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Matches 401 - 450 out of 688

Document Document Title
JP11142258A
To eliminate the operation for inserting a temperature sensor by indirectly measuring the temperature of a cooled body and to stably and automatically measure the temperature of the cooled body. This instrument is equipped with a cooling...  
JP11101704A
To provide a vacuum pressure measuring method and device for accurately and simply measuring vacuum pressure at a reduced pressure part. Water in a container 3 being connected to a reduced pressure part 1 where pressure should be measure...  
JP11101703A
To provide the pressure-measuring device of a vacuum device that accurately measures pressure in the vacuum device with a high response property, and at the same time freely sets a pressure-measuring range in a vacuum region. When pressu...  
JP11094674A
To provide a pressure setting device in which a gas ion source chamber serving as a part to be measured can be set at a preset pressure value in a short time. When a gas ion source chamber 1 is evacuated, an operator turns on a first gas...  
JP11083661A
To eliminate stepwise switching of a reference emission current and stabilize pressure measurements by continuously changing the reference emission current in accordance with a pressure. In changing a reference emission current Ier, the ...  
JP11082346A
To provide a vacuum device by which the exhausting performance of the vacuum device can be kept in a good condition regardless of the temperature change of the sealing water to be supplied to a sealing water type vacuum pump. In a vacuum...  
JP11072406A
To enhance precision and stability by using a multiple ion collector in a small-sized ionization vacuum gauge. An electronic source is disposed outside an anode volume of a releasing anode 14, and a plurality of ion collector electrodes ...  
JP11064144A
To perform not only a continuous vacuum inspection but also a total inspection of products by applying a high voltage into a sealed and evacuated non-conductive vessel from the outside to cause a plasma state within the vessel, and detec...  
JP11051797A
To obtain a heat-loss pressure gage which enhances the accuracy of the measurement of a pressure in a range from a low pressure up to a high pressure. A Pirani gage is provided with a small-diameter-wire detecting element 12, a small-dia...  
JP11044601A
To obtain a pressure sensor capable of measuring a pressure area of a wide range even in a small-sized sensor and accurately measure the pressure area of a wide range by using the pressure sensor. A pressure sensor 10 comprises a substra...  
JP10332504A
To obtain a pressure sensor strong against overload by keeping a constant interval between a vibratory structure and a board during vibration. The interval between a vibratory structure 12 and a board 20 is kept constant during vibration...  
JP2863652B
PURPOSE: To enable an ultra-high vacuum region which is equal to or less than 10-10 Pa to be measured accurately by measuring only gas molecule ions by virtually eliminating an influence of electron excitation isolated ion, light, and so...  
JP10293077A
To provide a measuring instrument in which a pressure in a wide range from normal pressure up to 10-2 Pa can be measured by one pressure gage. A very small vibrator 1 which is manufactured by a silicon process is vibrated near a resonanc...  
JP10281911A
To provide a wide band ionization gauge capable of measurement in an ultrahigh vacuum area. In an ultrahigh vacuum area, desorption ion is removed from the ion generated within an ion generating part 10 by an energy filter part 20 to mak...  
JP2839244B
To obtain a heat-loss pressure gage which enhances the accuracy of the measurement of a pressure in a range from a low pressure up to a high pressure. A Pirani gage is provided with a small-diameter-wire detecting element 12, a small-dia...  
JP2839243B
To enhance precision and stability by using a multiple ion collector in a small-sized ionization vacuum gauge. An electronic source is disposed outside an anode volume of a releasing anode 14, and a plurality of ion collector electrodes ...  
JP10267780A
To carry out high-accuracy vacuum measurements by miniaturizing a vacuum measuring device. In a vacuum measuring element 10, a cold cathode 20 serving as the radiation source of electrons that ionize atoms of residual gas and a collector...  
JP10239199A
To accurately measure the degree of vacuum without withdrawing outside a lead wire and the like, by calculating the degree of vacuum by a calculation means that is buried into a measurement object and generating a vibration corresponding...  
JP2814424B
PURPOSE: To prevent the trouble caused by incomplete drying, damage to work, etc., and realize a highly accurate drying by a method wherein the drying completion point is monitored within an extremely short time within the allowable rang...  
JP10213508A
To provide a technique capable of surely preventing filament disconnection. When pressure is to be found on the basis of the magnitude of an ionic current I, by collecting ion formed by gas molecule ionization with a collector C after im...  
JP10213509A
To provide a pressure measuring device capable of measuring a wide pressure range without combining a vacuum gauge. When vacuum atmosphere pressure is to be measured by using a vacuum gauge V including a filament F, grid G and a collecto...  
JP10206259A
To judge the existence of a vacuum leak by a method wherein sound waves are impinged from one face of a sheetlike vacuum packaged product, the intensity of the sound waves which are transmitted up to a face on the opposite side is measur...  
JP10199867A
To accurately detect an etching end point. Using an optical or electric signal from a plasma, a frequency plasma variation (step 220) during a wafer manufacturing process is monitored (step 210). For detecting an end point, (for example)...  
JP10153510A
To prevent the invasion of particles and prevent accuracy deterioration of a diaphragm vacuum gauge, by connecting a vacuum chamber and the diaphragm vacuum gauge via a filter. A diaphragm vacuum gauge 2 confirms that the interior of a v...  
JP10153513A
To enhance the pressure meausing accuracy of a hot-cathode magnetron-type vacuum gage, to reduce photoelectron current, and to reduce a current generated at a time when gas molecules stucked to the inner wall of an anode are driven out b...  
JP10097281A
To make possible reducing erroneous recognition even when a large capacity vocabulary data storage part is provided. A microphone 9 and a talk switch 10 are connected to a speech recognition system 8, and a voice signal inputted to the m...  
JP10092277A
To sense the reduction of the degree of vacuum of a vacuum valve via the detection of an abnormal discharge by providing a built-in outer electrode exposed on the outside of an insulating container to face a metal shield held in the insu...  
JP10078368A
To precisely measure ultra-high vacuum pressure with a simple structure by constituting an energy filter of a cylindrical electrode, an end plate electrode, and a baffle plate electrode, and providing a ring electrode within a cylinder t...  
JP10068643A
To provide a manufacturing method of miniature electronic parts capable of miniaturizing with the direct formation of a sealing structure in a recessed part which protects a functional part without the need for complicated and minute ope...  
JP10062288A
To prevent deterioration in material of a filament by a method wherein a series resistance with a value within a specified range is connected to the filament of a measuring element of an ionization vacuum meter to judge whether the insid...  
JP10038739A
To enlarge the lower limit of extremely high vacuum measuring range by providing a charged particle shielding electrode in a space communicating between a vacuum gauge container and a vacuum chamber to be measured thereby blocking intrus...  
JP10019711A
To make an apparatus compact and light-weight by arranging a magnet inside a vacuum container and constituting an anode or a cathode of the magnet. A vacuum container 1 is mounted via a flange 2 to a flange 3 of a vacuum container to be ...  
JP10010144A
To position a chip with high accuracy by letting a capacitor chip used as an electric circuit serve also as a positioning reference when the chip detecting an acceleration is mounted to a hybrid IC substrate. A semiconductor capacitive a...  
JP10009133A
To improve an operation rate by facilitating exchange of a vacuum gauge which is mounted on a high vacuum pump of a vacuum device at the time of breakage. A vacuum gauge 16 is connected to a criopump 10 by means of a detachably attachmen...  
JP09292300A
To stably hold a rotary shaft by providing superconducting magnetic levitation holding mechanisms on both upper and lower ends of the rotary shaft. A sample 32A is axisymmetrically supported with a vertical rotary shaft 31, and the upper...  
JP09232799A
To shorten a cycle time when an alignment inspection of components, such as solder balls which are sucked and held by a suction head by vacuum suction, is made by a method wherein a degree-of-vacuum detecting sensor is mounted to the suc...  
JP2676004B
PURPOSE: To provide an ionization gauge which can measure all the pressure from an ultra high vacuum area to a hyper vacuum area simply and highly accurately, by reducing the noise current such as an X-ray current or the secondary ion cu...  
JP09178590A
To provide a method for estimating the vacuum leakage and electric circuit defect of a strain gauge type pressure sensor being employed as a vacuum sensor accurately in safety without utilizing radioactivity and without causing any pollu...  
JP09101224A
To measure an ultra high vacuum pressure accurately by varying the conductance value and gas supply amount at two minimum values, respectively, and then measuring the pressure in a vacuum vessel for measuring for at least four states (co...  
JP09069347A
To accurately monitor the degree of vacuum in a vacuum airtight container. An ionizing electron emitting part 112 constituted of an field emission array is formed on a cathode base plate 101, an anode electrode 106, an electron accelerat...  
JP09068473A
To eliminate adverse effect of a photo-electron by providing a repeller electrode for reversing the direction of drawn-out ions, setting a collector elec trode on the grid side and the opposed side of an extraction electrode on the count...  
JP09015082A
PURPOSE: To resume the leak test effectively by lowering the background level at a mass spectrometric section quickly even when a large quantity of He is mixed into an oil in an oil-sealed rotary vacuum pump due to gross leak. CONSTITUTI...  
JP09005198A
PURPOSE: To provide a cold cathode gauge which stably operates even at a low pressure. CONSTITUTION: When a magnet 5 is provided around a discharge section 4 within a vacuum meter container 3 of a cold cathode gauge 2 and a magnetic fiel...  
JP08338776A
To extend a measuring range of a molecular resistance type pressure gauge toward a higher and a lower sides of the pressure by a constitution wherein a vibration member is movably attached in the vicinity of a stationary member. An ultra...  
JP08285716A
PURPOSE: To obtain method and apparatus for measuring the degree of vacuum in a vacuum case for infrared detector in which variation in the degree of vacuum can be measured accurately and the duration of vacuum can be measured and evalua...  
JP08247879A
PURPOSE: To easily lower the lower limit of measurement by soft X-rays, and accurately measure gas pressure by forming a metallic net ion collecting electrode (collector) out of fine wires. CONSTITUTION: Gas coming in toward a vacuum gau...  
JP08240503A
PURPOSE: To provide a flange mount-type hot cathode ionization vacuum gauge of long life which can measure stably even under a high pressure or even when performing degassing frequently and can be made compact. CONSTITUTION: The gauge ha...  
JP08233677A
PURPOSE: To provide a method and a vacuum gauge for ultra-high vacuum which can accurately measure ultra-high vacuum not more than about 10-11Pa by removing an ESD(electronically stimulated desorbed) ions. CONSTITUTION: In an ultra-high ...  
JP08180776A
PURPOSE: To provide a vacuum pressure measuring apparatus in which the intensity of a magnetic field can be adjusted easily and of which a connection part to fix a plurality of coil parts is hardly broken by thermal expansion and contact...  
JP08121956A
PURPOSE: To prevent the trouble caused by incomplete drying, damage to work, etc., and realize a highly accurate drying by a method wherein the drying completion point is monitored within an extremely short time within the allowable rang...  

Matches 401 - 450 out of 688