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Matches 401 - 450 out of 1,569

Document Document Title
JP4015859B2  
JP3137252U  
JP2007285947A
To measure an accurate vacuum for a large region with a Pirani gauge and to dispense with a calibration table. A resistance R0of a filament at 0°C is determined (S1), a length of the filament is determined from the specifications of the...  
JP2007218619A
To provide a cold-cathode ionization gauge which discharges easily, makes the time lag short during the period from the time a high voltage is applied to the cold-cathode ionization gauge, to the time current caused by discharging starts...  
JP2007522481A  
JP2007517233A  
JP3936139B2  
JP2007155669A
To provide a cold cathode ionization gauge capable of measuring pressure, in an instant after operation has started by providing a simple means for inducing discharge.In the cold cathode ionization gauge 1 comprises a positive electrode ...  
JP2007147344A
To provide a thin film Pirani vacuum sensor having high sensitivity in a high band from a high vacuum pressure to a low vacuum pressure which is lower by almost one atmospheric pressure, and a vacuum measuring device.At least one heater ...  
JP3957371B2
To provide a vacuum device by which the exhausting performance of the vacuum device can be kept in a good condition regardless of the temperature change of the sealing water to be supplied to a sealing water type vacuum pump. In a vacuum...  
JP2007113928A
To provide an ionization vacuum gauge that can make noise current which is generated extremely small, and easily and accurately measure all pressures in the region from an ultra-low vacuum to extremely-high vacuum.An electron gun section...  
JP3913770B2  
JP2007093579A
To provide a pressure measurement device and its pressure measurement method related to a vacuum chamber, more specifically, one using ultrasonic waves, in the vacuum chamber pressure measurement system.The device comprises the vacuum ch...  
JP2007085953A
To provide a vibration sensor which is not limited to the usable range, with simplified wiring, capable of alleviating the effects of signal transmittance noise, capable of high-occuracy reliable measurement and of measuring the degree o...  
JP3931294B2
To provide a detection device with a high sensitivity capable of detecting, with a high sensitivity, a detection object smaller in size than a detection object which a conventional art has targeted. The detection device is provided with ...  
JP2007051963A
To provide a thermal barometric pressure sensor which has barometric pressure sensing sensitivity, including barometric pressure of atmospheric pressure or higher and wide-range vacuum, ranging from low-vacuum region to high-vacuum regio...  
JP2007047910A
To provide a pressure/flow rate control system capable of easily controlling when a vacuum vessel is evacuated and a flow rate and gas pressure of the vacuum vessel is thereafter controlled at a certain level after charging gas into the ...  
JP2007047069A
To provide a physical quantity sensor that can seal a closed chamber for storing a detection section in a high vacuum state, can reduce size and costs, can improve the degree of freedom in a device, and has no restriction by the influenc...  
JP2007033422A
To provide a strong and low-cost ionization vacuum gauge using a cold cathode with little gas release.A hot cathode in a hot cathode ionization vacuum gauge (for example, a hot cathode B-A type ionization vacuum gauge) is replaced to the...  
JP2007024849A
To provide an ionization gauge that outgases a small amount of gas and has a robust cathode.A hot cathode in a hot cathode ionization gauge (for example: hot cathode B-A type ionization gauge) is replaced by a cold cathode by a carbon na...  
JP2007501532A  
JP2007017263A
To provide a sensing element, a vacuum gauge and a vacuum tube which can catch heat diffused 3-dimensionally with a 3-dimensional temperature sensing part, catch the 3-dimensional isothermal contour with the temperature sensing part, to ...  
JP3869211B2  
JP2006343305A
To enhance the degassing effect of an inner electrode of a measurement tube and that of a measurement-tube inner wall in a triode-type hot cathode ionization vacuum gauge.In this triode-type hot cathode ionization vacuum gauge, an ion co...  
JP2006343304A
To stabilize an apparatus in a B-A type hot cathode ionization vacuum gauge, and to release adsorption gas in a short time.In this B-A type hot cathode ionization vacuum gauge comprising a set of hot cathodes, a helical electrode 7 is pl...  
JP2006344738A
To provide a technique capable of easily detecting the abnormality of a measuring instrument fitted to a semiconductor production device.A Penning vacuum gage 1 fitted to a dry etching device or the like is composed of two dependent firs...  
JP2006329880A
To provide a pressure measuring device capable of measuring pressure in the pressure region from 100 Pa up to atmospheric pressure.The pressure measuring device is provided with a ballistic electron surface-emitting device (BSD) 1, an an...  
JP3886691B2
To calculate pressure within an accelerating tube on the basis of the indicated pressure of an ion pump or the like and to indicate it. This device for indicating the vacuum pressure of an electron microscope accelerating tube computes a...  
JP2006300578A
To provide a capacitance type pressure sensor for absolute pressure measurement having higher accuracy or reliability, and an evaluation method for evaluating the degree of vacuum in a vacuum chamber thereof.In this capacitance type pres...  
JP3840872B2
To provide a vacuum insulated breaker device having high safety and a vacuum pressure monitoring and measuring function with enhanced reliability. A vacuum pressure measuring terminal 30 is installed on the side of a metal container 2 in...  
JP3808092B2  
JP2006201054A
To solve the problem that a magnetron vacuum gage needs a long time until discharge is performed again when discharge stops once, can not measure in a low vacuum region, has a risk breaking a positive electrode in measurement by constant...  
JP3833776B2
To provide a wide band ionization gauge capable of measurement in an ultrahigh vacuum area. In an ultrahigh vacuum area, desorption ion is removed from the ion generated within an ion generating part 10 by an energy filter part 20 to mak...  
JP2006153782A
To prevent the flow of a gas to be measured from being directly in contact with a thin film and protect the thin film from contaminants or the like in the gas, in a gas sensing device which provides the thin film, which is formed thermal...  
JP2006153860A
To easily measure the degree of vacuum in a sealed vessel, for example to recognize that the inside of the sealed vessel is kept at a predetermined degree of vacuum, even when the inside of the sealed vessel is under rough vacuum of whic...  
JP2006153672A
To provide a measurement system for measurement of distribution of a physical amount such as air pressure or temperature in the space in particular in a vacuum chamber.The pressure and temperature distribution measurement system for meas...  
JP2006112812A
To provide a technology for measurement of a vacuum of a vacuum space of an enclosed vacuum structured body, using a very simple means without accompaniment of any destructive operation.The vacuum insulation panel 10 of the vacuum struct...  
JP2006084190A
To solve the problem that the conventional case used to have a difficulty in specification of a vacuum gauge of malfuction from among a lot of vacuum gauges when they are set on a plurality of places on a vacuum system.The vacuum gauge m...  
JP2006078190A
To determine the reason for the malfunction at a low cost and with a simple structure, in a system adopted with an insulating structure is whether a degradation in vacuum of the vacuum chamber or the abnormality of the system of the ther...  
JP2006510036A  
JP2006047288A
To provide a vacuum gauge with improved sensitivity, especially for an ionization vacuum gauge restricted in a saddle of electrostatic field.This vacuum gauge includes a negative electrode unit, a positive electrode ring, a shield electr...  
JP3746376B2  
JP2006503290A  
JP2006501620A  
JP2005331362A
To realize a vacuum gage robust against disturbance and capable of detecting precisely a degree of vacuum.A vibration body 1, a beam 2 and a housing 3 cut out of one sheet are fixed onto a base panel 6 via a spacer 5. The vibration body ...  
JP3739141B2
To enlarge the lower limit of extremely high vacuum measuring range by providing a charged particle shielding electrode in a space communicating between a vacuum gauge container and a vacuum chamber to be measured thereby blocking intrus...  
JP2005534032A  
JP3734913B2
To provide a technique capable of surely preventing filament disconnection. When pressure is to be found on the basis of the magnitude of an ionic current I, by collecting ion formed by gas molecule ionization with a collector C after im...  
JP3721238B2
To judge the existence of a vacuum leak by a method wherein sound waves are impinged from one face of a sheetlike vacuum packaged product, the intensity of the sound waves which are transmitted up to a face on the opposite side is measur...  
JP2005522674A  

Matches 401 - 450 out of 1,569