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Matches 401 - 450 out of 1,703

Document Document Title
JP2011242172A
To provide an oxygen detecting gauge that can cause oxygen to be practically quickly desorbed when a large quantity of oxygen is adsorbed in a filament surface.An oxygen detecting gauge M1 that is fitted to a vacuum vessel W and detects ...  
JP2011242335A
To provide a vacuum gauge capable of measuring pressure in a wide range without making measurement discontinuous with the single vacuum gauge.A vacuum gauge comprises: vibrators; vibrating electrodes for driving the vibrators using an el...  
JP4810422B2  
JP4809837B2  
JP2011196831A
To provide a vacuum gauge measuring wider range of gas pressure with sufficient accuracy than a conventional vacuum gauge.The vacuum gauge has: a vibrating body 4; an excitation electrode 5 which faces the vibrating body 4 and drives the...  
JP2011191284A
To provide a vacuum gauge capable of measuring two systems at low cost and at high accuracy.A cold cathode type ionization vacuum gauge, which shares a power source, a central processing element, and an accessary circuit therefor, is inc...  
JP2011174900A
To attain miniaturization of products and low manufacturing cost by mass production by manufacturing a capacitance type diaphragm vacuum gage and a Pirani vacuum gage on a single silicon substrate.The method for manufacturing, being a me...  
JP4764468B2  
JP4735052B2  
JP2011133386A
To provide a cold cathode ionization vacuum gauge using a permanent magnet as a member for inducing discharge, and readily generating discharges by arranging the permanent magnet on a pole piece.The cold cathode ionization vacuum gauge 1...  
JP2011128169A
To operate a hot cathode ionization vacuum gauge during a degassing operation by an electron bombardment method and a current heating method, by controlling degassing power level as a function of gauge pressure.While the degassing power ...  
JP4714768B2  
JP2011069733A5  
JPWO2009096504A1
本マイクロ真空計は、基板と、該基板から延 びる支持構造体によって基板から熱分離され た状態で基板の上方に保持された浮遊構造体 と、該浮遊構造体に配置されて発熱する...  
JP2011096446A
To provide: a device for measuring a mean free path, which can accurately and simply measure a mean free path of charged particles even at an atmosphere of a degree of poor vacuum and/or an atmosphere of activated gas; a vacuum indicator...  
JP2011513709A
An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions ...  
JP2011075480A
To provide an inspection method of a vacuum pump and a vacuum pressure measuring device, acquiring highly-reliable measurement data of a vacuum pressure, when inspecting the vacuum pump.In the inspection method of the vacuum pump for det...  
JP2011069733A
To provide a heat conduction-type barometric sensor (using thermal excitation) for the measurement of a high bandwidth barometric pressure with high sensitivity and high accuracy that has a simple structure and circuit configuration and ...  
JP2011508211A
[Subject] Cold electronic discharge [which can operate without not deteriorating, and not having demerit of BA type ionization vacuum gauge, and changing chemical constitution of chemical species of gas in a chamber] type an ionization v...  
JP2011043853A
To improve the subjective quality of decoding signal by properly adjusting the dynamic range of spectrum inserted in a technique for replacing a spectrum of a certain band with a spectrum of another band.A deformation information estimat...  
JP2011027700A
To provide a cold-cathode ionization gauge that allows easy mounting and replacement of members for inducing discharge and make it easier for the members to cause discharge.The cold-cathode ionization gauge includes: a cylindrical cathod...  
JP2011013218A
To provide a diaphragm type manometer of low cost.The manometer includes a monolithic base 102 which has an upper surface and a sidewall elongated more highly than the upper surface, a plurality of electric conductive elements 112 which ...  
JP2011007777A
To provide a cold cathode ionization vacuum gauge, a discharge starting auxiliary electrode plate, and a vacuum processing device which have simple configurations, and, even after long-term use, which allow discharge to be initiated in a...  
JPWO2009035123A1
急激な圧力上昇に対する応答性を向上させる とともに、真空容器への測定子容器の取り付 け方向の制約を無くしたピラニ真空計を提供 する。金属線からなる熱フィラメントと...  
JP4601629B2  
JP2010281804A
To provide the most effective method for the measurement of a degree of vacuum and a temperature in a container having a vacuum atmosphere or a gas atmosphere.A vacuum gauge stores a thermometer and a vacuum gauge in a single case. Fig.3...  
JP2010276597A
To provide a cold cathode ionization vacuum gauge for triggering discharge in a short time even when using over a long period of time without complicating an apparatus.The cold cathode ionization vacuum gauge includes the structure in wh...  
JP4594305B2  
JP4592897B2  
JP4590100B2  
JP4576939B2  
JP2010251813A
To provide a method and a device for determining an endpoint in an alternating cyclic etching process or a time-division multiplex process.A substrate is placed within a plasma chamber and subjected to an alternating cyclic process inclu...  
JP4568321B2  
JP2010237150A
To provide a cold-cathode ionization vacuum gauge with a longer lifetime. A cold-cathode ionization vacuum gauge includes: a measuring probe 1 having an anode electrode 11 and cathode electrodes 12a, 12b, 12c; and an electric circuit hav...  
JP2010230367A
To provide a vacuum gage which enables measurement of gas pressure in a wider range by one vacuum gage.A signal outputted from a signal source 10 for driving is amplified or attenuated by a driving voltage adjusting circuit 11. Moreover,...  
JP2010210302A
To provide a vacuum gauge for low-temperature apparatus which is capable of performing measurement even when its measuring range is a region other than a molecular flow region, has improved the vibration-proof property and durability of ...  
JP2010210301A
To provide a vacuum gauge for low-temperature apparatus whose vibration-proof property and durability have been improved.The vacuum gauge for low-temperature apparatus includes a low-temperature heat source 1 arranged inside a vacuum hea...  
JP2010190694A
To provide a vacuum processing apparatus where a measuring probe of a vacuum gauge of which sensitivity is changed by a magnetic field is arranged at an optimum position in the magnetic field.The vacuum processing apparatus 100 includes:...  
JP4522143B2  
JP2010169665A
To provide an electrostatic capacitance type diaphragm vacuum gage for highly accurately measuring pressure independently from attaching conditions of the vacuum gages.There is provided an inclined angle sensor 14 for detecting an inclin...  
JP2010525366A
A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to ...  
JP2010523946A
The vacuum measurement cell (8) of the capacitance type is extensively manufactured with ceramics. In the field which must be closed and combined, In or the field in which bushing and a measurement terminal area are provided, Between the...  
JP2010151783A
To provide a vacuum gauge that measures pressures of a gas in wide range with one vacuum gauge. Signals of frequencies corresponding to natural frequencies of vibrating bodies 24 and 28 that are output from initial vibration signal sourc...  
JP2010151623A
To provide a cold cathode ionization gauge that induces discharge in a short time even when used for a long time without complicating the device. The cold cathode ionization gauge includes a rod-shaped anode 2, a probe container (cathode...  
JP2010151622A
To provide a thermal conduction type vacuum gage capable of improving the accuracy of measurement without remodeling the shape of a gage head container, even in a viscous flow domain wherein heat transfer of gas molecules is governed by ...  
JP2010145119A
To provide a cold cathode ionization vacuum gage discharging easily by a discharge inducing member, and suppressing furthermore a time delay between a time when a high voltage is applied and a time when a current starts to flow by discha...  
JP4493139B2  
JP2010127796A
To provide a vacuum gauge increasing the measurable pressure range by using either a first vibration direction for high pressure measurement or a second vibration direction for low pressure measurement depending on the case, eliminating ...  
JP2010127795A
To provide a vacuum gauge which can vibrate a vibrator in two directions with measurable pressure ranges different from each other, with electrostatic force by a pair of vibrating electrodes, and not requiring a circuit for switching the...  
JP2010096763A
To provide a method and a device for reducing contaminants which reach an ion gauge collector.The system for measuring gas density in a vacuum includes a vacuum gauge, a housing which stores this vacuum gauge, and a magnet secured to out...  

Matches 401 - 450 out of 1,703