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Patent Searching and Data


Matches 401 - 450 out of 1,618

Document Document Title
JP2009128276A
To provide an ionization vacuum device protecting an electrode against contaminants in a vacuum vessel.The ionization vacuum device includes: a vacuum vessel 13; an anode 11 provided in the vessel 13, cathodes 12a and 12b provided in the...  
JP2009109456A
To easily detect pressure with a simple constitution.The pressure element 3 is arranged in a chamber 1 in which pressure varies, is constituted by cyano crosslink metal complex 6 containing water of crystallization, and measures the pres...  
JP4264156B2  
JP2009097892A
To provide a constant-current type Pirani vacuum gage having high measurement accuracy, even if a sensor part that has a filament is separated from a control system, and a simple structure, and a wide measurement range of pressure.This v...  
JP2009517633A  
JP2009079965A
To provide a thermocouple heater for a heat conduction type sensor having high sensitivity, high accuracy and a simple structure, wherein a thermocouple is used as an essential temperature sensor, and simultaneously operated as a heater ...  
JP4252064B2  
JP4246332B2  
JP2009510438A  
JP2009506544A  
JP2009024577A
To detect abnormality in degree of vacuum at a decompression part connected to a liquid seal type vacuum pump.In this method, it is judged by comparing actual vacuum pressure of the decompression part 3 connected to the liquid seal type ...  
JP2009505041A  
JP2009505052A  
JP4216375B2  
JP2009008693A
To provide a capacitive vacuum measuring cell which is practically and completely made of ceramic, and is highly resistant to corrosion as a result.A very thin ceramic diaphragm having a thickness of 250 m or less is used so as to be abl...  
JP2008304361A
To provide a cold cathode ionization vacuum gage capable of achieving excellent efficiency in maintenance work and reducing cost of work.The cold cathode ionization vacuum gage 21 is provided with plate members 24A, 24B arranged in the i...  
JP2008304360A
To provide a cold cathode ionization vacuum gage capable of preventing an auxiliary ignition device from being deformed and improving the efficiency in assembly work while achieving stable operation in a high vacuum condition.The cold ca...  
JP2008304463A
To provide a micro mechanical vacuum sensor for determining the pressure within a cavity of a micro mechanical element.The sensor includes a substrate 2, at least one electrically conductive support member 4 connected to the substrate, a...  
JP4196367B2  
JP4199050B2  
JP4189020B1  
JP4186646B2  
JP4187321B2  
JP2008281565A
To provide an ionization vacuum gauge, especially an ionization vacuum gauge using a carbon nanotube.The ionization vacuum gauge includes a linear negative electrode, a positive electrode installed so as to surround the linear negative e...  
JP2008268235A
To provide a method capable of maintaining accurate measurement without having to recalibrate a secondary electron multiplying element measuring system, and a vacuum processing device that precludes the operation from stopping for recali...  
JP2008267933A
To provide a transducer type vacuum gauge and its control method suppressing an increase of cost required for a device, and facilitating the setting of set points and the reading of the set-up set points in the transducer type vacuum gau...  
JP2008241264A
To provide an outdoor apparatus provided with a vacuum gauge capable of reliably measuring the degree of vacuum of a vacuum part without being affected by weather even in the case that the vacuum gauge is mounted to the apparatus install...  
JP2008537998A  
JP2008233079A
To provide ionization vacuum gauges or, in particular, an ionization vacuum gauge that utilizes carbon nanotubes.An ionization vacuum gauge according to the present invention includes: a cathode including a substrate and an emitter film ...  
JP2008233057A
To provide a high-sensitivity high-precision heat conduction type sensor for measuring physical quantities such as degrees of vacuum, gas or liquid flow rates and capable of widening the range of measurement and a heat conduction type me...  
JP2008209284A
To provide a pressure measuring device 185 capable of determining a gas pressure accurately.The device includes a Pirani vacuum gage 10 for outputting an electric signal corresponding to the gas pressure; an operation device (CPU) for ca...  
JP2008170175A
To provide a method for estimating a degree of vacuum, which can estimate the degree of vacuum in a vacuum vessel being highly vacuum or ultra-highly vacuum by using a simple technique needing no expensive nor large-sized apparatus.A pro...  
JP2008164541A
To provide a quartz type gas pressure gage capable of eliminating data collection man-hours and a computing circuit for temperature calibration to reduce a cost, by controlling very efficiently a temperature of a tuning fork type quartz ...  
JP2008164540A
To provide a quartz type GAS pressure gage capable of eliminating collection man-hours and a computing circuit for a correlation characteristic data between a natural resonance resistance and a temperature of a quartz oscillator to reduc...  
JP2008151756A
To resolve a problem such that in vacuum gauges in a way where gas molecules are ionized and pressure is determined from the number of generated ions, interaction such as collision and the like between ions and molecules can not be ignor...  
JP2008523410A  
JP2008128994A
To reduce a current applied onto current introduction terminals of an ionization vacuum gage and a mass spectrometer having an electrification-heating type grid, to compactify a vacuum terminal part, and to reduce a cost.The grid is form...  
JP2008111778A
To provide a Pirani vacuum gage capable of expanding a measurable pressure range and improving measurement accuracy.The Pirani vacuum gage comprises: a float membrane 32 having an electric resistor 40 which is disposed on its surface, an...  
JP4083239B2  
JP2008508517A  
JP2008507708A  
JP2008506947A  
JP2008504975A  
JP2008504549A  
JP2008014813A
To provide a vacuum measuring device operable normally even if dust enters a measuring environment, and a vapor deposition device.In a taking-out box 12, internal gas is sucked by a turbo-molecular pump 15. A Penning vacuum gage 14 measu...  
JP4036751B2  
JP2007322266A
To prevent a degradation in the sensitivity and a deactivation of a discharge due to a cathode pollution, and stably and accurately measure the pressure in a pressure measured environment that contains a cathode-contaminating gas, such a...  
JP2007535121A  
JP4015859B2  
JP3137252U  

Matches 401 - 450 out of 1,618