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Patent Searching and Data


Matches 401 - 450 out of 1,648

Document Document Title
JP2010127795A
To provide a vacuum gauge which can vibrate a vibrator in two directions with measurable pressure ranges different from each other, with electrostatic force by a pair of vibrating electrodes, and not requiring a circuit for switching the...  
JP2010096763A
To provide a method and a device for reducing contaminants which reach an ion gauge collector.The system for measuring gas density in a vacuum includes a vacuum gauge, a housing which stores this vacuum gauge, and a magnet secured to out...  
JP2010511875A
A vacuum pressure measuring device includes a source of an electron (1) provided with a reaction zone (30) for forming ion (22) by collision ionization, and a source of an electron (1) is connected so that it may be open for free passage...  
JP2010509573A
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm (2) at a spacing a first housing plate (1) is disposed sealing in the margin region with a joining means (3), and th...  
JP4437578B2  
JP4437336B2  
JP2010054486A
To provide an infrared sensor device capable of detecting the degree of vacuum in a package while suppressing the complication of the configuration.The infrared sensor device includes a diode 31 having an electric characteristic dependin...  
JP2010054518A
To stably measure the pressure of a medium-to-high vacuum region by an ionization first measuring element and measure a peculiar measurement region by a second measuring element.A hybrid vacuum gauge includes: a probe container 2; a firs...  
JP2010048726A
To provide a heat-conduction-type atmospheric pressure sensor of a simple structure and circuitry without the need of making use of electrostatic attraction drive and resonance, serving as an exciting means for vibrating a membrane in th...  
JP2010504508A
It is a method and a system which determine gas pressure power of the inside of a vacuum element (1) which this invention uses a heat measuring method and is provided with packing, or the vacuum exhaust air inside of the body, It has a f...  
JP2010502949A
A vacuum gauge of the Pirani type for measuring the pressure of vaporized organic or inorganic material used in forming a layer of a device, comprising: an extended filament having a thickness of 5 microns or less and having a temperatur...  
JP3156592U
[Subject] In a process of building into application products a strap used as a handle of various products, also when a strap made from textiles is applied, a back-and-front discriminating device which can be certainly distinguished to th...  
JP2009300381A
To provide a heat conduction type vacuum gage capable of preventing fluctuation of an output current from an electric resistor caused by convection of gas, and measuring a pressure always stably regardless of a mounting direction when be...  
JP2009300404A
To provide a pressure measuring device excellent in maintainability by change with time, producible inexpensively, and capable of accurately detecting a pressure in a wide pressure range from a normal pressure to high vacuum.A voltage va...  
JP4382939B2  
JP4382708B2  
JP4377196B2  
JP2009540268A
[Means for Solution] A gas sensor comprises silicon material and has the permselective membrane (13) which contains a warmer (20) outside. A film (13) closes a housing which stores a pressure sensor and which is exhausted. When exhaustin...  
JP2009271051A
To provide a measuring apparatus capable of measuring a pressure in a high vacuum by increasing efficiency of ultrasound transmission and reception required in measuring the pressure and improving accuracy.The pressure measuring apparatu...  
JP2009537831A
The present invention is a sensor element for pressure measurement which has a substrate (5) and at least one mass element (1), and the mass element (1) is, To the substrate (5), an interval is kept, and it is arranged, and the mass elem...  
JP4339948B2  
JP2009216719A
To provide a method of pressure measurement using a measuring apparatus which includes a crystal oscillator can prevent electrode parts of a crystal oscillator from corroding, keep natural resonance impedance stable and constant, and imp...  
JP2009210587A
To provide a high-sensitivity vacuum gauge.The present invention includes a cathode unit, an anode ring, a shielding electrode, an ion educing electrode, a reflector, and a collector. One end of the shielding electrode corresponds to the...  
JP4332296B2  
JP4327423B2  
JP4316007B2  
JPWO2009096504A
A floating structure held above a substrate after heat separation of this micro vacuum meter had been carried out from a substrate by support structure prolonged from a substrate and the substrate, It has a heating element which is arran...  
JP2009525487A
[Subject] A method and a device which attain nearly perfect temperature compensating over all the pressure ranges of heat loss type vacuum meter 200 are provided. [Means for Solution] Sensor leg RS and temperature compensating leg R2 are...  
JP4283118B2  
JP2009128276A
To provide an ionization vacuum device protecting an electrode against contaminants in a vacuum vessel.The ionization vacuum device includes: a vacuum vessel 13; an anode 11 provided in the vessel 13, cathodes 12a and 12b provided in the...  
JP2009109456A
To easily detect pressure with a simple constitution.The pressure element 3 is arranged in a chamber 1 in which pressure varies, is constituted by cyano crosslink metal complex 6 containing water of crystallization, and measures the pres...  
JP4264156B2  
JP2009097892A
To provide a constant-current type Pirani vacuum gage having high measurement accuracy, even if a sensor part that has a filament is separated from a control system, and a simple structure, and a wide measurement range of pressure.This v...  
JP2009517633A
A diaphragm device for vacuum meter (15) contains a tubular diaphragm casing (14) which surrounds a diaphragm (20), The casing has a connecting hole (22) for being open for free passage with Ko Deguchi (16) for being open for free passag...  
JP2009079965A
To provide a thermocouple heater for a heat conduction type sensor having high sensitivity, high accuracy and a simple structure, wherein a thermocouple is used as an essential temperature sensor, and simultaneously operated as a heater ...  
JP4252064B2  
JP4246332B2  
JPWO2009035123A
While raising the response to a rapid pressure increase, the Pirani gauge which lost restrictions of the attachment direction of the gauge head container to a vacuum vessel is provided. It has a hot filament base material which supports ...  
JP2009510438A
[Subject] The device which detects the method for judging the high-pressure state in an electric device and the high-pressure state in an electric device is provided. [Means for Solution] It is a method and a device which detect a high-p...  
JP2009506544A
The present invention gives the method for establishing the terminal point in the periodic etching processing performed by turns or a Time-Division-Multiplexing process. A base is put in in a plasma chamber and it applies to the periodic...  
JP2009024577A
To detect abnormality in degree of vacuum at a decompression part connected to a liquid seal type vacuum pump.In this method, it is judged by comparing actual vacuum pressure of the decompression part 3 connected to the liquid seal type ...  
JP2009505041A
The 1st housing body in which a vacuum measurement cell consists of aluminum oxides (1), And a diaphragm (2) which consists of an aluminum oxide which is arranged so that a vacuum may be sealed in an edge field to this side, and forms a ...  
JP2009505052A
A thermal conductivity gauge adjusts resistance of the variable digital ポテンシオ meter (28) in the neighborhood (16) the filament (12) in one neighborhood (20) of a ホイート stone bridged circuit, and catty-corner from a bridg...  
JP4216375B2  
JP2009008693A
To provide a capacitive vacuum measuring cell which is practically and completely made of ceramic, and is highly resistant to corrosion as a result.A very thin ceramic diaphragm having a thickness of 250 m or less is used so as to be abl...  
JP2008304361A
To provide a cold cathode ionization vacuum gage capable of achieving excellent efficiency in maintenance work and reducing cost of work.The cold cathode ionization vacuum gage 21 is provided with plate members 24A, 24B arranged in the i...  
JP2008304360A
To provide a cold cathode ionization vacuum gage capable of preventing an auxiliary ignition device from being deformed and improving the efficiency in assembly work while achieving stable operation in a high vacuum condition.The cold ca...  
JP2008304463A
To provide a micro mechanical vacuum sensor for determining the pressure within a cavity of a micro mechanical element.The sensor includes a substrate 2, at least one electrically conductive support member 4 connected to the substrate, a...  
JP4196367B2  
JP4199050B2  

Matches 401 - 450 out of 1,648