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WO/2001/009681A2 |
The invention relates to a multi-mirror-system for an illumination system, especially for lithography with wavelengths $m(F) 193 nm comprising an imaging system, wherein said imaging system comprises at least a first mirror (5) and a sec...
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WO/2001/009684A1 |
The invention relates to a lighting system for a projection lighting system that comprises: a light source (1) that emits light of wavelengths of $m(F) 193 nm, especially wavelengths between 10 nm and 20 nm; a collector unit (30, 32) for...
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WO/2001/007939A1 |
The present invention provides a high gain collimator (30) producing generally uniform intensity profiles for use in lithography and other applications. A focusing optic (42) is also provided. The collimator includes an optic (42) and a ...
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WO/2001/002890A1 |
A collecting and condensing system includes a paired reflector set having a first, or collecting, reflector that collects radiation emitted from a radiation source and collimates the collected radiation into parallel beams directed to a ...
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WO/2001/001703A1 |
Projection display device which comprises a light source for generating a light beam, integrator means for converting the light beam into a uniform rectangular beam, modulator means for modulating the rectangular light beam with the info...
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WO/2000/072057A1 |
A light concentration system (10) comprising a light concentrator (12) having an input end and an output end and configured to receive light at the input end, concentrate the light, and emit the concentrated light at the output end over ...
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WO/2000/052501A1 |
A discontinuous condenser lens having a good efficiency of transmission of incident light, causing little energy loss, and condensing incident light accurately in line. The incident surface of the medium of the lens is made a steplike fl...
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WO/2000/046637A1 |
An illuminator for illuminating an object to be illuminated uniformly with high light use efficiency and an apparatus for displaying an image with excellent color, field-of-view characteristics luminance, and uniformness are disclosed. F...
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WO/2000/040893A1 |
In a method for coupling light sources to a light guide, the light sources (4) are non-radial and they are coupled to the light guide (1) in such a way that the main axis of the far-field of the light sources (4) is substantially paralle...
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WO/2000/038004A1 |
The color unevenness of the projected picture is reduced and the contrast is improved. A projection display has an illuminator for illuminating light modulating means for demodulating light according to picture information. The illuminat...
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WO/2000/031579A1 |
The present invention relates to an image projection system (1) comprising an illumination system (3) for supplying an illumination beam, a modulation system (11) for modulating said illumination beam, and an optical system for projectin...
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WO/2000/019269A1 |
An optical docking station (110) comprises an optical frame (112) and a detachable virtual image display module (10). The display module (10) comprises a low power light source such as a light emitting diode (14), one or more beam splitt...
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WO/1999/046596A1 |
A fluorescent molecule is fixed to a slide (24), said slide 824) is coupled via an immersion liquid, with a light conducting body (1) first surface. The light conducting body further comprises a lateral surface (3) having the shape of a ...
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WO/1999/027406A1 |
The present invention relates to an optical condenser as well as to optical devices comprising this condenser which can be used in projection systems, in display screens, in information panels or other devices. The condenser and optical ...
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WO/1999/008144A1 |
A deconcentrating optic has an input aperture positioned near a point of minimum focus of a reflector, and has an output aperture which is larger than the input aperture. An inner surface connects the two apertures of the optic. The surf...
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WO/1999/006868A1 |
A light projecting method suitable for observing the state of the surface of an object to be measured, a surface inspection method using this light projecting method, and an apparatus used to implement these methods. In a light projectin...
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WO/1999/000692A1 |
A condenser (36) or aspheric lens comprising a condenser body having an aspheric section with a dome-shaped surface terminating in a circumferential perimeter and a sloping condenser surface extending from the circumferential perimeter o...
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WO/1998/017943A1 |
A solid integrated beamformer includes a solid nonimaging optic (40) having (i) a proximal nonimaging end and (ii) a distal nonimaging end; a solid refractive optic (50) integrally attached to the distal nonimaging end, the solid refract...
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WO/1998/010314A1 |
An optical beam shaping system has optical elements arranged in a radiation bundle in part designed as lens arrays having each several lenses for sensing partial radial bundles, their lens surfaces (3) being shaped into an optically acti...
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WO/1998/009113A1 |
An illuminating apparatus which has two lamp units suitable for the illuminating light source of a projection display and enables the bright illumination. A projection display using the illuminating apparatus is also disclosed. The illum...
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WO/1997/034173A1 |
A plate-like polarized light separator of a structure in which polarized light separating film surfaces and reflecting film surfaces are arranged alternately at fine pitches, and a projection display using such a polarized light separato...
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WO/1997/020241A1 |
A structure and method for a collection system for a projector includes a collector for reflecting light and a correcting mechanism for receiving the reflected light. The collector and the correcting mechanism, in combination, correct th...
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WO/1997/001787A1 |
A bright, small, light-weight, high resolution and economical projection display having a relatively simple construction and four great features of oblique projection, uniform illumination, large depth of focus and magnifying short-dista...
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WO/1996/041224A1 |
A reflective/diffractive light valve system collects light from multiple dimensions around a single light source. From these multiple collection dimensions, the light is directed to impinge on the valve from multiple directions. When the...
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WO/1996/031742A1 |
A radiant energy redirecting system comprising a radiant energy transmitting body structure (10); the structure comprising multiple elements (11), each of which acts as a radiant energy redirecting module, having on its cross-sectional p...
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WO/1996/031794A1 |
An image display apparatus which employs a polarization-sensitive scattering element (PSSE). In the display, a light source is usesd to illuminate a panel which modulates light in order to form an image. Positioned between the light sour...
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WO/1995/022779A1 |
A condenser lens (2) for a projection system optimizes the amount of overall brightness directed toward an aperture (3) and the uniformity of illumination at the aperture (3). The lens, when placed in the projection system, has a margina...
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WO/1995/003935A1 |
A light source destructuring and shaping device (6) which both homogenizes and imparts predetermined directionality to light rays emanating from a light source (7) is disclosed. The device comprises a micro-sculpted surface structure whi...
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WO/1994/024587A1 |
A device for use in the light-beam processing of materials comprises a point optical light source (1) and a concentrating reflector (2) with a reflecting surface in the form of a surface of rotation. The generatrix of the surface of rota...
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WO/1994/024586A1 |
A device for use in light-beam treatment comprises an elongated light source (1) and a concentrating reflector (2) with a reflecting surface in the form of a surface of rotation with a generatrix consisting of a number of sections (3) jo...
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WO/1994/023325A1 |
A family of condenser lenses for an overhead projector (OHP) are designed to balance overall brightness in the projected image versus uniformity of illumination. The lenses are plano-convex and aspheric, and their conic constant is a fun...
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WO/1994/009312A1 |
A device for light-beam working of materials consists of a light source (5) and an energy concentrator (1) which comprises a hollow reflective element, the reflective surfaces of which are formed of a basic ellipsoid (2), an additional e...
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WO/1993/021484A1 |
A radiant energy redirecting system comprising a radiant energy transmitting body structure (10) comprising multiple elements (11), each of which acts as a radiant energy redirecting module, having on its cross-sectional perimeter an ent...
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WO/1992/022008A1 |
This invention consists of a wide-angle, multi-element condenser system for an overhead projector that provides uniform illumination at the plane of the projection transparency, and a well-formed lamp image at the entrace pupil of the pr...
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WO/1992/020004A1 |
A matrix of optical concentrators (1) characterized essentially in that the concentrators (1) are optically independent rotationally symmetrical reflectors filled with a light-transparent optical material (2) having a refractive index n ...
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WO/1992/015029A1 |
When two hollow tubular light conduits (12, 14) are interconnected at a miter joint, beamed light can be redirected from one of the conduits to the other by a thin transparent prismatic element (22) that is mounted to extend along the pl...
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WO/1991/019218A1 |
Disclosed is an optical device for producing direct and/or trans-illumination of an object (2), the device consisting of an illumination and imaging device (1, 3, 4, 5), together with a polarizer (6) located in the illumination-beam path...
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WO/1991/018315A1 |
The invention relates to an image projector providing homogeneous lighting of an object to be projected while increasing the light collection efficiency. The projector (1) is comprised of a light source (6) producing a light intended to ...
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WO/1991/018307A1 |
The device of this invention employs a short focal length anamorphic lens (10) to collect light from a source (6) with asymmetric angular dispersion of the flux. Focal lenghts are chosen to provide an approximate line fuzzy focus with a ...
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WO/1991/013374A1 |
A reflector plate having such a form that two lines start at one point on a circle enclosing an emission source having a cylindrical, spherical or similar shape and extend toward opposite sides to form two symmetrical involutes and a str...
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WO/1991/010103A1 |
A device for focusing parallel rays on a receiving element (20). The device is characterized in that it comprises at least one focusing element on either side of a principal plane, each said element comprising a cylindrical primary refle...
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WO/1990/013777A1 |
A nonimaging radiant energy device (40) may include a hyperbolically shaped reflective element (42) with a radiant energy inlet (54) and a radiant energy outlet (58). A convex lens (44) is provided at the radiant energy inlet (54) and a ...
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WO/1990/011545A1 |
According to the invention the illuminating device having a high luminosity factor is essentially characterized in that it comprises a light source (1) housed in a mirror (2), a truncated transparent sleeve (8) placed between said light ...
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WO/1989/005463A1 |
A concentrator arrangement (10) consists of a plate (11) coupled to a plurality of mutually parallel first cells (14) with parabolic side walls (2, 3). The first cells (14) are optically coupled with second cells (15) whose coupling face...
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WO/1989/001640A1 |
Gradient optical density transmissive light directing devices (20, 24, 26, 28, 30) and fabrication thereof are disclosed herein. Examples of such devices include concentrators, lenses and compound lenses. The present invention teaches a ...
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WO/1987/006012A1 |
A concentrator of solar radiation comprises a carrying structure (1) on which are mounted, in annular rows, facets (2) the reflecting surfaces of which are split into annular zones (3). At least one of the peripheral annular zones (3) ha...
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WO/1987/001466A1 |
A regulator means (8) or (9) for varying the distance on the optical axis between a light source (1) such as a semiconductor laser and a condenser (2) is provided in an optical head device. A spherical aberration component, which is a fa...
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WO/1983/002310A1 |
The method and apparatus of the invention are intended to collect, in the intermediary space comprised between the transparent cover and the absorbing receiver surfaces of a solar insolator, the substantially parallel light beams from th...
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JP2024513135A |
The present invention is a method of manufacturing a mirror (26) for a microlithography projection exposure apparatus (1), in which a first mirror part (27) having a first connection surface (29) is provided, and a second connection surf...
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JP7446096B2 |
Provided is an illumination optical system advantageous for high-precision adjustment of an illumination area on an illuminated surface. The illumination optical system for illuminating an illuminated surface using light from a light sou...
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