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Matches 601 - 650 out of 3,117

Document Document Title
JP5670602B2  
JP5673119B2  
JP2015505169A
本発明は、特にマイクロリソグラフィ投影露 光装置における偏光影響光学配置に関する。 本発明の開示の態様により、偏光影響光学配 置は、光学的ポジティブ単軸結晶材料か...  
JP2015031955A
To provide a method for optimizing effective light intensity.An effective light intensity distribution is optimized by the steps of: (a) providing a light source discharging a light beam 1 of a first intensity distribution 2a in a Z-axis...  
JP5668780B2  
JP2015029128A
To provide an illumination optical device capable of achieving the lighting conditions that are rich in diversity for the shape, size and polarization state of illumination pupil luminance distribution.The illumination optical device com...  
JP2015029092A
To provide a reflective optical element for grazing incidence at an extreme ultraviolet wavelength, which has a reflectance as high as possible.A reflective optical element 100 to be used for a collector mirror in an optical system for E...  
JP5668779B2  
JP2015026644A
To provide a proximity exposure device and a proximity exposure method capable of obtaining a good light exposure accuracy even in a case where deviation occurs between a position of a chip and a position of a pattern of a mask at light ...  
JP2015503231A
投影露光装置(1)のための照明及び変位デ バイスは、照明視野(18)を照明するため の照明光学ユニット(25)を含む。物体ホ ルダ(17a)は、物体(17)を物体...  
JP5660074B2  
JP5659497B2  
JP2015015281A
To provide a light emitting device capable of suppressing luminance reduction and obtaining high light extraction efficiency.In a light emitting device 10 including a lens 2 and a light emitter 1, the lens is a spherical segment body hav...  
JP5656731B2  
JP2015008304A
To provide an illumination optical device which can form an annular pupil distribution in circumferential polarization state, while suppressing light quantity loss well.The illumination optical device includes a light flux conversion ele...  
JP2015007774A
To provide a compact lighting device in which light utilization efficiency is improved, to provide a projection type display device provided with the lighting device, and to provide a direct-view display device provided with the lighting...  
JP2015005764A
To provide a spatial light modulation unit that is used in an illuminating optical system and is able to improve the degree of freedom in the intensity level of a pupil intensity distribution.A spatial light modulation unit used in an il...  
JP2015005676A
To provide an illuminating optical system by which a pupil intensity distribution at each point on a target illumination face can be adjusted to its required distribution.An illuminating optical system that illuminates a target illuminat...  
JP5650272B2  
JP2014241411A
To provide a mount that has improved accuracy and reproducibility and decreased sensitivity to irregularities from the nominal geometry of an optical element that the mount supports.A mount is configured to mount an optical element in a ...  
JP5646632B2  
JP5644921B2  
JP5646580B2  
JP2014239088A
To reduce the effect of a speckle pattern on the surface to be irradiated when light having high coherence is used.Disclosed is an illuminating optical system ILS which irradiates a reticle surface Ra with illumination light IL from a li...  
JP2014534643A
EUV放射線(14)のためのミラー(20 )は、第1のEUV放射線反射領域と少なく とも1つの第2のEUV放射線反射領域とを 有する全体反射面(24)を含み、EU...  
JP5642385B2  
JP2014236211A
To provide an illuminating device which allows for efficient adjustment of illumination of the illumination light, and to provide an exposure device, an illuminating method and a method of manufacturing a device.An illuminating device in...  
JP2014533441A
マイクロリソグラフィ投影露光装置の照明系 は光変調器(38)を含み、その光変調器(38 は、変調器基板(70)と、変調器基板(70) 支持されたミラー(42a,42b,42c)のア...  
JP2014225641A
To provide an illumination optical system capable of suppressing deterioration in light utilization efficiency when a substrate is exposed using light through a prism changing a cross-sectional shape of a light flux.A prism optical syste...  
JP5630455B2  
JP2014219681A
To provide a high performance projection type picture display device that uses a plurality of light sources, and does not cause a light source device to be enlarged upon using the light source device irradiating an illumination optical s...  
JP2014530509A
マイクロリソグラフィのための投影露光装置 (1)のためのコレクター(15)は、第1 のフォーカス(26)から第2のフォーカス (27)への放射線(14)の集束中に...  
JP5623937B2  
JP2014206571A
To provide an image display light generation part assembly for an image display device, which realizes the image display device that obtains high contrast high image quality at low cost.A 1/4 wavelength plate 239 mutually exchanges a lin...  
JP2014529194A
マイクロリソグラフィ投影露光装置の投影対 物レンズは、波面補正デバイス(42)を備 え、波面補正デバイス(42)は、投影光が 通過する2つの反対光学面(46、48...  
JP2014203905A
To make it possible to obtain a distribution close to a target light intensity distribution in an irradiated surface even when the shape or properties of the reflecting face of the reflecting element of a spatial light modulator is chang...  
JP2014202805A
To provide a light irradiation device which offers increased irradiation light intensity.A light irradiation device comprises a liquid actuator 100, a compact light source 200, and a lens 300. Light from the small light source 200 enters...  
JP2014202679A
To provide a luminaire capable of reducing speckle noise further than the conventional art, and to provide an inspection apparatus that allows for short-time and efficient detection of fine defects required in association with the microf...  
JP5611443B2  
JP5604813B2  
JP5606634B2  
JP2014195048A
To provide an illumination optical system advantageous for efficiently illuminating a surface to be illuminated using light from a plurality of light sources.This illumination optical system for illuminating the surface to be illuminated...  
JP2014195094A
To provide an illumination optical device which can form an annular pupil distribution in circumferential polarization state, while suppressing light quantity loss well.The illumination optical device includes a light flux conversion ele...  
JP2014195086A
To provide an illumination optical device and a projection exposure device capable of reducing light quantity loss when illuminating a mask with illumination light in a prescribed polarization state.An illumination optical device compris...  
JP2014191158A
To provide a projector capable of improving use efficiency of illumination light.A projector includes: a light source 2; a diffraction optical element 5 to which light L1 emitted from the light source 2 is made incident; a light modulati...  
JP2014186086A
To provide a projector capable of correcting focus deviation and achieving high luminance with a simple configuration.A projector 1 including a display device 2 modulating illumination light and a projection lens 35 projecting the light ...  
JP5598239B2  
JP5598733B2  
JP2014182207A
To provide a luminaire capable of reducing speckle noise.A luminaire includes: a light source 41; a light condensing optical system 43A on which light emitted from the light source 41 is incident; a first light diffusion layer 49a on whi...  
JP2014179619A
To provide an optical system for a microlithographic projection exposure device.An optical system for a microlithographic projection exposure device includes an optical system axis (OA) and polarization influent optical arrays. The polar...  

Matches 601 - 650 out of 3,117