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Patent Searching and Data


Matches 401 - 450 out of 1,758

Document Document Title
JP2012163970
To provide a projector capable of appropriately correcting a change in hue of a projection image due to a change of a zoom state and of reducing the manufacturing cost.A projector 1 comprises: a projection lens 46 that magnifies an optic...  
JP2012160762
To provide a method of manufacturing a semiconductor device capable of transcribing any patterns formed on a reticle at various pitch, at a high resolution with stability.A method of manufacturing a semiconductor device includes a step o...  
JP2012155342
To provide a multi-colored illumination technique without increasing the etendue of the system.A multi-colored illumination system comprises at least two light emitting diode or a light emitting diode array producing two light having at ...  
JP2012156537
To provide an illumination optical device which can achieve appropriate lighting conditions required for transferring a mask pattern having various characteristics faithfully, e.g. diverse lighting conditions for the light intensity dist...  
JP2012156536
To provide an illumination optical device which can achieve appropriate lighting conditions required for transferring a mask pattern having various characteristics faithfully, e.g. diverse lighting conditions for the light intensity dist...  
JP2012155341
To provide a compact and inexpensive projection type video display device having a wide dynamic range and excellent in color reproducibility.A projection type video display device comprises: a light source 1; illumination means for separ...  
JP2012150212
To provide a light source device having a small etendue value while enhancing use efficiency of exciting light.A light source device comprises: a substrate 41; a phosphor layer 45 that is disposed on the substrate 41 and is excited by ex...  
JP2012145886
To provide an image projector that can be easily reduced in size and manufactured at low cost, and a portable device and a manufacturing method of the image projector.An image projector includes a correction circuit part that stores a pa...  
JP2012147019
To provide a beam delivery system providing a beam of light having a reduced coherence as compared to laser light directly emitted from a laser of the beam delivery system.A beam delivery system of a projection exposure system comprises ...  
JP2012145854
To provide a projector capable of suppressing discomfort due to coloration around display patterns.A projector 1 according to the present invention comprises: an illuminating device 2 emitting a plurality of color light beams having diff...  
JP2012142460
To provide an illumination optical system for forming a uniform light intensity distribution with high efficiency while nonuniformity of a light angular distribution from a light source is dissolved.An illumination optical system for ill...  
JP2012129319
To provide a reflective optical element in which heat exchange can be carried out quickly, and to provide an optical unit, an exposure device and a method of manufacturing a device.The optical unit comprises a reflective optical element ...  
JP2012129345
To enhance exposure characteristics.The exposure device comprises a light-emitting section (10) which emits EUV light by plasma excitation of predetermined atoms, a condensation section (20) which condenses the EUV light irradiated from ...  
JP2012113224
To provide an illuminating device that is enabled to address diversified needs by making the balance between color purity and luminous energy variable, and a projection type image displaying device using the same.In an illuminating devic...  
JP2012114358
To provide an exposure device in which speckles of an optical image formed on a photosensitive medium can be made obscure, and occurrence of unevenness of brightness can be minimized effectively in an illuminated region.An exposure devic...  
JP2012109568
To improve/optimize projection optics in a lithographic projection apparatus.Methods for matching the characteristics of a lithographic projection apparatus to a reference lithographic projection apparatus are described, where the matchi...  
JP2012103724
To provide an improved condenser for an illumination system for a microlithographic exposure apparatus.An illumination system of a microlithographic exposure apparatus comprises a condenser 601 for transforming a pupil plane 54 into a fi...  
JP2012098708
To provide a lighting device and a display apparatus which can reduce the size and improve the light use efficiency while reducing the occurrence of an interference pattern.A lighting device includes: a light source unit including a lase...  
JP2012099686
To form an illumination light source reproducing a target illumination light source shape accurately.A light source forming method comprises the steps of: linking a plurality of mirror elements SEk(k=1 to K) to a necessary number N of le...  
JP2012099685
To evaluate the degree of coincidence of the shape of an illumination light source with a target accurately.The shape Ψ of an illumination light source formed on the pupil surface of an illumination optical system is measured based on a...  
JP2012098366
To provide an optical unit that can enhance light use efficiency and be further miniaturized.The optical unit comprises: a PBS (Polarization Beam Splitter) 5 which includes a first prism body 2 and a second prism body 3 and is formed by ...  
JP2012093692
To provide a light radiation device and a light radiation method capable of surely forming a stripe pattern having intended optical anisotropy.A light radiation device includes: plural polarized light radiation parts for radiating polari...  
JP2012089674
To adjust the shape of an illumination light source easily to a required shape.The method for adjusting a light source includes a step 102 for setting image modulation parameters Zj representing change in the actual shape for the target ...  
JP2012088716
To prevent that, when a portable information processor incorporating an image display device is used with placed on a surface of a desk, an image is displayed on a screen in a state where a part of the image is not displayed because a la...  
JP2012084298
To provide a light irradiation device which can form a pattern faithful to a pattern of a mask and with high resolution.The light irradiation device includes a light emission part equipped with a light source element row having a plurali...  
JP2012080949
To provide a light source device for an endoscope which is capable of obtaining an image of high precision without reducing the quantity of light of a specific wavelength region of white illumination light during both of special light ob...  
JP2012079643
To provide an illumination optical device which illuminates an irradiated surface with uniform brightness and is suitable for changing simply the illumination range with little cost burden.The illumination optical device illuminates a wi...  
JP2012078784
To provide an imaging device for reducing the deterioration of picture quality due to the rays of light reflected and absorbed in a non-imaging area between imaging elements in the case of arranging a plurality of imaging elements to acq...  
JP2012069656
To provide a spatial light modulator having large area mirror elements.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mirror elements SEk a...  
JP2012069654
To configure a spatial light modulator having large area mirror elements arranged densely.The spatial light modulator comprises multiple mirror elements SEk each having a reflection surface SEA, a base member SVb on which the multiple mi...  
JP2012042963
To provide an illumination optical system that is uniform in brightness on an image display element, is not substantially affected by unevenness of light emission distribution of light source means, and has high use efficiency of light w...  
JP2012037680
To provide new light condensation means that can efficiently use light energy.A light condensation optical element 10 is composed of an (A) member 11 having optical transparency and a particulate (B) member 12 having optical transparency...  
JP2012028759
To provide an EUV radiation source that provides radiation with enhanced intensity homogeneity as compared to at least a part of known EUV radiation sources.An EUV radiation source comprises: a fuel supplying source configured to send a ...  
JP2012009872
To improve illuminating performance on areas to be irradiated.An illuminating optical system includes a first laser oscillator (41a); a second laser oscillator (41b); and an optical element (42) to make intensity distribution of incident...  
JP2012004561
To provide an illumination method, an illumination optical apparatus, and an exposure equipment capable of maintaining compatibility concerning a light intensity distribution as needed, when an optical element whose configuration is diff...  
JP2012002894
To provide a reflector that can be easily obtained to avoid inconveniences of conventional concentrating solar cell systems such as complication and high cost, a preparation method thereof, and a concentrating solar cell system.The prese...  
JP2011254086
To realize an appropriate illumination condition, which is necessary to transfer faithfully a mask pattern having a variety of characteristics, for example, an illumination condition having a diversity in a light intensity distribution a...  
JP2011238706
To provide a technique advantageous to deciding an effective light source used for fine patterns.The method has a step for calculating an optical strength distribution including a positive value portion, in which an optical strength has ...  
JP2011233911
To provide an illumination optical device capable of forming annular illumination pupil distribution in a circumferential polarization state while suppressing light quantity loss to an excellent level.The illumination optical device comp...  
JP2011232761
To provide an image display in which an image having high contrast and reduced illumination unevenness is displayed.An illumination optical system that illuminates a reflection type light modulation element via a polarization separation ...  
JP2011228536
To provide a reflection optical member capable of improving reflection efficiency of a radiation beam, an optical system, an exposure device, and a device manufacturing method.An emission side fly-eye mirror comprises: a mirror block 50A...  
JP2011222841
To provide a spatial light modulation unit capable of avoiding, in a reliable manner, optical members from being damaged by light excessively condensed through multiple mirror elements.A spatial light modulation unit (3), used in an illu...  
JP2011222170
To provide a light source device capable of emitting light in a desired direction.In the light source device 100, a first reflective surface 44 is arranged to reflect first light L1 emitted from a light emitting element 20 toward a third...  
JP2011222594
To expose light so as to inhibit concentration of light energy.The illuminating apparatus to apply light to a target surface includes: multiple lens elements laid out to split and emit light; rod lenses of a columnar shape having a light...  
JP2011221277
To provide an illuminating device capable of mitigating a rise of temperature of a light shielding means placed on an optical path and satisfactorily projecting an image information.An illuminating device includes: light source means; an...  
JP2011222856
To provide a spatial light modulation unit capable of making a desired pupil intensity distribution accurately.The spatial light modulation unit (3), used in an illumination optical system to illuminate a surface to be illuminated with l...  
JP2011216796
To index-evaluate a pupil luminance distribution formed on an illumination pupil of an illumination optical system for supplying illuminating light to an imaging optical system by taking notice of imaging performance.A method of evaluati...  
JP2011216863
To adjust a beam size in the long and short-axis directions for each direction, and also allow the beam to be irradiated at a uniform intensity.A variable beam size illumination optical device has a beam size varying optical system. The ...  
JP2011210381
To provide a light source device having a small and simple focus optical system that makes incident light emitted from a solid-state light-emitting element to be efficiently incident on a light guide making up a lighting system.The light...  
JP2011211230
To provide an optical illumination device and a projection exposure device which decrease light loss when a mask is illuminated with emitted light in a prescribed polarization state.The projection exposure device includes an optical illu...  

Matches 401 - 450 out of 1,758