Login| Sign Up| Help| Contact|

Patent Searching and Data


Matches 401 - 450 out of 1,585

Document Document Title
JP2008209284A
To provide a pressure measuring device 185 capable of determining a gas pressure accurately.The device includes a Pirani vacuum gage 10 for outputting an electric signal corresponding to the gas pressure; an operation device (CPU) for ca...  
JP2008170175A
To provide a method for estimating a degree of vacuum, which can estimate the degree of vacuum in a vacuum vessel being highly vacuum or ultra-highly vacuum by using a simple technique needing no expensive nor large-sized apparatus.A pro...  
JP2008164540A
To provide a quartz type GAS pressure gage capable of eliminating collection man-hours and a computing circuit for a correlation characteristic data between a natural resonance resistance and a temperature of a quartz oscillator to reduc...  
JP2008164541A
To provide a quartz type gas pressure gage capable of eliminating data collection man-hours and a computing circuit for temperature calibration to reduce a cost, by controlling very efficiently a temperature of a tuning fork type quartz ...  
JP2008151756A
To resolve a problem such that in vacuum gauges in a way where gas molecules are ionized and pressure is determined from the number of generated ions, interaction such as collision and the like between ions and molecules can not be ignor...  
JP2008523410A  
JP2008128994A
To reduce a current applied onto current introduction terminals of an ionization vacuum gage and a mass spectrometer having an electrification-heating type grid, to compactify a vacuum terminal part, and to reduce a cost.The grid is form...  
JP2008111778A
To provide a Pirani vacuum gage capable of expanding a measurable pressure range and improving measurement accuracy.The Pirani vacuum gage comprises: a float membrane 32 having an electric resistor 40 which is disposed on its surface, an...  
JP4083239B2  
JP2008508517A  
JP2008507708A  
JP2008506947A  
JP2008504975A  
JP2008504549A  
JP2008014813A
To provide a vacuum measuring device operable normally even if dust enters a measuring environment, and a vapor deposition device.In a taking-out box 12, internal gas is sucked by a turbo-molecular pump 15. A Penning vacuum gage 14 measu...  
JP4036751B2  
JP2007322266A
To prevent a degradation in the sensitivity and a deactivation of a discharge due to a cathode pollution, and stably and accurately measure the pressure in a pressure measured environment that contains a cathode-contaminating gas, such a...  
JP2007535121A  
JP4015859B2  
JP3137252U  
JP2007285947A
To measure an accurate vacuum for a large region with a Pirani gauge and to dispense with a calibration table. A resistance R0of a filament at 0°C is determined (S1), a length of the filament is determined from the specifications of the...  
JP2007218619A
To provide a cold-cathode ionization gauge which discharges easily, makes the time lag short during the period from the time a high voltage is applied to the cold-cathode ionization gauge, to the time current caused by discharging starts...  
JP2007522481A  
JP2007517233A  
JP3936139B2  
JP2007155669A
To provide a cold cathode ionization gauge capable of measuring pressure, in an instant after operation has started by providing a simple means for inducing discharge.In the cold cathode ionization gauge 1 comprises a positive electrode ...  
JP2007147344A
To provide a thin film Pirani vacuum sensor having high sensitivity in a high band from a high vacuum pressure to a low vacuum pressure which is lower by almost one atmospheric pressure, and a vacuum measuring device.At least one heater ...  
JP3957371B2
To provide a vacuum device by which the exhausting performance of the vacuum device can be kept in a good condition regardless of the temperature change of the sealing water to be supplied to a sealing water type vacuum pump. In a vacuum...  
JP2007113928A
To provide an ionization vacuum gauge that can make noise current which is generated extremely small, and easily and accurately measure all pressures in the region from an ultra-low vacuum to extremely-high vacuum.An electron gun section...  
JP3913770B2  
JP2007093579A
To provide a pressure measurement device and its pressure measurement method related to a vacuum chamber, more specifically, one using ultrasonic waves, in the vacuum chamber pressure measurement system.The device comprises the vacuum ch...  
JP2007085953A
To provide a vibration sensor which is not limited to the usable range, with simplified wiring, capable of alleviating the effects of signal transmittance noise, capable of high-occuracy reliable measurement and of measuring the degree o...  
JP3931294B2
To provide a detection device with a high sensitivity capable of detecting, with a high sensitivity, a detection object smaller in size than a detection object which a conventional art has targeted. The detection device is provided with ...  
JP2007051963A
To provide a thermal barometric pressure sensor which has barometric pressure sensing sensitivity, including barometric pressure of atmospheric pressure or higher and wide-range vacuum, ranging from low-vacuum region to high-vacuum regio...  
JP2007047910A
To provide a pressure/flow rate control system capable of easily controlling when a vacuum vessel is evacuated and a flow rate and gas pressure of the vacuum vessel is thereafter controlled at a certain level after charging gas into the ...  
JP2007047069A
To provide a physical quantity sensor that can seal a closed chamber for storing a detection section in a high vacuum state, can reduce size and costs, can improve the degree of freedom in a device, and has no restriction by the influenc...  
JP2007033422A
To provide a strong and low-cost ionization vacuum gauge using a cold cathode with little gas release.A hot cathode in a hot cathode ionization vacuum gauge (for example, a hot cathode B-A type ionization vacuum gauge) is replaced to the...  
JP2007024849A
To provide an ionization gauge that outgases a small amount of gas and has a robust cathode.A hot cathode in a hot cathode ionization gauge (for example: hot cathode B-A type ionization gauge) is replaced by a cold cathode by a carbon na...  
JP2007501532A  
JP2007017263A
To provide a sensing element, a vacuum gauge and a vacuum tube which can catch heat diffused 3-dimensionally with a 3-dimensional temperature sensing part, catch the 3-dimensional isothermal contour with the temperature sensing part, to ...  
JP3869211B2  
JP2006343305A
To enhance the degassing effect of an inner electrode of a measurement tube and that of a measurement-tube inner wall in a triode-type hot cathode ionization vacuum gauge.In this triode-type hot cathode ionization vacuum gauge, an ion co...  
JP2006343304A
To stabilize an apparatus in a B-A type hot cathode ionization vacuum gauge, and to release adsorption gas in a short time.In this B-A type hot cathode ionization vacuum gauge comprising a set of hot cathodes, a helical electrode 7 is pl...  
JP2006344738A
To provide a technique capable of easily detecting the abnormality of a measuring instrument fitted to a semiconductor production device.A Penning vacuum gage 1 fitted to a dry etching device or the like is composed of two dependent firs...  
JP2006329880A
To provide a pressure measuring device capable of measuring pressure in the pressure region from 100 Pa up to atmospheric pressure.The pressure measuring device is provided with a ballistic electron surface-emitting device (BSD) 1, an an...  
JP3886691B2
To calculate pressure within an accelerating tube on the basis of the indicated pressure of an ion pump or the like and to indicate it. This device for indicating the vacuum pressure of an electron microscope accelerating tube computes a...  
JP2006300578A
To provide a capacitance type pressure sensor for absolute pressure measurement having higher accuracy or reliability, and an evaluation method for evaluating the degree of vacuum in a vacuum chamber thereof.In this capacitance type pres...  
JP3840872B2
To provide a vacuum insulated breaker device having high safety and a vacuum pressure monitoring and measuring function with enhanced reliability. A vacuum pressure measuring terminal 30 is installed on the side of a metal container 2 in...  
JP3808092B2  
JP2006201054A
To solve the problem that a magnetron vacuum gage needs a long time until discharge is performed again when discharge stops once, can not measure in a low vacuum region, has a risk breaking a positive electrode in measurement by constant...  

Matches 401 - 450 out of 1,585