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Matches 351 - 400 out of 1,723

Document Document Title
JP5353358B2
To provide a vacuum gage which enables measurement of gas pressure in a wider range by one vacuum gage. A signal outputted from a signal source 10 for driving is amplified or attenuated by a driving voltage adjusting circuit 11. Moreover...  
JP5349366B2
The present invention allows manufacturing of a capacitive diaphragm pressure gauge and a Pirani pressure gauge on a single silicon substrate, which makes it possible to reduce the manufacturing cost by the miniaturization of products an...  
JP2013217942A
To provide a vacuum gauge capable of measuring a wide range of gas pressure by a single vacuum gauge.A vacuum gauge includes; a vibrator which comprising a spindle, a beam, and a vibrator fixing part and can be made to measure different ...  
JP2013205011A
To provide a vacuum measuring device with less infiltration of moisture or steam of a molten metal, and with less failure of a vacuum gauge caused by the infiltration happening.A vacuum measuring device is constructed such that a branch ...  
JP5302346B2
A method for operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power leve...  
JP5284961B2  
JP5289321B2  
JP5252739B2  
JP5249112B2  
JP5248218B2  
JP2013527436A
A metal wire (13) to which this invention extends between two ends of a substrate (10), two support sticks (11, 12), and a support stick (11, 12), And it has an electric interengagement child (14, 15) provided in a support stick, and the...  
JP5219816B2  
JPWO2011099238A1
省スペース化、低電力化や低コスト化等を図 るという機能を損なうことなく、測定対象物 に応じて複数個所での圧力測定が可能な低ラ ンニングコストのトランスデューサ型真...  
JPWO2011099238A
According to a measuring object thing, a transducer type vacuum meter of a low running cost in which pressure measurement at two or more places is possible is provided, without spoiling a function to attain space-saving-izing, low electr...  
JP5196681B2  
JP2013072695A
To provide a hot cathode ionization vacuum gauge which has the sensitivity stability equal to that of a conventional triode-type hot cathode ionization vacuum gauge and whose measurement lower limit can be lowered than the conventional o...  
JP2013072694A
To provide a hot cathode ionization vacuum gauge capable of suppressing reduction in the ionization rate and having excellent stability in the sensitivity over a long time even if a hot electron emission area is varied by thermal deforma...  
JP2013072840A
To provide an inexpensive vacuum degree sensor in a simple structure, and adsorption equipment capable of confirming adsorption power while suppressing increase of a cost.The vacuum degree sensor includes: an air housing body 19 which ha...  
JP5183763B2  
JP5170768B2  
JP5164952B2  
JP2013040914A
To provide a method for calibrating a measurement error caused by change of situation of a sensor, particularly a method for easy calibration of a cold-cathode type ionization vacuum gauge at a production field.Displays of a measuring in...  
JP2013040913A
To provide a method for calibrating a measurement error caused by change of situation of a sensor, particularly a method for easy calibration of a cold-cathode type ionization vacuum gauge at a production field.When displays of a measuri...  
JPWO2011040625A1
真空容器の内部にグリッド(10)と電子源 (20)とを備え、グリッドの外側に引き出 されたイオンビーム(100)をイオンコレ クタ(40)で捕らえて電流信号に変換...  
JPWO2011040625A
In a vacuum measuring device of form which equips an inside of a vacuum vessel with a grid (10) and a source of an electron (20), catches an ion beam (100) pulled out by the outside of a grid by an ion collector (40), and it changes into...  
JP5151934B2  
JP5151935B2  
JP5148104B2  
JPWO2011033933A
The present invention provides a device which measures a measurable average free path for an average free path of a charged particle directly, a vacuum meter, and a method of measuring an average free path. A device which measures an ave...  
JPWO2011033933A1
本発明は、荷電粒子の平均自由行程を直接的 に測定可能な平均自由行程を測定する装置、 真空計、および平均自由行程を測定する方法 を提供する。本発明の一実施形態に係る...  
JP5143736B2  
JP5139679B2  
JP5127042B2  
JP5124283B2  
JP2013011556A
To provide a diaphragm barometer in which, in order to fundamentally solve a problem of temporal change of a standard atmospheric pressure including vacuum of a standard pressure chamber in the diaphragm barometer, the standard atmospher...  
JP5108852B2  
JP5088814B2  
JP5076235B2  
JP5080283B2  
JP2012216325A
To provide a tank type vacuum breaker capable of detecting deterioration of a degree of vacuum even under an operational condition, and detecting deterioration of the degree of vacuum and outputting alarms in realtime.In a tank type vacu...  
JP2012198187A
To accurately measure a pressure value in a vacuum environment without disturbing the environment.A micro pressure sensor is composed of a heat conduction type pressure sensor part 2 arranged on a necessary position in a vacuum device an...  
JP5049780B2  
JP2010509573A5  
JP5038361B2  
JP2012181067A
To inhibit film formation inside of a vacuum gauge.A vacuum gauge system comprises: a cold cathode ionization gauge 1 which is attached to a vacuum processing device via a valve 2 and measures pressure inside of the vacuum processing dev...  
JP5027882B2  
JP5000386B2  
JP5002861B2  
JP4995617B2  
JP4994058B2  

Matches 351 - 400 out of 1,723