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WO/2004/107042 |
A method of evaluating process effects of multiple exposure photolithographic processes by first determining a set of expected images for each exposure step or process of the multiple exposure process individually (SET1, SET2) and then o...
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WO/2004/094967 |
In accordance with this invention, there is provided a method of imaging, measuring and displaying a 3-dimensional dose distribution of an energy field in a translucent 3-dimensional object comprises: applying an energy field to the obje...
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WO/2004/095133 |
A method of forming images through exposure according to digital data and development so as to obtain a print; and a silver halide color photographic lightsensitive material for use therein. In particular, a method of forming images wher...
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WO/2004/092832 |
Methods for the determination of center of focus and process control for a lithographic tool. Diffraction signatures are obtained from a plurality of diffraction structures located within multiple different focus setting fields. Variabil...
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WO/2004/093148 |
The invention describes a methodology based on the interpolation (503) of the correction (501 and 502) between selected evaluation points (505 and 506) of the target layout (504). By connecting the correction points this technique provid...
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WO/2004/090635 |
A method of producing a photomask (10) that poses a problem with a CD accuracy lowered due to a loading effect; and technique for restricting a loading effect. A method of producing a photomask (10) in which a chromium pattern (21) havin...
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WO/2004/086143 |
Method and apparatus for etching a metal layer disposed on a substrate, such as a photolithographic reticle, are provided. In one aspect, a method is provided for processing a photolithographic reticle including positioning the reticle o...
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WO/2004/086138 |
A method of processing uses a common delivery means to supply a starter solution and a replenisher solution to the processing apparatus. The volume of the delivery means is equal the volume of starter solution required to convert a fixed...
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WO/2004/086139 |
A method of photographic processing in which the cleaning solution used for washing the processor comprises at least a constituent part of the processing solution.
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WO/2004/083960 |
The present invention generally relates to optical lithography and more particularly relates to the fabrication of transparent or semitransparent phase shifting masks used in the manufacture of semiconductor devices. In particular, the p...
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WO/2004/079780 |
A patterned reflective semiconductor mask (10) uses a multiple layer ARC (24, 26, 28) overlying an absorber stack (22) that overlies a reflective substrate (12, 14). The absorber stack has more than one layer and an upper layer of the ab...
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WO/2004/079779 |
An attenuated phase shift mask (10 or 20) includes a substrate (12 or 22) and an attenuation stack (11 or 21) overlying the substrate. The attenuation stack includes a chromium layer or ruthenium layer (14 or 24) overlying the substrate,...
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WO/2004/077154 |
The present invention provides systems and methods for improved lithographic printing with polarized light. In embodiments of the present invention, polarized light (radially or tangentially polarized) is used to illuminate a phase-shift...
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WO/2004/072735 |
A method for correcting a photomask by the optical proximity effect, enabling decrease of the inter-mask difference in the pattern density-dependent error of the line width between a test mask and a corrected mask. The method comprises a...
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WO/2004/072734 |
An apparatus, system and method to compensate for the proximity effects in the imaging of patterns in a photolithography process. A light exposure of a photoresist layer is effectuated in predetermined patterns through an exposure mask h...
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WO/2004/068239 |
An image forming method for forming a stable image excellent in sharpness with no variation in density in the image part even after continuous printing by means of a high-speed digital printer. The method in which a silver halide color p...
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WO/2004/066028 |
A method for determining one or more process parameter settings of a photolithographic system is disclosed. The method is performed using a scatterometry tool (258) to measure a latent image of a pattern, a partially developed pattern, o...
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WO/2004/066358 |
The present invention generally relates to improved binary half tone ('BHT') photomasks and microscopic three-dimensional structures (e.g., MEMS, micro-optics, photonics, micro-structures and other three-dimensional, microscopic devices)...
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WO/2004/065287 |
A photoresist layer (417) on a semiconductor wafer (419) is patterned using a mask (401) with an absorbing layer (107) that has been repaired by using an additional light-absorbing carbon layer (105) that collects ions that are used in t...
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WO/2004/056377 |
The invention refers to an orthochromatic system of rare earh elements screen film for intra-oral odontological radiology, which is characterized by comprising: 1.a) a protective layer (1-PL) b) one phosphor emulsion layer (1-PEL), compr...
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WO/2004/049063 |
A photomask and method for creating a protective layer on the photomask are disclosed. The method includes placing a photomask including a patterned layer formed on at least a portion of a substrate in a chamber. Oxygen is introduced int...
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WO/2004/046812 |
A silver halide photosensitive material having a high photosensitivity, undergoing little fog, and having a favorable gradation, a long shelf life, a favorable pressure resistance, an excellent text image reproducibility, and an excellen...
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WO/2004/047121 |
The invention relates to a protective layer for an image detector used for an x-ray image. Said image detector comprises a layer of luminescent material (3), which is to be protected against mechanical stress and moisture. A polymeric pr...
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WO/2004/044967 |
Accuracy of position of a mask pattern is improved by reducing stress change in a thin film layer which occurs during a manufacturing process of a transfer mask. A method for manufacturing a transfer mask is characterized by comprising a...
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WO/2004/042344 |
The present invention relates to a method of manufacturing a detection device which involves providing a substrate having a layer of gold and a first layer of photosensitive material. Next, the substrate is subjected to a first level pho...
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WO/2004/040371 |
Novel copolymers suitable for forming the top layer photoimageable coating in a deep UV, particularly a 193 nm and 248 nm, bilayer resist system providing high resolution photolithography. Chemically amplified photoresist composition an ...
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WO/2004/039601 |
Vesicular images are formed by thermal imaging of imageable layers containing thermally imageable vesicular imaging compositions. The vesicular images can be used as masks for imaging printing plate precursors. In one aspect, the printin...
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WO/2004/027822 |
This invention provides compositions and devices having structurally ordered nanostructures (Figures 1A-1D), as well as methods for producing structurally ordered nanostructures.
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WO/2004/010217 |
A silver halide color photographic sensitive material for creating a color print by exposure and development on the basis of digital information and it image forming method are disclosed. Even if exposure is made by any type of digital e...
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WO/2004/010216 |
A method of forming a digital image with excellent line brightness and visually excellent whiteness. The method of image formation comprises exposing a silver halide photosensitive material and developing it, and is characterized in that...
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WO/2004/007745 |
The invention provides chemiluminescent assays that incorporate a film including at least one chemiluminescent precursor immobilized therewith which produces a triggerable chemiluminescent compound, the film being free of compounds which...
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WO/2004/001503 |
The present invention relates to an aqueous developer concentrate for the black and white development of silver halide photographic materials, without hydroquinone, said developer concentrate having the advantage of remaining stable and ...
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WO/2004/001504 |
The biodegradable developing solution useful in developing latent images formed in a photosensitive material. The developing solution includes a reducing agent having at least one compound selected from the group consisting of terpenoids...
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WO/2003/095226 |
The invention relates to a method for the production of a multilayer image, preferably a multicolor image, wherein a transfer foil placed on a paper substrate and treated with laser radiation is used. The transfer foil has a laser-sensit...
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WO/2003/095225 |
The invention relates to a multilayer body, involving a paper document having a hot stamp foil stamped thereon. Said hot stamp foil has a laser-sensitive layer in which a laser-induced color image (10y) has been placed by laser treatment...
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WO/2003/081336 |
An apparatus for production of a preparation water for photographic developer capable of preventing the oxidation of photographic developer, comprising housing (1), the housing (1) fitted with water inlet (14) and water outlet (15), and ...
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WO/2003/077031 |
Novel processes of applying a thin, uniform, conformal organic polymeric film by a wide variety of deposition processes into lithography pattern substrates are provided. The inventive processes result in shrinking of the gaps in the lith...
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WO/2003/074509 |
Heterocycle−bearing onium salts useful as cationic photopolymerization initiators or acid generators for chemically amplified resists, specifically, heterocycle −bearing sulfonium salts represented by the general formula [1] wherein ...
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WO/2003/071358 |
A system and method for repairing a photomask (52) for use in a photolithography process is disclosed, the photomask (52), consisting of a substrate layer (38) and a chrome layer (36) over the substrate layer (38), having a defect (42) i...
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WO/2003/063219 |
An electronic circuit is manufactured by the following method. A device is formed on the surface of a substrate, and a groove is formed in the surface of the substrate around the device. A part of the substrate is removed from the back o...
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WO/2003/062919 |
A method for photo-imageable lacquer deposition for a display device. In one embodiment, a layer of photo-imageable lacquer is deposited on top of a faceplate of a display device. Portions of the lacquer layer are removed and selected po...
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WO/2003/052803 |
A mask allowing an alignment of TTR method and a complementary division and having a high strength. A method for making the mask. A method for making semiconductor devices having high pattern accuracy. A stencil mask having, in four smal...
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WO/2003/050574 |
The invention relates to an alternative composite mask that is substantially composed of a transparent support film coated with a transparent polymer matrix that contains light-absorbing pigment particles or metal particles having an ave...
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WO/2003/048859 |
The present invention relates to a method for processing a color reversal photographic film that enables the amount of silver and tin (II) ions present in the washing water to be reduced, in order to obtain effluents that can be discharg...
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WO/2003/048858 |
The present invention relates to a new composite material with improved efficiency during its use in effluent treatment methods, in particular for treating photographic effluents. Said composite material is obtained by preparing an alumi...
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WO/2003/038521 |
The present invention relates to a concentrated solution for photographic reversal baths, and to a ready-to-use reversal solution, for limiting the growth of microorganisms and biofilm formation. The solutions comprise a chelating agent ...
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WO/2003/034147 |
An improved method for making a p-phenylenediamine color developeer concentrate in a free-base form wherein the sulfate or chloride salt of the color developer is contacted with an alkali metal hydroxide includes the steps of forming a l...
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WO/2003/030088 |
In an embodiment, an imager is used to generate an image of a sample, e.g., a tissue sample including diaminobenzidine tetrahydrochloride (DAB) stained cells. A user selects a region to be scored in the image (202). A mean intensity valu...
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WO/2003/019289 |
Compounds of formula (I) are provided, as well as methods for making such compounds. Such compounds are useful as fluorescent dyes.
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WO/2003/015329 |
The invention refers to a photosensitive device with typical appearance similar to a post office stamp, provided with information and equipped with at least two internal layers, able to perform the information transfer, be it coded or no...
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