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Matches 701 - 750 out of 3,164

Document Document Title
JP2014178525A
To provide a laser light source device which is capable of effectively cutting off the stray light component of laser light, while miniaturizing an optical system.A first collimator lens 20 turns the laser light emitted from an LD chip 1...  
JP2014525148A  
JP2014178599A
To provide a luminaire capable of emitting illumination light having more homogeneous illumination distribution.A luminaire includes: a light source 2; a diffraction optical element 5 on which light emitted from the light source 2 is inc...  
JP2014170127A
To provide a compact projection optical system which requires less projection space and projection distance and is capable of supporting a plurality of image sizes.A projection optical system comprises a dioptric system, a first mirror, ...  
JP2014167616A
To provide an apparatus and a method for proximity exposure and an illumination optical system which adjust positions of parts constituting the illumination optical system so as to condense light for exposure on a fly eye lens and achiev...  
JP2014160700A
To cool an optical element.Multiple elements 41 are located close to a base plate 42serving as a cooling/heating source by a mirror drive system (drive devices 42) thereby enabling rear surfaces of the elements 41 to make contact with a ...  
JP5582287B2  
JP5579755B2  
JP2014154698A
To cool an optical element.When the backside of a plurality of elements 41 is brought close to the front side of a cold heat source, i.e., a base plate 42, by means of a mirror drive system (actuator 42), the backside of a plurality of e...  
JP2014520399A  
JP2014520281A  
JP5574549B2  
JP2014146660A
To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.An illumination optical device includes an optical integrator hav...  
JP2014146718A
To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.An illumination optical device illuminating the irradiated surfac...  
JP2014146636A
To suppress variation in light intensity distribution when illuminating an irradiated surface by using a plurality of optical elements that can control a state of incoming light.An illumination method for illuminating a reticle surface R...  
JP2014146542A
To provide an illumination device, and so on capable of reducing luminance unevenness of illumination light.The illumination device includes a light source part including a laser light source, and an equalizing optical member including a...  
JP5569556B2  
JP5571170B2  
JP5570225B2  
JP5571546B2  
JP2014142369A
To provide an illumination optical system for achieving miniaturization and weight reduction.An illumination optical system 10C includes: an array light source 20 for emitting blue band light; a phosphor wheel 200 formed with a dichroic ...  
JP2014519196A  
JP5567973B2  
JP5566501B2  
JP5561508B2  
JP5554245B2  
JP5552140B2  
JP5552699B2  
JP5548127B2  
JP2014131031A
To provide the optical system of a microlithography projection exposure apparatus in which polarization illumination can be set flexibly.The optical system of a microlithography projection exposure apparatus comprises: a mirror arrangeme...  
JP5541604B2  
JP2014516209A  
JP2014127485A
To provide a transmission optical system capable of leading a light beam, having a substantially uniform intensity distribution even if the output distribution of a light source changes, stably to a spatial light modulator.An optical int...  
JP2014126836A
To provide an illumination device capable of minimizing loss of diffracted light and accurately identifying presence of change in characteristics of a diffraction optical element using a simple configuration.An illumination device 10 inc...  
JP2014123063A
To provide a projector that forms projection image light by coherent laser beams, capable of meeting a conventional requirement of more securely removing speckle noise, the speckle noise remaining in a projection image based on laser bea...  
JP2014123749A
To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective device onto an image field arranged on an image plane of the projection objective device.A catadioptr...  
JP2014123600A
To provide a transmission optical system capable of stably guiding a light flux having substantially uniform intensity distribution to a spatial light modulator even when output distribution of a power source is changed.A transmission op...  
JP5537455B2  
JP5537950B2  
JP5534540B2  
JP2014119655A
To provide an image display device which, although being reduced in size, can suppress one-sided blur due to temperature rise in the device.The image display device includes: a light source; a mirror for turning-back a light beam from th...  
JP2014119666A
To prevent damage to a light tunnel.An image irradiation device includes: a cylindrical light tunnel for uniforming light emitted from a light source device and guiding it to an image forming element; a position adjustment unit which mov...  
JP2014119702A
To provide a microlens array that has less optical loss and hardly causes degradation.A microlens array 110 is formed by bonding a first microlens array 122 formed of resin and a second microlens array 126 formed of glass. The first micr...  
JP2014115496A
To excellently maintain telecentricity over an entire variable power area, make illuminance unevenness less over an entire photographing screen and secure a relatively long operational distance (a working distance), and to reduce the siz...  
JP2014116612A
To provide an exposure device and an exposure method which can achieve appropriate illumination conditions required for faithfully transferring mask patterns with various characteristics, for example illumination conditions rich in diver...  
JP2014116611A
To provide an exposure device using an illumination system that enables patterns of various pitches to be simultaneously transferred at high resolution.An exposure device has: an illumination optical system 12 configured to illuminate a ...  
JP5533917B2  
JP5529922B2  
JP5531955B2  
JP5534276B2  

Matches 701 - 750 out of 3,164