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Matches 201 - 250 out of 1,055

Document Document Title
JP2012510138A
A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a m...  
JP2012509775A
A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a m...  
JP4885714B2
In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoel...  
JP4879760B2  
JP4874419B1
To restrict a bowing amount of a piezoelectric actuator, provided is a switching apparatus comprising a contact point section including a first contact point; and an actuator that moves a second contact point to contact or move away from...  
JP4875982B2  
JP4834443B2  
JP2011249192A
To provide a MEMS switch capable of suppressing the occurrence of stiction in a conducting state and performing stable signal transmission in a conducting state.In a fixed terminal FT11 and a second fixed terminal FT12 of a MEMS switch 1...  
JP2011249182A
To provide a switch having a contact at which pseudo-attachment does not occur even though the number of on/off operation times is increased.A switching device comprises: a first contact; and a second contact on which a protection conduc...  
JP4815756B2  
JP4813005B2  
JP4781472B2  
JP2011176038A
To provide an actuator and an actuator structure, wherein the actuator using a piezoelectric body is prevented from warping, to improve the yield, and to ensure high reliability and durability.The actuator 50 is provided with, on a first...  
JP4761897B2  
JP4744849B2
A semiconductor device having a surface MEMS element, includes a semiconductor substrate, and an actuator which is arranged above the semiconductor substrate via a space and has a lower electrode, an upper electrode, and a piezoelectric ...  
JP4740751B2  
JP4721045B2  
JP2011129369A
To provide an MEMS switch which assures a sure switching on and off operation and is superior in high-frequency response and has high reliability.The piezoelectric MEMS switch (10) includes a diaphragm (20) which is arranged opposed to a...  
JP4701113B2  
JP4692739B2  
JP4691112B2  
JP2011076725A
To provide a piezoelectric driving type MEMS element capable of improving production yield and reducing a cost with a simple manufacturing process.The piezoelectric driving type MEMS element 1 is composed of: a first substrate 10 which i...  
JP4613165B2
A micro electromechanical system (MEMS) switch includes a fixed contact (24) and a moveable contact (35) on an armature (30). The switch has electrodes (22, 34) associated with both the fixed and moveable contacts for providing an electr...  
JP2010282886A
To provide a liquid metal relay capable of preventing the generation of arc upon opening between contact points.The liquid metal relay includes: a fixed contact point 2 made of liquid metal; a movable contact point 1 made of solid metal ...  
JP2010282890A
To provide a liquid metal relay capable of preventing the generation of arc upon opening between contact points.The liquid metal relay includes: a first fixed contact point 1 including fixed contact points 1a and 1b made of solid metal a...  
JP4586642B2  
JP4580826B2
A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operat...  
JP4580745B2
A piezoelectric driving type MEMS apparatus includes: a supporting portion provided on a substrate; and a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode config...  
JP2010238737A
To reduce an increase in Q value of a varicap, or transmission loss of a switch in a piezoelectric driving type MEMS (Micro-electro-mechanical System) element.The piezoelectric driving type MEMS element includes: a substrate; a fixed por...  
JP2010232113A
To provide an RF-MEMS switch with a simple structure, easy to manufacture, compactly constituted, and with its information signal and an on/off operation hardly affected by noise, and, therefore, capable of surely carrying out on/off cha...  
JP2010177143A
To provide a piezoelectric drive type MEMS switch capable of suppressing deviations in a structure caused by bending of a driving part and having stable electrical characteristics and effective in power consumption saving.The piezoelectr...  
JP4504237B2  
JP4465341B2  
JP2010512624A
In the device (1) for separating an electric terminal (11) from a semiconductor switch (21) electrically, a semiconductor switch (21) has two opening-and-closing points of contact (4, 5) and one control point of contact (6). A device (1)...  
JP2010061976A
To provide a switch capable of reducing contact resistance between an electrode and a contact member.The switch includes an electrode 14 arranged on a substrate 11, an anchor 15 arranged on the substrate 11, a movable structure 16 suppor...  
JP4431030B2  
JP2010034048A
To provide an MEMS and an MEMS array capable of functioning under severe environments, reliable, and high in cost effectiveness, wherein the MEMS array is manufacturable using technology conforming to existing integrated circuit manufact...  
JP4413873B2  
JP4408266B2
A microswitch is provided with a movable electrode contact component including a bending displacement component having a cantilever shape, a piezoelectric/electrostrictive element having a piezoelectric/electrostrictor and a voltage appl...  
JP4404031B2  
JP4402682B2  
JP2010003573A
To provide a contact switching device capable of preventing short circuit between contacts when they are switched over from a switched-on state to a switched-off state with a comparatively simple structure.The contact switching device ha...  
JP2010500711A
This application has indicated the new composition of the minimum automatic lock type switching section article based on minute electricity machinery (MEMS) art. The conventional MEMS switch needs a continuous control signal in order to ...  
JP4386014B2  
JP4386767B2  
JP4386013B2  
JP2009285797A
To provide a micro electric machine system (MEMS) apparatus enhancing a capacitance ratio or insulation characteristics, and also enhancing an accuracy of an airtightness test, by reducing a parasitic capacitance of wiring.The micro elec...  
JP2009283874A
To provide an MEMS switch for suppressing warpage of a material due to stress, and reducing dispersion of an electric characteristic.This switch includes: drive parts 8a and 8b each having a plate-like elastic body with one end or both e...  
JP4377740B2
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that t...  
JP4366310B2  

Matches 201 - 250 out of 1,055