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Matches 601 - 650 out of 1,747

Document Document Title
JP2009054325
To provide an illumination light source employing a coherent light source, which suppresses the influence of speckle in a simplified arrangement.The illumination light source comprises: a surface emitting laser 2 in which a plurality of ...  
JP2009044147
To provide a lighting optical device which can illuminate a mask as an irradiated surface when it is applied to exposure equipment, e.g. an EUVL, without arranging a plane mirror in the optical path between a lighting optical system and ...  
JP2009044146
To obtain a lighting optical device which can avoid adverse effect of field stop on the image formation and aggravation of light exposure distribution when the lighting optical device is applied to exposure equipment employing a reflecti...  
JP2009027162
To provide a microlithographic projection exposure device capable of minimizing undesirable changes in the intensity distribution produced on a wafer surface, based on the polarization distribution set in an illumination system.This micr...  
JP2009019882
To provide an adaptor for lighting where the size of a diffusion plate is made appropriate.The adaptor for lighting is inserted between a light source and an object to be illuminated for use, has the diffusion plate 1 and an aperture dia...  
JP2009015218
To speed up a specimen observation using a scanning confocal microscope.The scanning confocal microscope 100 includes: a galvano mirror 4 by which an illuminating light ray for illuminating a specimen 1 is caused to scan on the specimen ...  
JP2009008728
To provide an illumination optical system which illuminates an image display element brightly with uniform brightness even with small angle distribution of an optical element in a section where the angle distribution is sensitive, and to...  
JP2009003104
To provide an illuminating lens varying the degree of light diffusion around an optical axis, and to provide an illumination device that has the illuminating lens.The illuminating lens 100 having a first face 101 formed into a plane and ...  
JP2008299326
To provide an element for homogenized lighting which can attain structured lighting of a pupil of an objective lens by a simple method.The element 1 for homogenization of lighting by simultaneous conditioning of polarization degree is co...  
JP2008292862
To reduce size and weight in a projection optical device having a reflection type liquid crystal element and projector device using the same.The projection optical device is equipped with: a light source 100; a plurality of reflection ty...  
JP2008277815
To enable, in a flexible mode, substantial or complete elimination of an unwanted preferential polarization orientation even upon a variation in the illumination setting.The polarization-influencing arrangement 10 includes: a first wedge...  
JP2008268243
To provide an illumination optical system capable of yielding uniform intensity distribution, and also reducing the loss of light quantity so as to yield illumination improved in the efficiency of using light, and a projection type displ...  
JP2008270571
To provide an illuminating optical device having a high degree of freedom with respect to a device layout.In the illuminating optical device for leading beams emitted from a light source to an illumination target, the illuminating optica...  
JP2008268601
To provide an illumination optical system with a light source which emits luminous flux having a flat cross section, and obtaining illuminating luminous flux having isotropic NA distribution in spite of compact configuration.The illumina...  
JP2008256979
To provide an illumination optical system for providing illuminating luminous flux having isotropic NA distribution with compact constitution equipped with a laser array light source.The illumination optical system IL1 for illuminating t...  
JP2008257013
To provide an optical unit configured to efficiently use light emitted from a light source.The optical unit is constituted by arranging two reflection surfaces facing each other across a virtual surface. The reflection surface on one sid...  
JP2008258637
To provide systems and methods for improved lithographic printing with a polarized light.Polarized light (polarized in radial or tangential direction) is used to illuminate a phase-shift mask (PSM) and produce an exposure beam. A negativ...  
JP2008250303
To provide an optical device for generating sheet light so that the tomographic layer of each of specimens can be efficiently observed.The optical device has a sheet light for emitting a luminous flux, and a plurality of optical devices ...  
JP2008241768
To provide a projection type display device capable of achieving simplification, miniaturization and reduction of cost of structure and making illuminance irregularity of a video image projected to a screen small.The projection type disp...  
JP2008235885
To provide a novel apparatus and method capable of adjusting the polarized light of a radiation beam.In an illuminating device of a lithography apparatus, an illuminating mode regulation element 2 converts a radiation beam PB into a dipo...  
JP2008227497
To provide an optical integrator system capable of forming a desired illuminance distribution on a surface to be illuminated without being substantially influenced by errors of surface shapes of optical surfaces of wavefront division ele...  
JP2008224889
To reduce speckle on the emission face of an optical fiber by connecting light from a laser light source to the optical fiber without waste, and reducing coherence of the laser light source.The apparatus includes: the laser light source ...  
JP2008227496
To provide an optical integrator system capable of forming a desired illuminance distribution on a surface to be illuminated by ensuring a predetermined large numerical aperture of an emission side without requiring excessively high accu...  
JP2008197652
To provide a collimator for a backlight unit, and to provide a liquid crystal display (LCD) using the collimator.The collimator includes a plate including a plurality of light passing areas, passing light incident from the backlight unit...  
JP2008191653
To provide a dual lamp coupling system in which separate integrator rods for each lamp are replaced with a single rod, to benefit from advantages such as simple mounting, simple alignment, less coupling loss, lower cost since there is no...  
JP2008182266
To reduce a light quantity loss when a mask is illuminated with an illumination light in a predetermined polarization state.A illumination optical system, which illuminates a reticle (R) with the illumination light from a light source (1...  
JP2008170714
To lessen color unevenness in an image projected on a screen.A lighting optical system 3 for guiding light emitted from a light source device 1 to liquid crystal panels 2r, 2g, 2b has an integrator optical system 20 which uniformizes int...  
JP2008171974
To provide a means capable of controlling light volume in stepless manner, allowing light volume control at a desired resolution, while preventing complication of hardware.A diaphragm 25 having a fixed aperture is arranged on a pupil sur...  
JP2008152286
To provide an illumination optical system obtaining an illumination light flux high in uniformity of illuminance by highly efficiently using light from a light source.In the illumination optical system, when a cross-section which is para...  
JP2008146085
To provide a small projection type display unit capable of preventing the overlapping of the optical path of an incident light on that of an outgoing light in a reflection type light valve and providing high-picture-quality projection im...  
JP2008139820
To provide a microscope illumination apparatus configured so that the loss of the amount of light is kept to a minimum and the light can be efficiently supplied to the microscope body, even in the case of light to be emitted, in particul...  
JP2008135743
To provide an illumination optical system which can switch some illumination settings with a few technical efforts.In a projection aligner for EUV projection microlithography, the illumination optical system includes a field facet mirror...  
JP2008122710
To provide a lighting device which is efficient in using light and has a large rate for changing the illuminated area in the longitudinal direction of the light source.The lighting device has a light source 31, a first optical component ...  
JP2008102389
To provide a light irradiation device for the irradiation of light condensed to be a linear shape with which a high peak illuminance is obtained, and further, the uniformity of the illuminance in the longitudinal direction of the light c...  
JP2008070769
To provide a light source unit capable of restraining the spread of a light beam emitted from a tapered rod to be much smaller, and an illumination device and a projector device.The light source device is equipped with an LED 2 which irr...  
JP2008060546
To provide an illuminating optical system for a microlithography projection aligner.The illuminating optical system for microlithography projection aligner 1 is used for illuminating an object surface 19 with illuminating light 3, 3' fro...  
JP2008041310
To provide a light source device capable of inexpensively preventing tarnish of an optical element; and an inspection device.This light source device is provided with: a light source 11 emitting light with heat radiation; the optical ele...  
JP2008040145
To improve autofocus accuracy in the longitudinal direction of a photographing area even in photography in the dark.The lens for an autofocus auxiliary light source having a domed outer surface and a circular bottom part is the lens 5 of...  
JP2008034124
To provide an LED lighting fixture which converts light from an LED light source nearly similar to a point light source into a plane light source through an optical system, and produces an illumination effect rich in surprise at the time...  
JP2008033339
To provide an image display device capable of improving a contrast by reducing stray light due to a specular reflection component.A projection lens is provided with: an incident side lens group for forming a Fourier transform plane 12A f...  
JP2008020707
To provide a projector where luminous light from various luminous sources can be effectively utilized, and bright images can be projected.Luminous light from a luminous source lamp unit 20 is separated into first polarized light and seco...  
JP3969038
To efficiently illuminate the specified illumination area of a liquid crystal light valve or the like even when a 1st lens array of an illumination optical system includes small lenses formed at different positions along an optical axis ...  
JP3966174
To realize the omission and the simplification of an optical element constituting an illumination optical system. A polarized light generating part has a nearly rectangular light incident surface 132 whose size in a direction (y) is smal...  
JP3967874
To prevent practical problems such as an increase in the weight and volume of a projection type display device due to the increase in the size of the prism used in the device and such as an increase in the cost due to the use of a large ...  
JP2007141865
To provide an optical apparatus for uniformly illuminating a light valve, inexpensive and excellent in energy efficiency.A light source 4 and a light transmitting tunnel 2 are provided in this apparatus for uniformly illuminating the lig...  
JP2007142084
To manufacture a hole array of high density regarding an exposure method for forming a hole array executed in a lithography process, and a device manufacturing method using the method.A mask R wherein a prescribed pattern is formed is il...  
JP3960185
To provide an illumination optical device which improves a contrast and is made small-sized, and also to provide a projector which has the illumination optical device. The parallelizing concave lens 14 of the illumination optical device ...  
JP2007129161
To provide a method for manufacturing a high-performance optical integrator whereby the reducing effect of the illuminating nonuniformity generated can be improved surely when using it together with a condenser.In the method (10), at lea...  
JP3958122
To provide a small-size lighting apparatus ensuring higher light application efficiency by adequately adjusting the length of a reflection type optical integrator and also provide an aligner using the same lighting apparatus and a device...  
JP3958163
To provide an exposure method, capable of preventing degradation in focusing performance caused by the effect of polarization, to form a wanted pattern. A pattern formed at a mask is irradiated with a lighting system that forms an effect...  

Matches 601 - 650 out of 1,747