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Matches 601 - 650 out of 2,933

Document Document Title
JP5371531B2  
JP5369319B2  
JP5373373B2  
JP2013251222A
To provide a lighting device capable of improving light use efficiency by a simple structure while attempting the high luminance of illumination light.A lighting device includes one or a plurality of light sources 10A, 10B, and 10C havin...  
JP2013243357A
To provide the optical system of microlithography projection exposure apparatus which allows flexible setting of a different polarization distribution including a tangential/radial mixed polarization distribution.A polarization-influenci...  
JP2013243386A
To obtain an illumination optical system which can form a pupil intensity distribution of desired shape and illuminance, and can achieve illumination conditions rich in diversity.The illumination optical system used in an exposure device...  
JP2013543150A  
JP2013239750A
To provide an illumination optical system capable of illuminating a surface to be illuminated with light of a required polarization state by suppressing influence of retardation caused by a subsequent optical system of a polarization con...  
JP5352694B2  
JP5352989B2  
JP2013235739A
To provide a lighting device capable of suppressing color irregularities, in one having white LED light sources arranged in which blue LED elements are eccentrically arranged.A lighting device 10 is provided with a plurality of white LED...  
JP2013541808A  
JP5338863B2  
JP5333528B2  
JP5333429B2  
JP5333322B2  
JP5337304B2  
JP2013540350A  
JP2013225673A
To provide a method and apparatus for determining apodization properties of a projection system in a lithographic apparatus.The method comprises allowing light from a given point in an illumination field to pass through the projection sy...  
JP5326259B2  
JP5327658B2  
JP2013218235A
To provide a projector that can make brightness of a projecting image uniform and improve light utilization efficiency.The projector comprises: a light modulation device 400R that includes a light source device, a lens integrator optical...  
JP2013219381A
To provide a device 1 for transferring a structure provided in a mask 2 onto a substrate 3.A device comprises: at least one illumination device 9 for uniformly irradiating a part of a mask 2; a mask holding device 7 for holding the mask ...  
JP5322331B2  
JP2013214030A
To provide a homogenizer for homogenizing light after primary concentration, which has a smaller moment of a homogenizer optical system and suppresses reduction in power generation efficiency due to displacement of an optical axis of the...  
JP5315322B2  
JP2013211558A
To provide an illumination optical device and a projection exposure device capable of reducing light quantity loss when illuminating a mask such as a reticle with illumination light in a prescribed polarization state.An illumination opti...  
JP5308275B2  
JP5308638B2  
JP2013198547A
To prevent the unevenness of color arising from differences in radiation angles of a plurality of semiconductor light sources.An endoscope light source device includes first-third light source modules 31-33. The light source modules 31-3...  
JP5302220B2  
JP2013195821A
To provide a light source device that can miniaturize a light guide optical system of blue light for blue image projection, and to provide a projector device including the light source device.A wheel 34 is provided with a prism 342 forme...  
JP2013195501A
To provide a laser emitting device and video display device capable of reducing speckle noise, having less vibration sound, and suitable for downsizing.A laser emitting device 1 includes a laser source 2 emitting a laser beam, a uniformi...  
JP2013195838A
To provide a light source device able to switch the optical path of blue light in time division without forming a phosphor plate in the shape of a wheel and to provide a projector device equipped with the same.A wheel 35 is disposed in t...  
JP2013190760A
To provide an illuminator for a microscope capable of easily switching critical illumination and Koehler illumination with improved uniformity of illumination than before in a simple composition.An illuminator for a microscope has: a fir...  
JP2013190674A
To provide a projector that can suppress occurrence of thermal damage and thermal degradation and is excellent in reliability.A projector comprises a first light source section 50A and a first optical element 60A. The first optical eleme...  
JP2013191858A
To provide an illumination optical device capable of reducing light quantity loss when lighting up a mask such as a reticle with illumination light in a predetermined polarized state, and a projection aligner.An illumination optical devi...  
JP5296382B2  
JP2013186338A
To provide a laser expand optical system capable of removing speckle, and simultaneously illuminating a wide area evenly without lowering a luminous intensity.A laser expand optical system 1 includes: an input lens 2 for condensing injec...  
JP5295468B1  
JP5293689B2  
JP2013182207A
To provide a projector that can suppress occurrence of illuminance unevenness and is excellent in display quality.A projector comprises: a solid light source 52 for emitting linearly polarized light; a birefringent element 60 for convert...  
JP5287113B2  
JP5287114B2  
JP2013535105A  
JP2013178290A
To provide a light source device capable of being mounted on a three-plate type projection type display device which uses a phosphor as a light source.A semiconductor laser 1 emits excitation light. A reflection type phosphor assembly 42...  
JP2013179305A
To provide an exposure device enabling the size reduction thereof and mask-less exposure with a stable operation and to provide an exposure device and exposure method enabling highly accurate exposure through mask-less exposure with resp...  
JP2013174844A
To provide an equal-magnification reflection-type imaging optical system that enables reflection light from a measured thin film surface of a predetermined wavefront aberration and a broad frequency band to be imaged on a light receiving...  
JP2013174905A
To provide an endoscope light source optical system capable of handling respective observation methods, preventing enlargement of a light source device and securing brightness.A light source optical system guiding light from a light sour...  
JP5283928B2  

Matches 601 - 650 out of 2,933