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Matches 451 - 500 out of 3,179

Document Document Title
WO/1991/010103A1
A device for focusing parallel rays on a receiving element (20). The device is characterized in that it comprises at least one focusing element on either side of a principal plane, each said element comprising a cylindrical primary refle...  
WO/1990/013777A1
A nonimaging radiant energy device (40) may include a hyperbolically shaped reflective element (42) with a radiant energy inlet (54) and a radiant energy outlet (58). A convex lens (44) is provided at the radiant energy inlet (54) and a ...  
WO/1990/011545A1
According to the invention the illuminating device having a high luminosity factor is essentially characterized in that it comprises a light source (1) housed in a mirror (2), a truncated transparent sleeve (8) placed between said light ...  
WO/1989/005463A1
A concentrator arrangement (10) consists of a plate (11) coupled to a plurality of mutually parallel first cells (14) with parabolic side walls (2, 3). The first cells (14) are optically coupled with second cells (15) whose coupling face...  
WO/1989/001640A1
Gradient optical density transmissive light directing devices (20, 24, 26, 28, 30) and fabrication thereof are disclosed herein. Examples of such devices include concentrators, lenses and compound lenses. The present invention teaches a ...  
WO/1987/006012A1
A concentrator of solar radiation comprises a carrying structure (1) on which are mounted, in annular rows, facets (2) the reflecting surfaces of which are split into annular zones (3). At least one of the peripheral annular zones (3) ha...  
WO/1987/001466A1
A regulator means (8) or (9) for varying the distance on the optical axis between a light source (1) such as a semiconductor laser and a condenser (2) is provided in an optical head device. A spherical aberration component, which is a fa...  
WO/1983/002310A1
The method and apparatus of the invention are intended to collect, in the intermediary space comprised between the transparent cover and the absorbing receiver surfaces of a solar insolator, the substantially parallel light beams from th...  
JP2016142900A
【課題】照明ムラの発生が低減された照明装 置およびプロジェクターを提供する。【解決 手段】励起光を射出する光源装置と、波長変 換素子と、を備え、励起光によって波長...  
JP2016139143A
【課題】様々な特性を有するマスクパターン を忠実に転写するために必要な適切な照明条 件、たとえば二次光源の光強度分布や偏光状 態などに関して多様性に富んだ照明条件...  
JP2016138961A
【課題】投写光学系を構成するレンズ群にお いて、設置位置のバラツキによる収差の変動 を効率的に抑える投写光学装置、及びこのよ うな投写光学装置を備えたプロジェクタ...  
JP5959342B2  
JP2016133756A
【課題】高輝度かつ高解像度に対応可能であ り、かつ、高画角を達成できる投射光学系を 提供すること。【解決手段】投射光学系40 は、拡大側から順に、nを6又は7とし...  
JP2016130859A
【課題】 照明光学系に用いられて瞳強度分布の強度レ ベルに関する自由度を向上させることのでき る空間光変調ユニット。【解決手段】 光源からの光により被照射面を照明...  
JP2016127226A
【課題】露光の際に、レチクルのパターン領 域内部に所望の温度分布を生じさせる。【解 決手段】 露光装置100は、パターンが形成されたパ ターン領域を有するレチクル...  
JP5944400B2  
JP2016518619A
A micro lithography device (10) contains an object system (20) containing a penetration filter (42) constituted so that light irradiation distribution in projection Optical path might be corrected variably. A penetration filter (42) cont...  
JP5938335B2  
JP5938707B2  
JP2016109731A
[Subject] In a microscope, irradiation light to a sample is adjusted swiftness and appropriately. [Means for Solution] It has a reflective means including a reflective surface which has a part of shape of an elliptical pipe side, and a d...  
JPWO2014010274A1
基板処理装置(EX)は、照明領域(IR) から発生する反射光束(L2)を基板に向け て投射させて、マスクパターンの像を基板に 結像する投影光学系(PL)と、照明領...  
JP5934082B2  
JP5935852B2  
JP5935920B2  
JP2016105190A
[Subject] A ring light lighting machine which is demarcated clearly and forms a uniform lighting field in lighting area is provided. [Means for Solution] It is a ring light lighting machine which has the light source arranged annularly. ...  
JP2016517026A
An illumination-light study unit (4) for projection lithography functions as illuminating an object recognition field (5) which can arrange an object (7) imaged by illumination light (16). An illumination-light study unit (4) has a view ...  
JP2016103025A
[Subject] An exposure method and a device for enabling transfer of a pattern of various pitches to high resolution simultaneous respectively are provided. [Means for Solution] It is an exposure device which has illumination-light study s...  
JP5928653B2  
JP5928632B2  
JP5927555B2  
JP2016099390A
[Subject] An illumination-light study system and an image display device which can raise a contrast ratio of picture light by reducing diffraction light are provided. [Means for Solution] An optical equalization element (14) which equali...  
JP2016100461A
[Subject] Large-sized-izing of an illumination optical device accompanying an increase in the number of optical components and complication of imaging optics and big-ticket-ization are avoided, and an illumination optical device in which...  
JPWO2013191255A1
照明装置は、長方形の第1面、内面、及び長 方形の第2面を有し、前記第1面に入射した 光が前記内面での多重反射を介して前記第2 面から出射する、光インテグレータと、...  
JP2016095523A
[Subject] A reflective refraction projection object instrument which has an inclination deviation mirror which makes it possible to image a pattern containing a subpattern which is suitable in the various directions is provided. [Means f...  
JP2016086060A
[Subject] Without consuming a memory of a computer excessively, also when a part of shape of a mask pattern is changed, an image formation pattern simulation system and an image formation pattern simulation method which can carry out a s...  
JP2016085472A
[Subject] An illumination-light study system which has high flexibility about change of shape of pupil intensity distribution, and a polarization state without being accompanied by exchange of an optical member. [Means for Solution] An i...  
JP5918858B2  
JP2016513817A
[Subject] As there are novelty and unobviousness to a prior art, the temperature of a reflector (for example, mirror) is controlled. [Means for Solution] An array of thermoelectrical heat pump which has respectively the 1st end that is i...  
JP2016075936A
[Subject] A method of manufacturing a device and such a device for equalizing illuminated viewing Nouchi's laser radiation is provided. [Means for Solution] A device for equalizing illuminated viewing Nouchi's laser radiation, Laser radi...  
JP5914254B2  
JP2016071353A
[Subject] The object of the present invention is to provide an optical apparatus which can realize smaller light equipment, light equipment using this, and a projection type display, controlling decline in utilization efficiency of light...  
JP2016072543A
[Subject] Although generating of a failure by a pattern is suppressed, provide a light irradiation device for peripheral exposure devices which can irradiate with light which has the irradiation intensity distribution which rises steeply...  
JP2016065923A
[Subject] Even when a point of a light source emitting light is large, control a fall of condensing nature in a condensing point. [Means for Solution] It extends to near the euphotic point at least from LED package 24A containing a plura...  
JP5911898B2  
JP5910324B2  
JP5909369B2  
JP2016063185A
[Subject] Enlargement is avoided and an illumination optical device advantageous to illuminating a field to be illuminated high illumination and uniformly is provided. [Means for Solution] Illumination optical device 101 is the 1st angle...  
JP2016061851A
[Subject] A lighting installation and a projector which can be made to generate fluorescence efficiently are provided. [Means for Solution] A condensing optical system which is established between a light source which emits excitation li...  
JP2016057644A
[Subject] Even if it increases the number of elements used as a light source, an illumination-light study system is aimed compact at offer of the illumination-light study system and image display device which can be constituted. [Means f...  
JP2016058591A
[Subject] An illumination optical device which makes shape of an image of a secondary light source easily desired ring belt shape and circle shape is provided suppressing a loss of light volume. [Means for Solution] Illumination optical ...  

Matches 451 - 500 out of 3,179