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JP2012129319A |
To provide a reflective optical element in which heat exchange can be carried out quickly, and to provide an optical unit, an exposure device and a method of manufacturing a device.The optical unit comprises a reflective optical element ...
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JP2012129345A |
To enhance exposure characteristics.The exposure device comprises a light-emitting section (10) which emits EUV light by plasma excitation of predetermined atoms, a condensation section (20) which condenses the EUV light irradiated from ...
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JP4955121B2 |
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JP2012113224A |
To provide an illuminating device that is enabled to address diversified needs by making the balance between color purity and luminous energy variable, and a projection type image displaying device using the same.In an illuminating devic...
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JP2012114358A |
To provide an exposure device in which speckles of an optical image formed on a photosensitive medium can be made obscure, and occurrence of unevenness of brightness can be minimized effectively in an illuminated region.An exposure devic...
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JP4952800B2 |
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JP4953149B2 |
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JP2012109568A |
To improve/optimize projection optics in a lithographic projection apparatus.Methods for matching the characteristics of a lithographic projection apparatus to a reference lithographic projection apparatus are described, where the matchi...
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JP4944769B2 |
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JP2012103724A |
To provide an improved condenser for an illumination system for a microlithographic exposure apparatus.An illumination system of a microlithographic exposure apparatus comprises a condenser 601 for transforming a pupil plane 54 into a fi...
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JP2012098708A |
To provide a lighting device and a display apparatus which can reduce the size and improve the light use efficiency while reducing the occurrence of an interference pattern.A lighting device includes: a light source unit including a lase...
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JP2012099686A |
To form an illumination light source reproducing a target illumination light source shape accurately.A light source forming method comprises the steps of: linking a plurality of mirror elements SEk(k=1 to K) to a necessary number N of le...
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JP2012099685A |
To evaluate the degree of coincidence of the shape of an illumination light source with a target accurately.The shape Ψ of an illumination light source formed on the pupil surface of an illumination optical system is measured based on a...
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JP2012098366A |
To provide an optical unit that can enhance light use efficiency and be further miniaturized.The optical unit comprises: a PBS (Polarization Beam Splitter) 5 which includes a first prism body 2 and a second prism body 3 and is formed by ...
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JP2012093692A |
To provide a light radiation device and a light radiation method capable of surely forming a stripe pattern having intended optical anisotropy.A light radiation device includes: plural polarized light radiation parts for radiating polari...
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JP2012089674A |
To adjust the shape of an illumination light source easily to a required shape.The method for adjusting a light source includes a step 102 for setting image modulation parameters Zj representing change in the actual shape for the target ...
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JP2012088716A |
To prevent that, when a portable information processor incorporating an image display device is used with placed on a surface of a desk, an image is displayed on a screen in a state where a part of the image is not displayed because a la...
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JP2012084298A |
To provide a light irradiation device which can form a pattern faithful to a pattern of a mask and with high resolution.The light irradiation device includes a light emission part equipped with a light source element row having a plurali...
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JP2012080949A |
To provide a light source device for an endoscope which is capable of obtaining an image of high precision without reducing the quantity of light of a specific wavelength region of white illumination light during both of special light ob...
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JP4922503B2 |
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JP4923370B2 |
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JP2012079643A |
To provide an illumination optical device which illuminates an irradiated surface with uniform brightness and is suitable for changing simply the illumination range with little cost burden.The illumination optical device illuminates a wi...
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JP2012078784A |
To provide an imaging device for reducing the deterioration of picture quality due to the rays of light reflected and absorbed in a non-imaging area between imaging elements in the case of arranging a plurality of imaging elements to acq...
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JP2012069656A |
To provide a spatial light modulator having large area mirror elements.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mirror elements SEk a...
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JP2012069654A |
To configure a spatial light modulator having large area mirror elements arranged densely.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mi...
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JP2012507757A |
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JP4904431B1 |
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JP4903767B2 |
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JP2012507160A |
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JP4901656B2 |
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JP2012042963A |
To provide an illumination optical system that is uniform in brightness on an image display element, is not substantially affected by unevenness of light emission distribution of light source means, and has high use efficiency of light w...
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JP2012037680A |
To provide new light condensation means that can efficiently use light energy.A light condensation optical element 10 is composed of an (A) member 11 having optical transparency and a particulate (B) member 12 having optical transparency...
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JP4880957B2 |
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JP4880790B1 |
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JP4879056B2 |
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JP2012028759A |
To provide an EUV radiation source that provides radiation with enhanced intensity homogeneity as compared to at least a part of known EUV radiation sources.An EUV radiation source comprises: a fuel supplying source configured to send a ...
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JP4864932B2 |
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JP4868785B2 |
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JP4859311B2 |
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JP2012009872A |
To improve illuminating performance on areas to be irradiated.An illuminating optical system includes a first laser oscillator (41a); a second laser oscillator (41b); and an optical element (42) to make intensity distribution of incident...
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JP4852617B2 |
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JP2012004561A |
To provide an illumination method, an illumination optical apparatus, and an exposure equipment capable of maintaining compatibility concerning a light intensity distribution as needed, when an optical element whose configuration is diff...
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JP2012500468A |
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JP2012002894A |
To provide a reflector that can be easily obtained to avoid inconveniences of conventional concentrating solar cell systems such as complication and high cost, a preparation method thereof, and a concentrating solar cell system.The prese...
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JP4844398B2 |
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JP2011530818A |
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JP2011254086A |
To realize an appropriate illumination condition, which is necessary to transfer faithfully a mask pattern having a variety of characteristics, for example, an illumination condition having a diversity in a light intensity distribution a...
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JP2011530184A |
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JP4838430B2 |
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JP4834255B2 |
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