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Patent Searching and Data


Matches 401 - 450 out of 2,801

Document Document Title
JP2014099649A
To provide an exposure apparatus which maintains a liquid immersion region in a desired state, and can excellently carry out exposure processing.An exposure apparatus EX exposes a substrate P by irradiating the substrate P with exposure ...  
JP2014098905A
To provide a projector capable of increasing brightness, while taking color balance of RGB.The projector 1 comprises: a first blue LED element 21B and a second blue LED element 22B for emitting blue light; a green LED element 23G for emi...  
JP5507248B2  
JP2014512677A  
JP5500454B2  
JP5494678B2  
JP2014511574A  
JP5492891B2  
JP5491272B2  
JP2014086684A
To provide an interferometer capable of highly accurately measuring a transmitted wavefront of an optical system to be tested while using a surface light source.The interferometer comprises: a surface light source which is disposed on an...  
JP2014085549A
To provide a light source device capable of reducing speckle noises while sufficiently retaining a light efficiency.A light source device 1 causes a laser beam incident on an optical integrator 3 to be multiply reflected on a light refec...  
JP5487630B2  
JP5485384B2  
JP5487251B2  
JP2014071979A
To provide a coherent light source device and a projector avoiding a problem of deterioration of uniformity of light projected by speckle inevitably appeared when a semiconductor laser or other laser lights or coherent light generated by...  
JP2014071456A
To provide a multi-projection system and a display system using the same which have relatively smaller thickness or width than conventional systems of the same type, in accordance with tendency of the reduction in thickness and the deman...  
JP5473350B2  
JP5470984B2  
JP5465247B2  
JP2014059584A
To provide an imaging optical system in such a way that increased demands for a correction of imaging errors over a field imaged by the imaging optical system are taken into account.An imaging optical system includes a plurality mirrors ...  
JP5459571B2  
JP5459482B2  
JP5461387B2  
JP2014507675A  
JP2014056139A
To provide an image projection device capable of improving the illumination balance in irradiated planes in a reflection type image display device and on a screen, with a simple configuration.The image projection device includes: an illu...  
JP5453804B2  
JP5453778B2  
JP5450339B2  
JP5447445B2  
JP5446856B2  
JP5448348B2  
JP2014049607A
To easily and highly accurately measuring optical characteristics of at least one of two optical systems by detecting illumination light that passes the two optical systems.In a measurement method of polarization properties of an illumin...  
JP2014044227A
To improve efficiency of heat radiation, and hold optical components against external force caused by attachment of a heat radiation part, so as to reduce relative positional deviation of beam spots of three colors, in an optical module....  
JP5439541B2  
JP2014039044A
To provide an illumination optical device capable of achieving, when mounted on an exposure apparatus, appropriate illumination conditions required for faithfully transferring a mask pattern having various characteristic features and ill...  
JP2014505368A  
JP5428250B2  
JP2014036108A
To solve a problem such that a plasmonic lens is adhered on a substrate and so a degree of freedom of a pattern is small.The exposure device for exposing an exposed member comprises: a light output part for outputting light; a reticle on...  
JP2014035449A
To provide a projection exposure whose constitution can be made simple.Disclosed is a projection exposure in which a pattern formed on a reflection type mask M is projection-exposed onto a sensitive substrate P. The projection exposure c...  
JP2014032354A
To execute a favorable projection exposure of a pattern configured atop a cylindrical plane onto a sheet substrate skirting another cylindrical plane by using a projection optical system capable of securing a favorable telecentricity of ...  
JP2014504448A  
JP2014503937A  
JP2014504005A  
JP5406639B2  
JP2014021480A
To solve the problem that a conventional lens generates a difference between light intensity nearby a light source and light intensity distant from the light source and also to solve the problem that a light source using the primary colo...  
JP2014016438A
To provide a light source device that is suitably combined and used with a device for illuminating a small region such as a microscope and a liquid crystal projector and that increases brightness of illumination light.A light source devi...  
JP5398299B2  
JP2014013303A
To provide an exposure device that causes little decrease in illuminance and no decrease in productivity per unit time even when illumination light to a fly eye lens located in an optical path of the light is physically blocked so as to ...  
JP5393055B2  
JP5392468B2  

Matches 401 - 450 out of 2,801