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Matches 401 - 450 out of 1,663

Document Document Title
JP2010230367A
To provide a vacuum gage which enables measurement of gas pressure in a wider range by one vacuum gage.A signal outputted from a signal source 10 for driving is amplified or attenuated by a driving voltage adjusting circuit 11. Moreover,...  
JP2010210302A
To provide a vacuum gauge for low-temperature apparatus which is capable of performing measurement even when its measuring range is a region other than a molecular flow region, has improved the vibration-proof property and durability of ...  
JP2010210301A
To provide a vacuum gauge for low-temperature apparatus whose vibration-proof property and durability have been improved.The vacuum gauge for low-temperature apparatus includes a low-temperature heat source 1 arranged inside a vacuum hea...  
JP2010190694A
To provide a vacuum processing apparatus where a measuring probe of a vacuum gauge of which sensitivity is changed by a magnetic field is arranged at an optimum position in the magnetic field.The vacuum processing apparatus 100 includes:...  
JP4522143B2  
JP2010169665A
To provide an electrostatic capacitance type diaphragm vacuum gage for highly accurately measuring pressure independently from attaching conditions of the vacuum gages.There is provided an inclined angle sensor 14 for detecting an inclin...  
JP2010525366A
A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to ...  
JP2010523946A
The vacuum measurement cell (8) of the capacitance type is extensively manufactured with ceramics. In the field which must be closed and combined, In or the field in which bushing and a measurement terminal area are provided, Between the...  
JP2010151783A
To provide a vacuum gauge that measures pressures of a gas in wide range with one vacuum gauge. Signals of frequencies corresponding to natural frequencies of vibrating bodies 24 and 28 that are output from initial vibration signal sourc...  
JP2010151623A
To provide a cold cathode ionization gauge that induces discharge in a short time even when used for a long time without complicating the device. The cold cathode ionization gauge includes a rod-shaped anode 2, a probe container (cathode...  
JP2010151622A
To provide a thermal conduction type vacuum gage capable of improving the accuracy of measurement without remodeling the shape of a gage head container, even in a viscous flow domain wherein heat transfer of gas molecules is governed by ...  
JP2010145119A
To provide a cold cathode ionization vacuum gage discharging easily by a discharge inducing member, and suppressing furthermore a time delay between a time when a high voltage is applied and a time when a current starts to flow by discha...  
JP4493139B2  
JP2010127796A
To provide a vacuum gauge increasing the measurable pressure range by using either a first vibration direction for high pressure measurement or a second vibration direction for low pressure measurement depending on the case, eliminating ...  
JP2010127795A
To provide a vacuum gauge which can vibrate a vibrator in two directions with measurable pressure ranges different from each other, with electrostatic force by a pair of vibrating electrodes, and not requiring a circuit for switching the...  
JP2010096763A
To provide a method and a device for reducing contaminants which reach an ion gauge collector.The system for measuring gas density in a vacuum includes a vacuum gauge, a housing which stores this vacuum gauge, and a magnet secured to out...  
JP2010511875A
A vacuum pressure measuring device includes a source of an electron (1) provided with a reaction zone (30) for forming ion (22) by collision ionization, and a source of an electron (1) is connected so that it may be open for free passage...  
JP2010509573A
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm (2) at a spacing a first housing plate (1) is disposed sealing in the margin region with a joining means (3), and th...  
JP4437578B2  
JP4437336B2  
JP2010054486A
To provide an infrared sensor device capable of detecting the degree of vacuum in a package while suppressing the complication of the configuration.The infrared sensor device includes a diode 31 having an electric characteristic dependin...  
JP2010054518A
To stably measure the pressure of a medium-to-high vacuum region by an ionization first measuring element and measure a peculiar measurement region by a second measuring element.A hybrid vacuum gauge includes: a probe container 2; a firs...  
JP2010048726A
To provide a heat-conduction-type atmospheric pressure sensor of a simple structure and circuitry without the need of making use of electrostatic attraction drive and resonance, serving as an exciting means for vibrating a membrane in th...  
JP2010504508A
It is a method and a system which determine gas pressure power of the inside of a vacuum element (1) which this invention uses a heat measuring method and is provided with packing, or the vacuum exhaust air inside of the body, It has a f...  
JP2010502949A
A vacuum gauge of the Pirani type for measuring the pressure of vaporized organic or inorganic material used in forming a layer of a device, comprising: an extended filament having a thickness of 5 microns or less and having a temperatur...  
JP3156592U
[Subject] In a process of building into application products a strap used as a handle of various products, also when a strap made from textiles is applied, a back-and-front discriminating device which can be certainly distinguished to th...  
JP2009300381A
To provide a heat conduction type vacuum gage capable of preventing fluctuation of an output current from an electric resistor caused by convection of gas, and measuring a pressure always stably regardless of a mounting direction when be...  
JP2009300404A
To provide a pressure measuring device excellent in maintainability by change with time, producible inexpensively, and capable of accurately detecting a pressure in a wide pressure range from a normal pressure to high vacuum.A voltage va...  
JP4382939B2  
JP4382708B2  
JP4377196B2  
JP2009540268A
[Means for Solution] A gas sensor comprises silicon material and has the permselective membrane (13) which contains a warmer (20) outside. A film (13) closes a housing which stores a pressure sensor and which is exhausted. When exhaustin...  
JP2009271051A
To provide a measuring apparatus capable of measuring a pressure in a high vacuum by increasing efficiency of ultrasound transmission and reception required in measuring the pressure and improving accuracy.The pressure measuring apparatu...  
JP2009537831A
The present invention is a sensor element for pressure measurement which has a substrate (5) and at least one mass element (1), and the mass element (1) is, To the substrate (5), an interval is kept, and it is arranged, and the mass elem...  
JP4339948B2  
JP2009216719A
To provide a method of pressure measurement using a measuring apparatus which includes a crystal oscillator can prevent electrode parts of a crystal oscillator from corroding, keep natural resonance impedance stable and constant, and imp...  
JP2009210587A
To provide a high-sensitivity vacuum gauge.The present invention includes a cathode unit, an anode ring, a shielding electrode, an ion educing electrode, a reflector, and a collector. One end of the shielding electrode corresponds to the...  
JP4332296B2  
JP4327423B2  
JP4316007B2  
JPWO2009096504A
A floating structure held above a substrate after heat separation of this micro vacuum meter had been carried out from a substrate by support structure prolonged from a substrate and the substrate, It has a heating element which is arran...  
JP2009525487A
[Subject] A method and a device which attain nearly perfect temperature compensating over all the pressure ranges of heat loss type vacuum meter 200 are provided. [Means for Solution] Sensor leg RS and temperature compensating leg R2 are...  
JP4283118B2  
JP2009128276A
To provide an ionization vacuum device protecting an electrode against contaminants in a vacuum vessel.The ionization vacuum device includes: a vacuum vessel 13; an anode 11 provided in the vessel 13, cathodes 12a and 12b provided in the...  
JP2009109456A
To easily detect pressure with a simple constitution.The pressure element 3 is arranged in a chamber 1 in which pressure varies, is constituted by cyano crosslink metal complex 6 containing water of crystallization, and measures the pres...  
JP4264156B2  
JP2009097892A
To provide a constant-current type Pirani vacuum gage having high measurement accuracy, even if a sensor part that has a filament is separated from a control system, and a simple structure, and a wide measurement range of pressure.This v...  
JP2009517633A
A diaphragm device for vacuum meter (15) contains a tubular diaphragm casing (14) which surrounds a diaphragm (20), The casing has a connecting hole (22) for being open for free passage with Ko Deguchi (16) for being open for free passag...  
JP2009079965A
To provide a thermocouple heater for a heat conduction type sensor having high sensitivity, high accuracy and a simple structure, wherein a thermocouple is used as an essential temperature sensor, and simultaneously operated as a heater ...  
JP4252064B2  

Matches 401 - 450 out of 1,663