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Matches 701 - 750 out of 2,747

Document Document Title
JP4804704B2  
JP2011216796A
To index-evaluate a pupil luminance distribution formed on an illumination pupil of an illumination optical system for supplying illuminating light to an imaging optical system by taking notice of imaging performance.A method of evaluati...  
JP2011216863A
To adjust a beam size in the long and short-axis directions for each direction, and also allow the beam to be irradiated at a uniform intensity.A variable beam size illumination optical device has a beam size varying optical system. The ...  
JP2011210381A
To provide a light source device having a small and simple focus optical system that makes incident light emitted from a solid-state light-emitting element to be efficiently incident on a light guide making up a lighting system.The light...  
JP2011211230A
To provide an optical illumination device and a projection exposure device which decrease light loss when a mask is illuminated with emitted light in a prescribed polarization state.The projection exposure device includes an optical illu...  
JP2011199285A
To provide an illumination system that is configured so that the system can generate a polarized illumination mode more flexibly, and to provide a lithographic apparatus.The illumination system includes: a polarization member including f...  
JP2011191763A
To provide a lens structure adapted for guiding light from a light source to a plurality of directions.The lens structure 100 includes a base 110, a pillar 120, and an umbrella-shaped body 130. The base 110 has a containing pit adapted f...  
JP4782820B2  
JP2011525637A  
JP2011187989A
To provide an illumination optical device, which almost uniformly adjusts the pupil luminance distribution at each point on irradiated surface respectively while the illumination distribution on the irradiated surface is almost uniformly...  
JP4776891B2  
JP4765314B2  
JP2011171563A
To provide an adjustment unit used in an illumination optical system and capable of adjusting a pupil intensity distribution for each position on an irradiation object surface.This adjustment unit (10) is used in an illumination optical ...  
JP2011165784A
To synthesize light from a second light source while not reducing the volume of light emitted from a first light source, relating to a light irradiation device which guides the light of the second light source into a region where no ligh...  
JP2011158920A
To provide a projection display device capable of smoothly suppressing the lowering of quantity of specified color light or the occurrence of color irregularity even when a display element is shifted relative to the optical axis of a pro...  
JP2011158502A
To provide a high-efficiency projection type video display apparatus, without increasing the size of a light source device, when using the light source device using a plurality of light sources, wherein light fluxes are condensed to a si...  
JP4747431B2  
JP2011154828A
To enable a light distribution direction to be variable and also make a reflecting range and a light distribution direction widely adjustable by making space for light distribution smaller, in a reflected illumination system where a refl...  
JP4737880B2  
JP2011142150A
To provide an illumination optical system which ensures high illumination efficiency while using a discharge tube of a normal ultra-high-voltage mercury vapor lamp or a laser light source, without using a special light source.This invent...  
JP2011521445A  
JP4728518B2  
JP2011137970A
To provide a lens array that reduces an influence of light to propagates to a necessary area on a focal plane, and to pass through an unnecessary region, forms consequently in the necessary area on the focal plane, uniform illumination i...  
JP4725814B2  
JP4723605B2  
JP4722312B2  
JP2011133514A
To improve the contrast of an image display apparatus while suppressing reduction in the brightness thereof.The image display apparatus includes: an image display element configured to display an image by controlling a polarization state...  
JP2011135099A
To provide an optical integrator having characteristics decreasing the influence of an relative positioning error of a pair of optical members on an illuminance distribution and the shape of an illumination field.This wavefront splitting...  
JP4717813B2  
JP2011128569A
To provide an image projection device which obtains high contrast by a simple constitution using a reflecting liquid crystal panel.The image projection device includes: a color separation element; a wavelength selecting phase plate; firs...  
JP2011128634A
To obtain a lighting optical system that is easily manufactured; and to emit illuminating light suitable for image display by improving speckle noise or spatial light intensity distribution; and also to provide an image display apparatus...  
JP2011124584A
To provide an illumination optical unit and a projection exposure apparatus including the same.The illumination optical unit includes a first optical element having a plurality of first reflective facet elements and a second optical elem...  
JP2011118268A
To provide an objective optical system which has the number of apertures, for example, larger than 1.1, while satisfactorily correcting aberration and keeping sensitivity in optical adjustment small.The objective optical system includes,...  
JP2011113002A
To provide a lighting apparatus which can easily manufacture a lens array while increasing lighting efficiency and to provide a projector using the lighting apparatus.In a luminous flux adjusting device 80, a first partial luminous flux ...  
JP2011114041A
To provide a luminous flux splitting apparatus capable of guiding luminous flux having a desired intensity distribution to a plurality of spatial optical modulators without depending upon an intensity distribution of incident luminous fl...  
JP2011112997A
To provide a mirror attachment and detachment device for changing the mirror of an illumination optical system, without directly touching the mirror.The mirror attachment and detachment device 1 is configured such that a plurality of sup...  
JP2011109128A
To provide a lithographic apparatus which applies a desired angular intensity distribution to a radiation beam by using an array of mirrors, this radiation beam overcoming or alleviating one or more shortcomings of a lithographic apparat...  
JP2011107710A
To provide a uniformizing optical element and an illumination device, for supplying polarized light in a predetermined oscillation direction with high efficiency at a high illumination ratio.The illumination device includes: a rod integr...  
JP2011107264A
To improve the yield of manufacturing liquid crystal panels with high performance by uniform irradiation with UV rays.A pair of electrodes 13a, 13b for discharge is disposed opposing to each other in an axial direction of a light emittin...  
JP2011109097A
To provide a homogenizer in which any risk of being damaged is obviated or mitigated.A two-stage homogenizer includes a first homogenizer stage and a second homogenizer stage. The first homogenizer stage includes a pair of microlens arra...  
JP4693088B2  
JP2011103465A
To prevent the condensation of light from optical elements in a narrow region on a surface of a following optical member when the light from a plurality of optical elements is used.A lighting device 2 for lighting a surface of a reticle ...  
JP4687905B2  
JP2011097076A
To simultaneously transfer various pitch patterns, each with high a resolution.An exposure apparatus includes an illuminating optical system 12 for illuminating a reticle R with illumination light IL, and a projecting optical system PL t...  
JP2011091177A
To perform uniform exposure by making uniform interference fringes of laser light formed through a fly-eye lens and reducing illuminance unevenness of the laser light.A laser exposure device includes: a laser light source 1; a first fly-...  
JP2011512879A  
JP4678493B2  
JP2011077142A
To provide an illumination optical apparatus for suppressing a loss of a quantity of illumination light caused by a change in an illumination condition, and to provide an aligner and a device manufacturing method.The illumination optical...  
JP2011075651A
To decrease speckle noise related to a projection type image display device using a coherent light source, and to decrease light loss caused by an increase of a divergence angle of light.An optical unit (for example, a speckle noise decr...  
JP4670876B2  

Matches 701 - 750 out of 2,747