| Document |
Document Title |
|
WO/2013/046283A1 |
[Problem] To construct electric equipment that has a warp-inhibited moving part. [Solution] At least one pedestal section and a counter electrode are formed, by means of plating, adjacent to a first space region on a first seed layer for...
|
|
WO/2013/028546A1 |
The present invention generally relates to a variable capacitor for RF and microwave applications. The variable capacitor includes a bond pad that has a plurality of cells electrically coupled thereto. Each of the plurality of cells has ...
|
|
WO/2013/024658A1 |
A first member (32) is provided with an electrostatic actuator (46), and a second member (33) is provided with a drive IC (72) for driving said electrostatic actuator (46). The first member (32) and the second member (33) are joined by j...
|
|
WO/2013/019864A1 |
A method for manufacturing a micro electro-mechanical system (MEMS) switch system (600, 700) includes etching each of a plurality of base circuit layers (425) and a plurality of passive component substrate layers (412, 418, 42, 426). The...
|
|
WO/2013/011128A1 |
The invention relates to an RF MEMS component with a fast activation time and intended for applications in the frequency range below about 10 GHz, comprising an insulating substrate (S) having, on the surface of said substrate, at least ...
|
|
WO/2013/005289A1 |
[Problem] To effect longer battery life of an electronic device for an electronic device, a method of manufacturing same, and an electronic device drive method. [Solution] An electronic device comprises: a substrate (31); a beam (34x), w...
|
|
WO/2012/170748A2 |
The present subject matter relates to the use of current splitting and routing techniques to distribute current uniformly among the various layers of a device to achieve a high Q-factor. Such current splitting can allow the use of relati...
|
|
WO/2012/164725A1 |
[Problem] To provide an electronic device, a method for producing the same, and a method for driving the electronic device, wherein the reliability of the electronic device is increased. [Solution] An electronic device (20) having: a sub...
|
|
WO/2012/155080A1 |
MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. In an embodiment, a mirror substrate is affixed to a member partially released from a first substrate and a through hole form...
|
|
WO/2012/155078A2 |
MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A released structure may include a member with a recess formed into an end face of its free end. A released structure may inc...
|
|
WO/2012/130664A1 |
The RF MEMS crosspoint switch (1) comprising a first transmission (10) line and a second transmission line (11) that crosses the first transmission line; the first transmission line (10) comprises two spaced-apart transmission line porti...
|
|
WO/2012/088822A1 |
A micro-electro-mechanical system (MEMS) switch and a manufacturing method thereof are provided. The MEMS switch includes a semiconductor substrate (10); a switch chamber (100) which is formed on the semiconductor substrate (10) and incl...
|
|
WO/2012/088821A1 |
A MEMS static memory and a MEMS programmable device are provided. The memory cell of the MEMS static memory comprises three MEMS switch devices, each of which includes a first terminal, a second terminal, a third terminal and a control t...
|
|
WO/2012/061205A1 |
This disclosure provides systems, methods, and apparatus for producing roughness in an electromechanical device by nucleation under plasma CVD conditions. In one aspect, a substrate and at least a first layer are provided. The disclosure...
|
|
WO/2012/058659A2 |
Magnetically actuated micro-electro-mechanical capacitor switches in laminate are disclosed. According to one embodiment, an apparatus comprises a first layer comprising a coil and magnetic element, the magnetic element made from one of ...
|
|
WO/2012/058323A1 |
A switching device structure having a top layer and a bottom layer, each layer comprising a body of magnetizable material, such as permalloy, disposed within a coil wherein an armature is suspended in a cavity between the top and bottom ...
|
|
WO/2012/040092A1 |
The present invention generally relates to MEMS devices and methods for their manufacture. The cantilever of the MEMS device may have a waffle-type microstructure. The waffle-type microstructure utilizes the support beams to impart stiff...
|
|
WO/2012/011703A2 |
According to the MEMS switch and the method for manufacturing same of the present invention, the MEMS switch includes a substrate, a first terminal formed on the substrate, a second terminal formed on the substrate and being spaced a pre...
|
|
WO/2012/001554A1 |
The invention relates to an electromechanical switch device (100, 200), comprising a first switch portion (111, 112, 211, 212), a second switch portion (121, 122, 220) and an actuator device (130, 230). The actuator device (130, 230) is ...
|
|
WO/2011/162949A2 |
Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60a, 60b) having a planar ...
|
|
WO/2011/162950A2 |
A method of forming at least one Micro-Electro-Mechanical System (MEMS) cavity (60b) includes forming a first sacrificial cavity layer (18) over a wiring layer (14) and substrate (10). The method further includes forming an insulator lay...
|
|
WO/2011/121531A1 |
The present invention provides an integrated electro -mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic ...
|
|
WO/2011/111274A1 |
Disclosed is a structure for a signal line wherein a lower insulating layer (23) is formed on the upper surface of a base (22); a semiconductor layer (24) is provided on the upper surface of the lower insulating layer (24) such that at l...
|
|
WO/2011/069988A2 |
The invention relates to a microelectromechanical system (MEMS) (100, 200) having an electromechanical microswitch (1) for switching an electrical signal (S), in particular a radio frequency signal (RFMEMS), in particular in the GHz rang...
|
|
WO/2011/058355A1 |
A MEMS switch comprising a pair of contact-making surfaces, at least one of which is movable relative to the other to open or close the switch, a said surface being carried by a flexible element, and actuator means configured to effect s...
|
|
WO/2011/058354A1 |
A packaged RF MEMS device comprising: an RF MEMS device, a substrate upon which the RF MEMS device is mounted, a cover mounted on the substrate, the cover comprising a cavity for containing the RF MEMS device, the cover and substrate the...
|
|
WO/2011/047356A1 |
Integrated circuits with configurable multi-gate switch circuitry are provided. The switch circuitry may include switch control circuitry and an array of multi- gate switches. Each multi-gate switch may have first and second terminals, f...
|
|
WO/2011/036808A1 |
Provided is a switch element equipped with a switching section provided on a base. The switching section comprises a support electrode which is fixed to the base, a beam which comprises a fixed portion that is fixed to the base and elec...
|
|
WO/2011/033729A1 |
Disclosed is an MEMS switch that, in order for the contact resistance of a point of contact that transmits signals to be maintained at a low level, in an ON mode maintains sufficient contact force for the point of contact to have low con...
|
|
WO/2011/033728A1 |
Disclosed is an MEMS switch that, in order for the contact resistance of a point of contact that transmits signals to be maintained at a low level, in an ON mode maintains sufficient contact force for the point of contact to have low con...
|
|
WO/2011/019489A2 |
A switching device structure comprising a top magnet, a bottom magnet, and a movable member disposed between the top and bottom magnets, the movable member having an electromagnet positioned thereon, the electromagnet comprising a plural...
|
|
WO/2008/153574A9 |
A current control device is disclosed. The current control device includes control circuitry integrally arranged with a current path and at least one micro electromechanical system (MEMS) switch (20) disposed in the current path. The cur...
|
|
WO/2010/128482A1 |
The present invention provides a capacitive MEMS device comprising a first electrode lying in a plane, and a second electrode suspended above the first electrode and movable with respect to the first electrode. The first electrode functi...
|
|
WO/2010/105827A1 |
The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3') under the flexible membrane (6), electric lowering actuation means (7) that...
|
|
WO/2010/107876A1 |
Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adher...
|
|
WO/2010/072431A1 |
Structures having a hybrid MEMS RF switch and method of fabricating such structures using existing wiring layers of a device is provided. The method of manufacturing a MEMS switch includes forming a forcing electrode from a lower wiring ...
|
|
WO/2010/049865A1 |
The present invention relates to a MEMS switch and a method of operating a MEMS switch, in order to reduce impact stress. Several MEMS suffer from a so-called zipping effect. This zipping effect can take place in MEMS switches consisting...
|
|
WO/2010/031885A1 |
The invention relates to a feedback resonant actuation method for MEMS electrostatic actuators. The invention involves connecting the electrostatic actuator (1) to an electronic circuit which operates as a sensor or estimator of the dist...
|
|
WO/2010/005888A2 |
A micro-electromechanical (MEMS) relay (1500) decouples a flux path from an electrical path through a switch structure (1512) to eliminate signal degradations that result from fluctuations in the magnetic flux. The fluctuations in the ma...
|
|
WO/2009/148677A2 |
A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or "resoswitch", with very high Q's, typically above 10000 in air, and higher i...
|
|
WO/2009/147600A1 |
31 ABSTRACT A MEMS switch (1, 81), and methods of fabricating thereof, the switch comprising: a sealed cavity (24); and a membrane (26); wherein the sealed cavity (24) is defined in part by the membrane (26); and the membrane is a 5 meta...
|
|
WO/2009/138919A1 |
A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas cham...
|
|
WO/2009/135017A1 |
Embodiments disclosed herein relate to a non-volatile memory bitcell (1) and arrays thereof, methods of detecting whether the bitcell is in a programmed state, methods of detecting whether the bitcell is in an erased state, methods of se...
|
|
WO/2009/128048A1 |
The present invention relates to a MEMS, being developed for e.g. a mobile communication application, such as switch, tunable capacitor, tunable filter, phase shifter, multiplexer, voltage controlled oscillator, and tunable matching netw...
|
|
WO/2009/123111A1 |
An MEM switch comprises a substrate on which a signal line having fixed contacts is formed, a movable board equipped with movable contacts, a flexible support for supporting the movable board, and an electrostatic actuator and a piezoele...
|
|
WO/2009/071498A1 |
The invention relates to an electrostatic-actuation microswitch of the capacitor type that comprises two frames, wherein the first one is a flexible membrane (11) and the second one includes at least one control electrode (13), the two f...
|
|
WO/2009/063627A1 |
When a high power signal is inputted into an electromechanical device, there occurs a phenomenon in which a movable electrode is driven unintendedly and automatically by an electrostatic force.Such a phenomenon is prevented in order to r...
|
|
WO/2009/057988A2 |
There is disclosed a method of fabricating radio frequency surface microelectromechanical (MEMS) switch. The method utilizes four masks, each configured through photolithography process at different stages that resulted in substantially ...
|
|
WO/2008/153579A1 |
Electrical distribution systems implementing micro-electromechanical system based switching devices. Exemplary embodiments include a method in an electrical distribution system, the method including determining if there is a fault condit...
|
|
WO/2008/131088A1 |
A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with...
|
