| Document |
Document Title |
|
JP2008256979 |
To provide an illumination optical system for providing illuminating luminous flux having isotropic NA distribution with compact constitution equipped with a laser array light source.The illumination optical system IL1 for illuminating t...
|
|
JP2008257013 |
To provide an optical unit configured to efficiently use light emitted from a light source.The optical unit is constituted by arranging two reflection surfaces facing each other across a virtual surface. The reflection surface on one sid...
|
|
JP2008258637 |
To provide systems and methods for improved lithographic printing with a polarized light.Polarized light (polarized in radial or tangential direction) is used to illuminate a phase-shift mask (PSM) and produce an exposure beam. A negativ...
|
|
JP2008250303 |
To provide an optical device for generating sheet light so that the tomographic layer of each of specimens can be efficiently observed.The optical device has a sheet light for emitting a luminous flux, and a plurality of optical devices ...
|
|
JP2008241768 |
To provide a projection type display device capable of achieving simplification, miniaturization and reduction of cost of structure and making illuminance irregularity of a video image projected to a screen small.The projection type disp...
|
|
JP2008235885 |
To provide a novel apparatus and method capable of adjusting the polarized light of a radiation beam.In an illuminating device of a lithography apparatus, an illuminating mode regulation element 2 converts a radiation beam PB into a dipo...
|
|
JP2008227497 |
To provide an optical integrator system capable of forming a desired illuminance distribution on a surface to be illuminated without being substantially influenced by errors of surface shapes of optical surfaces of wavefront division ele...
|
|
JP2008224889 |
To reduce speckle on the emission face of an optical fiber by connecting light from a laser light source to the optical fiber without waste, and reducing coherence of the laser light source.The apparatus includes: the laser light source ...
|
|
JP2008227496 |
To provide an optical integrator system capable of forming a desired illuminance distribution on a surface to be illuminated by ensuring a predetermined large numerical aperture of an emission side without requiring excessively high accu...
|
|
JP2008197652 |
To provide a collimator for a backlight unit, and to provide a liquid crystal display (LCD) using the collimator.The collimator includes a plate including a plurality of light passing areas, passing light incident from the backlight unit...
|
|
JP2008191653 |
To provide a dual lamp coupling system in which separate integrator rods for each lamp are replaced with a single rod, to benefit from advantages such as simple mounting, simple alignment, less coupling loss, lower cost since there is no...
|
|
JP2008182266 |
To reduce a light quantity loss when a mask is illuminated with an illumination light in a predetermined polarization state.A illumination optical system, which illuminates a reticle (R) with the illumination light from a light source (1...
|
|
JP2008170714 |
To lessen color unevenness in an image projected on a screen.A lighting optical system 3 for guiding light emitted from a light source device 1 to liquid crystal panels 2r, 2g, 2b has an integrator optical system 20 which uniformizes int...
|
|
JP2008171974 |
To provide a means capable of controlling light volume in stepless manner, allowing light volume control at a desired resolution, while preventing complication of hardware.A diaphragm 25 having a fixed aperture is arranged on a pupil sur...
|
|
JP2008152286 |
To provide an illumination optical system obtaining an illumination light flux high in uniformity of illuminance by highly efficiently using light from a light source.In the illumination optical system, when a cross-section which is para...
|
|
JP2008146085 |
To provide a small projection type display unit capable of preventing the overlapping of the optical path of an incident light on that of an outgoing light in a reflection type light valve and providing high-picture-quality projection im...
|
|
JP2008139820 |
To provide a microscope illumination apparatus configured so that the loss of the amount of light is kept to a minimum and the light can be efficiently supplied to the microscope body, even in the case of light to be emitted, in particul...
|
|
JP2008135743 |
To provide an illumination optical system which can switch some illumination settings with a few technical efforts.In a projection aligner for EUV projection microlithography, the illumination optical system includes a field facet mirror...
|
|
JP2008122710 |
To provide a lighting device which is efficient in using light and has a large rate for changing the illuminated area in the longitudinal direction of the light source.The lighting device has a light source 31, a first optical component ...
|
|
JP2008102389 |
To provide a light irradiation device for the irradiation of light condensed to be a linear shape with which a high peak illuminance is obtained, and further, the uniformity of the illuminance in the longitudinal direction of the light c...
|
|
JP2008070769 |
To provide a light source unit capable of restraining the spread of a light beam emitted from a tapered rod to be much smaller, and an illumination device and a projector device.The light source device is equipped with an LED 2 which irr...
|
|
JP2008060546 |
To provide an illuminating optical system for a microlithography projection aligner.The illuminating optical system for microlithography projection aligner 1 is used for illuminating an object surface 19 with illuminating light 3, 3' fro...
|
|
JP2008041310 |
To provide a light source device capable of inexpensively preventing tarnish of an optical element; and an inspection device.This light source device is provided with: a light source 11 emitting light with heat radiation; the optical ele...
|
|
JP2008040145 |
To improve autofocus accuracy in the longitudinal direction of a photographing area even in photography in the dark.The lens for an autofocus auxiliary light source having a domed outer surface and a circular bottom part is the lens 5 of...
|
|
JP2008034124 |
To provide an LED lighting fixture which converts light from an LED light source nearly similar to a point light source into a plane light source through an optical system, and produces an illumination effect rich in surprise at the time...
|
|
JP2008033339 |
To provide an image display device capable of improving a contrast by reducing stray light due to a specular reflection component.A projection lens is provided with: an incident side lens group for forming a Fourier transform plane 12A f...
|
|
JP2008020707 |
To provide a projector where luminous light from various luminous sources can be effectively utilized, and bright images can be projected.Luminous light from a luminous source lamp unit 20 is separated into first polarized light and seco...
|
|
JP3969038 |
To efficiently illuminate the specified illumination area of a liquid crystal light valve or the like even when a 1st lens array of an illumination optical system includes small lenses formed at different positions along an optical axis ...
|
|
JP3966174 |
To realize the omission and the simplification of an optical element constituting an illumination optical system. A polarized light generating part has a nearly rectangular light incident surface 132 whose size in a direction (y) is smal...
|
|
JP3967874 |
To prevent practical problems such as an increase in the weight and volume of a projection type display device due to the increase in the size of the prism used in the device and such as an increase in the cost due to the use of a large ...
|
|
JP2007141865 |
To provide an optical apparatus for uniformly illuminating a light valve, inexpensive and excellent in energy efficiency.A light source 4 and a light transmitting tunnel 2 are provided in this apparatus for uniformly illuminating the lig...
|
|
JP2007142084 |
To manufacture a hole array of high density regarding an exposure method for forming a hole array executed in a lithography process, and a device manufacturing method using the method.A mask R wherein a prescribed pattern is formed is il...
|
|
JP3960185 |
To provide an illumination optical device which improves a contrast and is made small-sized, and also to provide a projector which has the illumination optical device. The parallelizing concave lens 14 of the illumination optical device ...
|
|
JP2007129161 |
To provide a method for manufacturing a high-performance optical integrator whereby the reducing effect of the illuminating nonuniformity generated can be improved surely when using it together with a condenser.In the method (10), at lea...
|
|
JP3958122 |
To provide a small-size lighting apparatus ensuring higher light application efficiency by adequately adjusting the length of a reflection type optical integrator and also provide an aligner using the same lighting apparatus and a device...
|
|
JP3958163 |
To provide an exposure method, capable of preventing degradation in focusing performance caused by the effect of polarization, to form a wanted pattern. A pattern formed at a mask is irradiated with a lighting system that forms an effect...
|
|
JP2007121602 |
To provide an illumination optical system, capable of adjusting to luminance with which a display image is made more visible, without adversely affecting the reliability, the lifetime, and so on of a light source, when the illumination o...
|
|
JP2007122048 |
To provide a microscope system capable of displaying generated fluorescence in a more easily visible manner and to provide a recording method for visualizing fluorescence.An image sensor and a circuit related to the image sensor are used...
|
|
JP2007121447 |
To provide an illumination optical device and a liquid crystal projector capable of eliminating a situation that the quantity of light radiated to the specified side of an illumination area is decreased without decreasing the quantity of...
|
|
JP3954624 |
To provide a low-cost and energy-efficient optical apparatus for uniformly illuminating a light valve. The apparatus is provided with a light source 4 and a light transmitting tunnel 2 and the inner face of its wall section reflects ligh...
|
|
JP3953979 |
To provide an illumination optical system which employs a dichroic mirror wheel and an image display device equipped with the same. The illumination optical system includes a light source which emits light and the dichroic mirror wheel w...
|
|
JP3948962 |
To easily adjust the position of a light source, in relation between the spot center of the light source of an imaging apparatus with the optical axis of an imaging camera. The imaging device is equipped with a light source means for ill...
|
|
JP2007094095 |
To provide a projection type video display device which can be improved in reliability and always display video of excellent picture quality.The projection type video display device which spatially modules lighting luminous flux from a l...
|
|
JP2007078571 |
To acquire an approximately uniform illumination region, not only in a plane vertical to the optical axis direction but also in the optical axis direction.A fly-eye integrator 13 comprising a plurality of lens elements 3B, and a condense...
|
|
JP2007079029 |
To obtain an illumination optical system that has brightness even on the image display elements and is highly efficient in using light without being substantially affected by the uneven distribution of the light emitted from the light so...
|
|
JP3931700 |
To further improve the utilization efficiency of light of an illuminator for supplying exit light to a light valve, etc., through an integrator. The outer side of an opening 22 on an incident side 20a of the integrator 20 of the illumina...
|
|
JP2007072020 |
To obtain a light source unit which can irradiate a bright illumination optical system having a larger F value than the image focusing optical system in a direct connection measuring instrument.In a light source unit irradiating an imagi...
|
|
JP3929003 |
To provide a dark field projection display having a compact light source and substantially uniform intensity in a spatial light modulator. The dark field projection display has the spatial light modulator 7 and a lamp 1 and a reflector 2...
|
|
JP3930981 |
To miniaturize a projection type video display device, to improve brightness, to make the image quality high, and to improve the assembling accuracy of parts. As to first and second array lenses 6 and 7 of the projection type video displ...
|
|
JP3919419 |
To maintain the uniformity of the intensity distribution of the light from a light source on a surface to be irradiated regardless of the fluctuation of the light and, at the same time, to improve the efficiency of the light. An illumina...
|
