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JP2024015656A |
The present invention provides a gas physical quantity detection device and a gas physical quantity detection method that can improve performance by using a thermopile widely used for temperature measurement to measure physical quantitie...
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JP2023554089A |
The present disclosure relates to thermal conduction vacuum gauge assemblies. The assembly includes a body defining an internal chamber for receiving a working gas and a heating element disposed within the chamber. The body is defined by...
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JP2023553296A |
The present disclosure relates to thermal conduction vacuum gauge assemblies. The assembly includes a body defining an internal chamber for receiving a working gas and a heating element disposed within the internal chamber. The body is d...
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JP2023550350A |
The present invention provides a heat transfer pressure gauge and a method of heat transfer pressure measurement that improves the accuracy, reproducibility, and repeatability of pressure measurements while minimizing the effect of ambie...
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JP2023548676A |
A method (100) for operating a pressure sensor group, the group comprising at least a first pressure sensor having a first pressure measurement range and a second pressure sensor having a second pressure measurement range. , the first pr...
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JP2023547360A |
A method for operating a group of pressure sensors 1 configured to be able to measure pressure within a common measurement volume 2, the group of pressure sensors having at least a first pressure measurement range. a first pressure senso...
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JP2023132471A |
To provide a capacitance measuring inspection jig with which it is possible to check a capacitance type pressure sensor for leakage, alone not with others.A capacitance measuring inspection jig comprises: a base 14 that holds a capacitan...
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JP7330060B2 |
A film forming apparatus includes: a pressure-reducible processing container; a pressure gauge configured to detect a pressure in the processing container; and a controller, wherein the controller is configured to repeat a cycle includin...
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JP7314000B2 |
An electron generating apparatus includes a filament, a power supply configured to supply power to the filament so as to make the filament emit an electron, and a controller configured to repeatedly detect a value having a correlation wi...
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JP2023100312A |
To expose a portion in which getters are overlapped with each other in an airtight container as wide as possible, to increase a substantially surface area.A holding structure comprises a getter holder 22 that holds a plurality of getters...
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JP7290545B2 |
To provide a Pirani vacuum gage capable of accurately measuring gas pressure even before temperature of a cylindrical body and an envelope is stabilized at predetermined temperature without increasing the number of components.A Pirani va...
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JP7280595B2 |
To solve a problem in the monitoring of a vacuum insulation material by a conventional embodiment that a decision is merely made whether or not the thermal insulation performance of the vacuum insulation material at the point of measurem...
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JP7195949B2 |
To provide a hot cathode ionization gauge that corrects sensitivity according to a contamination state of an ion collector, and thereby obtains a precise pressure indication value.A hot cathode ionization gauge IG includes: a sensor body...
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JP7194899B2 |
A vacuum insulator (10) includes: a core (13); a pressure sensor (51) that detects a pressure; a transmitter (52) that transmits, by wireless communication, the detected pressure detected by the pressure sensor (51); a power feeder (53) ...
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JP2022549223A |
The present invention relates to a method 100 for determining pressure within a vacuum system, the method comprising: a) generating 101 a plasma in a sample chamber hydrodynamically connected to a vacuum system and in electrical contact ...
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JP2022174404A |
To automatically switch a self heating temperature.A diaphragm gauge comprises: a pressure receiving unit 10 whose electrical characteristics change according to displacement of a diaphragm due to the pressure of a medium to be measured;...
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JP2022134309A |
To suppress increase of heater temperature to be unnecessarily high, with high accuracy.A vacuum gauge 10 comprises a control circuit 22 performing feedback control on the temperature of a heater 12 based on the temperature of a pressure...
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JP2022134266A |
To facilitate formation of a vacuum chamber.While the inside of a vacuum heating furnace in which a vacuum device is disposed is evacuated to a high vacuum, the vacuum device is heated to a temperature A to degas the inside of a chamber ...
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JP7096628B1 |
To provide a diaphragm pressure gauge arranged under a measured pressure capable of measuring a pressure below atmospheric pressure without depending on an environmental temperature or a gas type. A diaphragm pressure gauge 10 is fixed t...
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JP7087892B2 |
To provide a vacuum degree detection device and an electron beam irradiation system each of which hardly detects vacuum degree erroneously due to discharge abnormality.A vacuum degree detection device 2 is configured to detect the vacuum...
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JP2022085260A |
To provide a diaphragm vacuum gauge with an extended lower limit of a pressure measurement range.A diaphragm vacuum gauge provided herein comprises: a pressure adjustment chamber 1 provided to be in communication with a measured chamber ...
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JP2022085261A |
To provide a diaphragm vacuum gauge with an extended upper limit of a pressure measurement range.A diaphragm vacuum gauge provided herein comprises: a pressure adjustment chamber 1 provided to be in communication with a measured chamber ...
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JP7063742B2 |
To provide a transducer type vacuum gauge capable of changing the attachment attitude of a body with respect to a connection port of a measuring object without changing the position of a sensor unit with respect to the measuring object.A...
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JP2022063937A |
To provide a pressure sensor with which it is possible to improve the strength required for practical use.A pressure sensor comprises a package 14 having a sensor chip accommodation space, and a support diaphragm 13 secured to the packag...
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JP7036675B2 |
To provide a BA type ionization gauge capable of detecting abnormal sensitivity as soon as possible without inviting complication of a structure.A BA type ionization gauge IG of the present invention has a metal enclosure 1 capable of be...
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JP6990251B2 |
A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to ena...
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JP6964202B2 |
A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or m...
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JP2021162502A |
To provide a housing for pressure sensors, with which a temperature distribution hardly occurs in the inside of a pressure sensor when used by being arranged on the inside of a heater block.MEANS FOR SOLVING THE PROBLEM: Provided is a ho...
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JP6937673B2 |
To provide a vacuum chamber abnormality detector, for example, that can detect a possible abnormality of the degree of vacuum in a reference vacuum chamber before the degree of vacuum actually becomes abnormal.The present invention provi...
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JP6932892B2 |
A triode type ionization vacuum gauge capable of accurately measuring the internal pressure of a measurement object is disclosed. The triode type ionization vacuum gauge of the present invention includes a filament, a grid, and an ion co...
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JP2021523361A |
To provide a partial pressure detecting device and a method for detecting a partial pressure of a gas species. A pressure dividing detector is a heat conduction vacuum gauge configured to detect the pressure of a mixed gas in a vacuum ch...
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JP6886215B2 |
The objective of the present invention is to provide a degree-of-vacuum measurement device which does not require a complicated control of a vacuum valve when a vacuum is drawn in the interior of a mold, which can be manufactured inexpen...
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JP6826131B2 |
A cold cathode ionization gauge includes multiple cathodes providing different spacings between the cathodes and an anode. The multiple cathodes allow for pressure measurements over wider ranges of pressure. A first cathode with a larger...
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JP6815283B2 |
A diaphragm vacuum gauge (100) is provided with a temperature difference calculating unit (14) and an abnormality determining unit (15). The temperature difference calculating unit (14) obtains a temperature difference Δt between a temp...
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JP6814789B2 |
Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias v...
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JP6809381B2 |
To provide a vacuum pump that can prevent burnout of a filament of an ionization vacuum gage provided in a vacuum chamber.A vacuum pump 1 comprises a rotation speed sensor 113 for detecting a rotation speed of a pump rotor 110, a signal ...
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JP6803496B1 |
To quickly determine that the pressure inside the vacuum chamber reaches the ultimate pressure without being affected by gas molecules adsorbed on the inner surface of the housing 1 when the inside of the vacuum chamber Vc at atmospheric...
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JP6796352B2 |
A pressure gauge (IA, 1B) includes: an outer container (20) defining an outer chamber (21) set to a reference pressure (Pr); an inner container (30) disposed in the outer container (20); and a tube (10) setting the inside of a first inne...
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JP6787636B2 |
To provide a vacuum measurement sensor that can measure a vacuum pressure in a desired range without depending on the type of a gas.The vacuum measurement sensor includes a reference pressure chamber 12 having an opening in one surface a...
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JP6772391B2 |
The ionization vacuum gauge according to one embodiment of the present invention is provided with a gauge head and a control unit. The control unit has a drive circuit, a grid power source, an ionic current detection circuit, and a poten...
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JP2020134330A |
To provide a heat conduction vacuum gauge which can measure surrounding voltages without being affected by surrounding temperatures.A heat conduction vacuum gauge 10 of the present invention includes: a sensitive unit 11; a conduction he...
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JP6744636B2 |
A vacuum gauge includes an introduction tube 320, a diaphragm 40 displaced by a gas to be measured that is introduced from the introduction tube, a piezoelectric element 50 that has one end coupled to the diaphragm and is displaced along...
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JP6728438B1 |
In a conventional example of a vacuum heat insulating material whose internal physical properties can be measured by using a sensor or the like, there is a limit in continuously supplying electric power to a sensor system mounted therein...
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JP6721806B1 |
The ionization vacuum gauge includes an anode having a rod shape and a cathode including a cathode plate having a through hole through which the anode passes. The shape of the through hole in the axial cross section of the anode includes...
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JP6687823B1 |
The ionization vacuum gauge includes an anode, a cathode, and an electromagnetic wave source. The cathode includes a first cathode plate having a through hole through which the anode passes and an accommodating portion for accommodating ...
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JP6670839B2 |
A method of making a gauge, the method comprising: positioning a gauge assembly within a mold, the gauge assembly comprising an electrical feedthrough pin disposed through an opening of a base; flowing molten polymer into the mold; and a...
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JP6663284B2 |
A state determination unit compares an output value obtained by a measuring unit with a reference characteristic value that serves as a reference, counts the number of times an excessive pressure application state occurs in which the out...
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JP2020030066A |
To provide a pressure sensor in which the structure for reducing membrane stress is realized with practical manufacturing dimensions and zero-point shift that is caused by the deposition film of a sensor diaphragm is as small as possible...
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JP6609728B1 |
Provided is a vacuum gauge configured so that set values can be easily set and changed, and a pressure measurement system including the vacuum gauge. The vacuum gauge PG, which has a main body 1 mounted on the object to be measured Vc an...
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JP2019196951A |
To detect abnormal vibration generated in manufacturing equipment at a relatively low cost.A signal extraction circuit 12 extracts, from a sensor signal SS of a diaphragm type pressure sensor 11 which detects internal pressure in a vesse...
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