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JP10206259 |
To judge the existence of a vacuum leak by a method wherein sound waves are impinged from one face of a sheetlike vacuum packaged product, the intensity of the sound waves which are transmitted up to a face on the opposite side is measur...
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JP10199867 |
To accurately detect an etching end point. Using an optical or electric signal from a plasma, a frequency plasma variation (step 220) during a wafer manufacturing process is monitored (step 210). For detecting an end point, (for example)...
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JP10153510 |
To prevent the invasion of particles and prevent accuracy deterioration of a diaphragm vacuum gauge, by connecting a vacuum chamber and the diaphragm vacuum gauge via a filter. A diaphragm vacuum gauge 2 confirms that the interior of a v...
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JP10153513 |
To enhance the pressure meausing accuracy of a hot-cathode magnetron-type vacuum gage, to reduce photoelectron current, and to reduce a current generated at a time when gas molecules stucked to the inner wall of an anode are driven out b...
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JP10097281 |
To make possible reducing erroneous recognition even when a large capacity vocabulary data storage part is provided. A microphone 9 and a talk switch 10 are connected to a speech recognition system 8, and a voice signal inputted to the m...
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JP10092277 |
To sense the reduction of the degree of vacuum of a vacuum valve via the detection of an abnormal discharge by providing a built-in outer electrode exposed on the outside of an insulating container to face a metal shield held in the insu...
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JP10078368 |
To precisely measure ultra-high vacuum pressure with a simple structure by constituting an energy filter of a cylindrical electrode, an end plate electrode, and a baffle plate electrode, and providing a ring electrode within a cylinder t...
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JP10068643 |
To provide a manufacturing method of miniature electronic parts capable of miniaturizing with the direct formation of a sealing structure in a recessed part which protects a functional part without the need for complicated and minute ope...
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JP10062288 |
To prevent deterioration in material of a filament by a method wherein a series resistance with a value within a specified range is connected to the filament of a measuring element of an ionization vacuum meter to judge whether the insid...
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JP10038739 |
To enlarge the lower limit of extremely high vacuum measuring range by providing a charged particle shielding electrode in a space communicating between a vacuum gauge container and a vacuum chamber to be measured thereby blocking intrus...
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JP10019711 |
To make an apparatus compact and light-weight by arranging a magnet inside a vacuum container and constituting an anode or a cathode of the magnet. A vacuum container 1 is mounted via a flange 2 to a flange 3 of a vacuum container to be ...
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JP10010144 |
To position a chip with high accuracy by letting a capacitor chip used as an electric circuit serve also as a positioning reference when the chip detecting an acceleration is mounted to a hybrid IC substrate. A semiconductor capacitive a...
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JP10009133 |
To improve an operation rate by facilitating exchange of a vacuum gauge which is mounted on a high vacuum pump of a vacuum device at the time of breakage. A vacuum gauge 16 is connected to a criopump 10 by means of a detachably attachmen...
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JP09292300 |
To stably hold a rotary shaft by providing superconducting magnetic levitation holding mechanisms on both upper and lower ends of the rotary shaft. A sample 32A is axisymmetrically supported with a vertical rotary shaft 31, and the upper...
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JP09232799 |
To shorten a cycle time when an alignment inspection of components, such as solder balls which are sucked and held by a suction head by vacuum suction, is made by a method wherein a degree-of-vacuum detecting sensor is mounted to the suc...
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JP2676004 |
PURPOSE: To provide an ionization gauge which can measure all the pressure from an ultra high vacuum area to a hyper vacuum area simply and highly accurately, by reducing the noise current such as an X-ray current or the secondary ion cu...
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JP09178590 |
To provide a method for estimating the vacuum leakage and electric circuit defect of a strain gauge type pressure sensor being employed as a vacuum sensor accurately in safety without utilizing radioactivity and without causing any pollu...
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JP09101224 |
To measure an ultra high vacuum pressure accurately by varying the conductance value and gas supply amount at two minimum values, respectively, and then measuring the pressure in a vacuum vessel for measuring for at least four states (co...
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JP09069347 |
To accurately monitor the degree of vacuum in a vacuum airtight container. An ionizing electron emitting part 112 constituted of an field emission array is formed on a cathode base plate 101, an anode electrode 106, an electron accelerat...
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JP09068473 |
To eliminate adverse effect of a photo-electron by providing a repeller electrode for reversing the direction of drawn-out ions, setting a collector elec trode on the grid side and the opposed side of an extraction electrode on the count...
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JP09015082 |
PURPOSE: To resume the leak test effectively by lowering the background level at a mass spectrometric section quickly even when a large quantity of He is mixed into an oil in an oil-sealed rotary vacuum pump due to gross leak. CONSTITUTI...
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JP09005198 |
PURPOSE: To provide a cold cathode gauge which stably operates even at a low pressure. CONSTITUTION: When a magnet 5 is provided around a discharge section 4 within a vacuum meter container 3 of a cold cathode gauge 2 and a magnetic fiel...
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JP08338776 |
To extend a measuring range of a molecular resistance type pressure gauge toward a higher and a lower sides of the pressure by a constitution wherein a vibration member is movably attached in the vicinity of a stationary member. An ultra...
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JP08285716 |
PURPOSE: To obtain method and apparatus for measuring the degree of vacuum in a vacuum case for infrared detector in which variation in the degree of vacuum can be measured accurately and the duration of vacuum can be measured and evalua...
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JP08247879 |
PURPOSE: To easily lower the lower limit of measurement by soft X-rays, and accurately measure gas pressure by forming a metallic net ion collecting electrode (collector) out of fine wires. CONSTITUTION: Gas coming in toward a vacuum gau...
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JP08240503 |
PURPOSE: To provide a flange mount-type hot cathode ionization vacuum gauge of long life which can measure stably even under a high pressure or even when performing degassing frequently and can be made compact. CONSTITUTION: The gauge ha...
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JP08233677 |
PURPOSE: To provide a method and a vacuum gauge for ultra-high vacuum which can accurately measure ultra-high vacuum not more than about 10-11Pa by removing an ESD(electronically stimulated desorbed) ions. CONSTITUTION: In an ultra-high ...
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JP08180776 |
PURPOSE: To provide a vacuum pressure measuring apparatus in which the intensity of a magnetic field can be adjusted easily and of which a connection part to fix a plurality of coil parts is hardly broken by thermal expansion and contact...
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JP08121956 |
PURPOSE: To prevent the trouble caused by incomplete drying, damage to work, etc., and realize a highly accurate drying by a method wherein the drying completion point is monitored within an extremely short time within the allowable rang...
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JP2511201 |
PURPOSE: To ensure reproducibility and stability of sensitivity by fixing the path of an electron directed from a cathode toward an electron collecting means. CONSTITUTION: A tubular object is provided with an external electrode 12 and a...
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JP08094475 |
PURPOSE: To realize highly accurate noncontact measurement of the gas pressure or the density of gas particle by detecting a laser light scattered by a gas. CONSTITUTION: An enclosed measuring vessel 2 has an opening 4 for introducing a ...
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JP08086710 |
PURPOSE: To provide a small and highly sensitive pressure sensor excellent in environment resistance. CONSTITUTION: A pressure sensor 20 is arranged so as to face an opening 14 communicated with a space 12 being a measuring object, and t...
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JP08074041 |
PURPOSE: To prevent the generation of a hillock, etc., on a material to be treated in a sputtering device open to the atmosphere by preventing the enlargement of the measurement error due to the oxidation of the internal electrode of an ...
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JP08029283 |
PURPOSE: To obtain a vacuum gage by which a degree of vacuum from a medium vacuum region up to a high vacuum region can be measured stably and safely by installing a cold-cathode electron source as an electron source used to generate an ...
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JP08029282 |
PURPOSE: To obtain a vacuum gage by which a vacuum from a medium-vacuum region up to a high-vacuum region can be measured without generating ions and without affecting an apparatus in the circumference by a method wherein an uneven thin ...
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JP08005494 |
PURPOSE: To provide a vacuum sensor which is simple in structure, small-sized, and besides can measure wide range of vacuum pressure with by itself by counterposing plural sets of diaphragm electrodes and conductive film electrodes with ...
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JP07325002 |
PURPOSE: To widen the sensitivity range of a micro vacuum sensor to 10-5 thru 103 millibar, wherein the sensor works on the principle of thermal conductivity, and equip the sensor with a high measuring accuracy. CONSTITUTION: A sensor st...
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JP07318447 |
PURPOSE: To eliminate the necessity of interrupting power supply to investigate a degree of vacuum of a vacuum valve dispense with a high voltage electric power supply device, and always easily monitor the degree of vacuum. CONSTITUTION:...
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JP07294360 |
PURPOSE: To provide an equipment with a casing which includes a pressure detecting device integrally formed in the casing. CONSTITUTION: A detecting means for detecting leakage which produce pressure change in the equipment includes a fi...
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JP07294359 |
PURPOSE: To measure degree of vacuum accurately in a short time without disturbing production of the vacuum insulator and without generating problem after production. CONSTITUTION: Inside of the small chamber 11 fixed in airtight state o...
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JP07277278 |
PURPOSE: To allow the driver to promptly notice that air has been sucked into the flow passage of a jet propulsion device during navigation of a jet-propelled boat. CONSTITUTION: In a water jet-propelled boat 10 carrying a jet propulsion...
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JP07270267 |
PURPOSE: To make it possible to ensure a prescribed detection reference position at all times without depending on the thickness and the size of a vacuum pack type heat insulating material, by providing an opening part in a setting stage...
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JP07260616 |
PURPOSE: To realize an inexpensive electric wiring for vacuum machine which can be handled easily while preventing insufficient contact. CONSTITUTION: The electric wiring 4 connects a vacuum machine, e.g. a vacuum meter 2 being inserted ...
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JP07232758 |
PURPOSE: To provide a system which detects whether a bottle or the like housing a secured material such as medicines is tampered or not to insure the security of the ensured material. CONSTITUTION: This is an electronic system which make...
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JP07209122 |
PURPOSE: To accurately measure continuously a measuring area wider than the measuring area of each sensor element, by combining a plurality of pressure sensors. CONSTITUTION: A Pirani sensor 1 is used in combination with a cold cathode e...
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JP07209123 |
PURPOSE: To enable accurately measuring self-exhaust velocity by providing an ionization vacuum gage for measuring object and a vacuum gage without self-exhaust function in a vacuum room and comparing the both values. CONSTITUTION: Fluid...
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JP07181095 |
PURPOSE: To provide an ionization vacuum gauge free from a problem related to a heating filament. CONSTITUTION: This ionization vacuum gauge is Bayard-Alpert type and has extremely low pressure environment in a chamber 1 for the measurem...
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JP07153419 |
PURPOSE: To prevent a stain in an ionizing chamber and attain pressure measurement or mass spectrometry with high accuracy in the ultra-high vacuum atmosphere. CONSTITUTION: An ionizing chamber 2 is made of a noble metal material which i...
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JP07120339 |
PURPOSE: To increase a mechanical strength and to enlarge range of a measuring pressure of a gas by making a filament coil-shaped. CONSTITUTION: A support 14 made of an insulating material is fixed to an inner wall of a main body 10, thr...
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JP07099034 |
PURPOSE: To provide an ionization gauge which can measure all the pressure from an ultra high vacuum area to a hyper vacuum area simply and highly accurately, by reducing the noise current such as an X-ray current or the secondary ion cu...
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