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Matches 851 - 900 out of 4,056

Document Document Title
JP6574087B2  
JP6569722B2  
JP6570298B2  
JP6565362B2  
JP6565365B2  
JP6558093B2  
JP2019128581A
To provide a light source device capable of condensing light emitted from a light source to a predetermined irradiation range and increasing use efficiency of light.A light source device 10 is constituted by a light source 12, a collimat...  
JP6547887B2  
JP2019117271A
To provide an exposure device capable of enhancing uniformity on an irradiation surface of exposed illumination light even when in the vicinity of the center of an irradiation area is the light strong and surrounding thereof weak by alig...  
JP6540183B2  
JP6540044B2  
JP6542208B2  
JP2019110128A
To provide a light source device and a distance measuring sensor provided with the same which are capable of providing a light source having higher luminance than the prior art.A light source device 10 is provided with: a light source un...  
JP2019109431A
To condense light, while suppressing loss of a light volume, in a light source device including a plurality of lamps.In a light source device 20 including a lamp unit 20A constituted of a lamp 22A and a reflector 24A, and a lamp unit 20B...  
JP2019109302A
To provide an illumination optical system that suppresses enables optimal illumination light for a dark field illumination, as suppressing a loss of an amount of light.An illumination optical system 1, which irradiates an irradiated surf...  
JP6537899B2  
JP6536724B1
[Subject] Light equipment which heightened optical power is provided using a plurality of semiconductor laser chips, controlling expansion of an apparatus scale. [Means for Solution] A plurality of optical outgoing radiation fields provi...  
JP2019105785A
To make it possible to achieve a liquid crystal panel having high efficiency and high luminance.A liquid crystal illumination device comprises: a liquid crystal panel; a light source that irradiates the liquid crystal panel with light; a...  
JP2019517030A
It is a component (111) of an optical image formation device (101), and a contact (109) which connects especially an optical component to a support unit (112) of a support structure (102.1), and a contact (109) provided with a connection...  
JP2019517033A
An extreme-ultraviolet-rays (EUV) lithography luring engine which prints a one-dimensional line on object work piece, Projection optics (PO) to which reduction coefficient N images one D pattern optically in the larger state than 1 to a ...  
JP6529809B2  
JP6527737B2  
JP2019514034A
More specifically, this indication is related with the optical power system which has a reflector and a lens about an optical power system. In some embodiments, optical power systems may be some of extension, virtual reality imaging, and...  
JP6520211B2  
JP2019079062A
To increase effective resolution of imaged light reflected from a polarizing beam splitter.Polarizing beam splitter plates 104 and systems incorporating such beam splitter plates are described. The polarizing beam splitter plate includes...  
JP2019512716A
A photosynthesis machine (500) for using it with a measurement tool contains a plurality of light sources (LED1, LED2, LED3, LED4, LED5), the 1st filter (502), and the 2nd filter (504). The 1st filter is designed to make light which refl...  
JPWO2018020850A1
[Means for Solution] A synthetic optical system unit is provided with the following. Polarization beam splitter, Heat conduction members. The polarization beam splitter has the 1st prism including the 1st field and the 2nd prism includin...  
JP6512253B2  
JP6503766B2  
JP6506982B2  
JP6506599B2  
JP6501187B2  
JP6502325B2  
JP6498680B2  
JP6495437B2  
JP6493445B2  
JP6494259B2  
JP6493325B2  
JP6494339B2  
JP6493584B2  
JP2019049723A
To reduce influences of leaked light on a projection image formed on a substrate and to favorably project a projection image.A projection optical apparatus is provided, which includes: a refractive lens group 71a having a circular imagin...  
JP6489769B2  
JP2019032558A
To provide an illumination optical device capable of forming an annular illumination pupil distribution of a peripheral polarization state while satisfactorily suppressing a luminous energy loss.The illumination optical device of the pre...  
JP2019505825A
The present invention relates to the optical system for micro lithography projection aligners, and is especially this optical system, The 1st reflective surface (311, 411, 511) movable in order to amend the Yield difference which is arra...  
JP2019028084A
To enable reduction of exposure unevenness due to a joint of an exposure area when a plurality of projection optics system arranged in zigzag is used in an exposure device.An exposure device 100 has an illumination light source 2, a visu...  
JP2019028224A
To provide a method of forming various effective light source distributions while reducing loss of illumination light.An illumination optical system of illuminating an article includes: a first optical system of modifying a light flux fr...  
JP6472055B2  
JP6471900B2  
JP6471424B2  
JP2019023732A
To achieve an appropriate illumination condition, which is necessary to transfer faithfully a mask pattern having a variety of characteristics, for example, an illumination condition having a diversity in a light intensity distribution a...  

Matches 851 - 900 out of 4,056