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JP2006059833 |
To provide an illumination optical device which can accurately detect the intensity of a light which reaches the surface to be irradiated in accordance with a simple configuration, even if the polarization state of the incident light to ...
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JP3774590 |
To easily manufacture a high integration density device by detecting light intensity distribution of a particular pattern image with a light intensity detecting means to measure the wave surface aberration of the projection optical syste...
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JP3774621 |
To solve a problem that light condensing and diffusing control in the longitudinal direction of a light source is not performed though such control in a direction (up-and-down direction) orthogonal to the longitudinal direction of the li...
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JP2006054328 |
To provide an illumination optic device provided with an optical member capable of easily forming forms of a desired light intensity distribution or a light distribution in the pupil position of an illumination optic system or in a posit...
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JP3771414 |
To obtain an arch-like or ring-like irradiation beam by providing a scattering device, which checks diffusion of irradiation beam to a projection system with which the pattern image of a mask in a lithography projection system is irradia...
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JP2006049898 |
To provide a more efficient microlens array system.A projection system comprises a lens array constituted such that it receives a beam to which pattern forming was carried out, divides the beam to which pattern forming has been carried o...
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JP2006047384 |
To provide an aligner for improving throughput by providing a composite mirror corresponding to a large substrate.The aligner irradiates a substrate to be exposed by using light from a light source via a projection optics having a unifor...
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JP2006047552 |
To provide an image projection apparatus having a reflection type display element that displays images by the modulation of pixel angles, the image projection apparatus being capable of satisfactorily separating illuminating light and pr...
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JP3767544 |
To provide a rod integrator or the like having the high utilization efficiency of light and suitable for a color recapturing system. In the rod integrator 103 equipped with a reflective inner peripheral surface (reflection surface) 111 f...
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JP3765784 |
To provide an illumination system which can realize a color image without color wheel and to provide a projection system which adopts the same. The illumination system is characterized in that it includes at least one light emitting devi...
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JP3763761 |
To provide efficient energy deposition on targets having optional shapes. A system for shaping an irradiance profile of plural apertures uses at least one arrangement, consisting of at least three apertures which correspond to plural opt...
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JP2006023548 |
To provide an illuminating optical system which, while suppressing heat generation, prevents any unnecessary light component from entering an image formation element.The illuminating optical system includes: a first lens array 3 for divi...
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JP3762087 |
To enhance the degree of freedom in design and to improve the strength of an advance/retreat barrel, because the strength of the advance/ retreat barrel gets low when the advance/retreat barrel is provided with two notches in order to av...
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JP3757938 |
To provide a polarization illumination device which is suitable to be utilized as an illumination device for a projection display device or the like whose temperature change is violent. A polarization illumination device (400) has a ligh...
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JP3757939 |
To provide a polarization illumination device which is suitable to be utilized as an illumination device for a projection display device or the like whose temperature change is violent. A polarization illumination device (400) has a ligh...
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JP2005351638 |
To provide an illumination optical device capable of being set simply with a similar labor to an ordinary illumination condition even in the case of a special illumination condition such as a plurality of bright line spectrums of a fluor...
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JP2005346021 |
To provide a lens array which permits mass production and, thereby, permits lower cost through man-hour reduction, to provide a method for producing the lens array, to provide an illumination optical device having the lens array and to p...
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JP2005346109 |
To obtain a lighting device suitable for an illuminating light source of a projection display apparatus to realize bright and uniform illumination.The lighting device has 1st and 2nd lamp units equipped with a light source lamp and a ref...
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JP3745957 |
To provide a light source equipment, which enables attachment of a reflector in a lamp housing at a predetermined position where a condensing point of the emitted light from the light source is correctly focused, a projector using this l...
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JP2005308513 |
To provide an evaluating method capable of analytically evaluating unevenness of illuminance caused by a plane profile error of an optical surface on the basis of measurement data about the plane profile of the optical surface.The evalua...
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JP2005311187 |
To provide a lighting optical system that enables the desired polarized light on a reticule surface.This lighting optical system uses light from a light source to illuminate a target surface. To adjust a polarization ratio of this light,...
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JP2005309288 |
To illuminate a prescribed range by the prescribed number of apertures even when the size of a light emitting part of a light source is small and to improve the uniformity of illuminance distribution on an illuminated object and the dire...
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JP2005310942 |
To realize an exposure system, capable of suppressing energy density and of appropriately correcting chromatic aberrations, while coping with the pupil face of a projection system with a larger caliber.The projection aligner for exposing...
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JP2005302265 |
To provide a solid immersion lens which has a shape for increasing a tilt margin between a lens and an optical recording medium and so on and allowing to decrease the diameter of a lens, and a method for forming the solid immersion lens....
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JP2005303084 |
To provide an aligner that resolves the difference in the optical characteristics between a given direction and an direction orthogonal to the given direction on the photosensitive substrate.In the aligner that exposes a mask M pattern i...
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JP2005302826 |
To provide a lighting optical device which can prevent a lighting pupil or an optical element arranged at its conjugated position from being damaged even if the light energy of an illuminating light emitted from a light source becomes hi...
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JP3731312 |
To provide a lighting device capable of performing a bright and uniform lighting without color irregularity by extracting the part of emitted light included in a fixed range including a lamp optical axis among the light emitted from resp...
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JP2005294845 |
To provide a lithographic apparatus, an illumination system, and an optical element for rotating an intensity distribution.A lithography projection apparatus includes an illumination system having a reflection type integrator with rectan...
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JP2005274734 |
To solve a problem such as the problem of deterioration of optical utilization efficiency caused by size of a margin of an illumination range, resulting from that the size of the illumination range is fixed in an image display device hav...
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JP2005276932 |
To perform high precision exposure extending over a long time, without deteriorating optical performance of a projection optical system.A specific mirror Mc, which makes illumination light EL incident on a reflecting mask R at a prescrib...
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JP2005266417 |
To provide an illuminance non-uniformity correction filter capable of excellently correcting illuminance non-uniformity that occurs inside an illumination optical system.In an illuminance non-uniformity correction filter 20 used for an i...
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JP3722547 |
To provide an illumination optical system with ideal numerical aperture and also capable of uniformly supplying bright illumination light in a fixed range, by controlling the diffusivity of a diffusion surface. In the illumination optica...
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JP2005250072 |
To realize an illuminating optical system capable of effectively suppressing uneven illumination on an illuminated surface which may be generated by the decentering or the like of a light source.The illuminating optical system comprises ...
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JP2005244013 |
To provide an optical system and an aligner bringing about a desired optical performance by reducing deformation of an optical member due to thermal expansion which causes degradation in image formation performance.In the optical system ...
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JP2005243904 |
To provide an illumination optical apparatus including an optical element capable of maintaining optical performance even when used in a place where energy density of a beam emitted from a light source is high.The illumination optical ap...
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JP2005234578 |
To provide an illumination system capable of realizing a color image without a color wheel, and a projection system adopting the illumination system.The illumination system includes at least one light emitting element 40 and a focusing l...
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JP2005234120 |
To provide an illumination optical apparatus in which illuminance of light illuminating an objective face to be irradiated can be easily increased without replacing discharge light sources.The illumination optical apparatus is equipped w...
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JP2005234007 |
To make an illumination NA uniform by a simple configuration in an illumination optical system which makes an intensity distribution of illumination light uniform by an optical integrator using a semiconductor laser as an illumination li...
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JP2005235999 |
To provide a lighting system that can constitute an exposure system having excellent optical performance and throughput by improving the utilization efficiency of the light of a small throughput and the uniformity of lighting strength.Th...
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JP2005236088 |
To provide an illuminating optical device which can provide illumination conditions which are highly diverse regarding proper illumination conditions such as a secondary light source shape, light intensity and polarization state required...
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JP2005227623 |
To provide a projection type display device capable of improving flare in a lighting area.The projection type display device has a color separation lighting part 220 for separating incident light into three colors of light and lighting r...
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JP2005221873 |
To provide a high-efficiency compact illumination optical system capable of making the solid angle of luminous flux made incident on a rod integrator small without lowering illumination efficiency to a compact display panel.The illuminat...
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JP3707406 |
To provide a method for adjusting the position of a color combining optical system by which the position of the color combining optical system is accurately performed with respect to an optical component casing which accommodates optical...
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JP2005214627 |
To easily adjust the position of a light source, in relation between the spot center of the light source of an imaging apparatus with the optical axis of an imaging camera.The imaging device is equipped with a light source means for illu...
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JP2005214688 |
To realize a light source device for inspection, capable of illuminating with high efficiency, without unevenness in color and brightness by a light produced by overlapping light beams of different wavelengths.To the light source device ...
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JP2005215356 |
To provide a projector which has a light source having a parabolic reflector and can improve the image quality, by increasing the degree of parallelism of the illumination flux radiated to the electro-optical modulator.A projector has a ...
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JP2005208132 |
To design/develop two or more types of light valves different in size by minimumly changing optical components or changing their layout.The projection type display device has an optical unit 601 that includes the light valves 311, 321, a...
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JP2005208500 |
To provide a projector which does not largely drop its efficiency of using the light, even when it is made to display smooth and high quality moving images.The projector has a lighting system 100A, liquid crystal display devices 400R, 40...
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JP2005209549 |
To enable effectively a light beam proceeding backward to direct forward out of the light beams emitted from a light source.An illumination optical system has a light source 2, and an optical member 3 made of a transparent body placed on...
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JP2005202366 |
To prevent an excessive aperture from being formed around a light source image formed by an illumination optical system even in performing an operation of varying the focal length of a projection lens, and to prevent deterioration in ima...
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