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JP6575241B2 |
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JP6551071B2 |
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JP6551070B2 |
To provide a piezoelectric MEMS switch capable of being easily miniaturized.A MEMS switch 100 includes: a first beam 13 supported by a substrate 3 in a cantilever fashion and including a separated part 13f separated from the substrate 3;...
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JP6551072B2 |
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JP6392047B2 |
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JP6382357B2 |
Methods and systems may provide for a hybrid RF MEMS component design including an electrostatic actuation and a piezoelectric actuation. In one example, the method may include applying a first voltage to generate a first piezoelectric f...
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JP6247501B2 |
To provide an integrated circuit device including a piezoelectric MEMS switch, having no signal transmission loss in a high frequency region, easy to control stress, capable of reducing residual stress.A movable beam 5 is configured by s...
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JP6215201B2 |
An electromagnetic relay, in particular a motor vehicle relay, contains a magnet yoke, a relay coil, a hinged armature which is pivotable about an axis of rotation and on which a moving contact, as working or switchover contact, is retai...
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JP6109854B2 |
Methods and systems may provide for a hybrid RF MEMS component design including an electrostatic actuation and a piezoelectric actuation. In one example, the method may include applying a first voltage to generate a first piezoelectric f...
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JP6070404B2 |
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JP6064814B2 |
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JP6051412B2 |
A piezoelectric actuator device includes a vibrator and a driver to vibrate the vibrator. The vibrator includes a lower vibration layer configured to vibrate and an upper vibration layer coupled to an upper surface of the lower vibration...
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JP5812096B2 |
A MEMS switch has fixed support, a plate-shaped flexible beam having at least one end immovably supported by the fixed support and having an extending movable surface, a movable electric contact disposed on the movable surface of the fle...
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JP5810924B2 |
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JP5803615B2 |
There is provided an electric device including a base member, a beam elastically deformable to bend upward and having an outline partially defined by a slit formed in the base member, a conductive pattern provided on a top surface of the...
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JP5707141B2 |
To provide an actuator which is provided with rigidity so that contacts are not agglutinated to each other.A switching device includes a contact part in which a first contact is provided, and the actuator which moves a second contact to ...
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JP5679058B2 |
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JP2014229404A |
To provide a switch that can be precisely switched even at a low voltage.A switch having a pair of switching electrodes arranged opposite to each other comprises: a first diaphragm and a second diaphragm supported by a substrate; a first...
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JP2014229403A |
To provide a switch that can be switched at a low voltage.A switch having a pair of switching electrodes arranged opposite to each other comprises: a diaphragm 12 supported by a substrate 16; a piezoelectric element 20 provided on the di...
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JP5616391B2 |
Provided is an actuator apparatus including: an actuator that is provided with a driving voltage at one end and a reference potential at the other end to enable driving; a first setting section that is connected to the one end of the act...
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JP5605952B2 |
A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a m...
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JP5572068B2 |
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JP5512694B2 |
A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a m...
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JP5506035B2 |
An actuator includes: a diaphragm having a thickness equal to or greater than 0.5 μm and equal to or less than 20 μm; a piezoelectric body layer which is provided on a first surface side of the diaphragm, and receives stress from the d...
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JP5491465B2 |
A package of a switching apparatus that houses an actuator having a movable contact point and in which a fixed contact point, which is electrically connected to or disconnected form the movable contact point, is accurately formed. Provid...
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JP5485951B2 |
To solve a problem that when elongating and contracting a rectangular piezoelectric film, since the length of a diagonal line becomes longer than a side length, a phenomenon occurs such that a part corresponding to the corner of the piez...
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JP2014075193A |
To provide a method for manufacturing an electronic device capable of improving reliability.A method for manufacturing an electronic device in which a gap is formed between a first electrode 22 and a second electrode 33 located above the...
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JP2014072048A |
To provide an electronic device for sufficiently keeping connection of a movable electrode and a stationary electrode in an upward and downward direction.An electronic device has: a movable beam 13 having flexibility between a first end ...
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JP5466579B2 |
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JP5466674B2 |
To provide a switch device comprising a long life piezoelectric actuator.A switch device comprises: a body having a first contact point; and an actuator for shifting a second contact point to make it in contact with or separate from the ...
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JP5449756B2 |
A MEMS switch 30, 50, 60, 70, 80 includes a substrate 32, a movable actuator 53, 63, 83 coupled to the substrate 32, a substrate contact 35, 85 , a substrate electrode 36, 56, 86, and a conductive stopper 39 59, 69, 79 electrically coupl...
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JP2014030008A |
To suppress deterioration in characteristics of a piezoelectric film by reducing a chance where the piezoelectric film is exposed to plasma, a medicinal solution and water in air, thereby suppressing deterioration in piezoelectric elemen...
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JP5416166B2 |
Provided is a switching apparatus comprising a contact point section that includes a first contact point; an actuator that includes a second contact point and moves the second contact point to contact or move away from the first contact ...
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JP5394451B2 |
To manufacture a switching apparatus that includes a piezoelectric actuator with increased lifespan, provided is a method for manufacturing a bimorph actuator, comprising first piezoelectric element layer formation of forming a first pie...
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JP5394436B2 |
To provide an actuator in which physical destruction is prevented while enhancing the rigidity.The switching device comprises a substrate 110 on which a first contact 122 is provided, and an actuator which moves a second contact 134 to c...
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JP5385117B2 |
A piezoelectric MEMS switch includes: a base substrate; a diaphragm arranged to oppose the base substrate via a gap; a first piezoelectric drive section constituted by layering a first lower electrode, a first piezoelectric body and a fi...
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JP5323988B2 |
Provided is a MEMS switch wherein worsening of isolation can be alleviated as much as possible, even when semiconductor material is used for a lever main-layer of a flexible lever upon which a movable terminal is formed. The MEMS switch ...
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JP5314932B2 |
To provide an MEMS switch for suppressing warpage of a material due to stress, and reducing dispersion of an electric characteristic. This switch includes: drive parts 8a and 8b each having a plate-like elastic body with one end or both ...
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JP5300559B2 |
A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an up...
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JP5298072B2 |
Disclosed is a MEMS switch that minimizes closed-switch stiction and allows stable signal transmission when the switch is in a closed state. A first fixed terminal (FT11) and second fixed terminal (FT12) in the disclosed MEMS switch (10-...
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JPWO2011132532A1 |
A piezoelectric actuator that can be formed with a simpler configuration and a simpler manufacturing flow than before is realized. A fixed electrode (12) is formed on the base substrate (11). A dielectric layer (13) is formed on the surf...
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JP2013114755A |
To prevent a cantilever from being brought into contact with a ground line while realizing stable contact between a movable terminal and a signal line.A switch device 1 includes: a base substrate 10; a movable portion 11; a signal line 1...
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JP5138144B2 |
A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The ...
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JP5118546B2 |
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JP5088895B2 |
An electrical switching element (1) has at least one actuator (5) with at least one switch contact (2) and a switching mechanism (7) for converting the actuator drive movement (6) into a switching movement (4) of the switch contact (2). ...
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JP5081038B2 |
The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to c...
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JP5033032B2 |
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JP4885714B2 |
In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoel...
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JP4879760B2 |
A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact op...
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JP4874419B1 |
To restrict a bowing amount of a piezoelectric actuator, provided is a switching apparatus comprising a contact point section including a first contact point; and an actuator that moves a second contact point to contact or move away from...
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