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JP2012099686A |
To form an illumination light source reproducing a target illumination light source shape accurately.A light source forming method comprises the steps of: linking a plurality of mirror elements SEk(k=1 to K) to a necessary number N of le...
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JP2012099685A |
To evaluate the degree of coincidence of the shape of an illumination light source with a target accurately.The shape Ψ of an illumination light source formed on the pupil surface of an illumination optical system is measured based on a...
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JP2012098366A |
To provide an optical unit that can enhance light use efficiency and be further miniaturized.The optical unit comprises: a PBS (Polarization Beam Splitter) 5 which includes a first prism body 2 and a second prism body 3 and is formed by ...
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JP2012093692A |
To provide a light radiation device and a light radiation method capable of surely forming a stripe pattern having intended optical anisotropy.A light radiation device includes: plural polarized light radiation parts for radiating polari...
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JP2012089674A |
To adjust the shape of an illumination light source easily to a required shape.The method for adjusting a light source includes a step 102 for setting image modulation parameters Zj representing change in the actual shape for the target ...
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JP2012088716A |
To prevent that, when a portable information processor incorporating an image display device is used with placed on a surface of a desk, an image is displayed on a screen in a state where a part of the image is not displayed because a la...
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JP2012084298A |
To provide a light irradiation device which can form a pattern faithful to a pattern of a mask and with high resolution.The light irradiation device includes a light emission part equipped with a light source element row having a plurali...
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JP2012080949A |
To provide a light source device for an endoscope which is capable of obtaining an image of high precision without reducing the quantity of light of a specific wavelength region of white illumination light during both of special light ob...
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JP4922503B2 |
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JP4923370B2 |
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JP2012079643A |
To provide an illumination optical device which illuminates an irradiated surface with uniform brightness and is suitable for changing simply the illumination range with little cost burden.The illumination optical device illuminates a wi...
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JP2012078784A |
To provide an imaging device for reducing the deterioration of picture quality due to the rays of light reflected and absorbed in a non-imaging area between imaging elements in the case of arranging a plurality of imaging elements to acq...
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JP2012069656A |
To provide a spatial light modulator having large area mirror elements.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mirror elements SEk a...
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JP2012069654A |
To configure a spatial light modulator having large area mirror elements arranged densely.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mi...
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JP2012507757A |
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JP4904431B1 |
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JP4903767B2 |
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JP2012507160A |
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JP4901656B2 |
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JP2012042963A |
To provide an illumination optical system that is uniform in brightness on an image display element, is not substantially affected by unevenness of light emission distribution of light source means, and has high use efficiency of light w...
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JP2012037680A |
To provide new light condensation means that can efficiently use light energy.A light condensation optical element 10 is composed of an (A) member 11 having optical transparency and a particulate (B) member 12 having optical transparency...
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JP4880957B2 |
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JP4880790B1 |
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JP4879056B2 |
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JP2012028759A |
To provide an EUV radiation source that provides radiation with enhanced intensity homogeneity as compared to at least a part of known EUV radiation sources.An EUV radiation source comprises: a fuel supplying source configured to send a ...
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JP4864932B2 |
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JP4868785B2 |
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JP4859311B2 |
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JP2012009872A |
To improve illuminating performance on areas to be irradiated.An illuminating optical system includes a first laser oscillator (41a); a second laser oscillator (41b); and an optical element (42) to make intensity distribution of incident...
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JP4852617B2 |
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JP2012004561A |
To provide an illumination method, an illumination optical apparatus, and an exposure equipment capable of maintaining compatibility concerning a light intensity distribution as needed, when an optical element whose configuration is diff...
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JP2012500468A |
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JP2012002894A |
To provide a reflector that can be easily obtained to avoid inconveniences of conventional concentrating solar cell systems such as complication and high cost, a preparation method thereof, and a concentrating solar cell system.The prese...
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JP4844398B2 |
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JP2011530818A |
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JP2011254086A |
To realize an appropriate illumination condition, which is necessary to transfer faithfully a mask pattern having a variety of characteristics, for example, an illumination condition having a diversity in a light intensity distribution a...
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JP2011530184A |
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JP4838430B2 |
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JP4834255B2 |
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JP2011529629A |
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JP4829398B2 |
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JP4821755B2 |
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JP2011528856A |
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JP2011238706A |
To provide a technique advantageous to deciding an effective light source used for fine patterns.The method has a step for calculating an optical strength distribution including a positive value portion, in which an optical strength has ...
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JP2011233911A |
To provide an illumination optical device capable of forming annular illumination pupil distribution in a circumferential polarization state while suppressing light quantity loss to an excellent level.The illumination optical device comp...
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JP2011232761A |
To provide an image display in which an image having high contrast and reduced illumination unevenness is displayed.An illumination optical system that illuminates a reflection type light modulation element via a polarization separation ...
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JP4817639B2 |
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JP4817487B2 |
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JP2011228536A |
To provide a reflection optical member capable of improving reflection efficiency of a radiation beam, an optical system, an exposure device, and a device manufacturing method.An emission side fly-eye mirror comprises: a mirror block 50A...
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JP2011222841A |
To provide a spatial light modulation unit capable of avoiding, in a reliable manner, optical members from being damaged by light excessively condensed through multiple mirror elements.A spatial light modulation unit (3), used in an illu...
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