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Matches 351 - 400 out of 1,734

Document Document Title
JP2014512528A
A gas pressure measurement cell device is provided with a heat conduction vacuum measurement cell (Pi) of a ピラニ type which has a measurement chamber case (3) which encloses a measurement chamber (2), and a measurement terminal area...  
JP5463361B2  
JP2014048264A
To provide a cold-cathode ionization gauge that prolongs lifetimes of a discharge induction member and an anode by suppressing sticking of a product material due to a discharge between the discharge induction member and a tip part of the...  
JP5387468B2  
JP5387467B2  
JP2013257174A
To provide a manufacturing method of a device, which allows a device part with a rectangular cross section formed on a substrate to have high-quality electrode films on all the surfaces including a first and a second principal surface, a...  
JP5375252B2
To provide a vacuum gauge that measures pressures of a gas in wide range with one vacuum gauge. Signals of frequencies corresponding to natural frequencies of vibrating bodies 24 and 28 that are output from initial vibration signal sourc...  
JP5371057B2
To provide an ionization vacuum gauge for further reducing gas discharge amounts due to electron stimulated desorption (ESD). The ionization vacuum gauge includes: an axial ion collector 1; a coil-shaped grid 2 installed in the periphery...  
JP5371931B2
There is disclosed an encoding device capable of appropriately adjusting the dynamic range of spectrum inserted according to the technique for replacing a spectrum of a certain band with a spectrum of another band. The device includes a ...  
JP5367925B1
A pressure sensor (400) has: a MEMS resonator (500); a sweep unit (401) that outputs an excitation signal to the MEMS resonator while sweeping frequencies of the excitation signal along a prescribed sweep direction across a prescribed fr...  
JP5353358B2
To provide a vacuum gage which enables measurement of gas pressure in a wider range by one vacuum gage. A signal outputted from a signal source 10 for driving is amplified or attenuated by a driving voltage adjusting circuit 11. Moreover...  
JP5349366B2
The present invention allows manufacturing of a capacitive diaphragm pressure gauge and a Pirani pressure gauge on a single silicon substrate, which makes it possible to reduce the manufacturing cost by the miniaturization of products an...  
JP2013217942A
To provide a vacuum gauge capable of measuring a wide range of gas pressure by a single vacuum gauge.A vacuum gauge includes; a vibrator which comprising a spindle, a beam, and a vibrator fixing part and can be made to measure different ...  
JP2013205011A
To provide a vacuum measuring device with less infiltration of moisture or steam of a molten metal, and with less failure of a vacuum gauge caused by the infiltration happening.A vacuum measuring device is constructed such that a branch ...  
JP5302346B2
A method for operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power leve...  
JP5284961B2  
JP5289321B2  
JP5252739B2  
JP5249112B2  
JP5248218B2  
JP2013527436A
A metal wire (13) to which this invention extends between two ends of a substrate (10), two support sticks (11, 12), and a support stick (11, 12), And it has an electric interengagement child (14, 15) provided in a support stick, and the...  
JP5219816B2  
JPWO2011099238A1
省スペース化、低電力化や低コスト化等を図 るという機能を損なうことなく、測定対象物 に応じて複数個所での圧力測定が可能な低ラ ンニングコストのトランスデューサ型真...  
JPWO2011099238A
According to a measuring object thing, a transducer type vacuum meter of a low running cost in which pressure measurement at two or more places is possible is provided, without spoiling a function to attain space-saving-izing, low electr...  
JP5196681B2  
JP2013072695A
To provide a hot cathode ionization vacuum gauge which has the sensitivity stability equal to that of a conventional triode-type hot cathode ionization vacuum gauge and whose measurement lower limit can be lowered than the conventional o...  
JP2013072694A
To provide a hot cathode ionization vacuum gauge capable of suppressing reduction in the ionization rate and having excellent stability in the sensitivity over a long time even if a hot electron emission area is varied by thermal deforma...  
JP2013072840A
To provide an inexpensive vacuum degree sensor in a simple structure, and adsorption equipment capable of confirming adsorption power while suppressing increase of a cost.The vacuum degree sensor includes: an air housing body 19 which ha...  
JP5183763B2  
JP5170768B2  
JP5164952B2  
JP2013040914A
To provide a method for calibrating a measurement error caused by change of situation of a sensor, particularly a method for easy calibration of a cold-cathode type ionization vacuum gauge at a production field.Displays of a measuring in...  
JP2013040913A
To provide a method for calibrating a measurement error caused by change of situation of a sensor, particularly a method for easy calibration of a cold-cathode type ionization vacuum gauge at a production field.When displays of a measuri...  
JPWO2011040625A1
真空容器の内部にグリッド(10)と電子源 (20)とを備え、グリッドの外側に引き出 されたイオンビーム(100)をイオンコレ クタ(40)で捕らえて電流信号に変換...  
JPWO2011040625A
In a vacuum measuring device of form which equips an inside of a vacuum vessel with a grid (10) and a source of an electron (20), catches an ion beam (100) pulled out by the outside of a grid by an ion collector (40), and it changes into...  
JP5151934B2  
JP5151935B2  
JP5148104B2  
JPWO2011033933A
The present invention provides a device which measures a measurable average free path for an average free path of a charged particle directly, a vacuum meter, and a method of measuring an average free path. A device which measures an ave...  
JPWO2011033933A1
本発明は、荷電粒子の平均自由行程を直接的 に測定可能な平均自由行程を測定する装置、 真空計、および平均自由行程を測定する方法 を提供する。本発明の一実施形態に係る...  
JP5143736B2  
JP5139679B2  
JP5127042B2  
JP5124283B2  
JP2013011556A
To provide a diaphragm barometer in which, in order to fundamentally solve a problem of temporal change of a standard atmospheric pressure including vacuum of a standard pressure chamber in the diaphragm barometer, the standard atmospher...  
JP5108852B2  
JP5088814B2  
JP5076235B2  
JP5080283B2  
JP2012216325A
To provide a tank type vacuum breaker capable of detecting deterioration of a degree of vacuum even under an operational condition, and detecting deterioration of the degree of vacuum and outputting alarms in realtime.In a tank type vacu...  

Matches 351 - 400 out of 1,734