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WO/2013/052953A1 |
Methods, structures, devices and systems are disclosed for implementing optomechanical sensors in various configurations by using two optically coupled optical resonators or cavities that can be move or deform relative to each other. The...
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WO/2012/149256A2 |
Techniques are provided for reducing mount vibration in an inertial rate sensor (IRS). For example, if oscillation in an IRS's vibratory members, vibrating along a first axis, cause displacement in the IRS's mount along a second axis, th...
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WO/2011/121863A1 |
Disclosed is a piezoelectric thin-film element which comprises a substrate and, disposed thereon, at least a lower electrode, a piezoelectric thin film represented by the general formula (NaxKyLiz)NbO3 (0≤x≤1, 0≤y≤1, 0≤z≤0.2,...
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WO/2011/111732A1 |
Disclosed is a manufacturing method for a sensor element equipped with a PZT film, that forms a good quality, and substantially homogenous PZT film. The method forms a lower electrode E0 on a surface of one side of an SOI substrate 31 ha...
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WO/2011/085494A3 |
Analysis of a swing of a game device such as a golf club is carried out by a first component shaped and arranged to be attached to the club by sliding a slot portion along the tapered shaft to a friction fit at a wider position. The comp...
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WO/2011/056908A3 |
A disclosed gyroscope or accelerometer apparatus is integrated into an integrated circuit chip. The apparatus has phase locked loops (PLLs) (210, 212) formed on a substrate that generate a signal having a wavelength that is less than 10m...
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WO/2011/085501A1 |
A head mounted information system comprises a frame configured to be worn by a user, a sensor unit coupled to the frame, and a processor unit coupled to the frame. The processor unit is connected to receive signals from the sensor unit. ...
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WO/2011/056908A2 |
A disclosed gyroscope or accelerometer apparatus is integrated into an integrated circuit chip. The apparatus has phase locked loops (PLLs) (210, 212) formed on a substrate that generate a signal having a wavelength that is less than 10m...
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WO/2011/021068A1 |
An apparatus and method comprising of a remote microphone attached to a portable radio such as those carried by Firefighters and other First Responders and equipped with automatic motion sensing and Emergency Alert capabilities which bec...
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WO/2010/093557A3 |
A technique includes receiving data indicative of a first measurement acquired by a rotation sensor on a seismic streamer and based on the first measurement, estimating a torque noise present in a measurement acquired by a second sensor ...
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WO/2010/093557A2 |
A technique includes receiving data indicative of a first measurement acquired by a rotation sensor on a seismic streamer and based on the first measurement, estimating a torque noise present in a measurement acquired by a second sensor ...
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WO/2010/064562A1 |
Provided is a low-cost angular velocity detection device which can reduce the effect of coupling between a drive electrode and a first displacement detection electrode caused by a floating capacity. An oscillating body (21) can be displ...
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WO/2009/087858A1 |
The surface of a substrate (2) is equipped with drive mass portions (4 to 7) at positions of point symmetry with respect to a center point (O). The drive mass portions (4 to 7) connect a connecting beam (8) mutually thereto. The connecti...
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WO/2009/061747A1 |
A sensor that measures angular velocity about an axis that is normal to a sensing plane of the sensor. The sensor comprises a sensing subassembly that includes a planar frame parallel to the sensing plane, a first proof mass disposed in ...
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WO/2009/050813A1 |
Provided is an electrostatic capacity detection device which outputs an electric signal in accordance with an electrostatic capacity accompanying an object to be measured. The device includes: a measurement terminal to be arranged in con...
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WO/2007/105211A3 |
The present invention discloses an improved planar, dual-axis, resonator gyroscope with mechanical coupling of adjacent vibrating members. The primary-mode flexible hinges include a tangential torsion element that largely decouples the o...
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WO/2009/035369A1 |
The invention relates to instrument engineering and can be used in orientation and navigation systems for measuring the velocity of the uniform and rectilinear motion of an object, for example an aircraft or a submarine etc, in relation ...
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WO/2009/028594A1 |
An angular velocity signal detection circuit includes: a first current/voltage conversion circuit (11) which converts current outputted from a first detection electrode (21) of a gyro sensor (2) into voltage and amplifies it so as to out...
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WO/2008/149821A1 |
Provided is a small and low-height sensor device. The sensor device is provided with a base body (1); a mounting body (3), which is arranged by being at least partially spaced apart from the base body (1) and can be displaced with respec...
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WO/2008/126409A1 |
An acceleration sensor is provided with a main substrate having a spindle section, and a facing substrate, which is placed over the main substrate through a protruding section and faces the spindle section of the main substrate through a...
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WO/2008/051677A3 |
Angular rate sensor for detecting rotation about first and second mutually perpendicular axes which has first and second masses coupled together for torsional drive mode oscillation of equal amplitude and opposite phase about third axes ...
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WO/2008/079930A1 |
Operation of a planar resonator gyroscope with in-plane parasitic modes of vibration to obtain improved performance is disclosed. A planar resonator gyroscope, such as a disc resonator gyroscope, may be operated with embedded electrodes....
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WO/2008/021534A1 |
A dual-axis tuning fork gyroscope includes four open-ended tuning forks arranged coplanarly in two opposite pairs, a first pair of open-ended tuning forks being arranged opposite one another along a first axis, a second pair of open-ende...
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WO/2008/010337A1 |
A tuning fork-shaped vibrator small-sized, having a reduced height, and capable of being used as a vibration gyro having excellent detection sensitivity, and a vibration gyro using the tuning fork-shaped vibrator. The tuning fork-shaped ...
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WO/2006/138392A3 |
A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode in...
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WO/2007/120158A1 |
A cup or bell shaped angular rate sensor electrode has drive or sense electrodes repositioned from their typical location at the nodes. One pair of electrodes, residing on opposite sides of the cup, is uniformly displaced in one directio...
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WO2006132773B1 |
Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perp...
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WO/2006/026151A3 |
A gimbal-type torsional z-axis micromachined gyroscope with a nonresonant actuation scheme measures angular rate of an object with respect to the axis normal to the substrate plane (the z-axis). A 2 degrees-of-freedom (2-DOF) drive-mod...
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WO/2007/086849A1 |
A method of operating an anti-phase six degree-of-freedom tuning fork gyroscope system comprises the steps of driving a first three degree-of-freedom gyroscope subsystem, and driving a second three degree-of freedom gyroscope subsystem i...
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WO/2006/132773A3 |
Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perp...
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WO/2007/021505A3 |
A system (20) for measuring speed of a high-speed motor (22) using a moving average filter (120). A position sensor (24) generates a rotor position signal. A signal processing module (26) determines a rotor angle from the rotor position ...
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WO/2006/057128A1 |
A piezoelectric vibrator (10) has a first piezoelectric body substrate (1a) and a second piezoelectric body substrate (1c). The first piezoelectric body substrate (1a) has a first main surface (41) and a second main surface (42) that are...
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WO2006009578A3 |
A microstructure comprising an in-plane solid-mass electrically conductive tuning fork gyroscope (10) and fabrication methods. The gyroscope (10) is formed using substrate material having lower and upper layers (21,23) sandwiching a sacr...
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WO/2006/026151A2 |
A gimbal-type torsional z-axis micromachined gyroscope with a nonresonant actuation scheme measures angular rate of an object with respect to the axis normal to the substrate plane (the z-axis). A 2 degrees-of-freedom (2-DOF) drive-mod...
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WO2005031257A3 |
An oscillatory rate sensor is described for sensing rotation about the "z-axis". It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue...
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WO/2006/023032A2 |
Cross-monitoring sensor system and method in which a plurality of sensors (68, 69) each having a sensing element, circuitry for processing signals from the sensing element, an output interface for delivering processed signals, and an aux...
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WO2005062754A3 |
A sensor is fabricated with micron feature sizes capable of simultaneously measuring absolute angles of rotation and angular rotational rates. The measurements are made directly from the position and velocity of the device without the ne...
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WO/2006/009194A1 |
There is provided a semiconductor sensor in which a diaphragm can be prevented from being damaged through movement of a weight even if the weight collides onto a semiconductor integrated circuit substrate, and the diaphragm section can b...
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WO/2006/009578A2 |
A microstructure comprising an in-plane solid-mass electrically conductive tuning fork gyroscope (10) and fabrication methods. The gyroscope (10) is formed using substrate material having lower and upper layers (21,23) sandwiching a sacr...
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WO/2005/104228A1 |
A sensor system includes a sensor device (10) and an integrated circuit (20) for driving the device (10). The device (10) includes a sensor body (1) of a silicon-based material, an upper sealing member (2) of a silicon-based material, an...
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WO/2005/083356A1 |
An apparatus and a system, as well as a method and an article, may include coupling a plurality of masses to provide a plurality of output signals responsive to motion relative to a common axis. Moving the plurality of masses at a substa...
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WO/2005/076017A1 |
Micromachined vibratory gyroscope and method in which the vibrating masses are coupled electronically, e.g. by electronically adjusting the resonance frequency of one or more of the masses so that all of the masses have the same resonanc...
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WO2005017445B1 |
There is a sensor element (24) for an electronic sensor device (20). The sensor element (24) may have a substrate (43), a pair of proof masses (34a, 34b), a set of drive beams (44), and at least one base beam (46). The pair of proof mass...
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WO/2005/062754A2 |
A sensor is fabricated with micron feature sizes capable of simultaneously measuring absolute angles of rotation and angular rotational rates. The measurements are made directly from the position and velocity of the device without the ne...
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WO2005017445A3 |
There is a sensor element (24) for an electronic sensor device (20). The sensor element (24) may have a substrate (43), a pair of proof masses (34a, 34b), a set of drive beams (44), and at least one base beam (46). The pair of proof mass...
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WO2004074168A3 |
A packaged microchip has an isolator (24) that minimizes stress transmission from its package (12) to its microchip (16). To that end, the packaged microchip includes a stress sensitive microchip having a bottom surface with a bottom sur...
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WO/2005/031257A2 |
An oscillatory rate sensor is described for sensing rotation about the 'z-axis'. It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue...
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WO2004097895A3 |
A proof mass (11) for a MEMS device is provided herein. The proof mass comprises a base (13) comprising a semiconductor material, and at least one appendage (15) adjoined to said base by way of a stem (21). The appendage (15) comprises a...
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WO/2005/017445A2 |
There is a sensor element (24) for an electronic sensor device (20). The sensor element (24) may have a substrate (43), a pair of proof masses (34a, 34b), a set of drive beams (44), and at least one base beam (46). The pair of proof mass...
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WO/2004/097895A2 |
A proof mass (11) for a MEMS device is provided herein. The proof mass comprises a base (13) comprising a semiconductor material, and at least one appendage (15) adjoined to said base by way of a stem (21). The appendage (15) comprises a...
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