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Matches 301 - 350 out of 1,696

Document Document Title
JP2013037300
To provide an exposure device capable of continuously producing a high-image-quality, inexpensive liquid crystal panel at a high yield, in a process for manufacturing a TFT substrate using a gray tone mask and to provide an exposure meth...  
JP2013025130
To provide a video display device which can get along with multiple kinds of reflective display devices having different angles at which minute mirrors are driven, without having adversely affecting display video.A circuit board 33 can b...  
JP2013025249
To provide a luminaire that reduces a partial temperature rise of an excitation light emitting position regardless of an installed position and reduces degradation in the light conversion rate of a rotary fluorescent plate and performanc...  
JP2013025080
To provide an irradiation device capable of simply increasing illuminance.In the irradiation device which includes a light source device 4 for emitting light, a glass rod 18 constituting an integrator optical system for uniformizing ligh...  
JP2013025215
To provide a projector capable of preventing luminance reduction of a display image.A projector includes: a solid light source 411 that emits light with a given wavelength; a wavelength change device 46 that has a fluorescent layer 4611 ...  
JP2013025247
To provide a projector using local dimming technique in which luminance unevenness between divided regions recognizable by an observer is low, and higher image quality display is possible.A projector 1 includes: a light source unit 2 inc...  
JP2013015762
To provide an illumination optical system and an image display apparatus which allow compact configuration of the illumination optical system even when the number of devices as light sources is increased.An illumination optical system in...  
JP2012253143
To provide an aligner device that can firstly reduce variation of edge formation positions of patterns formed on an exposure object substrate by suppressing swing of waveform patterns of diffraction images generated in a vicinity of an e...  
JP2012247778
To provide an image projection apparatus that can satisfy miniaturization design requirements by reducing the number of components arranged in a length direction.The image projection apparatus relating to one embodiment of the present in...  
JP2012238007
To provide a rear projection type video display unit capable of greatly shortening a projection distance of a projection optical system, reducing an interval between a screen lower edge and a display unit lower edge, and achieving compac...  
JP2012238900
To provide a lithography system.A maskless lithography system for transferring a pattern onto a surface of a target, comprises: at least one beam generator for generating a plurality of small beams; modulation means comprising a pluralit...  
JP2012234203
To provide a projection type video display apparatus excelling in user-friendliness, of which installation position is easily changed (which is improved in the degree of freedom in terms of installation position) without causing distorti...  
JP2012230352
To restrain loss in a quantity of light by making the curvature radii of two lens cells of an eccentric fly-eye lens different from each other.An illumination optical system comprises: a first lens array having a plurality of lens cells ...  
JP2012220589
To provide a laser illumination device capable of reducing illumination unevenness caused by an interference fringe of transmitted light of a fly-eye lens.In a laser illumination device, fly-eye lenses 2(4) and a condenser lens 32 are di...  
JP2012222349
To provide a multilayer mirror configured to reflect the radiation containing the wavelength in a range of about 6.4-7.2nm.The multilayer mirror includes a mutual layer containing a first layer and a second layer. The first layer and the...  
JP2012220815
To provide a reflecting optical element capable of changing a direction of an optical path by a single body while having a function of solving illumination irregularity.A reflecting mirror 8 is constituted by aligning a plurality of smal...  
JP2012216854
To provide an exposure device capable of supplying only EUV light to a mask, while eliminating another light other than the EUV light.A multilayer film of Mo/Si is formed on a front surface of a mirror 510, and blazed grooves 513 are for...  
JP2012212890
To provide an illumination system of a microlithographic projection exposure apparatus.An illumination system comprises: a mirror arrangement 140 having a plurality of mirror units 141, 142, 143 displaceable independently of one another ...  
JP2012209036
To provide a light source device capable of outputting a luminous flux in high efficiency by enlarging the amount of luminous flux per unit area of a light-emitting section.The light source device is provided with a first solid light-emi...  
JP2012209584
To provide an illumination optical system for a microlithographic projection exposure device.An illumination optical system for a microlithographic projection device (1) is used for illuminating an object surface (19) with illumination l...  
JP2012203344
To provide a light source unit and a projector having a light source of high luminance by a plurality of number of laser light emitters for visual rays with large outputs, a light source retaining etendue to be small and capable of formi...  
JP2012199242
To provide a light source device using light-emitting diodes and solid light-emitting elements, as well as a projector capable of projecting projection images with higher luminance with the use of the light source device.In the projector...  
JP2012199552
To provide an illumination optical device capable of achieving the lighting conditions that are rich in diversity for the shape, size and polarization state of illumination pupil luminance distribution.The illumination optical device com...  
JP2012198457
To provide a projector that suppresses a decline in a contrast ratio.In a projector, a rotational angle φ0 of an alignment axis 49 of a liquid crystal layer, a rotational angle φ1 of a transmission axis 29 of an incident side polarizer...  
JP2012195233
To provide a light source device capable of achieving high efficiency.The light source device 100 comprises an extra-high pressure mercury lamp 10 which emits discharge light L including visible light V and ultraviolet rays U, a separati...  
JP2012189854
To protect a projection window for projecting a laser beam to the outside or a projection optical system, and to prevent the erroneous projection of the laser beam, in an image display device using a semiconductor laser as a light source...  
JP2012189280
To provide a light-condensing device for obtaining a high light-condensing efficiency.The light-condensing device includes: a converging device which receives light from a parallel light source, and emits the light; and a light-receiving...  
JP2012189930
To enhance a contrast ratio of a projector.A projector 1 includes: an illumination optical system 2 for emitting first light (green light L2); a reflection type first liquid crystal panel 27 for modulating the first light emitted from th...  
JP2012189861
To provide a projector which can further enhance light utilization efficiency.In a projector 1000 which includes: an illumination device 100 including a light source device 10 that includes a solid light source for generating excitation ...  
JP2012189938
To provide a light source device capable of reducing in size of the light source device in a structure having a phosphor layer, and further to provide a projector.A light source device comprises: a first light source for emitting first l...  
JP2012189857
To provide a light source device capable of suppressing the partial deterioration of a fluorescent body by changing an irradiation range of a light beam in a fluorescence wheel, and projecting a clear image while emitting light of stable...  
JP2012185480
To provide an illumination optical system and a projector device, which are able to prevent uneven illumination by forming, on an illuminated member, an image of a divided pattern of a light emitting surface.The illumination optical syst...  
JP2012181394
To provide a projector including a light source device which can simply adjust light amount balance of fluorescent light and diffusion light.The light source device includes: a blue laser light emitting element which emits light of a pre...  
JP2012182479
To provide an illumination optical device which illuminates an irradiated surface with light in a desired polarization state by adjusting the polarization distribution on an illumination pupil surface or the irradiated surface.In order t...  
JP2012173661
To provide a lens for an illuminating device able to set more appropriately the light distribution angle of the illuminating device according to the purpose of the use of the illuminating device and also able to set more appropriately th...  
JP2012173574
To realize the miniaturization of an image display apparatus having a laser light source device with a semiconductor laser as a light source.An image display apparatus 1 includes: laser light source devices 2 to 4 which output a green co...  
JP2012169634
To provide an illumination optical unit, an illumination system, a projection exposure apparatus, a production method for producing a micro-structured or nano-structured component, and a micro-structured component or nano-structured comp...  
JP2012163966
To provide a projection-type video display device capable of making the illuminance uniformity of a video and a large dynamic range compatible.In a projection-type video display device uniformizing light from a light source by using an a...  
JP2012163970
To provide a projector capable of appropriately correcting a change in hue of a projection image due to a change of a zoom state and of reducing the manufacturing cost.A projector 1 comprises: a projection lens 46 that magnifies an optic...  
JP2012160762
To provide a method of manufacturing a semiconductor device capable of transcribing any patterns formed on a reticle at various pitch, at a high resolution with stability.A method of manufacturing a semiconductor device includes a step o...  
JP2012155342
To provide a multi-colored illumination technique without increasing the etendue of the system.A multi-colored illumination system comprises at least two light emitting diode or a light emitting diode array producing two light having at ...  
JP2012156537
To provide an illumination optical device which can achieve appropriate lighting conditions required for transferring a mask pattern having various characteristics faithfully, e.g. diverse lighting conditions for the light intensity dist...  
JP2012156536
To provide an illumination optical device which can achieve appropriate lighting conditions required for transferring a mask pattern having various characteristics faithfully, e.g. diverse lighting conditions for the light intensity dist...  
JP2012155341
To provide a compact and inexpensive projection type video display device having a wide dynamic range and excellent in color reproducibility.A projection type video display device comprises: a light source 1; illumination means for separ...  
JP2012150212
To provide a light source device having a small etendue value while enhancing use efficiency of exciting light.A light source device comprises: a substrate 41; a phosphor layer 45 that is disposed on the substrate 41 and is excited by ex...  
JP2012145886
To provide an image projector that can be easily reduced in size and manufactured at low cost, and a portable device and a manufacturing method of the image projector.An image projector includes a correction circuit part that stores a pa...  
JP2012147019
To provide a beam delivery system providing a beam of light having a reduced coherence as compared to laser light directly emitted from a laser of the beam delivery system.A beam delivery system of a projection exposure system comprises ...  
JP2012145854
To provide a projector capable of suppressing discomfort due to coloration around display patterns.A projector 1 according to the present invention comprises: an illuminating device 2 emitting a plurality of color light beams having diff...  
JP2012142460
To provide an illumination optical system for forming a uniform light intensity distribution with high efficiency while nonuniformity of a light angular distribution from a light source is dissolved.An illumination optical system for ill...  
JP2012129319
To provide a reflective optical element in which heat exchange can be carried out quickly, and to provide an optical unit, an exposure device and a method of manufacturing a device.The optical unit comprises a reflective optical element ...  

Matches 301 - 350 out of 1,696