Login| Sign Up| Help| Contact|

Patent Searching and Data


Matches 701 - 750 out of 3,612

Document Document Title
JP2016541009A
[Subject] The device which may contain a programmable patterning device provided with the array of a spontaneous light type contrast device is provided. [Means for Solution] A substrate holder built so that an exposure device might hold ...  
JP2016541021A
An illumination system of a micro lithography projection aligner (10) contains a pupil formation unit (36) which turns light on a spatial light modulator (52) which penetrates or reflects incidence light by a space decomposition method. ...  
JP6053748B2  
JP6053737B2  
JP2016218381A
[Subject] A lighting installation for proximity exposure which can compensate for variation in size of an exposure pattern resulting from variation in a gap between a work and a mask with easy composition, a proximity exposure device, an...  
JP6049043B2  
JP6050618B2  
JP2016212434A
[Subject] An illumination optical device which can form ring band-like lighting pupil distribution of a peripheral direction polarization state is provided suppressing a light volume loss satisfactorily. [Means for Solution] An illuminat...  
JP2016502136A5  
JP6044611B2  
JP2016206247A
[Subject] Art advantageous to the improvement in accuracy of amendment of exposure light volume unevenness and coexistence of a throughput is provided. [Means for Solution] An illumination-light study system which illuminates a field to ...  
JP2016206246A
[Subject] Art advantageous to improvement in accuracy of amendment of exposure light volume unevenness and coexistence of a throughput is provided. [Means for Solution] An illumination-light study system which illuminates a field to be i...  
JP2016206234A
[Subject] An aperture for modification lighting and an exposure device which can be easily applied to the conventional exposure device are provided. [Means for Solution] Aperture 20 for modification lighting which forms gray tone illumin...  
JP6041304B2  
JP2016502233A5  
JP2016200787A
[Subject] A light irradiation device which can adjust a wavelength and light volume of illumination light is provided being able to obtain sufficient light volume used as substitution of a discharge lamp, and holding the homogeneity of i...  
JP2016537683A
Including a transparent lens in which the present invention defines optic volume, the transparent lens is related with an optical system containing the 1st reflective lens which orients light so that light which carried out demand may re...  
JP6034845B2  
JP2016197600A
[Subject] Provide light equipment and an image display device which can attain high-intensity-ization, suppressing enlargement of a device. [Means for Solution] Light equipment concerning one form of this art is provided with the followi...  
JP6025835B2  
JP6028633B2  
JP2016192343A
[Subject] A short arc Flach lamp which has in a housing a pair of starting auxiliary electrodes arranged inside an arc tube among a pair of a main electrode and the pair of main electrodes, While having a reflective mirror reflected belo...  
JP2016535313A
An illumination-light study unit for EUV projection lithography functions, in order that an object recognition field (3) of a downstream image formation optical unit (6) may illuminate an illuminated viewing field arranged inside. An obj...  
JP2016192264A
[Subject] A subject of the present invention is having an irradiation object face of high illumination homogeneity, and having a small optical radial plane compared with an irradiation object face, and providing a tabular imaging optics ...  
JP2016191844A
[Subject] It aims at being able to emit fluorescence at high efficiency and providing fluorescence light equipment which can constitute a small device from an easy structure. [Means for Solution] It has an excitation light emitting part ...  
JP6022759B2  
JP6023777B2  
JP2016188923A
[Subject] An exposure device and an exposure method which can attain efficient-izing and reinforcement of a spatial-light-modulation element are provided. [Means for Solution] Micro lens array 142 by which a micro lens in which exposure ...  
JP2016188878A
[Subject] An illumination-light study system which can obtain high illumination realizing illumination homogeneity in a lighting field, and homogeneity of the irradiation angle characteristic. [Means for Solution] The 1st light-emitting ...  
JP2016186892A
[Subject] A bundle of rays can be extracted thinly and small light equipment and a lighting installation, and a projector are provided. [Means for Solution] The 2nd light source unit 21B that ejects bundle of rays K2 containing the 1st l...  
JP6016169B2  
JP2016184127A
[Subject] Light equipment which controlled a fall of luminosity is realized including a plurality of LED elements. [Means for Solution] Light equipment is provided with the following. A plurality of LED elements, The first optical system...  
JP2016184126A
[Subject] A plurality of LED elements are included and light equipment which improved the homogeneity of illumination distribution on an irradiation side is realized. [Means for Solution] Light equipment is provided with the following. A...  
JP6010032B2  
JP2016177194A
[Subject] It excels in portability and obtains the image projection device which can display a picture with an expansion display and sufficient quality easily. [Means for Solution] It has a light source, an image display element illumina...  
JP2016173484A
[Subject] By thinking transmissivity of a red spectrum region as important, a projection lens and a projector aiming at improving a shortage of light volume of a red spectrum region are provided. [Means for Solution] It is a projection l...  
JP2016170390A
[Subject] It aims at providing a projector incorporating light equipment and this with high utilization efficiency of light. [Means for Solution] Light equipment 2 is provided with a pickup optical system into which a light emitting elem...  
JP5994970B2  
JP2012522358A5  
JP2016167024A
[Subject] A shadow cast over exposure light by a member of a light source part provides art advantageous to reducing influence which it has on image formation performance. [Means for Solution] An illumination-light study system which ill...  
JP2016528526A
A fiducial structure object (250, 400, 500) and the 1st actuator (205) that is self-maintenance type actuators are used, and it is the 1st optical element (215) that can operate to a fiducial structure object (250, 400, 500), An EUV imag...  
JP5991256B2  
JP5984013B2  
JP5983689B2  
JP5983966B2  
JP2016162754A
[Subject] Even if it is irradiated with many light sources at a mutually different angle and superposition of a beam pattern is made, a luminescent device for vehicles with which matching of a beam pattern can be made to be made is provi...  
JP2016162731A
[Subject] Absorption of light in the end face by the side of incidence of a shading object which constitutes a louver is controlled, and a field-like lighting installation which can raise luminosity is provided. [Means for Solution] Ligh...  
JP2016162575A
[Subject] Though afocal magnification is low, a bundle of rays can be extracted thinly and small light equipment is provided. A projector provided with a lighting installation provided with the above-mentioned light equipment and the lig...  
JP2016157096A
[Subject] A lighting installation which can obtain illumination light more efficiently is provided. [Means for Solution] It has light source 10 and light tunnel 14, and constitutes lighting installation 1 used for a projection display et...  
JP2016526258A
The present invention relates to a laser light source (300), a wavelength conversion light source, a synthetic light source, and a projection system. The laser light source concerned is [a laser device array and] with a condensing optica...  

Matches 701 - 750 out of 3,612