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Matches 401 - 450 out of 2,746

Document Document Title
JP2014007259A
To provide an advantageous technique for design of an exposure device which can reduce variation of aberration of a projection optical system caused by temperature variation.A method of designing a projection optical system having a hold...  
JP2014006372A
To provide a depolarizer able to eliminate speckle at a low cost and in a saved space.A depolarization element 1 comprises: an optical polarizer 3 having a light transmission area 3a; an elastic body 5 connected to the optical polarizer ...  
JP5391641B2  
JP5390691B2  
JP5387893B2  
JP2014003305A
To provide an illumination optical device for illuminating a pattern on a mask with illumination light, in which an annular illumination pupil distribution in circumferential polarization state is formed while suppressing light quantity ...  
JP2014003086A
To provide a highly-efficient light irradiation device by providing an optical system capable of efficiently taking an outgoing beam into an integrator from a light source composed of a plurality of LEDs.A light irradiation device 1 comp...  
JP2014003306A
To provide an illumination optical device which can form an annular pupil distribution in circumferential polarization state, while suppressing light quantity loss well.The illumination optical device includes a light flux conversion ele...  
JP2014003290A
To provide an optical method for performing high accuracy measurement and setting of the angular position of a facet mirror for EUV use, and to provide an optical measurement device.In the optical method for measuring the angular positio...  
JP5384750B2  
JP5375122B2  
JP5377641B2  
JP2013254229A
To provide a projection optical system comprising reduced image face curvature.A projection optical system comprises: a first optical system for forming a second image conjugate with a first image; and a second optical system comprising ...  
JP5371531B2  
JP5369319B2  
JP5373373B2  
JP2013251222A
To provide a lighting device capable of improving light use efficiency by a simple structure while attempting the high luminance of illumination light.A lighting device includes one or a plurality of light sources 10A, 10B, and 10C havin...  
JP2013243357A
To provide the optical system of microlithography projection exposure apparatus which allows flexible setting of a different polarization distribution including a tangential/radial mixed polarization distribution.A polarization-influenci...  
JP2013243386A
To obtain an illumination optical system which can form a pupil intensity distribution of desired shape and illuminance, and can achieve illumination conditions rich in diversity.The illumination optical system used in an exposure device...  
JP2013543150A  
JP2013239750A
To provide an illumination optical system capable of illuminating a surface to be illuminated with light of a required polarization state by suppressing influence of retardation caused by a subsequent optical system of a polarization con...  
JP5352694B2  
JP5352989B2  
JP2013235739A
To provide a lighting device capable of suppressing color irregularities, in one having white LED light sources arranged in which blue LED elements are eccentrically arranged.A lighting device 10 is provided with a plurality of white LED...  
JP2013541808A  
JP5338863B2  
JP5333528B2  
JP5333429B2  
JP5333322B2  
JP5337304B2  
JP2013540350A  
JP2013225673A
To provide a method and apparatus for determining apodization properties of a projection system in a lithographic apparatus.The method comprises allowing light from a given point in an illumination field to pass through the projection sy...  
JP5326259B2  
JP5327658B2  
JP2013218235A
To provide a projector that can make brightness of a projecting image uniform and improve light utilization efficiency.The projector comprises: a light modulation device 400R that includes a light source device, a lens integrator optical...  
JP2013219381A
To provide a device 1 for transferring a structure provided in a mask 2 onto a substrate 3.A device comprises: at least one illumination device 9 for uniformly irradiating a part of a mask 2; a mask holding device 7 for holding the mask ...  
JP5322331B2  
JP2013214030A
To provide a homogenizer for homogenizing light after primary concentration, which has a smaller moment of a homogenizer optical system and suppresses reduction in power generation efficiency due to displacement of an optical axis of the...  
JP5315322B2  
JP2013211558A
To provide an illumination optical device and a projection exposure device capable of reducing light quantity loss when illuminating a mask such as a reticle with illumination light in a prescribed polarization state.An illumination opti...  
JP5308275B2  
JP5308638B2  
JP2013198547A
To prevent the unevenness of color arising from differences in radiation angles of a plurality of semiconductor light sources.An endoscope light source device includes first-third light source modules 31-33. The light source modules 31-3...  
JP5302220B2  
JP2013195821A
To provide a light source device that can miniaturize a light guide optical system of blue light for blue image projection, and to provide a projector device including the light source device.A wheel 34 is provided with a prism 342 forme...  
JP2013195501A
To provide a laser emitting device and video display device capable of reducing speckle noise, having less vibration sound, and suitable for downsizing.A laser emitting device 1 includes a laser source 2 emitting a laser beam, a uniformi...  
JP2013195838A
To provide a light source device able to switch the optical path of blue light in time division without forming a phosphor plate in the shape of a wheel and to provide a projector device equipped with the same.A wheel 35 is disposed in t...  
JP2013190760A
To provide an illuminator for a microscope capable of easily switching critical illumination and Koehler illumination with improved uniformity of illumination than before in a simple composition.An illuminator for a microscope has: a fir...  
JP2013190674A
To provide a projector that can suppress occurrence of thermal damage and thermal degradation and is excellent in reliability.A projector comprises a first light source section 50A and a first optical element 60A. The first optical eleme...  
JP2013191858A
To provide an illumination optical device capable of reducing light quantity loss when lighting up a mask such as a reticle with illumination light in a predetermined polarized state, and a projection aligner.An illumination optical devi...  

Matches 401 - 450 out of 2,746