Login| Sign Up| Help| Contact|

Patent Searching and Data


Matches 701 - 750 out of 1,747

Document Document Title
JP2006091232
To provide a compact illuminating device capable of supplying bright illuminating light.The illuminator has a light source part 101 supplying light, a solid form reflector 104 having a reflective member, and a housing part 102 provided w...  
JP3787123
To provide an inspecting method for inspecting an illumination optical system having a local defect simply and in a short period of time. The inspecting method comprises the steps of coating a resist film on the surface of a substrate to...  
JP3782377
To provide a multiple lamp exposure device capable of irradiating a large area with high-luminance light by using many lamps, as an exposure device irradiating a panel coated with photosensitive material with the light so as to form a fi...  
JP2006066429
To provide a lighting optical device which can correct the variation in illuminance by a simple structure even if an illuminance distribution on a lighted surface changes with time.The lighting optical system (1-11) lights an illuminatio...  
JP2006065118
To provide a lighting optical system of a spatial optical modulator comprising an array of micromirrors whose resolution and contrast are high.A plane light source installed obliquely to an optical axis and a telecentric optical system a...  
JP2006065348
To provide efficient energy deposition on targets having optional shapes.A system for shaping an irradiance profile of plural apertures uses at least one arrangement, consisting of at least three apertures which correspond to plural opti...  
JP2006065332
To provide a projection type video display device which is compact and has excellent cooling efficiency.The video display device is equipped with a video display element as a light valve means of forming an optical image corresponding to...  
JP2006058488
To provide an illumination optical device whose light quantity is very large and whose illuminance irregularity is small in using a light emitting element array such as an LED array as a light source, and to provide a projection type dis...  
JP2006059834
To provide an illumination optical device which can regulate substantially uniformly a pupil luminance distribution on each point on a surface to be irradiated while illuminance on a surface to be irradiated is maintained or regulated un...  
JP2006059833
To provide an illumination optical device which can accurately detect the intensity of a light which reaches the surface to be irradiated in accordance with a simple configuration, even if the polarization state of the incident light to ...  
JP3774590
To easily manufacture a high integration density device by detecting light intensity distribution of a particular pattern image with a light intensity detecting means to measure the wave surface aberration of the projection optical syste...  
JP3774621
To solve a problem that light condensing and diffusing control in the longitudinal direction of a light source is not performed though such control in a direction (up-and-down direction) orthogonal to the longitudinal direction of the li...  
JP2006054328
To provide an illumination optic device provided with an optical member capable of easily forming forms of a desired light intensity distribution or a light distribution in the pupil position of an illumination optic system or in a posit...  
JP3771414
To obtain an arch-like or ring-like irradiation beam by providing a scattering device, which checks diffusion of irradiation beam to a projection system with which the pattern image of a mask in a lithography projection system is irradia...  
JP2006049898
To provide a more efficient microlens array system.A projection system comprises a lens array constituted such that it receives a beam to which pattern forming was carried out, divides the beam to which pattern forming has been carried o...  
JP2006047384
To provide an aligner for improving throughput by providing a composite mirror corresponding to a large substrate.The aligner irradiates a substrate to be exposed by using light from a light source via a projection optics having a unifor...  
JP2006047552
To provide an image projection apparatus having a reflection type display element that displays images by the modulation of pixel angles, the image projection apparatus being capable of satisfactorily separating illuminating light and pr...  
JP3767544
To provide a rod integrator or the like having the high utilization efficiency of light and suitable for a color recapturing system. In the rod integrator 103 equipped with a reflective inner peripheral surface (reflection surface) 111 f...  
JP3765784
To provide an illumination system which can realize a color image without color wheel and to provide a projection system which adopts the same. The illumination system is characterized in that it includes at least one light emitting devi...  
JP3763761
To provide efficient energy deposition on targets having optional shapes. A system for shaping an irradiance profile of plural apertures uses at least one arrangement, consisting of at least three apertures which correspond to plural opt...  
JP2006023548
To provide an illuminating optical system which, while suppressing heat generation, prevents any unnecessary light component from entering an image formation element.The illuminating optical system includes: a first lens array 3 for divi...  
JP3762087
To enhance the degree of freedom in design and to improve the strength of an advance/retreat barrel, because the strength of the advance/ retreat barrel gets low when the advance/retreat barrel is provided with two notches in order to av...  
JP3757938
To provide a polarization illumination device which is suitable to be utilized as an illumination device for a projection display device or the like whose temperature change is violent. A polarization illumination device (400) has a ligh...  
JP3757939
To provide a polarization illumination device which is suitable to be utilized as an illumination device for a projection display device or the like whose temperature change is violent. A polarization illumination device (400) has a ligh...  
JP2005351638
To provide an illumination optical device capable of being set simply with a similar labor to an ordinary illumination condition even in the case of a special illumination condition such as a plurality of bright line spectrums of a fluor...  
JP2005346021
To provide a lens array which permits mass production and, thereby, permits lower cost through man-hour reduction, to provide a method for producing the lens array, to provide an illumination optical device having the lens array and to p...  
JP2005346109
To obtain a lighting device suitable for an illuminating light source of a projection display apparatus to realize bright and uniform illumination.The lighting device has 1st and 2nd lamp units equipped with a light source lamp and a ref...  
JP3745957
To provide a light source equipment, which enables attachment of a reflector in a lamp housing at a predetermined position where a condensing point of the emitted light from the light source is correctly focused, a projector using this l...  
JP2005308513
To provide an evaluating method capable of analytically evaluating unevenness of illuminance caused by a plane profile error of an optical surface on the basis of measurement data about the plane profile of the optical surface.The evalua...  
JP2005311187
To provide a lighting optical system that enables the desired polarized light on a reticule surface.This lighting optical system uses light from a light source to illuminate a target surface. To adjust a polarization ratio of this light,...  
JP2005309288
To illuminate a prescribed range by the prescribed number of apertures even when the size of a light emitting part of a light source is small and to improve the uniformity of illuminance distribution on an illuminated object and the dire...  
JP2005310942
To realize an exposure system, capable of suppressing energy density and of appropriately correcting chromatic aberrations, while coping with the pupil face of a projection system with a larger caliber.The projection aligner for exposing...  
JP2005302265
To provide a solid immersion lens which has a shape for increasing a tilt margin between a lens and an optical recording medium and so on and allowing to decrease the diameter of a lens, and a method for forming the solid immersion lens....  
JP2005303084
To provide an aligner that resolves the difference in the optical characteristics between a given direction and an direction orthogonal to the given direction on the photosensitive substrate.In the aligner that exposes a mask M pattern i...  
JP2005302826
To provide a lighting optical device which can prevent a lighting pupil or an optical element arranged at its conjugated position from being damaged even if the light energy of an illuminating light emitted from a light source becomes hi...  
JP3731312
To provide a lighting device capable of performing a bright and uniform lighting without color irregularity by extracting the part of emitted light included in a fixed range including a lamp optical axis among the light emitted from resp...  
JP2005294845
To provide a lithographic apparatus, an illumination system, and an optical element for rotating an intensity distribution.A lithography projection apparatus includes an illumination system having a reflection type integrator with rectan...  
JP2005274734
To solve a problem such as the problem of deterioration of optical utilization efficiency caused by size of a margin of an illumination range, resulting from that the size of the illumination range is fixed in an image display device hav...  
JP2005276932
To perform high precision exposure extending over a long time, without deteriorating optical performance of a projection optical system.A specific mirror Mc, which makes illumination light EL incident on a reflecting mask R at a prescrib...  
JP2005266417
To provide an illuminance non-uniformity correction filter capable of excellently correcting illuminance non-uniformity that occurs inside an illumination optical system.In an illuminance non-uniformity correction filter 20 used for an i...  
JP3722547
To provide an illumination optical system with ideal numerical aperture and also capable of uniformly supplying bright illumination light in a fixed range, by controlling the diffusivity of a diffusion surface. In the illumination optica...  
JP2005250072
To realize an illuminating optical system capable of effectively suppressing uneven illumination on an illuminated surface which may be generated by the decentering or the like of a light source.The illuminating optical system comprises ...  
JP2005244013
To provide an optical system and an aligner bringing about a desired optical performance by reducing deformation of an optical member due to thermal expansion which causes degradation in image formation performance.In the optical system ...  
JP2005243904
To provide an illumination optical apparatus including an optical element capable of maintaining optical performance even when used in a place where energy density of a beam emitted from a light source is high.The illumination optical ap...  
JP2005234578
To provide an illumination system capable of realizing a color image without a color wheel, and a projection system adopting the illumination system.The illumination system includes at least one light emitting element 40 and a focusing l...  
JP2005234120
To provide an illumination optical apparatus in which illuminance of light illuminating an objective face to be irradiated can be easily increased without replacing discharge light sources.The illumination optical apparatus is equipped w...  
JP2005234007
To make an illumination NA uniform by a simple configuration in an illumination optical system which makes an intensity distribution of illumination light uniform by an optical integrator using a semiconductor laser as an illumination li...  
JP2005235999
To provide a lighting system that can constitute an exposure system having excellent optical performance and throughput by improving the utilization efficiency of the light of a small throughput and the uniformity of lighting strength.Th...  
JP2005236088
To provide an illuminating optical device which can provide illumination conditions which are highly diverse regarding proper illumination conditions such as a secondary light source shape, light intensity and polarization state required...  
JP2005227623
To provide a projection type display device capable of improving flare in a lighting area.The projection type display device has a color separation lighting part 220 for separating incident light into three colors of light and lighting r...  

Matches 701 - 750 out of 1,747