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Patent Searching and Data


Matches 301 - 350 out of 1,055

Document Document Title
JP2007299631A
To provide a contact switching device capable of carrying out switching operation smoothly. The contact switching device 1 is provided with a body part 2 having a first fluid housing room 2a which is formed by using a semiconductor board...  
JP2007299632A
To provide a contact switching device which is easy to manufacture and in which electric power saving is achieved. The electric contact switching device 1 is provided with a body part 2 having a semiconductor board 3 in which a housing r...  
JP2007299629A
To provide a contact switching device in which a position of a contact face of a conductive fluid and an insulating fluid in a fluid housing room can be set at a prescribed position at non-action of an actuator. The contact switching dev...  
JP2007299628A
To enable to easily control a position of a conductive fluid to be injected into a housing part. By reducing wettability by making the inner wall face of a groove part 2b a rough face, and accordingly by suppressing adhesion of the condu...  
JP2007294326A
To provide a high-reliability switch; and to provide a power inverter using it. This switch is provided with a board 1, a signal wire 2, a support base 3, a fixing member 4, a drive part 5 and a contact electrode 6. The signal wire 2 and...  
JP2007273451A
To provide a piezoelectric MEMS switch eliminating the process of enforcing the etching of the back side of a substrate as conventionally performed, and also eliminating process constraints, by improving the structure as a piezoelectric ...  
JP2007273800A
To provide a piezoelectric drive-type MEMS actuator, capable of proper reproducibly and high precisely controlling the displacement amount of a piezoelectric drive by suppressing an impact of warpage due to by a residual strain of a piez...  
JP2007259669A
To provide a piezoelectric actuator that is capable of controlling the amount of piezoelectric drive displacement with proper reproducibility and in a wide range, while suppressing warpages due to the residual strain of a piezoelectric f...  
JP2007250217A
To provide a relay usable without malfunction even under a high magnetic field environment. A movable contact 2 of the relay 1 is formed of an elongated plate shaped ion conductive polymer/noble metal assembly which is formed by joining ...  
JP2007227353A
To provide a method for fabricating a downward type SMEM switch, and a downward type MEMS switch, capable of improving the performance of a reconfigured antenna by fabricating a contact pad which is actuated downward by piezoelectricity ...  
JP2007207498A
To provide a mechanism device capable of preventing malfunction of an upper electrode sticking to a lower electrode due to Coulomb force, by widening a gap between the both electrodes in a method other than thickening of a sacrifice laye...  
JP2007200742A
To provide an actuator for a microswitch which can exert ample displacement generating force and amount for mechanically carrying out connection and disconnection of electrical and optical signals, and which is compact and has high durab...  
JP2007522609A
An electronic device includes the micro electric machine switch (MEMS) which has a ピエゾ electricity element equipped with a ピエゾ electricity layer (12) between the 1st and 2nd electrode layers (11, 13) structurized by the separ...  
JP2007188866A
To provide a MEMS switch in which contact resistance is reduced by improving a contact structure for a signal line, and insertion loss can be reduced thereby, and which can be driven with a low voltage.This MEMS switch includes a substra...  
JPWO2007083769A
A process of forming the 1st electric conduction film 12, and a process of forming the 2nd electric conduction film 13 containing an alloy of metal or the metal on the 1st electric conduction film 12, It heat-treats in a process of formi...  
JP2007515306A
The microelectromechanical system (MEMS) element ( 101 ) comprises a first electrode ( 31 ) that is present on a surface of substrate ( 30 ) and a movable element ( 40 ). This overlies at least partially the first electrode ( 31 ) and co...  
JP2007141835A
To provide a piezoelectric high frequency micro-machine switch in which a cantilever and a CPW wiring line can be formed on one base plate and the above cantilever drives downward.The high frequency micro-machine switch is composed of a ...  
JP3904240B2
A ceramic element comprises a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 f...  
JP2007066729A
To reduce an operating time for switching electric contacts in comparison to a thermally driven device for switching electric contacts.A device for switching contacts comprises: a semiconductor substrate 1 which has a container 2 for con...  
JP2007066736A
To provide an electric contact switching device which improves the reliability of electrical connections.The electric contact switching device is provided with a silicon substrate 1 where a groove 2 which is served as a fluid flow passag...  
JP2007066728A
To reduce an operating time for switching electric contacts in comparison to a thermally driven device for switching electric contacts.A device for switching electric contacts comprises: a semiconductor substrate 1 which has a container ...  
JP2007066737A
To provide a normally closed electric contact switching device with high responsiveness.The electric contact switching device is provided with a silicon substrate 1, a glass substrate 7 attached to the silicon substrate 1 while covering ...  
JP2007066727A
To reduce an opeating time for switching electric contacts in comparison to a thermally driven device for switching electric contacts.A device for switching electric contacts comprises: a semiconductor substrate 1 which has a container 2...  
JP2007066732A
To easily control the position of a conductive fluid injected into the inside of a container, and to reduce tendency of air bubble remaining.A container 2 comprises a cavity 2a, a groove 2b, an injection groove 2c, and an injection openi...  
JP2007066733A
To provide an electric contact switching device in which a conductive fluid is easily contained in a container.A container 2 comprises: a cavity 2a, a volume of which is reduced by deformation of a diaphragm 1b; a groove 2b, a cross-sect...  
JP2007504608A
The switch of a minute electric machine system (MEMS) contains the fixed contact 24 and the traveling contact 35 on the armature 30. The electrodes 22 and 34 relevant to both of fixed contacts and traveling contacts for a switch to bring...  
JP2007035620A
To provide a method for reducing or eliminating formation of an oxide which becomes hindrance in manufacturing or operation, in regard to a fluid switch.This method comprises (i) a step providing a switching fluid on a first substrate un...  
JP2007026804A
To provide a micromachine switch that can be manufactured easily with improved yields, and can reduce voltage required for operating the switch, and to provide a manufacturing method of the micromachine switch.The manufacturing method of...  
JP2007012558A
To provide a movable element which can control an generation of a stiction and a semiconductor device, a module and an electronic device using the movable element.The movable element is provided on a semiconductor base plate 1 with a sig...  
JP2007005635A
To provide a semiconductor device comprising an actuator capable of laterally generating a large displacement.The semiconductor device comprises a beam part 11 extending in a first direction with its one end fixed by a supporting part 13...  
JP2006351297A
To provide a movable element composed by reducing voltage/power consumption to an extent allowing itself to be formed integrally with a low voltage/low power consumption-based element; to provide a module with the movable element incorpo...  
JP2006351296A
To provide a movable element facilitating a manufacturing process, never disturbing reduction of a package size, and having low voltage/low power consumption to an extent allowing itself to be integrally formed with a low voltage/low pow...  
JP2006346830A
To provide a micro mechanical device, a micro switch, a variable capacity capacitor, a high frequency circuit and an optical switch capable of restraining malfunction.This micro mechanical device comprises a first piezoelectric driving a...  
JP2006331742A
To provide an electromechanical switch capable of responding to switching at a high speed with a low drive voltage.An electromechanical switch body 10, which is a MEMS switch has a first movable electrode 14 and a second movable electrod...  
JP2006326834A
To provide an improved in-site cap for an integrated circuit device including a micro machine device, a method for manufacturing the in-site cap, and provide such a cap and a method of using a basic IC circuit manufacturing process for m...  
JP2006526871A
The nano electric machine switching system (NEMSS) constituted considering mechanical operation of a nanotube as a center is offered. Such NEMSS can realize the function as an automatic switch, a degree diode, amplifier, an inverter, a v...  
JP2006524880A
The method and system for an assembly of a lamination electric machine system and lamination electric machine structure and manufacture are explained. Two or more structure layers (104, 106, 108, 110, 112, 114) containing at least one st...  
JP2006523924A
The switch and its manufacture method of a fluid base are indicated. The 1st substrate (102) and 2nd substrate (104) in which a switch demarcates at least one pair in some cavities (106, 108, 110) between substrates with 1 enforcement fo...  
JP2006523923A
The electric relay which has electric contact (118, 120) of two wettability in which each electric contact supports a conductive liquid (126). The switch finger (114) of wettability is moved from the position which is not bent to the 1st...  
JP2006523926A
The method of creating a substrate and a substrate and the switch incorporating a substrate are indicated. A substrate (100) consists of the 1st electrode (112) vapor-deposited on the 1st layer (101) and the 1st layer, and the 2nd layer ...  
JP2006523925A
The electric relay which has electric contact (118, 120) of two wettability which supports a conductive liquid (126). A switch finger (114) without wettability is moved between the 1st position between electric contact, and the 2nd posit...  
JP2006523927A
The switch of a fluid base is indicated. With 1 enforcement form, a switch (400) is the 1st (100) and the 2nd (402) substrate which were combined, At least one pair in some cavities is demarcated among them, The 1st (100) and the 2nd (40...  
JP2006523928A
The 1st of the curved switching fluid cavity (816), the 1st which demarcate the 2nd intersection channel (134, 136) between substrates and which were combined, and the switch (100) which has the 2nd substrate (102, 104). Switching fluid ...  
JP3834862B2
To open/close a large current with a large effective contact area, by including a drive element making two sheets of slide plates slide in a direction parallel to a surface, and sliding the slide plate in a direction arranging a conducto...  
JP2006269429A
To provide a switch with a wettable surface made of a material not making alloy with switching fluid.The switch is composed of a first and a second base plates (102, 104) demarcating a plurality of cavities (106, 108, 110, 112, 114) betw...  
JP2006261515A
To provide a method suitable for executing wet etching while sufficiently protecting a protection target, and also to provide a micro movable element that is manufactured by utilizing the method.The wet etching method includes: a process...  
JP2006228717A
To provide an electromechanical switch capable of responding to switching at a high speed by low driving voltage.An electromechanical switch body 10 being a MEMS switch has a first movable electrode 14 and a second movable electrode 16 h...  
JP3815405B2
To provide a superminiature matrix relay easy to assemble. A plurality of electric circuits are opened and closed in such a way that a piezoelectric element 128 is installed in a thin plate base material 125 comprising a single crystal, ...  
JP2006221956A
To provide a fuse of extra small size capable of cutting off a circuit certainly with a low current value.The fuse comprises a support frame 4 of which a pair of frame parts 3, 4 of nearly U-shape are arranged oppositely, a vibration bod...  
JP2006179384A
To provide a micro-contact switching device capable of preventing contacts from becoming unable to open and close due to mutual adhesion thereof, even if the number of accumulated switching movements is increased, which can be mounted on...  

Matches 301 - 350 out of 1,055