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JP2000348594 |
To actuate a micro-machine switch at low drive voltage and suppress warpage of a contact electrode by providing an intermediate electrode arranged opposed to a lower electrode on a flexible girder member supported by a support member on ...
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JP3139413 |
To increase the electrostatic attraction between both electrodes, eliminate the concurrent use of piezoelectric drive, miniaturize a micro-relay, increase sensitivity, reduce powder consumption, and improve productivity by molding the fi...
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JP3137112 |
To provide a simple structure so as to reduce insertion losses of a micromachine. This micromachine is provided with first and second high frequency signal lines 1b and 1a, a cantilever 11 fixed to the end of the first high frequency sig...
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JP3137108 |
To reduce insert losses of a micromachine switch and to enhance high frequency characteristics of a circuit using the micromachine switch. This micromachine switch comprises a driving means 12 for displacing a contact 11 according to a c...
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JP2000315441 |
To provide a device for a high-integrated radio frequency transceiver allowing selection or change of a component deciding a different operation frequency. A switch 11 is formed by use of a micro electromechanical system (i.e., a fluctua...
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JP2000311961 |
To improve dimension accuracy and to inexpensively manufacture a semiconductor element by providing at least one positioning projecting at either opposing surface of a base wafer and a cap wafer. For example, a micro relay consists of a ...
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JP2000311572 |
To provide an electrostatic relay having excellent response even in a small size and capable of working in a low driving voltage and suppressing transfer between contacts or bounce generation. In this relay, an inner space is sealed by p...
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JP2000311573 |
To provide a simple structure so as to reduce insertion losses of a micromachine. This micromachine is provided with first and second high frequency signal lines 1b and 1a, a cantilever 11 fixed to the end of the first high frequency sig...
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JP2000306484 |
To make the size thin and appropriately open a contact by bending part of a moving electrode, contacting part of the moving electrode with a fixed electrode to elastically deform, and closing the moving contact to the fixed contact. A mo...
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JP2000306478 |
To provide a micro-relay possible to be thinly formed preventing a movable base from being deformed, and capable of keeping contact in an excellent condition. In the structure of this micro-relay, a movable base 2 is bonded to a cap memb...
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JP2000294104 |
To reduce insert losses of a micromachine switch and to enhance high frequency characteristics of a circuit using the micromachine switch. This micromachine switch comprises a driving means 12 for displacing a contact 11 according to a c...
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JP3119255 |
To operate at low driving voltage and increase breakdown voltage characteristics of an insulator film by forming a region from a connecting part with a supporting member to only the position facing a bottom electrode of a beam member wit...
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JP2000278001 |
To obtain a microwave switch matrix with a simple configuration where signals are highly isolated. This switch matrix is provided with a plurality of input lines 22 that respectively receive an input signal, a plurality of output lines 2...
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JP3112001 |
To suppress deterioration of a reflection characteristic at the ON time, and simultaneously to improve an isolation characteristic at the OFF time, by making a moving element have at least two projecting parts formed by notching the end ...
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JP2000243202 |
To reliably open and close a contact without enlarging a micro-relay. A movable contact 28 formed on a movable base 20 is brought into contact with and detached from a pair of fixed contacts 13, 14 provided in parallel with a fixed base ...
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JP2000208018 |
To provide an electrostatic moving contact element capable of preventing a short circuit between a fixed attracted electrode and a movable attracted electrode and capable of being miniaturized and lowering the drive voltage. When a drive...
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JP2000200533 |
To lower the loss of the energy flowing in a signal line by providing a gap and a control line connected to an electrode arranged with a space from each signal line, and arranging the control line and a control terminal with a more space...
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JP2000188049 |
To provide an inexpensive micro switch of high performance which can be produced in high volume. A micro machine switch comprises: a support member 7 which is disposed in the proximity of a gap on a signal line on a substrate 1 and has a...
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JP2000188050 |
To operate at low driving voltage and increase breakdown voltage characteristics of an insulator film by forming a region from a connecting part with a supporting member to only the position facing a bottom electrode of a beam member wit...
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JP2000173375 |
To prevent generation of fusing at the time of closing a contact so as to smoothly open/close the contact by forming uneveness on a surface of the contact.Under the condition where no voltage is applied to between a fixed electrode 4 and...
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JP2000164105 |
To reduce electric power consumption, and to easily and reliably provide a latching structure by supporting both end parts of a buckling part by support parts, and holding a deformation state in either one position.A silicon movable part...
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JP2000164104 |
To improve contact point opening performance without enlarging an electrostatic microrelay by forming a projecting part at least in either one of a fixed base board and a movable base board, and allowing the projecting part to abut to th...
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JP2000149751 |
To suppress deterioration of a reflection characteristic at the ON time, and simultaneously to improve an isolation characteristic at the OFF time, by making a moving element have at least two projecting parts formed by notching the end ...
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JP2000149750 |
To improve an isolation characteristic at the OFF time, by making a moving element include a projecting part formed by notching at least one end of the periphery on at least one distributed constant line side of the periphery, and by mak...
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JP2000113792 |
To provide a small micro relay having good high frequency characteristic by providing fixed electrodes on both sides of a signal line with equal distance and sharing it with a high frequency GND electrode.Fixed electrodes 12 and two sign...
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JP2000090802 |
To provide a micro electromechanical device which is operated at a low biasing voltage, and has a switching operation independent of the stiffness of a beam. This device 20 is provided with two parallel interconnecting lines 24a, 24b tha...
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JP2000090801 |
To prevent loss of microwave from increasing and prevent manufacturing cost from rising, using a micro machine switch for switching the microwave. This circuit 1 is provided with a semiconductor substrate 2, a microwave transistor 3 prov...
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JP2000057927 |
To prevent the adhesion at a contact while securing the opening condition, and to prolong the service life while improving the reliability by utilizing the repulsion Coulomb electrostatic force between a cantilever beam and a contact ele...
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JP2000030595 |
To lessen a size of a filter structure required for a multi-system mobile communication means, by forcing at least either one of a first or second conductors to transmit a control voltage into contact with a piezo-electric layer, and by ...
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JP2000031397 |
To sufficiently lower resistance of a movable thin film part in an MEMS element, reduce irregularity of the resistance, improve reliability of wiring using the MEMS element, and facilitate integration with a semiconductor integrated circ...
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JP2000030594 |
To lessen a size of a filter structure required for a multi-system mobile communication means, by integrating a resonator element and a switch element on the same base and in the same process. A bulk acoustic wave(BAW) resonator having a...
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JP2000021282 |
To provide a stable initial action and strong contact releasing force by a simple structure and to lower costs so as to enable mass production by arranging an abutting member abutting to a driving part of a movable electrode before volta...
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JP11355003 |
To provide an inexpensive high frequency integrated circuit with new constitution. In a high frequency integrated circuit, a micro strip line 2 is directly formed on a silicon substrate 1 and the resistivity of the silicon substrate l is...
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JP11355028 |
To reduce one step of scanning without narrowing the scanning range of a radiation beam in a small phased array antenna system. A phased array antenna device has multilayer structure formed of a radiation element layer 41 where respectiv...
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JP11274805 |
To provide an integrated circuit reducing the area to be occupied by control signal lines by controlling a lot of high frequency switches through a multilevel control voltage with a little control signal lines while sharing the control s...
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JP11260178 |
To prevent formation of a bad-conductor layer on a contact surface, achieve a low contact resistance property, and hence miniaturize a device and reduce power consumption, by devising on material quality of a layer lying between a contac...
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JP11260233 |
To obtain an electrostatic relay of high practical use, having low voltage drive, a low contact resistance and a large contact rating. This relay is constituted of a board, an inboard beam-shaped torsional elastic part 3, which is held w...
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JP11250792 |
To reduce an occupation area and to reduce a drive voltage by separating fixed attraction electrodes from movable attraction electrodes, arranging fixed contact electrodes apart from movable contact electrodes, and by supporting respecti...
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JP11232987 |
To provide an electrostatic relay with superior practical applicability of low drive voltage, low contact resistance, and high contact capacity. This electrostatic relay comprises a double-supported beam-like twisted elastic part 3 which...
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JP11219652 |
To secure an insulation property, to allow contact with a low driving voltage and to increase reliability by providing a recess on at least one of the upper face of a base and the lower face of a moving contactor, and arranging a contact...
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JP11204013 |
To execute a logical operation for a plurality of input data via a single electrostatic moving contact element. A support beam 7 is fitted with a moving attraction electrode 5 in such a state as faced to moving part drive electrodes 2a a...
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JP11185586 |
To prolong the service life of a contact, and improve contact reliability by partially removed a position immediately above a movable contact, and providing an intermediate insulation membrane and an auxiliary spring layer at which a gap...
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JP11176306 |
To provide a small semiconductor device produced easily and having a small floor area. This device is constituted by forming a space between a plurality of silicon wafers 11-21 which are laminated with each other while integratedly joine...
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JP11176307 |
To provide a small electrostatic microrelay having a high voltage resistance and contact pressure. A movable contact 26 is arranged on an upper surface of a thin plate movable piece 22 supported with both ends of an actuator 20. From bot...
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JP11168319 |
To provide a miniaturized device by connecting a feeder waveguide with respective radiation waveguides through distribution constant lines, changing a feeding phase in the distribution constant circuit and providing a switch element whic...
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JP11144596 |
To extend the life and improve the mechanical reliability by providing a circuit board for forming a pivot point, a pin rotatably supported thereby, a beam rotatable between two positions, at least one pair of electric contacts and a fie...
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JP11134998 |
To provide a designed operating characteristic hard to generate the thermal stress and thermal deflection by collecting plural anchors for standing at a part in a top surface of a base, and supporting a movable electrode through a thin p...
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JP11120884 |
To provide an electrostatic microrelay to be driven by a low drive voltage so as to obtain a desired contact pressure. A base 10 is formed with a fixed electrode 12 at a central part of a top surface thereof, and a fixed contact 13 is ar...
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JP11111146 |
To provide an electrostatic microrelay which has a desired operation speed in an initial operation and return operation and reliably keeps a desired contact pressure and can be driven at low driving voltage. An actuator 20 is constituted...
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JP11074717 |
To decrease processes for mounting a moduled switch and to reduce manufacturing cost by forming a phase shifter and a phase shift control circuit which controls the phase shifting of the phase shifter in one body. This system has M radia...
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