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Matches 401 - 450 out of 1,738

Document Document Title
JP2012098366
To provide an optical unit that can enhance light use efficiency and be further miniaturized.The optical unit comprises: a PBS (Polarization Beam Splitter) 5 which includes a first prism body 2 and a second prism body 3 and is formed by ...  
JP2012093692
To provide a light radiation device and a light radiation method capable of surely forming a stripe pattern having intended optical anisotropy.A light radiation device includes: plural polarized light radiation parts for radiating polari...  
JP2012089674
To adjust the shape of an illumination light source easily to a required shape.The method for adjusting a light source includes a step 102 for setting image modulation parameters Zj representing change in the actual shape for the target ...  
JP2012088716
To prevent that, when a portable information processor incorporating an image display device is used with placed on a surface of a desk, an image is displayed on a screen in a state where a part of the image is not displayed because a la...  
JP2012084298
To provide a light irradiation device which can form a pattern faithful to a pattern of a mask and with high resolution.The light irradiation device includes a light emission part equipped with a light source element row having a plurali...  
JP2012080949
To provide a light source device for an endoscope which is capable of obtaining an image of high precision without reducing the quantity of light of a specific wavelength region of white illumination light during both of special light ob...  
JP2012079643
To provide an illumination optical device which illuminates an irradiated surface with uniform brightness and is suitable for changing simply the illumination range with little cost burden.The illumination optical device illuminates a wi...  
JP2012078784
To provide an imaging device for reducing the deterioration of picture quality due to the rays of light reflected and absorbed in a non-imaging area between imaging elements in the case of arranging a plurality of imaging elements to acq...  
JP2012069656
To provide a spatial light modulator having large area mirror elements.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mirror elements SEk a...  
JP2012069654
To configure a spatial light modulator having large area mirror elements arranged densely.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mi...  
JP2012042963
To provide an illumination optical system that is uniform in brightness on an image display element, is not substantially affected by unevenness of light emission distribution of light source means, and has high use efficiency of light w...  
JP2012037680
To provide new light condensation means that can efficiently use light energy.A light condensation optical element 10 is composed of an (A) member 11 having optical transparency and a particulate (B) member 12 having optical transparency...  
JP2012028759
To provide an EUV radiation source that provides radiation with enhanced intensity homogeneity as compared to at least a part of known EUV radiation sources.An EUV radiation source comprises: a fuel supplying source configured to send a ...  
JP2012009872
To improve illuminating performance on areas to be irradiated.An illuminating optical system includes a first laser oscillator (41a); a second laser oscillator (41b); and an optical element (42) to make intensity distribution of incident...  
JP2012004561
To provide an illumination method, an illumination optical apparatus, and an exposure equipment capable of maintaining compatibility concerning a light intensity distribution as needed, when an optical element whose configuration is diff...  
JP2012002894
To provide a reflector that can be easily obtained to avoid inconveniences of conventional concentrating solar cell systems such as complication and high cost, a preparation method thereof, and a concentrating solar cell system.The prese...  
JP2011254086
To realize an appropriate illumination condition, which is necessary to transfer faithfully a mask pattern having a variety of characteristics, for example, an illumination condition having a diversity in a light intensity distribution a...  
JP2011238706
To provide a technique advantageous to deciding an effective light source used for fine patterns.The method has a step for calculating an optical strength distribution including a positive value portion, in which an optical strength has ...  
JP2011233911
To provide an illumination optical device capable of forming annular illumination pupil distribution in a circumferential polarization state while suppressing light quantity loss to an excellent level.The illumination optical device comp...  
JP2011232761
To provide an image display in which an image having high contrast and reduced illumination unevenness is displayed.An illumination optical system that illuminates a reflection type light modulation element via a polarization separation ...  
JP2011228536
To provide a reflection optical member capable of improving reflection efficiency of a radiation beam, an optical system, an exposure device, and a device manufacturing method.An emission side fly-eye mirror comprises: a mirror block 50A...  
JP2011222841
To provide a spatial light modulation unit capable of avoiding, in a reliable manner, optical members from being damaged by light excessively condensed through multiple mirror elements.A spatial light modulation unit (3), used in an illu...  
JP2011222170
To provide a light source device capable of emitting light in a desired direction.In the light source device 100, a first reflective surface 44 is arranged to reflect first light L1 emitted from a light emitting element 20 toward a third...  
JP2011222594
To expose light so as to inhibit concentration of light energy.The illuminating apparatus to apply light to a target surface includes: multiple lens elements laid out to split and emit light; rod lenses of a columnar shape having a light...  
JP2011221277
To provide an illuminating device capable of mitigating a rise of temperature of a light shielding means placed on an optical path and satisfactorily projecting an image information.An illuminating device includes: light source means; an...  
JP2011222856
To provide a spatial light modulation unit capable of making a desired pupil intensity distribution accurately.The spatial light modulation unit (3), used in an illumination optical system to illuminate a surface to be illuminated with l...  
JP2011216796
To index-evaluate a pupil luminance distribution formed on an illumination pupil of an illumination optical system for supplying illuminating light to an imaging optical system by taking notice of imaging performance.A method of evaluati...  
JP2011216863
To adjust a beam size in the long and short-axis directions for each direction, and also allow the beam to be irradiated at a uniform intensity.A variable beam size illumination optical device has a beam size varying optical system. The ...  
JP2011210381
To provide a light source device having a small and simple focus optical system that makes incident light emitted from a solid-state light-emitting element to be efficiently incident on a light guide making up a lighting system.The light...  
JP2011211230
To provide an optical illumination device and a projection exposure device which decrease light loss when a mask is illuminated with emitted light in a prescribed polarization state.The projection exposure device includes an optical illu...  
JP2011199285
To provide an illumination system that is configured so that the system can generate a polarized illumination mode more flexibly, and to provide a lithographic apparatus.The illumination system includes: a polarization member including f...  
JP2011191763
To provide a lens structure adapted for guiding light from a light source to a plurality of directions.The lens structure 100 includes a base 110, a pillar 120, and an umbrella-shaped body 130. The base 110 has a containing pit adapted f...  
JP2011187989
To provide an illumination optical device, which almost uniformly adjusts the pupil luminance distribution at each point on irradiated surface respectively while the illumination distribution on the irradiated surface is almost uniformly...  
JP2011171563
To provide an adjustment unit used in an illumination optical system and capable of adjusting a pupil intensity distribution for each position on an irradiation object surface.This adjustment unit (10) is used in an illumination optical ...  
JP2011165784
To synthesize light from a second light source while not reducing the volume of light emitted from a first light source, relating to a light irradiation device which guides the light of the second light source into a region where no ligh...  
JP2011158920
To provide a projection display device capable of smoothly suppressing the lowering of quantity of specified color light or the occurrence of color irregularity even when a display element is shifted relative to the optical axis of a pro...  
JP2011158502
To provide a high-efficiency projection type video display apparatus, without increasing the size of a light source device, when using the light source device using a plurality of light sources, wherein light fluxes are condensed to a si...  
JP2011154828
To enable a light distribution direction to be variable and also make a reflecting range and a light distribution direction widely adjustable by making space for light distribution smaller, in a reflected illumination system where a refl...  
JP2011142150
To provide an illumination optical system which ensures high illumination efficiency while using a discharge tube of a normal ultra-high-voltage mercury vapor lamp or a laser light source, without using a special light source.This invent...  
JP2011137970
To provide a lens array that reduces an influence of light to propagates to a necessary area on a focal plane, and to pass through an unnecessary region, forms consequently in the necessary area on the focal plane, uniform illumination i...  
JP2011133514
To improve the contrast of an image display apparatus while suppressing reduction in the brightness thereof.The image display apparatus includes: an image display element configured to display an image by controlling a polarization state...  
JP2011135099
To provide an optical integrator having characteristics decreasing the influence of an relative positioning error of a pair of optical members on an illuminance distribution and the shape of an illumination field.This wavefront splitting...  
JP2011128569
To provide an image projection device which obtains high contrast by a simple constitution using a reflecting liquid crystal panel.The image projection device includes: a color separation element; a wavelength selecting phase plate; firs...  
JP2011128634
To obtain a lighting optical system that is easily manufactured; and to emit illuminating light suitable for image display by improving speckle noise or spatial light intensity distribution; and also to provide an image display apparatus...  
JP2011124584
To provide an illumination optical unit and a projection exposure apparatus including the same.The illumination optical unit includes a first optical element having a plurality of first reflective facet elements and a second optical elem...  
JP2011118268
To provide an objective optical system which has the number of apertures, for example, larger than 1.1, while satisfactorily correcting aberration and keeping sensitivity in optical adjustment small.The objective optical system includes,...  
JP2011113002
To provide a lighting apparatus which can easily manufacture a lens array while increasing lighting efficiency and to provide a projector using the lighting apparatus.In a luminous flux adjusting device 80, a first partial luminous flux ...  
JP2011114041
To provide a luminous flux splitting apparatus capable of guiding luminous flux having a desired intensity distribution to a plurality of spatial optical modulators without depending upon an intensity distribution of incident luminous fl...  
JP2011112997
To provide a mirror attachment and detachment device for changing the mirror of an illumination optical system, without directly touching the mirror.The mirror attachment and detachment device 1 is configured such that a plurality of sup...  
JP2011109128
To provide a lithographic apparatus which applies a desired angular intensity distribution to a radiation beam by using an array of mirrors, this radiation beam overcoming or alleviating one or more shortcomings of a lithographic apparat...  

Matches 401 - 450 out of 1,738