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Matches 451 - 500 out of 1,766

Document Document Title
JP2012004561A
To provide an illumination method, an illumination optical apparatus, and an exposure equipment capable of maintaining compatibility concerning a light intensity distribution as needed, when an optical element whose configuration is diff...  
JP2012002894A
To provide a reflector that can be easily obtained to avoid inconveniences of conventional concentrating solar cell systems such as complication and high cost, a preparation method thereof, and a concentrating solar cell system.The prese...  
JP2011254086A
To realize an appropriate illumination condition, which is necessary to transfer faithfully a mask pattern having a variety of characteristics, for example, an illumination condition having a diversity in a light intensity distribution a...  
JP2011238706A
To provide a technique advantageous to deciding an effective light source used for fine patterns.The method has a step for calculating an optical strength distribution including a positive value portion, in which an optical strength has ...  
JP2011233911A
To provide an illumination optical device capable of forming annular illumination pupil distribution in a circumferential polarization state while suppressing light quantity loss to an excellent level.The illumination optical device comp...  
JP2011232761A
To provide an image display in which an image having high contrast and reduced illumination unevenness is displayed.An illumination optical system that illuminates a reflection type light modulation element via a polarization separation ...  
JP2011228536A
To provide a reflection optical member capable of improving reflection efficiency of a radiation beam, an optical system, an exposure device, and a device manufacturing method.An emission side fly-eye mirror comprises: a mirror block 50A...  
JP2011222841A
To provide a spatial light modulation unit capable of avoiding, in a reliable manner, optical members from being damaged by light excessively condensed through multiple mirror elements.A spatial light modulation unit (3), used in an illu...  
JP2011222170A
To provide a light source device capable of emitting light in a desired direction.In the light source device 100, a first reflective surface 44 is arranged to reflect first light L1 emitted from a light emitting element 20 toward a third...  
JP2011222594A
To expose light so as to inhibit concentration of light energy.The illuminating apparatus to apply light to a target surface includes: multiple lens elements laid out to split and emit light; rod lenses of a columnar shape having a light...  
JP2011221277A
To provide an illuminating device capable of mitigating a rise of temperature of a light shielding means placed on an optical path and satisfactorily projecting an image information.An illuminating device includes: light source means; an...  
JP2011222856A
To provide a spatial light modulation unit capable of making a desired pupil intensity distribution accurately.The spatial light modulation unit (3), used in an illumination optical system to illuminate a surface to be illuminated with l...  
JP2011216796A
To index-evaluate a pupil luminance distribution formed on an illumination pupil of an illumination optical system for supplying illuminating light to an imaging optical system by taking notice of imaging performance.A method of evaluati...  
JP2011216863A
To adjust a beam size in the long and short-axis directions for each direction, and also allow the beam to be irradiated at a uniform intensity.A variable beam size illumination optical device has a beam size varying optical system. The ...  
JP2011210381A
To provide a light source device having a small and simple focus optical system that makes incident light emitted from a solid-state light-emitting element to be efficiently incident on a light guide making up a lighting system.The light...  
JP2011211230A
To provide an optical illumination device and a projection exposure device which decrease light loss when a mask is illuminated with emitted light in a prescribed polarization state.The projection exposure device includes an optical illu...  
JP2011199285A
To provide an illumination system that is configured so that the system can generate a polarized illumination mode more flexibly, and to provide a lithographic apparatus.The illumination system includes: a polarization member including f...  
JP2011191763A
To provide a lens structure adapted for guiding light from a light source to a plurality of directions.The lens structure 100 includes a base 110, a pillar 120, and an umbrella-shaped body 130. The base 110 has a containing pit adapted f...  
JP2011187989A
To provide an illumination optical device, which almost uniformly adjusts the pupil luminance distribution at each point on irradiated surface respectively while the illumination distribution on the irradiated surface is almost uniformly...  
JP2011171563A
To provide an adjustment unit used in an illumination optical system and capable of adjusting a pupil intensity distribution for each position on an irradiation object surface.This adjustment unit (10) is used in an illumination optical ...  
JP2011165784A
To synthesize light from a second light source while not reducing the volume of light emitted from a first light source, relating to a light irradiation device which guides the light of the second light source into a region where no ligh...  
JP2011158920A
To provide a projection display device capable of smoothly suppressing the lowering of quantity of specified color light or the occurrence of color irregularity even when a display element is shifted relative to the optical axis of a pro...  
JP2011158502A
To provide a high-efficiency projection type video display apparatus, without increasing the size of a light source device, when using the light source device using a plurality of light sources, wherein light fluxes are condensed to a si...  
JP2011154828A
To enable a light distribution direction to be variable and also make a reflecting range and a light distribution direction widely adjustable by making space for light distribution smaller, in a reflected illumination system where a refl...  
JP2011142150A
To provide an illumination optical system which ensures high illumination efficiency while using a discharge tube of a normal ultra-high-voltage mercury vapor lamp or a laser light source, without using a special light source.This invent...  
JP2011137970A
To provide a lens array that reduces an influence of light to propagates to a necessary area on a focal plane, and to pass through an unnecessary region, forms consequently in the necessary area on the focal plane, uniform illumination i...  
JP2011133514A
To improve the contrast of an image display apparatus while suppressing reduction in the brightness thereof.The image display apparatus includes: an image display element configured to display an image by controlling a polarization state...  
JP2011135099A
To provide an optical integrator having characteristics decreasing the influence of an relative positioning error of a pair of optical members on an illuminance distribution and the shape of an illumination field.This wavefront splitting...  
JP2011128569A
To provide an image projection device which obtains high contrast by a simple constitution using a reflecting liquid crystal panel.The image projection device includes: a color separation element; a wavelength selecting phase plate; firs...  
JP2011128634A
To obtain a lighting optical system that is easily manufactured; and to emit illuminating light suitable for image display by improving speckle noise or spatial light intensity distribution; and also to provide an image display apparatus...  
JP2011124584A
To provide an illumination optical unit and a projection exposure apparatus including the same.The illumination optical unit includes a first optical element having a plurality of first reflective facet elements and a second optical elem...  
JP2011118268A
To provide an objective optical system which has the number of apertures, for example, larger than 1.1, while satisfactorily correcting aberration and keeping sensitivity in optical adjustment small.The objective optical system includes,...  
JP2011113002A
To provide a lighting apparatus which can easily manufacture a lens array while increasing lighting efficiency and to provide a projector using the lighting apparatus.In a luminous flux adjusting device 80, a first partial luminous flux ...  
JP2011114041A
To provide a luminous flux splitting apparatus capable of guiding luminous flux having a desired intensity distribution to a plurality of spatial optical modulators without depending upon an intensity distribution of incident luminous fl...  
JP2011112997A
To provide a mirror attachment and detachment device for changing the mirror of an illumination optical system, without directly touching the mirror.The mirror attachment and detachment device 1 is configured such that a plurality of sup...  
JP2011109128A
To provide a lithographic apparatus which applies a desired angular intensity distribution to a radiation beam by using an array of mirrors, this radiation beam overcoming or alleviating one or more shortcomings of a lithographic apparat...  
JP2011107710A
To provide a uniformizing optical element and an illumination device, for supplying polarized light in a predetermined oscillation direction with high efficiency at a high illumination ratio.The illumination device includes: a rod integr...  
JP2011107264A
To improve the yield of manufacturing liquid crystal panels with high performance by uniform irradiation with UV rays.A pair of electrodes 13a, 13b for discharge is disposed opposing to each other in an axial direction of a light emittin...  
JP2011109097A
To provide a homogenizer in which any risk of being damaged is obviated or mitigated.A two-stage homogenizer includes a first homogenizer stage and a second homogenizer stage. The first homogenizer stage includes a pair of microlens arra...  
JP2011103465A
To prevent the condensation of light from optical elements in a narrow region on a surface of a following optical member when the light from a plurality of optical elements is used.A lighting device 2 for lighting a surface of a reticle ...  
JP2011097076A
To simultaneously transfer various pitch patterns, each with high a resolution.An exposure apparatus includes an illuminating optical system 12 for illuminating a reticle R with illumination light IL, and a projecting optical system PL t...  
JP2011091177A
To perform uniform exposure by making uniform interference fringes of laser light formed through a fly-eye lens and reducing illuminance unevenness of the laser light.A laser exposure device includes: a laser light source 1; a first fly-...  
JP2011077142A
To provide an illumination optical apparatus for suppressing a loss of a quantity of illumination light caused by a change in an illumination condition, and to provide an aligner and a device manufacturing method.The illumination optical...  
JP2011075651A
To decrease speckle noise related to a projection type image display device using a coherent light source, and to decrease light loss caused by an increase of a divergence angle of light.An optical unit (for example, a speckle noise decr...  
JP2011059174A
To fix a length of a scanning range and a scanning speed in a lighting device.The lighting device, which illuminates an object area by causing light to scan the object area, includes: a light source (1) generating light; an optical syste...  
JP2011060869A
To provide an element changeover device that positions one of a plurality of reflection optical elements into an optical path and can of easily exchange the respective reflection optical elements.The element changeover device (30) for po...  
JP2011053323A
To provide a light source device improving the luminance, and to provide a projector including the same.The projector includes: the light source device; a display element; a projector control means and the like. The light source device i...  
JP2011048070A
To prevent quantity of light from being reduced and to switch between a non-polarizing state and a polarizing state by a simple configuration.Each of a first polarizing separation element 71 and a second polarizing separation element 73 ...  
JP2011049284A
To efficiently and accurately measure dynamic optical characteristics of a projection optical system without enlargement of an optical system for measurement.A measuring device for measuring optical characteristics of the projection opti...  
JP2011048314A
To provide a reflection type liquid crystal projector which has a projection auto-focus function using a reflection type liquid crystal and a liquid crystal lens and can be incorporated in a cellular phone, etc.The reflection type liquid...  

Matches 451 - 500 out of 1,766