Login| Sign Up| Help| Contact|

Patent Searching and Data


Matches 451 - 500 out of 2,925

Document Document Title
JP2014202805A
To provide a light irradiation device which offers increased irradiation light intensity.A light irradiation device comprises a liquid actuator 100, a compact light source 200, and a lens 300. Light from the small light source 200 enters...  
JP2014203905A
To make it possible to obtain a distribution close to a target light intensity distribution in an irradiated surface even when the shape or properties of the reflecting face of the reflecting element of a spatial light modulator is chang...  
JP5611443B2  
JP5606634B2  
JP5604813B2  
JP2014195048A
To provide an illumination optical system advantageous for efficiently illuminating a surface to be illuminated using light from a plurality of light sources.This illumination optical system for illuminating the surface to be illuminated...  
JP2014195094A
To provide an illumination optical device which can form an annular pupil distribution in circumferential polarization state, while suppressing light quantity loss well.The illumination optical device includes a light flux conversion ele...  
JP2014191158A
To provide a projector capable of improving use efficiency of illumination light.A projector includes: a light source 2; a diffraction optical element 5 to which light L1 emitted from the light source 2 is made incident; a light modulati...  
JP2014186086A
To provide a projector capable of correcting focus deviation and achieving high luminance with a simple configuration.A projector 1 including a display device 2 modulating illumination light and a projection lens 35 projecting the light ...  
JP5598733B2  
JP5598239B2  
JP2014182207A
To provide a luminaire capable of reducing speckle noise.A luminaire includes: a light source 41; a light condensing optical system 43A on which light emitted from the light source 41 is incident; a first light diffusion layer 49a on whi...  
JP2014525148A  
JP2014178525A
To provide a laser light source device which is capable of effectively cutting off the stray light component of laser light, while miniaturizing an optical system.A first collimator lens 20 turns the laser light emitted from an LD chip 1...  
JP2014178599A
To provide a luminaire capable of emitting illumination light having more homogeneous illumination distribution.A luminaire includes: a light source 2; a diffraction optical element 5 on which light emitted from the light source 2 is inc...  
JP2014179645A
To provide an illumination optics for microlithography.The illumination optics can divide an illumination light radiation bundle 3 into a plurality of radiation sub-bundles (28 to 30) which are assigned to different illumination angles o...  
JP2014179619A
To provide an optical system for a microlithographic projection exposure device.An optical system for a microlithographic projection exposure device includes an optical system axis (OA) and polarization influent optical arrays. The polar...  
JP2014170127A
To provide a compact projection optical system which requires less projection space and projection distance and is capable of supporting a plurality of image sizes.A projection optical system comprises a dioptric system, a first mirror, ...  
JP2014167616A
To provide an apparatus and a method for proximity exposure and an illumination optical system which adjust positions of parts constituting the illumination optical system so as to condense light for exposure on a fly eye lens and achiev...  
JP2014160700A
To cool an optical element.Multiple elements 41 are located close to a base plate 42serving as a cooling/heating source by a mirror drive system (drive devices 42) thereby enabling rear surfaces of the elements 41 to make contact with a ...  
JP5582287B2  
JP5579755B2  
JP2014154698A
To cool an optical element.When the backside of a plurality of elements 41 is brought close to the front side of a cold heat source, i.e., a base plate 42, by means of a mirror drive system (actuator 42), the backside of a plurality of e...  
JP2014520281A  
JP2014520399A  
JP5574549B2  
JP2014146542A
To provide an illumination device, and so on capable of reducing luminance unevenness of illumination light.The illumination device includes a light source part including a laser light source, and an equalizing optical member including a...  
JP2014146636A
To suppress variation in light intensity distribution when illuminating an irradiated surface by using a plurality of optical elements that can control a state of incoming light.An illumination method for illuminating a reticle surface R...  
JP2014146660A
To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.An illumination optical device includes an optical integrator hav...  
JP2014146718A
To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.An illumination optical device illuminating the irradiated surfac...  
JP5571170B2  
JP5570225B2  
JP5571546B2  
JP5569556B2  
JP2014142369A
To provide an illumination optical system for achieving miniaturization and weight reduction.An illumination optical system 10C includes: an array light source 20 for emitting blue band light; a phosphor wheel 200 formed with a dichroic ...  
JP2014519196A  
JP5567973B2  
JP5566501B2  
JP5561508B2  
JP5554245B2  
JP5552140B2  
JP5548127B2  
JP5552699B2  
JP2014131031A
To provide the optical system of a microlithography projection exposure apparatus in which polarization illumination can be set flexibly.The optical system of a microlithography projection exposure apparatus comprises: a mirror arrangeme...  
JP5541604B2  
JP2014127485A
To provide a transmission optical system capable of leading a light beam, having a substantially uniform intensity distribution even if the output distribution of a light source changes, stably to a spatial light modulator.An optical int...  
JP2014516209A  
JP2014126836A
To provide an illumination device capable of minimizing loss of diffracted light and accurately identifying presence of change in characteristics of a diffraction optical element using a simple configuration.An illumination device 10 inc...  
JP2014123749A
To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective device onto an image field arranged on an image plane of the projection objective device.A catadioptr...  
JP2014123600A
To provide a transmission optical system capable of stably guiding a light flux having substantially uniform intensity distribution to a spatial light modulator even when output distribution of a power source is changed.A transmission op...  

Matches 451 - 500 out of 2,925