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Matches 151 - 200 out of 1,057

Document Document Title
JPWO2013005289A1
【課題】電子デバイスとその製造方法及び電 子デバイスの駆動方法において、電子デバイ スの高寿命化を図ること。【解決手段】基材 31と、一方の端部31cと他方の端部...  
JPWO2013005289A
[Subject] Attain high life-ization of an electronic devide in an electronic devide, its manufacturing method, and a drive method of an electronic devide. [Means for Solution] Beam 34x which each of substrate 31, one end 31c, and end 31d ...  
JP2015015198A
To provide a MEMS module that prevents deformation of a moving part at the time of manufacturing.A MEMS module includes: a first surface 11a and a second surface 11b; a plurality of first electrode pads 13 disposed on the second surface ...  
JP2014229404A
To provide a switch that can be precisely switched even at a low voltage.A switch having a pair of switching electrodes arranged opposite to each other comprises: a first diaphragm and a second diaphragm supported by a substrate; a first...  
JP2014229403A
To provide a switch that can be switched at a low voltage.A switch having a pair of switching electrodes arranged opposite to each other comprises: a diaphragm 12 supported by a substrate 16; a piezoelectric element 20 provided on the di...  
JP2014221503A
To provide an MEMS device having uniform height of a sealed space.An MEMS device 1 comprises: a first substrate 10 having a first face 10a on which a first electrode 15 is disposed and being formed of a silicate glass or a ceramic; a cav...  
JP5616391B2  
JP5605952B2  
JP5572068B2  
JP5512694B2  
JP5506035B2  
JP5491465B2  
JP5485951B2  
JP2014075193A
To provide a method for manufacturing an electronic device capable of improving reliability.A method for manufacturing an electronic device in which a gap is formed between a first electrode 22 and a second electrode 33 located above the...  
JP2014072048A
To provide an electronic device for sufficiently keeping connection of a movable electrode and a stationary electrode in an upward and downward direction.An electronic device has: a movable beam 13 having flexibility between a first end ...  
JP5466579B2  
JP5466674B2  
JP5449756B2  
JP2014030008A
To suppress deterioration in characteristics of a piezoelectric film by reducing a chance where the piezoelectric film is exposed to plasma, a medicinal solution and water in air, thereby suppressing deterioration in piezoelectric elemen...  
JP5416166B2  
JPWO2012043464A1
可動端子が設けられた可撓レバーのレバー主 層に半導体材料を用いた場合でもアイソレー ションの悪化を極力抑制できるMEMSスイ ッチを提供する。MEMSスイッチ10...  
JPWO2012043464A
Even when a semiconducting material is used for a lever main stratum of a flexible lever provided with a movable terminal, a MEMS switch which can control aggravation of isolation as much as possible is provided. In the state where both ...  
JP5394451B2  
JP5394436B2  
JP5385117B2  
JP2013229985A
To provide an actuator device that dispenses with an individual adjustment of a control voltage.The actuator device provided includes: an actuator driven under the application of a driving voltage to one end and a reference potential to ...  
JP5323988B2
Provided is a MEMS switch wherein worsening of isolation can be alleviated as much as possible, even when semiconductor material is used for a lever main-layer of a flexible lever upon which a movable terminal is formed. The MEMS switch ...  
JP5314932B2
To provide an MEMS switch for suppressing warpage of a material due to stress, and reducing dispersion of an electric characteristic. This switch includes: drive parts 8a and 8b each having a plate-like elastic body with one end or both ...  
JP5300559B2
A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an up...  
JP5298072B2
Disclosed is a MEMS switch that minimizes closed-switch stiction and allows stable signal transmission when the switch is in a closed state. A first fixed terminal (FT11) and second fixed terminal (FT12) in the disclosed MEMS switch (10-...  
JP2013143231A
To increase temperature fluctuation resistance of a high-frequency microswitch.A first movable beam portion is formed in a silicon layer adhered partially to a silicon substrate through an insulating layer, and has a first signal wiring ...  
JPWO2011132532A
The electrostrictive actuator which can be formed by composition simpler than before and a simple manufacture flow is realized. The fixed electrode (12) is formed in the base board (11). The dielectric layer (13) is formed on the surface...  
JPWO2011132532A1
従来よりも簡素な構成および簡素な製造フロ ーで形成可能な圧電アクチュエータを実現す る。ベース基板(11)には、固定電極(1 2)が形成されている。ベース基板(1...  
JP2013114900A
To improve characteristics of an electronic device in the electronic device and a method for manufacturing the same.An electronic device has: a base material 31; a beam 34x a part of contours of which is demarcated by a slit 34a formed o...  
JP2013114755A
To prevent a cantilever from being brought into contact with a ground line while realizing stable contact between a movable terminal and a signal line.A switch device 1 includes: a base substrate 10; a movable portion 11; a signal line 1...  
JP2013030273A
To solve a problem that when elongating and contracting a rectangular piezoelectric film, since the length of a diagonal line becomes longer than a side length, a phenomenon occurs such that a part corresponding to the corner of the piez...  
JP5138144B2  
JP2013026195A
To provide a package of a switching device in which an actuator, having a movable contact, is accommodated and a fixed contact which is electrically connected or disconnected with the movable contact is accurately formed.The switching de...  
JP2013026194A
To provide a switch device comprising a long life piezoelectric actuator.A switch device comprises: a body having a first contact point; and an actuator for shifting a second contact point to make it in contact with or separate from the ...  
JP2013026608A
To provide a manufacturing method of a bimorph type piezoelectric actuator which enables long life, a switching device, a transmission path switching device, and a testing device.A manufacturing method of a bimorph type piezoelectric act...  
JP5118546B2  
JP2012243389A
To provide an actuator in which physical destruction is prevented while enhancing the rigidity.The switching device comprises a substrate 110 on which a first contact 122 is provided, and an actuator which moves a second contact 134 to c...  
JP2012238669A
To provide a switching device which makes deviation of a piezoelectric film larger and operates the piezoelectric film.A switching device 100 comprises: a contact part 120 provided with a first contact 122; an actuator which has a second...  
JP5088895B2  
JP5081038B2  
JP5033032B2  
JP2011176038A5  
JP2012146592A
To provide an actuator which is provided with rigidity so that contacts are not agglutinated to each other.A switching device includes a contact part in which a first contact is provided, and the actuator which moves a second contact to ...  
JP2012119595A
To provide a switching device in which adhesion between the contacts of an actuator provided with a piezoelectric element is prevented.The switching device 100 comprises a contact part provided with a first contact 122, an actuator havin...  
JP2012119596A
To provide a switching device in which warpage of a piezoelectric actuator is minimized.The switching device 100 comprises a contact part 120 provided with first contacts 122a, 122b, and an actuator 130 which moves a second contact 134 t...  

Matches 151 - 200 out of 1,057