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Matches 701 - 750 out of 2,807

Document Document Title
JP4944769B2  
JP2012103724A
To provide an improved condenser for an illumination system for a microlithographic exposure apparatus.An illumination system of a microlithographic exposure apparatus comprises a condenser 601 for transforming a pupil plane 54 into a fi...  
JP2012098708A
To provide a lighting device and a display apparatus which can reduce the size and improve the light use efficiency while reducing the occurrence of an interference pattern.A lighting device includes: a light source unit including a lase...  
JP2012099686A
To form an illumination light source reproducing a target illumination light source shape accurately.A light source forming method comprises the steps of: linking a plurality of mirror elements SEk(k=1 to K) to a necessary number N of le...  
JP2012099685A
To evaluate the degree of coincidence of the shape of an illumination light source with a target accurately.The shape Ψ of an illumination light source formed on the pupil surface of an illumination optical system is measured based on a...  
JP2012098366A
To provide an optical unit that can enhance light use efficiency and be further miniaturized.The optical unit comprises: a PBS (Polarization Beam Splitter) 5 which includes a first prism body 2 and a second prism body 3 and is formed by ...  
JP2012093692A
To provide a light radiation device and a light radiation method capable of surely forming a stripe pattern having intended optical anisotropy.A light radiation device includes: plural polarized light radiation parts for radiating polari...  
JP2012089674A
To adjust the shape of an illumination light source easily to a required shape.The method for adjusting a light source includes a step 102 for setting image modulation parameters Zj representing change in the actual shape for the target ...  
JP2012088716A
To prevent that, when a portable information processor incorporating an image display device is used with placed on a surface of a desk, an image is displayed on a screen in a state where a part of the image is not displayed because a la...  
JP2012084298A
To provide a light irradiation device which can form a pattern faithful to a pattern of a mask and with high resolution.The light irradiation device includes a light emission part equipped with a light source element row having a plurali...  
JP2012080949A
To provide a light source device for an endoscope which is capable of obtaining an image of high precision without reducing the quantity of light of a specific wavelength region of white illumination light during both of special light ob...  
JP4922503B2  
JP4923370B2  
JP2012079643A
To provide an illumination optical device which illuminates an irradiated surface with uniform brightness and is suitable for changing simply the illumination range with little cost burden.The illumination optical device illuminates a wi...  
JP2012078784A
To provide an imaging device for reducing the deterioration of picture quality due to the rays of light reflected and absorbed in a non-imaging area between imaging elements in the case of arranging a plurality of imaging elements to acq...  
JP2012069656A
To provide a spatial light modulator having large area mirror elements.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mirror elements SEk a...  
JP2012069654A
To configure a spatial light modulator having large area mirror elements arranged densely.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mi...  
JP2012507757A  
JP4904431B1  
JP4903767B2  
JP2012507160A  
JP4901656B2  
JP2012042963A
To provide an illumination optical system that is uniform in brightness on an image display element, is not substantially affected by unevenness of light emission distribution of light source means, and has high use efficiency of light w...  
JP2012037680A
To provide new light condensation means that can efficiently use light energy.A light condensation optical element 10 is composed of an (A) member 11 having optical transparency and a particulate (B) member 12 having optical transparency...  
JP4880957B2  
JP4880790B1  
JP4879056B2  
JP2012028759A
To provide an EUV radiation source that provides radiation with enhanced intensity homogeneity as compared to at least a part of known EUV radiation sources.An EUV radiation source comprises: a fuel supplying source configured to send a ...  
JP4864932B2  
JP4868785B2  
JP4859311B2  
JP2012009872A
To improve illuminating performance on areas to be irradiated.An illuminating optical system includes a first laser oscillator (41a); a second laser oscillator (41b); and an optical element (42) to make intensity distribution of incident...  
JP4852617B2  
JP2012004561A
To provide an illumination method, an illumination optical apparatus, and an exposure equipment capable of maintaining compatibility concerning a light intensity distribution as needed, when an optical element whose configuration is diff...  
JP2012500468A  
JP2012002894A
To provide a reflector that can be easily obtained to avoid inconveniences of conventional concentrating solar cell systems such as complication and high cost, a preparation method thereof, and a concentrating solar cell system.The prese...  
JP4844398B2  
JP2011530818A  
JP2011254086A
To realize an appropriate illumination condition, which is necessary to transfer faithfully a mask pattern having a variety of characteristics, for example, an illumination condition having a diversity in a light intensity distribution a...  
JP2011530184A  
JP4838430B2  
JP4834255B2  
JP2011529629A  
JP4829398B2  
JP4821755B2  
JP2011528856A  
JP2011238706A
To provide a technique advantageous to deciding an effective light source used for fine patterns.The method has a step for calculating an optical strength distribution including a positive value portion, in which an optical strength has ...  
JP2011233911A
To provide an illumination optical device capable of forming annular illumination pupil distribution in a circumferential polarization state while suppressing light quantity loss to an excellent level.The illumination optical device comp...  
JP2011232761A
To provide an image display in which an image having high contrast and reduced illumination unevenness is displayed.An illumination optical system that illuminates a reflection type light modulation element via a polarization separation ...  
JP4817639B2  

Matches 701 - 750 out of 2,807