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Matches 451 - 500 out of 3,070

Document Document Title
JP5803412B2  
JP2015191043A
【課題】高い利用効率で光源からの光を利用 しながら、スペックルを効果的に目立たなく させることができる照明装置を提供する。【 解決手段】照明装置40は、照射装置7...  
JP5800340B2  
JP2015184303A
To provide a light source optical device and a projector 10 where light efficiency of light source light is enhanced.A light source optical device includes: a light source; an illumination optical system 110 including a plurality of lens...  
JP5793222B2  
JP2015529855A
極端紫外線(EUV)検査システムの波面収 差を測定するためのテスト構造が開示される 。テスト構造は、EUV光に実質的に反射性 を有さない素材から形成される基板およ...  
JP2015172749A
To provide an illumination optical apparatus which can realize appropriate illumination conditions necessary for accurate transfer of mask patterns having varied characteristics, e.g. illumination conditions with wide variety in the ligh...  
JP5787382B2  
JP5787133B2  
JP2015166863A
To provide a lens which allows for measuring light intensity of an effective luminous flux propagating therethrough without requiring additional components for coupling light out.A lens includes at least one object-side refractive surfac...  
JP5780337B2  
JP5781165B2  
JP2015163994A
To provide a lighting optical unit and a projection exposure device including the same.A lighting optical unit comprises: a first optical element including plural first reflection facet elements; and a second optical element including pl...  
JP2015163947A
To provide: a light source optical system capable of projecting a brighter image by reducing the volume of unconverted light returning to a light source from a wavelength conversion element; a light source device having the same; and an ...  
JP2015162446A
To provide an optical lens, a light source unit, and a lighting device capable of reducing glare with low light loss.A lighting device 1 comprises: a device body 6; and a light source unit 10 attached to this device body 6. The light sou...  
JP2015161737A
To provide a display device having a high optical performance, with small size, being thin.A display device includes a space phase modulation element 30 for forming a display optical flux 2, a transparent substrate 40 in which the displa...  
JP5772935B2  
JP5772090B2  
JP2015524942A
マイクロリソグラフィ投影露光装置を作動さ せる方法において、ファセットミラー(72 )は、5nmと30nmの間の中心波長を有 する投影光(PL)で照明される。ファ...  
JP2015155950A
【課題】光学系の構成を簡略化でき、かつ均 一化光学系に対して理想的に近い状態でコヒ ーレント光を入射可能にする。【解決手段】 照明装置は、コヒーレント光を放射する...  
JP5768428B2  
JP2015524576A
照明光学ユニット(4)は、第1のファセッ ト要素(17)と、ファセット(24)を形 成するように柔軟にグループ分けすることが できる多数の変位可能マイクロミラー(...  
JP5765608B2  
JP2015146275A
To solve the problem of the possibility that the light intensity of a spot on a fluorescent body largely varies due to a positioning error (attaching error) between a light emission point of a semiconductor laser and a collimator lens, w...  
JP2015146417A
To provide: an exposure device and an exposure method, with which a mask pattern can be accurately exposed and transferred in relation to a shape of an exposed region of a workpiece even if the workpiece is distorted, and exposure accura...  
JP5761329B2  
JP5757930B2  
JP5759174B2  
JP2015141826A
To provide a luminous flux control member capable of facilitating correction of the shape of a reflection surface.A luminous flux control member of the present invention comprises an incident region and an emission region. The incident r...  
JPWO2013140589A1
本発明は、発光管(21)と、発光管(21 )からの光が入射する入射面(23a)と、 入射面(23a)から入射した光を内部で多 重反射させて出射する出射面(23b)...  
JP2015141393A
To provide an illumination device that can illuminate at sufficiently even luminance while making speckle unnoticeable.An illumination device 40 comprises: a first diffusion element 50; an irradiation device 70 that irradiates the first ...  
JP5756242B1
【課題】複数のランプが最適に配置された露 光装置を提供する。【解決手段】複数のラン プ12で構成されたランプ群11と、複数の ランプ12からの光を受けて、当該光の...  
JP2015133304A
To provide an illumination lens capable of suppressing illuminance irregularity in illumination by emitted light.An illumination lens 4 illuminating a display unit by condensing rays from a light source 3 and emitting the condensed rays ...  
JP2015132848A
To provide an illumination optical system having high flexibility relating to a profile of pupil intensity distribution and changes in a polarization state without accompanying exchange of an optical member.The illumination optical syste...  
JP5753260B2  
JP5748589B2  
JP2015519736A
本発明は、基板(30)及び反射コーティン グ(31)を有する、光学素子(21)に関 するものである。反射コーティング(31) は、特にEUV照射を反射するように構...  
JP2015127755A
To provide a projection type image display device and a projection optical systems, which are able to perform large-screen display with an easy, small and inexpensive configuration even when applied for super-wide angle.The projection ty...  
JP5746259B2  
JP2015125424A
To provide an optical device that enables reduction in a variation of a loss of light amount further than when guiding light from all of a plurality of light sources different in a wavelength by use of one fiber.The present invention rel...  
JP2015118362A
To provide a projector enhancing admissibility of positional accuracy, improving contrast of an image, further controlling a boundary between a bright portion and a dark portion in an image plane of an image projected to not be conspicuo...  
JP2015119192A
To provide a beam delivery system providing a beam of light having a reduced coherence as compared to laser light directly emitted from a laser of the beam delivery system.A beam delivery system of a projection exposure system comprises ...  
JP2015115423A
To provide a designing method of an exposure light source which is capable of generating a mask image as sharp as a light source of pixelated light intensity distribution and can be easily manufactured.The designing method includes: a fi...  
JP2015114633A
To provide a light irradiation apparatus capable of radiating a substantially parallel light beam with uniform and high luminance.A light irradiation apparatus for radiating a light beam to a rectangular irradiation area on an irradiatio...  
JP2015517733A
EUV投影リソグラフィのための照明光学ユ ニットは、リソグラフィマスクを配置するこ とができる物体視野に照明光を案内するよう に機能する。照明光学ユニットは、少な...  
JP2015114620A
To enable improvement of speckle reduction effect without complicating a structure.A luminaire 40 includes: a diffusion member 67 having an anisotropic diffusion surface; a rotary shaft member 68 that rotates the anisotropic diffusion su...  
JP2015517729A
EUV投影リソグラフィのための照明光学ユ ニットは、下流の結像反射光学ユニットの物 体視野と結像される反射性物体とを配置する ことができる照明視野を斜め照明するよ...  
JP2015111672A
To provide an illumination system of a micro lithography projection exposure device that can adjust both a space radiation illuminance distribution and an angular radiation illuminance distribution in a field dependent method.An illumina...  
JP5736746B2  
JP5737175B2  

Matches 451 - 500 out of 3,070