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JP2005031667 |
To guide emitted light from a light source highly efficiently to the surface of an illumination object.A light guide 301 for guiding light from a light source 209 onto a surface 505 is formed as a single component, by combining the light...
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JP3640391 |
To provide a lighting optical system of a spatial optical modulator comprising an array of micromirrors whose resolution and contrast are high. A plane light source installed obliquely to an optical axis and a telecentric optical system ...
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JP3640173 |
To make it possible to display a brighter image due to high color reproducibility through the efficient use of an illumination light emitted from light sources such as a lamp by applying an image display device to a projector comprising ...
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JP2005025177 |
To provide a projector and a display device by which a high picture quality is obtained by improving the display performance of a moving picture without deteriorating the utilization efficiency of light.A luminous flux emitted by a light...
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JP2005025064 |
To provide a lighting device capable of efficiently supplying polarized light polarized in a specified vibration direction, and also, light in a specified wavelength region, suitable for a single plate type projector using a liquid cryst...
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JP2005018030 |
To provide an illumination optical system which realizes illumination of high illumination efficiency when illuminating DMDs having different sizes as well as when illuminating only a partial area of a DMD.The illumination optical system...
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JP2005004223 |
To provide a projection system and a color image forming method.The projection system is equipped with a light source 10, a color separating device separating light emitted from the light source according to a plurality of wavelength reg...
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JP3631010 |
To enable glass material to deteriorate less in quality and to be improved in optical performance, by a method wherein a pulse light source and the component elements of a projection optical system are properly set using formulas I and I...
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JP2004363448 |
To provide an exposure apparatus which has excellent image-forming performance by preventing illumination light flux from being rejected.The aligner comprises an illumination optical system for illuminating a reticle with the light flux ...
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JP2004362971 |
To provide a light source device and a projector equipped with the same that prevents deterioration of illuminance in a illuminated area and of uniformity of illuminance to provide a high display image quality.The light source device 110...
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JP2004347668 |
To reduce fluctuation of an axis of polarization on a face to be irradiated in a polarized light irradiation device to make light irradiate an optical alignment layer.The polarized light irradiation device for optical alignment is constr...
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JP2004341072 |
To make the luminous flux diameter of a secondary light source surface small without degrading the illuminance uniformity at a surface to be irradiated of an illumination optical system using a lens array as an optical integrator.At leas...
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JP2004335953 |
To provide an aligner in which the throughput can be ensured by providing a solid light source unit arranged with an array of a plurality of solid light sources thereby setting the image plane illuminance at a level required for a practi...
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JP2004335937 |
To enable a solid light source to be used in an aligner using a light source, such as a mercury lamp being the existing property of a user.In a method for manufacturing the aligner, a mask is irradiated with light, by using a lighting op...
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JP3618944 |
To obtain a trapezoidal illumination distribution in both first and second directions intersecting perpendicularly efficiently by composing an element lens of a plurality of types of lenses having different irradiation area on a plane to...
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JP3619141 |
To obtain a projection aligner, capable of accurately projecting the pattern of a reticle, and to provide a method for manufacturing a device using the same. The projection aligner projects the pattern of the reticle illuminated by a las...
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JP2004325826 |
To make it possible to fix optical members onto a flat fixing surface of a mount while maintaining high positional accuracy.In the method of fixing the optical members 14, such as collimator lens arrays, onto the flat fixing surface 11f ...
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JP2004326129 |
To provide an illuminator and a projection type display device displaying a uniform bright projected picture by efficiently utilizing emitted light from a light source.A polarized light separation means is arranged so that two kinds of p...
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JP2004325533 |
To provide an inexpensive rod integrator which can uniformize the luminance distribution of a light-emitting surface even when the rod integrator is not elongated and which can satisfy the utilization efficiency of light and moreover min...
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JP2004318167 |
To suggest a polarized light radiating system suitable as an illuminating system of a projection display device, etc. of which the temperature change is large.The polarized light radiating system (400) has a light source (401); an integr...
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JP2004317678 |
To manufacture a cylinder lens or a cylinder lens array with high profile irregularity.An exposure stage where a gray scale mask (20) modulated in terms of transmittance in accordance with the unit cylindrical surface shape of the cylind...
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JP2004309667 |
To make an illuminator compact by efficiently composing light from two light sources and increasing light quantity without making light emitting area larger.The illuminator 1 making the polarization direction of the light emitted from tw...
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JP2004310035 |
To provide a color illuminator capable of realizing an illumination with color light having high optical efficiency and making an optical system small in size, and to provide an image projection device adopting the color illuminator.The ...
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JP2004301519 |
To provide an optical system capable of illuminating a plurality of solid-state image sensors and having an exit pupil which is variable in location and diameter and to provide a solid-state image sensor lighting apparatus using the same...
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JP2004286946 |
To provide a compact and especially thin projector in spite of constitution where illuminating light is modulated by a reflection type panel.The illuminating light from a light source (10) whose intensity distribution is made uniform by ...
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JP2004288803 |
To provide a rod integrator type illumination optical system having the high reduction effect of an illumination unevenness and using EUV rays.A light source (11) emitting EUV rays, a hollow reflection type integrator (15), and an imagin...
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JP3605055 |
To provide an illumination system that can change illumination conditions by light of wavelength of 200 nm or lower from a light source, a aligner, and a device-manufacturing method using the projection aligner. In the illumination syste...
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JP3605047 |
To provide an illumination device, having high light utilization efficiency by upgrading uniformity of illuminance with respect to the longitudinal direction of an illuminated area formed by the device, and to provide an aligner using th...
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JP2004279820 |
To provide a simple design method for deciding the optical parameter of an illumination optical system equipped with an integrator optical system in a short period of time.In the design method for the illumination optical system for deci...
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JP2004279822 |
To provide a simple design method for an illumination optical system for deciding an optical parameter in a single plate projector in a short time.The design method for the illumination optical system used for the single plate projector ...
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JP2004279821 |
To provide a simple design method for deciding the optical parameter of an integrator illumination optical system equipped with a tapered rod in a short period of time.In the design method for the illumination optical system for deciding...
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JP2004281215 |
To make light which has an inconspicuous boundary between emitted light from the emission side opening of a through-hole of a cylindrical light guide member and that from the emission side end face of a peripheral wall incident to a disp...
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JP2004264850 |
To provide a scroll unit, a color lighting device and a projection system using the same.The scroll unit includes: a rotatably installed first spiral lens disk in which a plurality of cylindrical lens cells are spirally arrayed; a second...
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JP2004266259 |
To provide an illumination optical device which provides homogeneous illumination distribution in an irradiated surface by well correcting components of fourth order or higher of unevenness of illumination distribution in the irradiated ...
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JP3599648 |
To provide an illumination device, capable of regulating telecentric characteristics of a luminous flux on a wafer, without reducing the utility efficiency of an illumination light. A pipe 6 is moved in a direction perpendicular to the o...
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JP2004265706 |
To provide a lighting fixture in which irradiation unevenness can be reduced.The lighting fixture comprises a lamp 1 as a light source, a fixture main body 2 for housing the lamp 1 inside, and a Fresnel lens 3 for condensing the light fr...
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JP3599052 |
To improve the utilization efficiency of illuminating light without causing the complication of a device constitution and the troublesomeness of manufacture in a picture display device equipped with a non-emitting reflection type spatial...
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JP2004259451 |
To provide a lighting system capable of simultaneously and simply radiating parallel light in a plurality of directions.This lighting system has a light source 1; an arc-like reflecting plate 2 for reflecting the light radiated from the ...
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JP3594543 |
To provide a projection type video display device, capable of suppressing the occurrence of irregular colors, even when one or more light sources stop light emission when there are plural light sources. Light sources 1a, 1d of four light...
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JP2004252205 |
To make obtainable a brighter projected image.In the projection type display device, the illuminator 11 emitting illuminating light is constituted so that NA may be larger in a 1st direction than in a 2nd direction between the 1st and th...
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JP2004252112 |
To enhance the utilization efficiency of light from a light source.The video projection device is constituted in such a manner that white light from a lamp 12 is reflected by an elliptical reflection mirror 11 and separated to the light ...
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JP2004247495 |
To provide an inspecting method for inspecting an illumination optical system having a local defect simply and in a short period of time.The inspecting method comprises the steps of coating a resist film on the surface of a substrate to ...
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JP2004245912 |
To improve the utilization efficiency of light of a light irradiation system lined up and arranged with a plurality of light sources without increasing a collimation angle.Portions of circles forming apertures of converging mirrors 2a an...
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JP2004246363 |
To provide a projection optical system which lowers the height of the whole of an optical system relating to a projector.The projection optical system includes a lamp 301 which radiates light, a color separator 302 which separates the co...
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JP2004245977 |
To provide an illumination optical system for obtaining an illumination flux having illuminance with high uniformity by highly efficiently using the light from a light source.The system for optically operating an incident illumination fl...
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JP3588990 |
To surely eliminate unnecessary light and to enhance the color reproducibility of a projected picture with compact constitution. Illumination light emitted from a light source 301 is guided to light valves 201-203 by a kaleidoscope 303, ...
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JP2004219397 |
To provide an optical system which can change the position of an emission pupil, in which the intensity of irradiation light will not decrease.In inspecting a solid-state imaging element, the position of the emission pupil of these optic...
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JP2004212759 |
To provide a structure of an illumination optical system capable of attaining a function of an optical integrator with a small and simple structure and having high light utilization efficiency and high performance, and to provide a proje...
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JP2004207389 |
To provide an illumination optical apparatus which can adjust the position of an illumination area formed on an illuminated face while at the same time suppressing a loss of optical energy.The illumination optical apparatus illuminates t...
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JP2004198637 |
To provide a reflector having good balance between the size of a spot diameter and the largeness of a condensing angle and capable of enhancing light utilization efficiency.The reflector 102 has elliptical shape and is constituted to con...
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