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Patent Searching and Data


Matches 451 - 500 out of 3,173

Document Document Title
WO/1989/001640A1
Gradient optical density transmissive light directing devices (20, 24, 26, 28, 30) and fabrication thereof are disclosed herein. Examples of such devices include concentrators, lenses and compound lenses. The present invention teaches a ...  
WO/1987/006012A1
A concentrator of solar radiation comprises a carrying structure (1) on which are mounted, in annular rows, facets (2) the reflecting surfaces of which are split into annular zones (3). At least one of the peripheral annular zones (3) ha...  
WO/1987/001466A1
A regulator means (8) or (9) for varying the distance on the optical axis between a light source (1) such as a semiconductor laser and a condenser (2) is provided in an optical head device. A spherical aberration component, which is a fa...  
WO/1983/002310A1
The method and apparatus of the invention are intended to collect, in the intermediary space comprised between the transparent cover and the absorbing receiver surfaces of a solar insolator, the substantially parallel light beams from th...  
JP2016127226A
【課題】露光の際に、レチクルのパターン領 域内部に所望の温度分布を生じさせる。【解 決手段】 露光装置100は、パターンが形成されたパ ターン領域を有するレチクル...  
JP5944400B2  
JP2016518619A
A micro lithography device (10) contains an object system (20) containing a penetration filter (42) constituted so that light irradiation distribution in projection Optical path might be corrected variably. A penetration filter (42) cont...  
JP5938335B2  
JP5938707B2  
JP2016109731A
[Subject] In a microscope, irradiation light to a sample is adjusted swiftness and appropriately. [Means for Solution] It has a reflective means including a reflective surface which has a part of shape of an elliptical pipe side, and a d...  
JPWO2014010274A1
基板処理装置(EX)は、照明領域(IR) から発生する反射光束(L2)を基板に向け て投射させて、マスクパターンの像を基板に 結像する投影光学系(PL)と、照明領...  
JP5934082B2  
JP5935852B2  
JP5935920B2  
JP2016105190A
[Subject] A ring light lighting machine which is demarcated clearly and forms a uniform lighting field in lighting area is provided. [Means for Solution] It is a ring light lighting machine which has the light source arranged annularly. ...  
JP2016517026A
An illumination-light study unit (4) for projection lithography functions as illuminating an object recognition field (5) which can arrange an object (7) imaged by illumination light (16). An illumination-light study unit (4) has a view ...  
JP2016103025A
[Subject] An exposure method and a device for enabling transfer of a pattern of various pitches to high resolution simultaneous respectively are provided. [Means for Solution] It is an exposure device which has illumination-light study s...  
JP5928653B2  
JP5928632B2  
JP5927555B2  
JP2016099390A
[Subject] An illumination-light study system and an image display device which can raise a contrast ratio of picture light by reducing diffraction light are provided. [Means for Solution] An optical equalization element (14) which equali...  
JP2016100461A
[Subject] Large-sized-izing of an illumination optical device accompanying an increase in the number of optical components and complication of imaging optics and big-ticket-ization are avoided, and an illumination optical device in which...  
JPWO2013191255A1
照明装置は、長方形の第1面、内面、及び長 方形の第2面を有し、前記第1面に入射した 光が前記内面での多重反射を介して前記第2 面から出射する、光インテグレータと、...  
JP2016095523A
[Subject] A reflective refraction projection object instrument which has an inclination deviation mirror which makes it possible to image a pattern containing a subpattern which is suitable in the various directions is provided. [Means f...  
JP2016086060A
[Subject] Without consuming a memory of a computer excessively, also when a part of shape of a mask pattern is changed, an image formation pattern simulation system and an image formation pattern simulation method which can carry out a s...  
JP2016085472A
[Subject] An illumination-light study system which has high flexibility about change of shape of pupil intensity distribution, and a polarization state without being accompanied by exchange of an optical member. [Means for Solution] An i...  
JP5918858B2  
JP2016513817A
[Subject] As there are novelty and unobviousness to a prior art, the temperature of a reflector (for example, mirror) is controlled. [Means for Solution] An array of thermoelectrical heat pump which has respectively the 1st end that is i...  
JP2016075936A
[Subject] A method of manufacturing a device and such a device for equalizing illuminated viewing Nouchi's laser radiation is provided. [Means for Solution] A device for equalizing illuminated viewing Nouchi's laser radiation, Laser radi...  
JP5914254B2  
JP2016071353A
[Subject] The object of the present invention is to provide an optical apparatus which can realize smaller light equipment, light equipment using this, and a projection type display, controlling decline in utilization efficiency of light...  
JP2016072543A
[Subject] Although generating of a failure by a pattern is suppressed, provide a light irradiation device for peripheral exposure devices which can irradiate with light which has the irradiation intensity distribution which rises steeply...  
JP2016065923A
[Subject] Even when a point of a light source emitting light is large, control a fall of condensing nature in a condensing point. [Means for Solution] It extends to near the euphotic point at least from LED package 24A containing a plura...  
JP5911898B2  
JP5910324B2  
JP5909369B2  
JP2016063185A
[Subject] Enlargement is avoided and an illumination optical device advantageous to illuminating a field to be illuminated high illumination and uniformly is provided. [Means for Solution] Illumination optical device 101 is the 1st angle...  
JP2016061851A
[Subject] A lighting installation and a projector which can be made to generate fluorescence efficiently are provided. [Means for Solution] A condensing optical system which is established between a light source which emits excitation li...  
JP2016057644A
[Subject] Even if it increases the number of elements used as a light source, an illumination-light study system is aimed compact at offer of the illumination-light study system and image display device which can be constituted. [Means f...  
JP2016058591A
[Subject] An illumination optical device which makes shape of an image of a secondary light source easily desired ring belt shape and circle shape is provided suppressing a loss of light volume. [Means for Solution] Illumination optical ...  
JP2016058165A
[Subject] A lighting installation which is stabilized and can control a direction of movement of high-output light from light equipment with high precision is provided. [Means for Solution] Lighting installation 40 contains optical eleme...  
JP2016053718A
[Subject] An illumination optical device and a projection aligner which can lessen a light volume loss at the time of illuminating a mask by illumination light of a predetermined polarization state are provided. [Means for Solution] It h...  
JP2016053644A
[Subject] The object of the present invention is to provide a projection type display using a color separation constructional system and this which can inhibit influence of leak light. [Means for Solution] A color separation construction...  
JP2016510425A
At least one mirror device (200) which has a plurality of mirror elements of each other because of the object of changing the angular distribution of the light in which the present invention was reflected by the mirror device which can b...  
JP2016510142A
The projection lens for imaging the pattern arranged in the object plane (OS) of a projection lens using the electromagnetic radiation line which has the operating wavelength of lambda< 260 nm at the image plane has a plurality of optica...  
JP2016045306A
[Subject] A light flux control member which controls a luminance nonuniformity and is used for a surface light source device with high light use efficiency is provided. [Means for Solution] A light flux control member has the 1st entranc...  
JP2016042124A
To provide a lighting device capable of changing the beam angle distribution of illumination light while restraining loss in the quantity of light.A lighting device comprises: a light source 2 that emits light; a multiple reflection elem...  
JP2016042122A
To provide a lighting device capable of changing the beam angle distribution of illumination light while restraining loss in the quantity of light.A lighting device comprises: a light source that emits light; a multiple reflection elemen...  
JP2016509691A
A system constituted so that a radiation beam might be projected on a target portion of a substrate in a lithography device is indicated. A system is provided with a mirror and a controller. A mirror has an actuator for constituting shap...  
JP2016042125A
To provide a diffusion lens that suppresses sensitivity to changes in illuminance as well as suppresses degradation in optical performance caused by unnecessary light and decrease in releasability in the process of molding the lens.An em...  

Matches 451 - 500 out of 3,173