  
JP4829285B2  
JP2011242172A
To provide an oxygen detecting gauge that can cause oxygen to be practically quickly desorbed when a large quantity of oxygen is adsorbed in a filament surface.An oxygen detecting gauge M1 that is fitted to a vacuum vessel W and detects ...  
JP2011242335A
To provide a vacuum gauge capable of measuring pressure in a wide range without making measurement discontinuous with the single vacuum gauge.A vacuum gauge comprises: vibrators; vibrating electrodes for driving the vibrators using an el...  
JP4809837B2  
JP4810422B2  
JP2011196831A
To provide a vacuum gauge measuring wider range of gas pressure with sufficient accuracy than a conventional vacuum gauge.The vacuum gauge has: a vibrating body 4; an excitation electrode 5 which faces the vibrating body 4 and drives the...  
JP2011191284A
To provide a vacuum gauge capable of measuring two systems at low cost and at high accuracy.A cold cathode type ionization vacuum gauge, which shares a power source, a central processing element, and an accessary circuit therefor, is inc...  
JP2011174900A
To attain miniaturization of products and low manufacturing cost by mass production by manufacturing a capacitance type diaphragm vacuum gage and a Pirani vacuum gage on a single silicon substrate.The method for manufacturing, being a me...  
JP4764468B2  
JP4735052B2  
JP2011133386A
To provide a cold cathode ionization vacuum gauge using a permanent magnet as a member for inducing discharge, and readily generating discharges by arranging the permanent magnet on a pole piece.The cold cathode ionization vacuum gauge 1...  
JP2011128169A
To operate a hot cathode ionization vacuum gauge during a degassing operation by an electron bombardment method and a current heating method, by controlling degassing power level as a function of gauge pressure.While the degassing power ...  
JP4714768B2  
JP2011096446A
To provide: a device for measuring a mean free path, which can accurately and simply measure a mean free path of charged particles even at an atmosphere of a degree of poor vacuum and/or an atmosphere of activated gas; a vacuum indicator...  
JP2011513709A  
JP2011075480A
To provide an inspection method of a vacuum pump and a vacuum pressure measuring device, acquiring highly-reliable measurement data of a vacuum pressure, when inspecting the vacuum pump.In the inspection method of the vacuum pump for det...  
JP2011069733A
To provide a heat conduction-type barometric sensor (using thermal excitation) for the measurement of a high bandwidth barometric pressure with high sensitivity and high accuracy that has a simple structure and circuit configuration and ...  
JP2011508211A  
JP2011043853A
To improve the subjective quality of decoding signal by properly adjusting the dynamic range of spectrum inserted in a technique for replacing a spectrum of a certain band with a spectrum of another band.A deformation information estimat...  
JP2011027700A
To provide a cold-cathode ionization gauge that allows easy mounting and replacement of members for inducing discharge and make it easier for the members to cause discharge.The cold-cathode ionization gauge includes: a cylindrical cathod...  
JP2011013218A
To provide a diaphragm type manometer of low cost.The manometer includes a monolithic base 102 which has an upper surface and a sidewall elongated more highly than the upper surface, a plurality of electric conductive elements 112 which ...  
JP2011007777A
To provide a cold cathode ionization vacuum gauge, a discharge starting auxiliary electrode plate, and a vacuum processing device which have simple configurations, and, even after long-term use, which allow discharge to be initiated in a...  

Matches 251 - 300 out of 1,567