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Matches 701 - 750 out of 2,796

Document Document Title
JP2012084298A
To provide a light irradiation device which can form a pattern faithful to a pattern of a mask and with high resolution.The light irradiation device includes a light emission part equipped with a light source element row having a plurali...  
JP2012080949A
To provide a light source device for an endoscope which is capable of obtaining an image of high precision without reducing the quantity of light of a specific wavelength region of white illumination light during both of special light ob...  
JP4922503B2  
JP4923370B2  
JP2012079643A
To provide an illumination optical device which illuminates an irradiated surface with uniform brightness and is suitable for changing simply the illumination range with little cost burden.The illumination optical device illuminates a wi...  
JP2012078784A
To provide an imaging device for reducing the deterioration of picture quality due to the rays of light reflected and absorbed in a non-imaging area between imaging elements in the case of arranging a plurality of imaging elements to acq...  
JP2012069656A
To provide a spatial light modulator having large area mirror elements.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mirror elements SEk a...  
JP2012069654A
To configure a spatial light modulator having large area mirror elements arranged densely.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mi...  
JP2012507757A  
JP4904431B1  
JP4903767B2  
JP2012507160A  
JP4901656B2  
JP2012042963A
To provide an illumination optical system that is uniform in brightness on an image display element, is not substantially affected by unevenness of light emission distribution of light source means, and has high use efficiency of light w...  
JP2012037680A
To provide new light condensation means that can efficiently use light energy.A light condensation optical element 10 is composed of an (A) member 11 having optical transparency and a particulate (B) member 12 having optical transparency...  
JP4880957B2  
JP4880790B1  
JP4879056B2  
JP2012028759A
To provide an EUV radiation source that provides radiation with enhanced intensity homogeneity as compared to at least a part of known EUV radiation sources.An EUV radiation source comprises: a fuel supplying source configured to send a ...  
JP4864932B2  
JP4868785B2  
JP4859311B2  
JP2012009872A
To improve illuminating performance on areas to be irradiated.An illuminating optical system includes a first laser oscillator (41a); a second laser oscillator (41b); and an optical element (42) to make intensity distribution of incident...  
JP4852617B2  
JP2012004561A
To provide an illumination method, an illumination optical apparatus, and an exposure equipment capable of maintaining compatibility concerning a light intensity distribution as needed, when an optical element whose configuration is diff...  
JP2012500468A  
JP2012002894A
To provide a reflector that can be easily obtained to avoid inconveniences of conventional concentrating solar cell systems such as complication and high cost, a preparation method thereof, and a concentrating solar cell system.The prese...  
JP4844398B2  
JP2011530818A  
JP2011254086A
To realize an appropriate illumination condition, which is necessary to transfer faithfully a mask pattern having a variety of characteristics, for example, an illumination condition having a diversity in a light intensity distribution a...  
JP2011530184A  
JP4838430B2  
JP4834255B2  
JP2011529629A  
JP4829398B2  
JP4821755B2  
JP2011528856A  
JP2011238706A
To provide a technique advantageous to deciding an effective light source used for fine patterns.The method has a step for calculating an optical strength distribution including a positive value portion, in which an optical strength has ...  
JP2011233911A
To provide an illumination optical device capable of forming annular illumination pupil distribution in a circumferential polarization state while suppressing light quantity loss to an excellent level.The illumination optical device comp...  
JP2011232761A
To provide an image display in which an image having high contrast and reduced illumination unevenness is displayed.An illumination optical system that illuminates a reflection type light modulation element via a polarization separation ...  
JP4817639B2  
JP4817487B2  
JP2011228536A
To provide a reflection optical member capable of improving reflection efficiency of a radiation beam, an optical system, an exposure device, and a device manufacturing method.An emission side fly-eye mirror comprises: a mirror block 50A...  
JP2011222841A
To provide a spatial light modulation unit capable of avoiding, in a reliable manner, optical members from being damaged by light excessively condensed through multiple mirror elements.A spatial light modulation unit (3), used in an illu...  
JP2011222170A
To provide a light source device capable of emitting light in a desired direction.In the light source device 100, a first reflective surface 44 is arranged to reflect first light L1 emitted from a light emitting element 20 toward a third...  
JP2011222594A
To expose light so as to inhibit concentration of light energy.The illuminating apparatus to apply light to a target surface includes: multiple lens elements laid out to split and emit light; rod lenses of a columnar shape having a light...  
JP2011221277A
To provide an illuminating device capable of mitigating a rise of temperature of a light shielding means placed on an optical path and satisfactorily projecting an image information.An illuminating device includes: light source means; an...  
JP2011222856A
To provide a spatial light modulation unit capable of making a desired pupil intensity distribution accurately.The spatial light modulation unit (3), used in an illumination optical system to illuminate a surface to be illuminated with l...  
JP4808733B2  
JP4804704B2  

Matches 701 - 750 out of 2,796