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Matches 251 - 300 out of 1,060

Document Document Title
JP2009285797A
To provide a micro electric machine system (MEMS) apparatus enhancing a capacitance ratio or insulation characteristics, and also enhancing an accuracy of an airtightness test, by reducing a parasitic capacitance of wiring.The micro elec...  
JP2009283874A
To provide an MEMS switch for suppressing warpage of a material due to stress, and reducing dispersion of an electric characteristic.This switch includes: drive parts 8a and 8b each having a plate-like elastic body with one end or both e...  
JP4377740B2
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that t...  
JP4366310B2  
JP2009266615A
To provide an MEMS switch capable of preventing an effect of warping due to a material stress.The MEMS switch is provided with: a base plate having an open mouth portion; a driving arm of which the piezoelectric driving portion having a ...  
JP2009252516A
To provide an MEMS switch in which a parasitic capacitance between a first contact electrode and a second contact electrode are reduced and a driving voltage is lowered and moreover a contact reliability is improved.The MEMS switch inclu...  
JP2009252598A
To provide an MEMS switch in which a reduction of a transfer loss is attained and moreover a contact pressure is enlarged as well while isolation characteristics are improved.The MEMS switch includes a pair of signal lines 34, 34 which a...  
JP2009252378A
To provide an MEMS switch which reduces a parasitic capacitance between a movable contact and both of stationary contacts.The MEMS switch includes a base board 1, a pair of signal lines 34, 34 which are formed on the one surface side of ...  
JP2009245877A
To provide an MEMS switch capable of securing desired contact pressure with less power consumption while reducing parasitic capacitance between a movable contact and a stationary contact, and its manufacturing method.In a structural body...  
JP2009238532A
To provide a micro electric machine switch capable of reducing noises and capable of stably contacting a fixed contact and a movable contact.The micro electric machine switch is provided with a movable contact support table 1 having a ta...  
JP2009238547A
To provide a MEMS (micro electro mechanical system) switch which reduces a parasitic capacitance between a movable contact and both fixed contacts and secures a desired contact pressure while realizing a low power consumption.The MEMS sw...  
JP2009531821A
The switch has a thermal connecting element (10) between two interfaces (1, 2), where the element is made resilient and has sufficient thermal conductivity to present a weak thermal gradient between the interfaces. An actuator (20) e.g. ...  
JP2009193804A
To provide an actuator which has an improved operation accuracy.The actuator is provided with a frame body 17 having a hole 16 on a surface, a transmission electrode portion 18 arranged on an upper side of the hole 16, and a driving port...  
JP4316590B2  
JP2009529210A
[Means for Solution] An electrical switch element, especially a relay have an actuator (5), switch contact (2), and a switch mechanism (7). Since a switch mechanism changes drive movement (6) of an actuator into switching movement (4) of...  
JP2009528667A
A MEMS piezo-electricity switch (100) unrelated to a bad influence to morphological alteration and the consequential characteristic which provide an advantage of small structure which can be easily manufactured to a single unit, and are ...  
JP2009171737A
To provide an actuator of which the maximum electrostatic capacity is made large by reducing the influence of warpage of a beam, and, moreover, in which steep variation in the electrostatic capacity around the maximum electrostatic capac...  
JP2009158363A
To propose a switch capable of reducing power consumption at non-driving times, and applicable to a battery-driven portable electronic unit or the like for which consumption power is to be a problem.The switch 1 is provided with a cylind...  
JP2009152194A
To provide a MEMS switch preventing inconvenient conduction modes and damages on the switch caused by an accidental operation.The MEMS switch includes a movable actuator 33 combined with the substrate, a substrate contact 35, a substrate...  
JP2009140799A
To provide an inexpensive switch without necessity of another mounting package.Two sheets of substrates 9, 10 at least at one of which an outside electrode is installed are mutually stuck to form a cavity part in the interior. In this ca...  
JP2009134993A
To provide an MEMS switch in which downsizing is achieved and on/off of an electric current of a large capacity can be carried out surely.A silicon substrate 1 has a support part 2, and one end of a plate-like magnetic body 3 is fixed to...  
JPWO2007083769A1
第1導電膜12を形成する工程と、第1導電 膜12の上に金属または前記金属の合金を含 む第2導電膜13を形成する工程と、第2導 電膜13の上に第3導電膜14を形成す...  
JP4258439B2  
JP4231062B2  
JP2009021227A
To provide an electromechanical switch capable of being compatible with both low-voltage driving and high isolation.The electromechanical switch has a first beam 106 organizing a driving section, a second beam 107 as a contact section li...  
JP4216392B2  
JP2008545542A
A minute electric machine system (MEMS) element may have at least 1 flexible region currently supported by the substrate and this board. The at least 1 above-mentioned flexible region may have a super-lattice which it has after each has ...  
JP2008258670A
To provide an antenna device that realizes transmission and reception, in a frequency band having a wide bandwidth.The antenna device is equipped with a variable capacitance capacitor C2 using a dielectric material, a capacitor C1 connec...  
JP2008253058A
To decrease possibility that a jointed portion to a wiring board peels off, when mounting on the wiring board is performed and decrease the possibility of a lead wire being cut, when an electrode is electrically connected through a wire ...  
JP2008238330A
To provide a MEMS (Micro-Electro-Mechanical System) device having low operation voltage and strong pressure contact force and separating force.This MEMS device has a substrate 1, a supporting part 2 provided on the substrate 1, a fixed e...  
JP2008177043A
To provide a microswitching element suitable for suppressing orientation variations of a movable contact electrode to a fixed contact electrode, and a manufacturing method of the microswitching element.The element X1 is provided with a f...  
JP2008166111A
To provide a switch capable of switching operation without causing a sticking.The switch is provided with a substrate 2, a signal line conductor 1 arranged on the substrate 2, and a movable electrode part moving on the signal line conduc...  
JP2008159327A
To provide a contact switching device capable of preventing adhesion of a surplus conductive fluid, in the surrounding of an injection port.The contact switching device is provided with the body part 1 which has a housing chamber 1d in w...  
JP2008159322A
To provide a contact switching device capable of preventing flow out of a conductive fluid from an injection port.The contact switching device is provided with the body 1d which has a housing chamber 1d, in which a conductive fluid L is ...  
JP2008159323A
To provide a contact switching device capable of preventing adhesion of a surplus conductive fluid, in the surrounding of an injection port.The contact switching device is provided with the body part 1 which has a housing chamber 1d in w...  
JP2008159324A
To provide a contact-switching device capable of preventing flowing out of a conductive fluid from an injection port.The contact-switching device is provided with the body 1d which has a housing chamber 1d in which a conductive fluid L i...  
JP2008159326A
To provide a contact switching device capable of preventing flowing out of a conductive fluid from an injection port.The contact switching device has the body part 1 which has a housing chamber 1d in which a conductive fluid L is stored ...  
JP2008159325A
To provide a contact switching device capable of preventing flowing out of a conductive fluid from an injection port.The contact switching device has the body part 1 which has a housing chamber 1d in which a conductive fluid L is stored ...  
JP2008091204A
To provide a relay capable of reducing the manufacturing costs, reducing the manufacturing time, and reducing its size.The relay comprises first and second fixed contacts F1, F2; a movable contact M for electrically disconnecting the fix...  
JP2008091167A
To provide a micromechanical device having a piezo-electric drive actuator which does not use a lead system material for a piezo-electric film, is easy to manufacture and can eliminate sticking even if it happens.The micromechanical devi...  
JP2008082069A
To provide a door handle for a vehicle which can detect with accuracy the approach and contact of a user's hand associated with operation of the door handle provided to a door for a vehicle.The door handle for the vehicle is provided to ...  
JPWO2005104258A1
It is an inspection method of the piezo-electricity/electrostriction actuator possessing piezo-electricity / Electrostrictive object, and two or more electrodes. This inspection method takes up a frequency characteristic when vibrating p...  
JP2008053077A
To provide a MEMS (Micro electro-mechanical system) switch capable of maintaining contact pressure at low and having a long lifetime.In the MEMS switch, at least one of a fixed electrode 3 or a lower electrode 5 is constructed of Au, and...  
JP4045274B2  
JP4044864B2  
JP4039744B2  
JP4037394B2
A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the...  
JP2008005642A
To provide a piezoelectric-driving MEMS actuator having a mechanism in which a distance between an action end and a fixed electrode is maintained to be constant irrespective of whether residual distortion is large or small, and reproduci...  
JP2007318712A
To provide a device including a piezoelectric thin film capable of suppressing a spurious radiation by preventing the occurrence of unnecessary vibration in a lateral mode, and capable of avoiding degradation of reliability by stress con...  
JP2007534283A
[Subject] The electric activity polymer transducer which makes the bending besides a plane is offered. [Solution means] A transducer forms the set of the surface feature based on bending of electric activity polymer. The set of surface f...  

Matches 251 - 300 out of 1,060