Login| Sign Up| Help| Contact|

Patent Searching and Data


Matches 601 - 650 out of 2,812

Document Document Title
JP5157945B2  
JP5158439B2  
JP5156056B2  
JP2013046060A
To resolve problems such as increase in cost and complexity of a lithographic process, decrease in throughput, and increase in defects.A lithographic apparatus includes: an illumination system for providing a radiation beam; a patterning...  
JP2013041132A
To provide an optical element capable of obtaining light in which intensity distribution is equalized with high efficiency.An optical element 30 includes: a first rod integrator 31A that has a first end surface 3a and a second end surfac...  
JP2013041018A
To provide a dimmer capable of enhancing an extinction rate in a state that a light-shielding member is closed even when lenses constituting a lens array are arranged at odd-numbered rows in a direction in which the light-shielding membe...  
JP2013041017A
To provide a dimmer capable of maintaining a separation distance between end portions of a light-shielding member and of enhancing an extinction rate, and further to provide a projector.A dimmer blocks a light beam made incident thereto ...  
JP2013041760A
To provide a lighting device with a further improved light use efficiency than a prior art.The lighting device 100 includes a light source device 110 emitting light, a first lens array 120 with a plurality of first micro lenses 122, a se...  
JP2013037300A
To provide an exposure device capable of continuously producing a high-image-quality, inexpensive liquid crystal panel at a high yield, in a process for manufacturing a TFT substrate using a gray tone mask and to provide an exposure meth...  
JP5150335B2  
JP5142892B2  
JP5138364B2  
JP2013025130A
To provide a video display device which can get along with multiple kinds of reflective display devices having different angles at which minute mirrors are driven, without having adversely affecting display video.A circuit board 33 can b...  
JP2013025249A
To provide a luminaire that reduces a partial temperature rise of an excitation light emitting position regardless of an installed position and reduces degradation in the light conversion rate of a rotary fluorescent plate and performanc...  
JP2013025080A
To provide an irradiation device capable of simply increasing illuminance.In the irradiation device which includes a light source device 4 for emitting light, a glass rod 18 constituting an integrator optical system for uniformizing ligh...  
JP2013025215A
To provide a projector capable of preventing luminance reduction of a display image.A projector includes: a solid light source 411 that emits light with a given wavelength; a wavelength change device 46 that has a fluorescent layer 4611 ...  
JP2013025247A
To provide a projector using local dimming technique in which luminance unevenness between divided regions recognizable by an observer is low, and higher image quality display is possible.A projector 1 includes: a light source unit 2 inc...  
JP2013503461A  
JP5134732B2  
JP2013502703A  
JP2013015762A
To provide an illumination optical system and an image display apparatus which allow compact configuration of the illumination optical system even when the number of devices as light sources is increased.An illumination optical system in...  
JP5112455B2  
JP2012533871A  
JP5110979B2  
JP5110076B2  
JP5106360B2  
JP2012533180A  
JP2012253143A
To provide an aligner device that can firstly reduce variation of edge formation positions of patterns formed on an exposure object substrate by suppressing swing of waveform patterns of diffraction images generated in a vicinity of an e...  
JP5102492B2  
JP5102539B2  
JP5099793B2  
JP2012247778A
To provide an image projection apparatus that can satisfy miniaturization design requirements by reducing the number of components arranged in a length direction.The image projection apparatus relating to one embodiment of the present in...  
JP2012531730A  
JP2012531759A  
JP2012238007A
To provide a rear projection type video display unit capable of greatly shortening a projection distance of a projection optical system, reducing an interval between a screen lower edge and a display unit lower edge, and achieving compac...  
JP2012531055A  
JP2012238900A
To provide a lithography system.A maskless lithography system for transferring a pattern onto a surface of a target, comprises: at least one beam generator for generating a plurality of small beams; modulation means comprising a pluralit...  
JP5087386B2  
JP2012530263A  
JP2012234203A
To provide a projection type video display apparatus excelling in user-friendliness, of which installation position is easily changed (which is improved in the degree of freedom in terms of installation position) without causing distorti...  
JP5081704B2  
JP2012230352A
To restrain loss in a quantity of light by making the curvature radii of two lens cells of an eccentric fly-eye lens different from each other.An illumination optical system comprises: a first lens array having a plurality of lens cells ...  
JP5077724B2  
JP5077565B2  
JP2012528356A  
JP2012220589A
To provide a laser illumination device capable of reducing illumination unevenness caused by an interference fringe of transmitted light of a fly-eye lens.In a laser illumination device, fly-eye lenses 2(4) and a condenser lens 32 are di...  
JP2012222349A
To provide a multilayer mirror configured to reflect the radiation containing the wavelength in a range of about 6.4-7.2nm.The multilayer mirror includes a mutual layer containing a first layer and a second layer. The first layer and the...  
JP2012220815A
To provide a reflecting optical element capable of changing a direction of an optical path by a single body while having a function of solving illumination irregularity.A reflecting mirror 8 is constituted by aligning a plurality of smal...  
JP2012216854A
To provide an exposure device capable of supplying only EUV light to a mask, while eliminating another light other than the EUV light.A multilayer film of Mo/Si is formed on a front surface of a mirror 510, and blazed grooves 513 are for...  
JP5066611B2  

Matches 601 - 650 out of 2,812