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Matches 451 - 500 out of 2,938

Document Document Title
JP2014534643A
EUV放射線(14)のためのミラー(20 )は、第1のEUV放射線反射領域と少なく とも1つの第2のEUV放射線反射領域とを 有する全体反射面(24)を含み、EU...  
JP2014239088A
To reduce the effect of a speckle pattern on the surface to be irradiated when light having high coherence is used.Disclosed is an illuminating optical system ILS which irradiates a reticle surface Ra with illumination light IL from a li...  
JP5642385B2  
JP2014236211A
To provide an illuminating device which allows for efficient adjustment of illumination of the illumination light, and to provide an exposure device, an illuminating method and a method of manufacturing a device.An illuminating device in...  
JP2014533441A
マイクロリソグラフィ投影露光装置の照明系 は光変調器(38)を含み、その光変調器(38 は、変調器基板(70)と、変調器基板(70) 支持されたミラー(42a,42b,42c)のア...  
JP2014225641A
To provide an illumination optical system capable of suppressing deterioration in light utilization efficiency when a substrate is exposed using light through a prism changing a cross-sectional shape of a light flux.A prism optical syste...  
JP5630455B2  
JP2014219681A
To provide a high performance projection type picture display device that uses a plurality of light sources, and does not cause a light source device to be enlarged upon using the light source device irradiating an illumination optical s...  
JP2014530509A
マイクロリソグラフィのための投影露光装置 (1)のためのコレクター(15)は、第1 のフォーカス(26)から第2のフォーカス (27)への放射線(14)の集束中に...  
JP5623937B2  
JP2014206571A
To provide an image display light generation part assembly for an image display device, which realizes the image display device that obtains high contrast high image quality at low cost.A 1/4 wavelength plate 239 mutually exchanges a lin...  
JP2014529194A
マイクロリソグラフィ投影露光装置の投影対 物レンズは、波面補正デバイス(42)を備 え、波面補正デバイス(42)は、投影光が 通過する2つの反対光学面(46、48...  
JP2014202679A
To provide a luminaire capable of reducing speckle noise further than the conventional art, and to provide an inspection apparatus that allows for short-time and efficient detection of fine defects required in association with the microf...  
JP2014202805A
To provide a light irradiation device which offers increased irradiation light intensity.A light irradiation device comprises a liquid actuator 100, a compact light source 200, and a lens 300. Light from the small light source 200 enters...  
JP2014203905A
To make it possible to obtain a distribution close to a target light intensity distribution in an irradiated surface even when the shape or properties of the reflecting face of the reflecting element of a spatial light modulator is chang...  
JP5611443B2  
JP5606634B2  
JP5604813B2  
JP2014195048A
To provide an illumination optical system advantageous for efficiently illuminating a surface to be illuminated using light from a plurality of light sources.This illumination optical system for illuminating the surface to be illuminated...  
JP2014195094A
To provide an illumination optical device which can form an annular pupil distribution in circumferential polarization state, while suppressing light quantity loss well.The illumination optical device includes a light flux conversion ele...  
JP2014191158A
To provide a projector capable of improving use efficiency of illumination light.A projector includes: a light source 2; a diffraction optical element 5 to which light L1 emitted from the light source 2 is made incident; a light modulati...  
JP2014186086A
To provide a projector capable of correcting focus deviation and achieving high luminance with a simple configuration.A projector 1 including a display device 2 modulating illumination light and a projection lens 35 projecting the light ...  
JP5598733B2  
JP5598239B2  
JP2014182207A
To provide a luminaire capable of reducing speckle noise.A luminaire includes: a light source 41; a light condensing optical system 43A on which light emitted from the light source 41 is incident; a first light diffusion layer 49a on whi...  
JP2014525148A  
JP2014178525A
To provide a laser light source device which is capable of effectively cutting off the stray light component of laser light, while miniaturizing an optical system.A first collimator lens 20 turns the laser light emitted from an LD chip 1...  
JP2014178599A
To provide a luminaire capable of emitting illumination light having more homogeneous illumination distribution.A luminaire includes: a light source 2; a diffraction optical element 5 on which light emitted from the light source 2 is inc...  
JP2014179645A
To provide an illumination optics for microlithography.The illumination optics can divide an illumination light radiation bundle 3 into a plurality of radiation sub-bundles (28 to 30) which are assigned to different illumination angles o...  
JP2014179619A
To provide an optical system for a microlithographic projection exposure device.An optical system for a microlithographic projection exposure device includes an optical system axis (OA) and polarization influent optical arrays. The polar...  
JP2014170127A
To provide a compact projection optical system which requires less projection space and projection distance and is capable of supporting a plurality of image sizes.A projection optical system comprises a dioptric system, a first mirror, ...  
JP2014167616A
To provide an apparatus and a method for proximity exposure and an illumination optical system which adjust positions of parts constituting the illumination optical system so as to condense light for exposure on a fly eye lens and achiev...  
JP2014160700A
To cool an optical element.Multiple elements 41 are located close to a base plate 42serving as a cooling/heating source by a mirror drive system (drive devices 42) thereby enabling rear surfaces of the elements 41 to make contact with a ...  
JP5582287B2  
JP5579755B2  
JP2014154698A
To cool an optical element.When the backside of a plurality of elements 41 is brought close to the front side of a cold heat source, i.e., a base plate 42, by means of a mirror drive system (actuator 42), the backside of a plurality of e...  
JP2014520281A  
JP2014520399A  
JP5574549B2  
JP2014146542A
To provide an illumination device, and so on capable of reducing luminance unevenness of illumination light.The illumination device includes a light source part including a laser light source, and an equalizing optical member including a...  
JP2014146636A
To suppress variation in light intensity distribution when illuminating an irradiated surface by using a plurality of optical elements that can control a state of incoming light.An illumination method for illuminating a reticle surface R...  
JP2014146660A
To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.An illumination optical device includes an optical integrator hav...  
JP2014146718A
To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.An illumination optical device illuminating the irradiated surfac...  
JP5571170B2  
JP5570225B2  
JP5571546B2  
JP5569556B2  
JP2014142369A
To provide an illumination optical system for achieving miniaturization and weight reduction.An illumination optical system 10C includes: an array light source 20 for emitting blue band light; a phosphor wheel 200 formed with a dichroic ...  
JP2014519196A  
JP5567973B2  

Matches 451 - 500 out of 2,938