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Patent Searching and Data


Matches 501 - 550 out of 11,602

Document Document Title
WO/2009/118355
The present invention relates to an inertial sensor, preferably an acceleration sensor or multi-axis acceleration sensor as a microelectromechanical construction element, said sensor comprising a housing with at least one first gas-fille...  
WO/2009/120753
Micromachined accelerometer and method in which a proof mass is suspended above a substrate for movement in response to acceleration, electrodes form capacitors which change in capacitance in response to movement of the proof mass, proce...  
WO/2009/120575
A micro electro-mechanical sensor is provided. The micro electro-mechanical sensor includes a substrate, and a conducting plane disposed on the substrate. A conducting via is disposed on the substrate, such as adjacent to the conducting ...  
WO/2009/117832
A tracking system is provided for tracking an objects. A first and a second trackable member each have an inertial sensor unit producing at least orientation-based data. A processing unit receives the orientation-based data from the trac...  
WO/2009/119840
Provided is an acceleration sensor element, an acceleration sensor device and a method for manufacturing an acceleration sensor element that can be miniaturized while maintaining a detection sensitivity. An acceleration sensor element (2...  
WO/2009/116162
Disclosed is a micro moving element (X). The micro moving element (X) is produced by a process comprising: a first bonding step for bonding a first packaging wafer to a first surface of a device wafer; a second bonding step for bonding a...  
WO/2009/117703
A method of detecting activity in a MEMS accelerometer captures an acceleration bias, measures acceleration at a predetermined time, calculates a change in acceleration using the measured acceleration and the acceleration bias, and compa...  
WO/2009/117687
A method of capturing an event in a MEMS accelerometer stores acceleration data in memory, detects a trigger event based on the acceleration data, and modifies a configuration of the memory so that a specified amount of the acceleration ...  
WO/2009/111663
An acceleration sensor is provided. The acceleration sensor contains a first electrically conductive element and a second electrically conductive element. An electrically insulative element is connected to the first electrically conducti...  
WO/2009/103900
The method of correcting the gain of a capacitive unit comprising electrodes that can move with respect to one another, comprises the steps: of successively applying reduced bias voltages (10, 12) to one of the electrodes, said voltages ...  
WO/2009/103900
The method of correcting the gain of a capacitive unit comprising electrodes that can move with respect to one another, comprises the steps: of successively applying reduced bias voltages (10, 12) to one of the electrodes, said voltages ...  
WO/2009/101519
A resonant MEMS device that detects photons, particles and small forces including atomic forces is disclosed. The device comprises a planar substrate 1, two electrodes 2 and 3 on top of the substrate, a resonant micro-electromechanical (...  
WO/2009/101519
A resonant MEMS device that detects photons, particles and small forces including atomic forces is disclosed. The device comprises a planar substrate 1, two electrodes 2 and 3 on top of the substrate, a resonant micro-electromechanical (...  
WO/2009/099124
This aims to provide a physical quantity sensor, which can reduce the influences of a strain to be propagated to the individual parts connected with anchor portions, even if a supporting substrate is deformed, and which can extract wirin...  
WO/2009/099125
Disclosed is a Z-axis compatible physical quantity sensor that is small and has excellent sensor sensitivity. The sensor possesses a support substrate, anchors (21, 22) that are secured to the upper surface of the support substrate, mova...  
WO/2009/099123
Disclosed is a physical quantity sensor that can increase detection accuracy, especially when constructed with movable parts that move in parallel in the height direction. The sensor possesses a support substrate, movable parts (6), whic...  
WO/2009/094733
The present invention relates to a motion sensor which enables the detection of motion actuation, especially vertically. The actuation sensor consists of the following components: a magnet sensor (1 ) inserted in a guide tube (2), which ...  
WO/2009/091966
Micromachined accelerometer having one or more proof masses (16, 36, 37, 71, 72) mounted on one or more decoupling frames (17, 38, 39) or on a shuttle (73) such that the proof mass(es) can move along a first (y) axis in response to accel...  
WO/2009/090841
Provided is an electrostatic capacity type acceleration sensor, which is made surface-mountable by using a conductive member extending through a substrate and which measures an acceleration highly sensitively. The acceleration sensor is ...  
WO/2009/087503
The invention relates to a sensor device (1) for measuring the rotational speed and for determining the rotational speed deviation or the rotational acceleration of a rotating element, especially of a crank shaft of a combustion engine, ...  
WO/2009/087504
The invention relates to a sensor device (1) for measuring the linear or rotational speed and for determining the linear or rotational acceleration of a linear moving or rotating element, especially of a crank shaft of a combustion engin...  
WO/2009/087022
The invention relates to a device comprising a difference capacitor (100) and an evaluation circuit (1000), wherein the evaluation circuit (1000) comprises an output signal (Ui) and a voltage-controlled voltage source (500). The output s...  
WO/2009/087812
Provided is a technique for changing the action sensitivity of a self-restoring fuse to a mechanical input, without changing the constitution and specifications of the fuse element body. A mechanical fuse for cutting the power current in...  
WO/2009/083326
A method for controlling the energy use of electrical and/or electronic components is proposed, wherein a first signal is produced by a micromechanical sensor unit as a function of an acceleration of the sensor unit and a change in the e...  
WO/2009/081206
The apparatus for monitoring muscle contractions of a subject (for example as a check on epilepsy or Parkinson's disease) comprises: a first sensor arranged to be placed on a reference location on the body of a subject for sensing, over ...  
WO/2009/081084
This device is of the type comprising a support (12), at least one bob weight (18)/spring (20) system comprising a bob weight (18) and a spring (20) that is initially is preloaded in such a way as to push the bob weight (18) in a detecti...  
WO/2009/081084
This device is of the type comprising a support (12), at least one bob weight (18)/spring (20) system comprising a bob weight (18) and a spring (20) that is initially is preloaded in such a way as to push the bob weight (18) in a detecti...  
WO/2009/081459
A packaged device (X1) comprises a micro moving element (Y) having movable portions (10, 61) and terminal portions (31b, 31e), a first packaging member (80) having a through hole (82a), and a second packaging member (90). The packaged de...  
WO/2009/076156
A system and method of determining and reporting on the position of a wireless device relative to a group of other wireless devices dispersed within a specified geographic area. The system includes at least one Query Unit, three or more ...  
WO/2009/074975
Signal lights are connected to the standard car braking alert circuit and to a first and second additional circuits respectively. A pole balanced on a pivot determines the flashing of different signals by activating switching means to cl...  
WO/2009/076149
Systems and methods for utilizing finite difference simulation results to compute streamline trajectories, which may be used to analyze the results with other streamline techniques.  
WO/2009/070887
An apparatus is provided for recording information about an event resulting in application of a force to a body. The apparatus comprises data recording means for recording the information, sensor means for sensing a parameter which enabl...  
WO/2009/068983
Device for monitoring and analysing the driving of a motor vehicle, including a unit (1) mountable on board the vehicle and designed to detect and record vibrations/accelerations - at least temporarily - along three axis substantially or...  
WO/2009/068983
Device for monitoring and analysing the driving of a motor vehicle, including a unit (1) mountable on board the vehicle and designed to detect and record vibrations/accelerations - at least temporarily - along three axis substantially or...  
WO/2009/068983
Device for monitoring and analysing the driving of a motor vehicle, including a unit (1) mountable on board the vehicle and designed to detect and record vibrations/accelerations - at least temporarily - along three axis substantially or...  
WO/2009/063473
A 3-dimensional MEMS accelerometer fabricated on a single planar substrate deploys three co-planar sensor elements. Each sensor element is a capacitive device deploying a static electrode plate and a parallel dynamic electrode plate supp...  
WO/2009/063473
A 3-dimensional MEMS accelerometer fabricated on a single planar substrate deploys three co-planar sensor elements. Each sensor element is a capacitive device deploying a static electrode plate and a parallel dynamic electrode plate supp...  
WO/2009/060781
A method for correcting a mask pattern to dry-etch an object to be etched such as a silicon wafer with high precision, and a method for simply and quickly manufacturing small-sized and highly reliable acceleration sensor and angular velo...  
WO/2009/056413
The invention relates to a micromechanical component (1), said micromechanical component comprising stationary electrodes (3) and a seismic mass (19) which is connected to a carrier substrate (18) by means of suspension elements (5), is ...  
WO/2009/056688
A system for a sports activity, which system is adapted to detect potential game contacts that include contacts between games equipment (1) and a games object (2) and/or contacts between a games object (2) and a target surface (5), and t...  
WO/2009/056413
The invention relates to a micromechanical component (1), said micromechanical component comprising stationary electrodes (3) and a seismic mass (19) which is connected to a carrier substrate (18) by means of suspension elements (5), is ...  
WO/2009/054724
A speed sensor 21 comprises a static part 3 and a dynamic part 5 arranged concentrically inside it. The static part 3 has two permanent magnets 7A and 7B and the dynamic part 5 has two iurther permanent magnets 9 and 11. The magnet 9 is ...  
WO/2009/054724
A speed sensor 21 comprises a static part 3 and a dynamic part 5 arranged concentrically inside it. The static part 3 has two permanent magnets 7A and 7B and the dynamic part 5 has two iurther permanent magnets 9 and 11. The magnet 9 is ...  
WO/2009/050578
A MEMS structure for a combined gyroscope and accelerometer unit (100) based on in-plane vibratory movements comprises a proof mass (101) and comb-drives (102) operable to cause the proof mass (101) to resonate in the x-direction, common...  
WO/2009/050813
Provided is an electrostatic capacity detection device which outputs an electric signal in accordance with an electrostatic capacity accompanying an object to be measured. The device includes: a measurement terminal to be arranged in con...  
WO/2009/050578
A MEMS structure for a combined gyroscope and accelerometer unit (100) based on in-plane vibratory movements comprises a proof mass (101) and comb-drives (102) operable to cause the proof mass (101) to resonate in the x-direction, common...  
WO/2009/047120
The invention relates to an acceleration sensor with a substrate, at least one web (1, 12, 13) and a seismic mass (9), wherein the web (1, 12, 13) and the seismic mass (9) are arranged above a plane of the substrate. The seismic mass (9)...  
WO/2009/048621
Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Ke of the electromechanical system. A reso...  
WO/2009/047120
The invention relates to an acceleration sensor with a substrate, at least one web (1, 12, 13) and a seismic mass (9), wherein the web (1, 12, 13) and the seismic mass (9) are arranged above a plane of the substrate. The seismic mass (9)...  
WO/2009/047887
A composite sensor for detecting angular velocity and acceleration is provided with an angular velocity detecting element, an acceleration detecting element, an angular velocity signal processing IC, an acceleration signal processing IC ...  

Matches 501 - 550 out of 11,602